Abstract: Disclosed herein is a method for forming a gate in a semiconductor device, which can improve the characteristics of the device. The method comprises the steps of: providing a substrate having active and field regions; selectively etching a portion of the active region to form a trench; forming on the substrate including the trench an amorphous conductive film for forming a gate; subjecting the resulting structure to an annealing process so as to convert the amorphous conductive film into a crystalline conductive film; and selectively etching the crystalline conductive film so as to form a gate covering the corner portion of the trench.

Abstract: An actuator, including: a substrate; a middle plate supported above the substrate to be rotatable, about a rotation axis, with respect to the substrate; a stage connected to and spaced above the middle plate; a pair of first driving electrodes located on the substrate around the rotation axis; and a pair of second driving electrodes located on the substrate surrounding the first driving electrodes. Torsion springs connect opposite sides of the middle plate to support the middle plate above the substrate. A connecting member connects the stage and middle plate.

Abstract: An inductor fabricated with a dry film resist and a cavity and a method of fabricating the inductor. The cavity can be formed in a substrate to minimize a parasitic capacitance generated by structures of upper electrodes, an insulating layer, and a lower electrode and minimize energy loss caused by an eddy current generated through the substrate. Also, a process of forming and planarizing the cavity can be simplified so as to form the cavity to a sufficient depth. As a result, an inductor having a high quality factor and a high self resonant frequency can be fabricated. Also, a scheme for simply forming and planarizing a cavity is contemplated.

Abstract: Provided are a biochip platform for biochemically analyzing a sample such as DNA or protein, including a dielectric particle layer, and an optical assay apparatus including the same. The biochip platform includes the dielectric particle layer uniformly formed on a substrate. The particle uniformity of the dielectric particle layer enables good wavelength separation of fluorescence signal, and the large surface area of the dielectric particle layer guarantees better amplification efficiency of fluorescence signal. Furthermore, the biochip platform shows good economical efficiency due to easy fabrication process, and is particularly useful in an optical assay apparatus for analyzing a biochemical sample due to good assay efficiency.

Abstract: A low leakage Schottky diode and fabrication method thereof. The Schottky diode includes a n-type semiconductor; an anode having a circular periphery formed in a region above the n-type semiconductor; and a cathode formed in a region above the n-type semiconductor and having a pattern surrounding and set apart from the outer periphery of the anode. Because there are no edges at the anode and cathode interface, leakage current is minimized.

Abstract: A method of increasing discrimination for a target DNA having a polymorphic site is provided. The method includes: synthesizing a first probe by artificially substituting a base of a probe which is fully complementary to a target DNA having a polymorphic site by a mismatched natural base and synthesizing a second probe by artificially substituting a base of another probe having a single base mismatch at a position corresponding to the polymorphic site of the target DNA with a mismatched natural base; synthesizing a first hurdle DNA which is fully complementary to the first probe and is shorter than the first probe and a second hurdle DNA which is fully complementary to the second probe and is shorter than the second probe; immobilizing the first and second probes on a substrate; hybridizing the immobilized first and second probes with the first and second hurdle DNAs, respectively; and hybridizing the target DNA with the hybrids.

Abstract: A semiconductor device using schottky diodes for removing noise, a fabrication method, and an electrostatic discharge prevention device are provided. The semiconductor device includes a P-well substrate; insulation layers deposited on etched regions of the substrate; an N-well layer deposited on an etched region of the P-well substrate between the insulation layers; P+ type implants injected to a first region and a second region of the N-well layer; and first and second metals formed in schottky contact on the first and second regions, respectively. The method includes etching away regions of a P-well substrate and depositing an insulation substance; etching away the P-well substrate and depositing the insulation substance between the insulation layers to create an N-well layer; injecting P+ type implants to a first region and a second region of the N-well layer; and forming first and second metals in schottky contact on the first and second regions, respectively.

Abstract: A film bulk acoustic resonator (FBAR) including a substrate having an etched air gap therethrough; a resonance part having a first electrode, a piezoelectric film and a second electrode which are laminated in turn above the air gap; and an etching resistance layer disposed between the air gap and the resonance part to limit an etching depth in forming the air gap, thereby preventing damage to the resonance part.

Abstract: A method of forming a via hole through a glass wafer includes depositing a material layer on an outer surface of the glass wafer, the material layer having a selection ratio higher than that of the glass wafer, forming a via-patterned portion on one side of the material layer, performing a first etching in which the via-patterned portion is etched to form a preliminary via hole, eliminating any remaining patterning material used in the formation of the via-patterned portion, performing a second etching in which the preliminary via hole is etched to form a via hole having a smooth surface and extending through the glass wafer, and eliminating the material layer. The method according to the present invention is able to form a via hole through a glass wafer without allowing formation of an undercut or minute cracks, thereby increasing the yield and reliability of MEMS elements.

Abstract: A one-way transparent optical system and a flat panel display having the same are provided. The one-way transparent optical system includes a transparent substrate and an external light blocking layer. The external light block layer includes: first light reflecting layers, first and second light reflecting layers, transmitting windows, and first and second light absorbing layers. The first light reflecting layers are formed on and inclined toward the transparent substrate. The second light reflecting layers are spaced a predetermined distance from the first light reflecting layers. The first and second light reflecting layers are alternately arranged on the transparent substrate. The transmitting windows are formed in the upper and lower portions of the spaces between the first and second light reflecting layers. The first and second light absorbing layers respectively formed on the first and second light reflecting layers.

