Patents by Inventor Hung-Ming Chen

Hung-Ming Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11656391
    Abstract: A method for performing DBO measurements utilizing apertures having a single pole includes using a first aperture plate to measure X-axis diffraction of a composite grating. In some embodiments, the first aperture plate has a first pair of radiation-transmitting regions disposed along a first diametrical axis and on opposite sides of an optical axis that is aligned with a center of the first aperture plate. Thereafter, in some embodiments, a second aperture plate, which is complementary to the first aperture plate, is used to measure Y-axis diffraction of the composite grating. By way of example, the second aperture plate has a second pair of radiation-transmitting regions disposed along a second diametrical axis and on opposite sides of the optical axis. In some cases, the second diametrical axis is substantially perpendicular to the first diametrical axis.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Chih Hsieh, Kai Wu, Yen-Liang Chen, Kai-Hsiung Chen, Po-Chung Cheng, Chih-Ming Ke
  • Patent number: 11658065
    Abstract: A method for CMP includes following operations. A metal layer is received. A CMP slurry composition is provided in a CMP apparatus. The CMP slurry composition includes at least a first oxidizer and a second oxidizer different from each other. The first oxidizer is oxidized to form a peroxidant by the second oxidizer. A portion of the metal layer is oxidized to form a first metal oxide by the peroxidant. The first metal oxide is re-oxidized to form a second metal oxide by the second oxidizer.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang, Chi-Hsiang Shen, Ting-Hsun Chang, Li-Chieh Wu, Hung Yen, Chi-Jen Liu, Liang-Guang Chen, Kei-Wei Chen
  • Patent number: 11527190
    Abstract: An example computing device includes: a display to display a color calibration pattern; a touchpad to receive input for the computing device, the touchpad having a reflective layer to reflect the color calibration pattern; a color sensor to detect the reflected color calibration pattern from the touchpad; a processor interconnected with the color sensor and the display, the processor to calibrate a color output of the display based on the color calibration pattern detected at the color sensor.
    Type: Grant
    Filed: March 31, 2022
    Date of Patent: December 13, 2022
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chia-Wen Chuang, Chia-Hung Chu, Chih-Chen Hung, Wan-Chieh Lu, Hung-Ming Chen
  • Publication number: 20220301944
    Abstract: A high atomic number material is applied to one or more surfaces of a semiconductor structure of a wafer. The one or more surfaces are at a depth different from a depth of a surface of the wafer. An electron beam is scanned over the semiconductor structure to cause a backscattered electron signal to be collected at a collector. A profile scan of the semiconductor structure is generated based on an intensity of the backscattered electron signal, at the collector, resulting from the high atomic number material. The high atomic number material increases the intensity of the backscattered electron signal for the one or more surfaces of the semiconductor structure such that contrast in the profile scan is increased. The increased contrast of the profile scan enables accurate critical dimension measurements of the semiconductor structure.
    Type: Application
    Filed: March 19, 2021
    Publication date: September 22, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Pei-Hsuan LEE, Hung-Ming CHEN, Kuang-Shing CHEN, Yu-Hsiang CHENG, Xiaomeng CHEN
  • Publication number: 20220283641
    Abstract: In one example, an electronic device may include a touch panel defining an input surface having an input region and a display panel disposed below the touch panel. The display panel may visualize a virtual keyboard including a set of virtual keys. Further, the electronic device may include a haptic array module disposed below the display panel. The haptic array module may include a first actuator disposed below the input region corresponding to a first virtual key of the set of virtual keys. Further, the electronic device may include a controller in communication with the haptic array module to trigger the first actuator to generate a haptic output at the input region in response to an activation of the virtual keyboard.
    Type: Application
    Filed: November 8, 2019
    Publication date: September 8, 2022
    Applicant: Hewlett-Packard Development Company, L.P.
