Patents by Inventor Hung-Li Chiang

Hung-Li Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11721376
    Abstract: A memory device and a memory circuit is provided. The memory device includes a spin-orbit torque (SOT) layer, a magnetic tunnel junction (MTJ), a read word line, a selector and a write word line. The MTJ stands on the SOT layer. The read word line is electrically connected to the MTJ. The write word line is connected to the SOT layer through the selector. The write word line is electrically connected to the SOT layer when the selector is turned on, and the write word line is electrically isolated from the SOT layer when the selector is in an off state.
    Type: Grant
    Filed: April 21, 2022
    Date of Patent: August 8, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Li Chiang, Chung-Te Lin, Shy-Jay Lin, Tzu-Chiang Chen, Ming-Yuan Song, Hon-Sum Philip Wong
  • Patent number: 11715798
    Abstract: An MFMIS-FET includes a MOSFET having a three-dimensional structure that allows the MOSFET to have an effective area that is greater than the footprint of the MFM or the MOSFET. In some embodiment, the gate electrode of the MOSFET and the bottom electrode of the MFM are united. In some, they have equal areas. In some embodiments, the MFM and the MOSFET have nearly equal footprints. In some embodiments, the effective area of the MOSFET is much greater than the effective area of the MFM. These structures reduce the capacitance ratio between the MFM structure and the MOSFET without reducing the area of the MFM structure in a way that would decrease drain current.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: August 1, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Li Chiang, Chih-Sheng Chang, Tzu-Chiang Chen
  • Publication number: 20230240078
    Abstract: A memory device including a plurality of memory cells, at least one of the plurality of memory cells includes a first transistor, a second transistor, and a third transistor. The first transistor includes a first drain/source path and a first gate structure electrically coupled to a write word line. The second transistor includes a second drain/source path and a second gate structure electrically coupled to the first drain/source path of the first transistor. The third transistor includes a third drain/source path electrically coupled to the second drain/source path of the second transistor and a third gate structure electrically coupled to a read word line. Where, the first transistor, and/or the second transistor, and/or the third transistor is a ferroelectric field effect transistor or a negative capacitance field effect transistor.
    Type: Application
    Filed: May 27, 2022
    Publication date: July 27, 2023
    Inventors: Hung-Li Chiang, Jer-Fu Wang, Tzu-Chiang Chen, Meng-Fan Chang
  • Publication number: 20230225218
    Abstract: A memory device includes a transistor and a memory cell. The transistor includes a gate electrode disposed over a substrate and source/drain regions in the substrate beside the gate electrode. The memory cell is disposed over the transistor and includes a bottom electrode electrically connected to one of the source/drain regions, a top electrode disposed over the bottom electrode, and a first bit and a second bit separated from each other and disposed between the bottom electrode and the top electrode.
    Type: Application
    Filed: January 13, 2022
    Publication date: July 13, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Li Chiang, Jer-Fu Wang, Tzu-Chiang Chen, Meng-Fan Chang
  • Publication number: 20230225132
    Abstract: A memory structure includes a substrate. The memory structure further includes a first transistor, wherein the first transistor is a first distance from the substrate. The memory structure further includes a second transistor, wherein the second transistor is a second distance from the substrate, and the first distance is different from the second distance, and a first source/drain (S/D) region of the first transistor is connected to a second S/D region of the second transistor. The memory structure further includes a plurality of storage elements electrically connected to both the first transistor and the second transistor, wherein each of the plurality of storage elements is a third distance from the substrate, and the third distance is different from both the first distance and the second distance.
    Type: Application
    Filed: April 22, 2022
    Publication date: July 13, 2023
    Inventors: Hung-Li CHIANG, Jer-Fu WANG, Yi-Tse HUNG, Tzu-Chiang CHEN, Meng-Fan CHANG, Hon-Sum Philip WONG
  • Publication number: 20230197513
    Abstract: An integrated circuit device includes a first bit line structure that has a horizontal portion and a vertical portion in which an upper surface of the vertical portion is exposed for making electrical contact with a contact that, in turn, is in electrical contact with a metal pattern through which operating voltages may be applied to the bit line structure.
    Type: Application
    Filed: May 20, 2022
    Publication date: June 22, 2023
    Inventors: Hung-Li CHIANG, Jer-Fu WANG, Tzu-Chiang CHEN, Meng-Fan CHANG
  • Publication number: 20230170406
    Abstract: A process is provided to fabricate a finFET device having a semiconductor layer of a two-dimensional “2D” semiconductor material. The semiconductor layer of the 2D semiconductor material is a thin film layer formed over a dielectric fin-shaped structure. The 2D semiconductor layer extends over at least three surfaces of the dielectric fin structure, e.g., the upper surface and two sidewall surfaces. A vertical protrusion metal structure, referred to as “metal fin structure”, is formed about an edge of the dielectric fin structure and is used as a seed to grow the 2D semiconductor material.
