Abstract: A method of reducing trench aspect ratio. A trench is formed in a substrate. A conformal Si-rich oxide layer is formed on the surface of the trench by HDPCVD. A conformal first oxide layer is formed on the Si-rich oxide layer by HDPCVD. A conformal second oxide layer is formed on the first oxide layer by LPCVD. Part of the Si-rich oxide layer, the second oxide layer and the first oxide layer are removed by anisotropic etching to form an oxide spacer composed of a remaining Si-rich oxide layer, a remaining second oxide layer and a remaining first oxide layer. The remaining second oxide layer, part of the remaining first oxide layer and part of the Si-rich oxide layer are removed by BOE. Thus, parts of the remaining first and Si-rich oxide layers are formed on the lower surface of the trench, thereby reducing the trench aspect ratio.

Abstract: An improved shearing blade module of an electric clipper comprises an upper blade and a lower blade; the lower blade is fixed, and the upper blade is comprised of a swaying member capable of swaying sideway in the housing of the electric clipper, such that the blades of the upper and lower blades define the shearing action; the lower blade has a metallic main body, and a hard vacuum coated film is disposed on the surface of said main body; said upper blade has a main body with both volume and area smaller than those of the lower blade, and said main body is made of ceramics. Combining the excellent properties of the ceramic material and the hard multiplayer film, the blade module enhances the heat resistance, wear resistance, and sharpness of the blade sections of the upper and lower blades.

Abstract: A method for fabricating LOCOS isolation having a planar surface. The method utilizes a polysilicon spacer to prevent bird beak. The method adds the steps of forming a polishing stop layer and removing said edge-protrusion portion of the local oxide by chemical mechanical polishing.