    Inventors: Hung-Ming Chen, Charles Stancil, Tai Hsiang Chen, Wei Hung Lin
  • Patent number: 11429195
    Abstract: The present subject matter relates to self-healing keyboards. In an example implementation, a self-healing keyboard of an electronic device comprises a self-healing film having a self-healing layer disposed over a keyboard. The self-healing layer is composed of polyurethane, epoxy vinyl ester, epoxy, polyurethane microcapsules filled with silane compound, and a polysiloxane mixture.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: August 30, 2022
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Kuan-Ting Wu, Hung-Ming Chen, Chih Chen Hung
  • Patent number: 11424092
    Abstract: In one example, a keyboard device may include a base plate, a pivoting support fixedly disposed on the base plate and having a recess portion, a key cap support having a shaft portion rotatably received in the recess portion, a rolling element disposed between the shaft portion and the pivoting support, and a key cap assembled to the key cap support.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: August 23, 2022
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chih-Chen Hung, Hung-Ming Chen, Kun-Chih Wang, Ke-Jian Liou
  • Publication number: 20220229494
    Abstract: Techniques for proving haptic feedback in computing systems are described. In operation, an input representing utilisation parameters of an electronic pen is received. In an example, the electronic pen may be electronically coupled to the computing system. Based on the received utilisation parameters, the computing system provides a pattern of haptic feedback to the user.
    Type: Application
    Filed: September 16, 2019
    Publication date: July 21, 2022
    Applicant: Hewlett-Packard Development Company, L.P.
    Inventors: Charles J. Stancil, Tai Hsiang Chen, Hung-Ming Chen, Simon Wong, Hsiang-Ta Ke, Yi-Hsien Lin, Jung-Hsing Wang
  • Publication number: 20220028974
    Abstract: A semiconductor device comprises a fin structure disposed over a substrate; a gate structure disposed over part of the fin structure; a source/drain structure, which includes part of the fin structure not covered by the gate structure; an interlayer dielectric layer formed over the fin structure, the gate structure, and the source/drain structure; a contact hole formed in the interlayer dielectric layer; and a contact material disposed in the contact hole. The fin structure extends in a first direction and includes an upper layer, wherein a part of the upper layer is exposed from an isolation insulating layer. The gate structure extends in a second direction perpendicular to the first direction. The contact material includes a silicon phosphide layer and a metal layer.
    Type: Application
    Filed: October 11, 2021
    Publication date: January 27, 2022
    Inventors: Cheng-Yi PENG, Chih Chieh YEH, Chih-Sheng CHANG, Hung-Li CHIANG, Hung-Ming CHEN, Yee-Chia YEO
  • Publication number: 20210366672
    Abstract: In one example, a keyboard device may include a base plate, a pivoting support fixedly disposed on the base plate and having a recess portion, a key cap support having a shaft portion rotatably received in the recess portion, a rolling element disposed between the shaft portion and the pivoting support, and a key cap assembled to the key cap support.
    Type: Application
    Filed: December 12, 2018
    Publication date: November 25, 2021
    Applicant: Hewlett-Packard Development Company, L.P.
    Inventors: Chih-Chen Hung, Hung-Ming Chen, Kun-Chih Wang, Ke-Jian Liou
  • Patent number: 11158725
    Abstract: The fin structure includes a first portion and a second, lower portion separated at a transition. The first portion has sidewalls that are substantially perpendicular to the major surface of the substrate. The lower portion has tapered sidewalls on opposite sides of the upper portion and a base having a second width larger than the first width.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: October 26, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng Yuan, Hung-Ming Chen, Tsung-Lin Lee, Chang-Yun Chang, Clement Hsingjen Wann
  • Patent number: 11145750
    Abstract: A semiconductor device comprises a fin structure disposed over a substrate; a gate structure disposed over part of the fin structure; a source/drain structure, which includes part of the fin structure not covered by the gate structure; an interlayer dielectric layer formed over the fin structure, the gate structure, and the source/drain structure; a contact hole formed in the interlayer dielectric layer; and a contact material disposed in the contact hole. The fin structure extends in a first direction and includes an upper layer, wherein a part of the upper layer is exposed from an isolation insulating layer. The gate structure extends in a second direction perpendicular to the first direction. The contact material includes a silicon phosphide layer and a metal layer.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: October 12, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Yi Peng, Chih Chieh Yeh, Chih-Sheng Chang, Hung-Li Chiang, Hung-Ming Chen, Yee-Chia Yeo
  • Publication number: 20210280516
    Abstract: A method includes forming a gate structure on a substrate; forming a gate spacer on a sidewall of the gate structure; forming a carbon-containing layer on the gate spacer; diffusing carbon from the carbon-containing layer into a portion of the substrate below the gate spacer; forming a recess in the substrate on one side of the gate spacer opposite to the gate structure; and forming an epitaxy feature in the recess of the substrate.