    Type: Application
    Filed: January 26, 2023
    Publication date: June 1, 2023
    Inventors: Chao-Ching CHENG, Hung-Li CHIANG, Chun-Chieh LU, Ming-Yang LI, Tzu- Chiang CHEN
  • Publication number: 20230157187
    Abstract: A resistive memory device includes a bottom electrode, a switching layer including a first horizontal portion, a second horizontal portion over an upper surface of the bottom electrode, and a first vertical portion over a side surface of the bottom electrode, a top electrode including a first horizontal portion over the first horizontal portion of the switching layer, a second horizontal portion over the second horizontal portion of the switching layer, and a first vertical portion over the first vertical portion of the switching layer, and a conductive via contacting the first horizontal portion, the second horizontal portion and the first vertical portion of the top electrode. By providing a switching layer and a top electrode which conform to a non-planar profile of the bottom electrode, charge crowding and a localized increase in electric field may facilitate resistance-state switching and provide a reduced operating voltage.
    Type: Application
    Filed: April 6, 2022
    Publication date: May 18, 2023
    Inventors: Hung-Li Chiang, Jung-Piao Chiu, Jer-Fu Wang, Tzu-Chiang Chen, Meng-Fan Chang
  • Patent number: 11652141
    Abstract: Transistor structures and methods of forming transistor structures are provided. The transistor structures include alternating layers of a first epitaxial material and a second epitaxial material. In some embodiments, one of the first epitaxial material and the second epitaxial material may be removed for one of an n-type or p-type transistor. A bottommost layer of the first epitaxial material and the second epitaxial material may be be removed, and sidewalls of one of the first epitaxial material and the second epitaxial material may be indented or recessed.
    Type: Grant
    Filed: March 24, 2022
    Date of Patent: May 16, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Yi Peng, Hung-Li Chiang, Yu-Lin Yang, Chih Chieh Yeh, Yee-Chia Yeo, Chi-Wen Liu
  • Patent number: 11626328
    Abstract: An integrated circuit device includes a substrate having a first portion in a first device region and a second portion in a second device region. A first semiconductor strip is in the first device region. A dielectric liner has an edge contacting a sidewall of the first semiconductor strip, wherein the dielectric liner is configured to apply a compressive stress or a tensile stress to the first semiconductor strip. A Shallow Trench Isolation (STI) region is over the dielectric liner, wherein a sidewall and a bottom surface of the STI region is in contact with a sidewall and a top surface of the dielectric liner.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Lin Lee, Chih Chieh Yeh, Feng Yuan, Hung-Li Chiang, Wei-Jen Lai
  • Publication number: 20230087836
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a fin structure over the substrate. The fin structure has a channel height. The semiconductor device structure also includes a stack of nanostructures over the substrate. The channel height is greater than a lateral distance between the fin structure and the stack of the nanostructures. The semiconductor device structure further includes a metal gate stack over the nanostructures, and the nanostructures are separated from each other by portions of the metal gate stack. In addition, the semiconductor device structure includes a dielectric layer surrounding the metal gate stack, the nanostructures, and the fin structure.
    Type: Application
    Filed: November 28, 2022
    Publication date: March 23, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hung-Li CHIANG, I-Sheng CHEN, Tzu-Chiang CHEN
  • Patent number: 11605779
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a first dielectric pattern, a second dielectric pattern, a first bottom electrode, a first storage pattern, and a first top electrode. The first bottom electrode is disposed between the first dielectric pattern and the second dielectric pattern, and the first bottom electrode interfaces a first sidewall of the first dielectric pattern and a sidewall of the second dielectric pattern. The first storage pattern is disposed on the first dielectric pattern, the second dielectric pattern and the first bottom electrode, wherein the first storage pattern is electrically connected to the first bottom electrode. The first storage pattern is between the first bottom electrode and the first top electrode. A semiconductor die including a memory array is also provided.
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: March 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Li Chiang, Jer-Fu Wang, Jung-Piao Chiu, Yu-Sheng Chen, Tzu-Chiang Chen
  • Patent number: 11600720
    Abstract: A process is provided to fabricate a finFET device having a semiconductor layer of a two-dimensional “2D” semiconductor material. The semiconductor layer of the 2D semiconductor material is a thin film layer formed over a dielectric fin-shaped structure. The 2D semiconductor layer extends over at least three surfaces of the dielectric fin structure, e.g., the upper surface and two sidewall surfaces. A vertical protrusion metal structure, referred to as “metal fin structure”, is formed about an edge of the dielectric fin structure and is used as a seed to grow the 2D semiconductor material.