Abstract: A method for forming a capacitor of a semiconductor device includes forming a first insulation layer having a storage node plug on a semiconductor substrate; forming an etch stop layer and a second insulation layer sequentially on the substrate having the first insulation layer; forming a hole exposing a portion of the storage node plug by selectively etching the second insulation layer by using the etch stop layer; recessing a portion of the storage node plug exposed by the hole; forming a barrier metal layer on a surface of the recessed storage node plug; forming a storage node electrode connected to the storage node plug through the barrier metal layer in the hole; and forming a dielectric layer and a metal layer for a plate electrode sequentially on the storage node electrode.

Abstract: The present invention relates to a gene encoding a protein named as ARIA (armadillo repeat protein interacting with ABF2), which contains armadillo repeats and a BTB/POZ domain. The protein is a novel ABA signaling component, which affects ABA-regulated gene expression, seedling growth, ABA sensitivity, and stress tolerance of plants. Furthermore, the present invention provides a method of producing salt-tolerant plants comprising the introduction of an expression cassette containing the ARIA gene linked to a plant promoter to plants.

Abstract: There is provided a flat type piezoelectric ultrasonic motor for generating a rotation force to a rotor by ultrasonic vibrations. In the piezoelectric ultrasonic motor, a vibrator is formed of elastic material at a given size, a plurality of piezoelectric plates are attached on the vibrator, a rotor is drivingly connected to the vibrator thereby to be rotated, and a power source unit applies driving voltages to the piezoelectric plates. The piezoelectric plates are arranged on quartered surface areas of the vibrator in such a way that longitudinal axes of neighboring piezoelectric plates form a given angle therebetween and opposing piezoelectric plates have opposite polarizations, and the power source unit applies alternating driving voltages to the piezoelectric plates thereby to make the rotor rotated, thereby making it possible to simplify the piezoelectric plates' shape, minimize its size and enhance its driving efficiency.

Abstract: The present invention relates to a gene encoding a protein named as ARIA (armadillo repeat protein interacting with ABF2), which contains armadillo repeats and a BTB/POZ domain. The protein is a novel ABA signaling component, which affects ABA-regulated gene expression, seedling growth, ABA sensitivity, and stress tolerance of plants. Furthermore, the present invention provides a method of producing salt-tolerant plants comprising the introduction of an expression cassette containing the ARIA gene linked to a plant promoter to plants.

Abstract: A silicon-on-insulator (SOI) substrate including laminated layers of a substrate, an oxide layer, and a silicon layer in order. The oxide layer has an electrifying hole fluidly connected with the substrate and the electrifying hole is filled with a part of the silicon layer. A method for fabricating the floating structure is also disclosed which includes the steps of forming an oxide layer having a predetermined thickness on a substrate, forming one or more electrifying holes in an area of the oxide layer corresponding to an inner part of the floating structure, forming a silicon layer on the oxide layer including an electrification structure electrically connecting the silicon layer to the substrate, forming a pattern for the floating structure on the silicon layer, removing the oxide layer corresponding to an inner area of the pattern, forming a thermal oxide layer on a surface of the silicon layer, and removing the thermal oxide layer to form the floating structure.

Abstract: A device and a method of subdividing data service charge in mobile communication network is disclosed. In one embodiment, the method includes receiving a billing initiation request signal from a wireless data service device (either an interworking function (IWF) unit or a packet data serving node (PDSN)), producing a usage-amount data for the subscriber based on at least one of the type and amount of data being transmitted through the wireless data service device on the mobile communication network. The method also includes, responsive to a billing end request signal, received from the wireless data service device, transferring a billing request signal, requesting to bill the subscriber for the usage-amount data, to an authentication, authorization and accounting (AAA) unit. In one embodiment, the above method can apply to a graduated billing for the each service group in the mobile communication network.

Abstract: An inductor device having an improved quality factor is provided. To obtain the improved quality factor, the inductor device includes a substrate etched away at predetermined intervals; first and second inductors formed on the top and bottom of the substrate, respectively; and first and second protection packages for shielding the first and second inductors, respectively, from outside. The first and second inductors are formed in a symmetrical structure with respect to the substrate, and the inductor device further includes connection parts for electrically connecting the first and second inductors. Further, the inductor device has air gaps between the substrate, first inductor, and second inductor in order for the first and second inductors to be exposed in the air, and the first protection package has an electrode layer formed thereon at predetermined positions to supply electric currents to the inductor device.

Abstract: An optical module, in which one or more grooves on which a plurality of optical fibers or optical parts are mounted, are formed to different depths and a stopper hole is manufactured so as to prevent a convex corner phenomenon so that an optical axis is precisely aligned, and a method of manufacturing the same are provided. The method of manufacturing an optical module includes the steps of first etching to form one or more grooves on a first surface of a wafer, and second etching to form one or more stopper holes so that a second surface of the wafer is etched to penetrate the wafer. The optical module having one or more grooves for mounting one or more optical parts on a substrate, includes stopper holes which are formed by penetrating the bottom surface of the substrate to center a region which corresponds to a predetermined region among the grooves.

Abstract: A method for forming device isolation film of semiconductor device is provided, the method including sequentially forming a pad oxide layer and a pad nitride layer on a semiconductor substrate having a cell region and a peripheral circuit region, etching a predetermined region of the pad nitride layer, the pad oxide layer, and the semiconductor substrate to form a trench, forming an sidewall oxide film on a surface of the trench, etching a predetermined thickness of the sidewall oxide film in the cell region, forming a liner nitride film and a liner oxide film on the semiconductor substrate including the trench and the pad nitride layer, depositing a HDP oxide film to fill up the trench, performing a planarization process to expose the pad nitride layer, and removing the pad nitride layer.

Abstract: The present invention relates to a system and method for downloading remote control data using the Internet. In the system and method, a server unit is provided with remote control data, a user selects required remote control data through a client personal computer and a remote control code transmitting system, and the selected data is transmitted to a remote controller in a wired or wireless manner. In accordance with the present invention, the user can appropriately utilize a single remote controller for various apparatuses.