    Type: Application
    Filed: May 26, 2021
    Publication date: September 9, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Ming CHEN, Yu-Chang LIN, Chung-Ting LI, Jen-Hsiang LU, Hou-Ju LI, Chih-Pin TSAO
  • Patent number: 11024582
    Abstract: A semiconductor device includes a substrate, a carbon-containing diffusion barrier, a phosphorus-containing source/drain feature, a gate structure, and a gate spacer. The substrate has a channel region. The carbon-containing diffusion barrier is present in the substrate. The phosphorus-containing source/drain feature is present in the substrate, and the carbon-containing diffusion barrier is between the channel region and the phosphorus-containing source/drain feature. The gate is present over the channel region of the substrate. The gate spacer abuts the gate structure and is present over a portion of the phosphorus-containing source/drain feature.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: June 1, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Ming Chen, Yu-Chang Lin, Chung-Ting Li, Jen-Hsiang Lu, Hou-Ju Li, Chih-Pin Tsao
  • Patent number: 11004709
    Abstract: A method for monitoring gas in a wafer processing system is provided. The method includes producing an exhaust flow in an exhausting conduit from a processing chamber. The method further includes placing a gas sensor in fluid communication with a detection point located in the exhausting conduit via a sampling tube that passes through a through hole formed on the exhausting conduit. The detection point is located away from the through hole. The method also includes detecting a gas condition at the detection point with the gas sensor. In addition, the method also includes analyzing the gas condition detected by the gas sensor to determine if the gas condition in the exhausting conduit is in a range of values.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: May 11, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Chieh Hsieh, Su-Yu Yeh, Ko-Bin Kao, Chia-Hung Chung, Li-Jen Wu, Chun-Yu Chen, Hung-Ming Chen, Yong-Ting Wu
  • Patent number: 10999357
    Abstract: A data transmission system and a data transmission method are disclosed. The data transmission system includes a cloud server, an edge computing device, and a gateway. The cloud server includes a schema database which stores a transmission address corresponding to a target schema. The edge computing device transmits a data receiving request message related to the target schema to the cloud server. The cloud server transmits the transmission address to the edge computing device after receiving the data receiving request message. After receiving the transmission address, the edge computing device receives at least one data value corresponding to at least one label of the target schema from the gateway according to the transmission address, and generates a target data corresponding to the target schema according to the at least one label and the at least one data value.
    Type: Grant
    Filed: October 29, 2020
    Date of Patent: May 4, 2021
    Assignee: Institute For Information Industry
    Inventors: Pai-Ju Lan, Shao-Yu Ni, Hung-Ming Chen, Shih-Ying Chen
  • Patent number: 10990203
    Abstract: In one example, touchpad assembly is disclosed, which may include a bottom cover, a horizontal elastic member flexibly positioned on the bottom cover, a balancing bar disposed on the bottom cover and substantially parallel to the horizontal elastic member, and a metal dome. The metal dome may include a first end fixedly connected to the bottom cover via a first fixture, and a second end to hold the horizontal elastic member and the balancing bar such that the balancing bar is flexibly engaged with the bottom cover. The balancing bar, the metal dome, and the horizontal elastic member may control a flexure of a touchpad when the touchpad is pressed.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: April 27, 2021
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Hung-Ming Chen, Chao-Wen Cheng, Kuan-Ting Wu
  • Publication number: 20200192491
    Abstract: The present subject matter relates to self-healing keyboards. In an example implementation, a self-healing keyboard of an electronic device comprises a self-healing film having a self-healing layer disposed over a keyboard. The self-healing layer is composed of polyurethane, epoxy vinyl ester, epoxy, polyurethane microcapsules filled with silane compound, and a polysiloxane mixture.
    Type: Application
    Filed: July 6, 2017
    Publication date: June 18, 2020
    Inventors: KUAN-TING WU, HUNG-MING CHEN, CHIH-CHEN HUNG
  • Patent number: D925941
    Type: Grant
    Filed: January 13, 2020
    Date of Patent: July 27, 2021
    Inventor: Hung-Ming Chen
  • Patent number: D953605
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: May 31, 2022
    Inventors: Hung-Ming Chen, Chen-Yen Wei