    Type: Grant
    Filed: April 26, 2021
    Date of Patent: March 7, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chao-Ching Cheng, Hung-Li Chiang, Chun-Chieh Lu, Ming-Yang Li, Tzu-Chiang Chen
  • Patent number: 11581426
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed over a bottom fin structure. A sacrificial gate structure having sidewall spacers is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is removed. The second semiconductor layers are laterally recessed. Dielectric inner spacers are formed on lateral ends of the recessed second semiconductor layers. The first semiconductor layers are laterally recessed. A source/drain epitaxial layer is formed to contact lateral ends of the recessed first semiconductor layer. The second semiconductor layers are removed thereby releasing the first semiconductor layers in a channel region. A gate structure is formed around the first semiconductor layers.
    Type: Grant
    Filed: May 3, 2021
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chao-Ching Cheng, Hung-Li Chiang, Tzu-Chiang Chen, I-Sheng Chen
  • Patent number: 11569236
    Abstract: A method of forming a semiconductor device includes etching a substrate to form two first trenches separated by a fin; filling the two first trenches with an isolation layer; and depositing a dielectric layer over the fin and the isolation layer. The method further includes forming a second trench in the dielectric layer over a channel region of the semiconductor device, the second trench exposing the isolation layer. The method further includes etching the isolation layer through the second trench to expose an upper portion of the fin in the channel region of the semiconductor device, and forming a dummy gate in the second trench over the isolation layer and engaging the upper portion of the fin.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: January 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hung-Li Chiang, Cheng-Yi Peng, Tsung-Yao Wen, Yee-Chia Yeo, Yen-Ming Chen
  • Patent number: 11515305
    Abstract: A structure and a formation method of hybrid semiconductor devices are provided. The structure includes a substrate and a fin structure over the substrate. The fin structure has a channel height. The structure also includes a stack of nanostructures over the substrate. The channel height is greater than a lateral distance between the fin structure and the stack of the nanostructures. The structure further includes a gate stack over the nanostructures. The nanostructures are separated from each other by portions of the gate stack.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: November 29, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Li Chiang, I-Sheng Chen, Tzu-Chiang Chen
  • Publication number: 20220367618
    Abstract: The structure of a semiconductor device with isolation structures between FET devices and a method of fabricating the semiconductor device are disclosed. A method of fabricating the semiconductor device includes forming a fin structure on a substrate and forming polysilicon gate structures with a first threshold voltage on first fin portions of the fin structure.
    Type: Application
    Filed: July 28, 2022
    Publication date: November 17, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Li CHIANG, Chao-Ching CHENG, Tzu-Chiang CHEN, I-Sheng CHEN
  • Publication number: 20220367569
    Abstract: The present disclosure relates to an integrated circuit. The integrated circuit has a plurality of bit-line stacks disposed over a substrate and respectively including a plurality of bit-lines stacked onto one another. A data storage structure is over the plurality of bit-line stacks and a selector is over the data storage structure. A word-line is over the selector. The selector is configured to selectively allow current to pass between the plurality of bit-lines and the word-line. The plurality of bit-line stacks include a first bit-line stack, a second bit-line stack, and a third bit-line stack. The first and third bit-line stacks are closest bit-line stacks to opposing sides of the second bit-line stack. The second bit-line stack is separated from the first bit-line stack by a first distance and is further separated from the third bit-line stack by a second distance larger than the first distance.
    Type: Application
    Filed: July 27, 2022
    Publication date: November 17, 2022
    Inventors: Hung-Li Chiang, Chao-Ching Cheng, Jung-Piao Chiu, Tzu-Chiang Chen, Yu-Sheng Chen
  • Publication number: 20220359737
    Abstract: A method includes: forming a dielectric fin protruding above a substrate; forming a channel layer over an upper surface of the dielectric fin and along first sidewalls of the dielectric fin, the channel layer including a low dimensional material; forming a gate structure over the channel layer; forming metal source/drain regions on opposing sides of the gate structure; forming a channel enhancement layer over the channel layer; and forming a passivation layer over the gate structure, the metal source/drain regions, and the channel enhancement layer.
    Type: Application
    Filed: July 25, 2022
    Publication date: November 10, 2022
    Inventors: Yi-Tse Hung, Chao-Ching Cheng, Tse-An Chen, Hung-Li Chiang, Tzu-Chiang Chen, Lain-Jong Li
  • Publication number: 20220359754
    Abstract: A method of fabrication of a multi-gate semiconductor device that includes providing a fin having a plurality of a first type of epitaxial layers and a plurality of a second type of epitaxial layers. The plurality of the second type of epitaxial layers is oxidized in the source/drain region. A first portion of a first layer of the second type of epitaxial layers is removed in a channel region of the fin to form an opening between a first layer of the first type of epitaxial layer and a second layer of the first type of epitaxial layer. A portion of a gate structure is then formed in the opening.
    Type: Application
    Filed: July 15, 2022
    Publication date: November 10, 2022
    Inventors: Huan-Sheng WEI, Hung-Li CHIANG, Chia-Wen LIU, Yi-Ming SHEU, Zhiqiang WU, Chung-Cheng WU, Ying-Keung LEUNG