Abstract: The present invention relates to a sensor for detecting hydrocarbon type gas such as methane gas and propane gas, and process for manufacturing thereof. SiO.sub.2 was deposited in 1 .mu.m by ion beam sputtering with a mixed gas (3:2) of argon and oxygen on a silicon wafer in the process. In case of a propane sensor, platinum electrode is deposited in 600 .ANG. by ion beam sputtering on a tin oxide thin film synthesized by ionized beam of which the oxygen ion energy is 0 to 500 eV by using poly alumina. In case of a methane sensor, heat treatment at 500.degree. C. was performed for 1 hour in the air in order for the thin film to be stable at high operation temperature, while heat treatment was not performed in case of propane sensor. The sensor was manufactured by adding platinum or palladium thereto by argon ion beam sputtering. The thin film type tin oxide sensor according to the present invention exhibited an excellent selectivity of 47.4% even at low temperature of 150.degree. C.

Abstract: An adhesive strength increasing method which does not need a bulky apparatus such as an ion implantation apparatus and prevent the characteristic of a material from being degraded by using a high level current ion of a low level energy, thus increasing an adhesive strength between a metal thin film and a glass substrate. In the present invention, a metal is deposited on a substrate an inert gas or a reactive gas having a predetermined energy is irradiatd to the deposited metal thin film, and then the metal thin film is sealed, thus increasing an adhesive strength between a metal thin film and a glass substrate.

Abstract: This invention provides a composition of high frequency dielectric ceramics represented by the following formula:(Pb.sub.(1-x) Ca.sub.x)[(Fe.sub.0.5 Nb.sub.0.5).sub.(1-y) Sn.sub.y ]O.sub.3wherein 0.4.ltoreq.x.ltoreq.0.62; and 0.05.ltoreq.y.ltoreq.0.1.

Abstract: The present invention relates to tinoxide thin film, a process for manufacturing thereof comprising the step of depositing tin while providing oxygen or ionized oxygen around a substrate, and relates to a gas detecting sensor prepared by the use of such tinoxide thin film.

Abstract: A process for modifying the surfaces of a polymer, ceramic, ITO or glass by irradiating energized ion particles onto the surfaces of the polymer, ceramic, ITO or glass, while blowing a reactive gas directly over the surface of the polymer, ceramic, ITO or glass under a vacuum condition, to decrease the wetting angle of the surface. The process can be widely used in the fields of polymers because it provides effects of increasing the spreading of aqueous dyestuffs, increasing adhesive strength with other materials and inhibition of light scattering by decreasing the wetting angle of the material surface.

Abstract: An improved thin film deposition apparatus which is capable of easily increasing the temperature of a crucible using low electric power, for thus reducing the maintenance cost of the system, and fabricating a thin film having a constant characteristic by using a lower current density variation based on a distance, for thus increasing the reliability of a thin film device, whereby it is possible to fabricate a more compact product and to more easily maintain the system, which includes a heat shielding cylindrical chamber, a cylindrical chamber located within the heat shielding cylindrical chamber, a crucible section including a crucible and a heat filament arranged at an inner and lower portion of the cylindrical chamber, an ionization section having an anode and an ionization filament arranged in an upper portion inside the cylindrical chamber, and a magnet for enhancing an ionization efficiency, an upper and lower filament support for supporting the heater filament and the ionization filament, an upper and l

Abstract: A PZT ferroelectric thin film is sputter deposited on an electrode without microcracks while avoiding oxygen and Pb ion deficiencies at the electrode interface by initially forming a buffer layer containing a sufficient amount of a volatile Pb component and a sufficient amount of oxygen to easily absorb the energy of sputter particles. The PZT ferroelectric thin film can also be deposited by laser ablation.

Abstract: A rapid thermal processing method for a ceramic thin film which is capable of carrying out a uniform heating of a large sized wafer, and of achieving a rapid temperature elevation, and of enhancing a crystallinity of a deposited thin film, wherein a thin film-coated material is disposed on a support to rapidly heat the thin film by the application of microwaves, the temperature is measured with a temperature measuring unit, and the generation of the microwaves is halted at a required temperature.

Abstract: The present invention relates to a process for modifying a polymer surface by irradiating ion particles with energy on a polymer surface, while blowing the reactive gas directly on the polymer surface under vacuum condition, to decrease the wetting angle of the polymer surface. The process for modifying the polymer surface according to the present invention can be widely used in the application fields of polymers because it provides effects of increasing the spreading of aqueous dyestuffs, increasing adhesive strength with other materials and inhibition of light scattering by decreasing the wetting angle of the polymer surface.

Abstract: A method for the preparation of tetragonal zirconia polycrystal composite with high toughness and low-temperature degradation resistance. The method comprising adding transformable TZP of ZrO.sub.2 --Y.sub.2 O.sub.3 --Nb.sub.2 O.sub.5 /Ta.sub.2 O.sub.5 system to non-transformable TZP of ZrO.sub.2 --Y.sub.2 O.sub.3 --Nb.sub.2 O.sub.5 /Ta.sub.2 O.sub.5 system in an amount of not more than 60% by weight based on the total weight of the resulting mixture; and sintering the mixture at above 1,500.degree. C. Even though being exposed to a temperature ranging from 100.degree. to 400.degree. C. for a long time in air, the TZP composite prepared by the present method is rarely transformed into monoclinic zirconia and yet exhibits high toughness.

Abstract: There are a piezoelectric ceramics-polymer composite material and a method for the preparation of the same which comprises10 to 60% by volume of silane-coated PZT piezoelectric ceramics powder based on the total volume of the composition;at most 3% by volume of carbon powder based on the total volume of the composition; andbalance volume of PVdF piezoelectric polymer.

Abstract: A method for preparing a perpendicularly magnetizable material usable on magnetic recording media comprises the steps of: dissolving at least one member of the group consisting of strontium chloride and strontium nitrate with at least one member of the group consisting of iron chloride and iron nitrate in distilled water; adding citric acid to the resultant solution; controlling the pH of the solution to a range sufficient to completely dissociate the citric acid; heating the resultant solution with stirring to yield a gelatinous precursor; and subjecting the precursor to a temperature sufficiently high to remove the organic constituents thereof, which is characterized by controlling the pH of the solution to gelate the solution without the use of ethylene glycol, and can provide a perpendicularly magnetizable material superior in magnetic and particle properties.