Patents by Inventor I-CHIH CHEN

I-CHIH CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10153278
    Abstract: A fin-type field effect transistor comprising a substrate, at least one gate stack, spacers and epitaxy material portions is described. The substrate has fins and insulators located between the fins, and the fins comprise channel portions and flank portions beside the channel portions, the flank portions and the channel portions of the fins are protruded from the insulators, the flank portions of the fins and the channel portions of the fins have substantially a same height from top surfaces of the insulators, and each of the flank portions of the fins has a top surface and side surfaces adjoining the top surface. The at least one gate stack is disposed over the substrate, disposed on the insulators and over the channel portions of the fins. The spacers are disposed on the side surfaces of the flank portions of the fins. The epitaxy material portions are located above the top surfaces of the flank portions of the fins.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: December 11, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Sheng-Lin Hsieh, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Ru-Shang Hsiao, Ting-Chun Kuan
  • Patent number: 10096672
    Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: October 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Chih Chen, Chih-Mu Huang, Fu-Tsun Tsai, Meng-Yi Wu, Yung-Fa Lee, Ying-Lang Wang
  • Patent number: 10090392
    Abstract: A semiconductor device includes a metal oxide semiconductor device disposed over a substrate and an interconnect plug. The metal oxide semiconductor device includes a gate structure located on the substrate and a raised source/drain region disposed adjacent to the gate structure. The raised source/drain region includes a top surface above a surface of the substrate by a distance. The interconnect plug connects to the raised source/drain region. The interconnect plug includes a doped region contacting the top surface of the raised source/drain region, a metal silicide region located on the doped region, and a metal region located on the metal silicide region.
    Type: Grant
    Filed: January 17, 2014
    Date of Patent: October 2, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: I-Chih Chen, Chih-Mu Huang, Ling-Sung Wang, Ying-Hao Chen, Wen-Chang Kuo, Jung-Chi Jeng
  • Patent number: 10056455
    Abstract: A semiconductor device including a substrate, a gate stack, a pair of insulator structures, and source/drain materials is provided. The substrate has a plurality of recesses, wherein the plurality of recesses defines a protruded portion of the substrate having a channel region, and the protruded portion has a first side surface and a second side surface opposite to the first side surface. The gate stack is disposed on the protruded portion of the substrate. The pair of insulator structures are disposed within the plurality of recesses and respectively covering parts of the first side surface and the second side surface of the protruded portion, wherein the channel region is uncovered by the pair of insulator structures. The source/drain materials are disposed on the substrate in the plurality of recesses and on two opposing sides of the channel region, wherein the source/drain materials cover the pair of insulator structures.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: August 21, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ting-Chun Kuan, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Fu-Tsun Tsai, Ru-Shang Hsiao
  • Publication number: 20180061987
    Abstract: A method of fabricating a semiconductor device includes following steps. A trench is formed in a substrate. A barrier layer and an epitaxy layer are formed in sequence in the trench. The barrier layer has a first dopant. A source/drain recess cavity is formed by etching at least the epitaxial layer. A source/drain region is formed in the source/drain recess cavity. The source/drain region has a second dopant.
    Type: Application
    Filed: November 6, 2017
    Publication date: March 1, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: I-Chih CHEN, Ying-Lang WANG, Chih-Mu HUANG, Ying-Hao CHEN, Wen-Chang KUO, Jung-Chi JENG
  • Patent number: 9865731
    Abstract: A semiconductor device includes a p-type metal oxide semiconductor device (PMOS) and an n-type metal oxide semiconductor device (NMOS) disposed over a substrate. The PMOS has a first gate structure located on the substrate, a carbon doped n-type well disposed under the first gate structure, a first channel region disposed in the carbon doped n-type well, and activated first source/drain regions disposed on opposite sides of the first channel region. The NMOS has a second gate structure located on the substrate, a carbon doped p-type well disposed under the second gate structure, a second channel region disposed in the carbon doped p-type well, and activated second source/drain regions disposed on opposite sides of the second channel region.
    Type: Grant
    Filed: November 15, 2013
    Date of Patent: January 9, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: I-Chih Chen, Ying-Lang Wang, Chih-Mu Huang, Ying-Hao Chen, Wen-Chang Kuo, Jung-Chi Jeng
  • Publication number: 20170338342
    Abstract: A method for forming a semiconductor device is provided. The method includes forming an isolation structure in a semiconductor substrate, and the isolation structure surrounds an active region of the semiconductor substrate. The method also includes forming a gate over the semiconductor substrate, and the gate is across the active region and extends onto the isolation structure. The gate has an intermediate portion over the active region and two end portions connected to the intermediate portion, the end portions are over the isolation structure. The method includes forming a support film over the isolation structure, and the support film is a continuous film which continuously covers the isolation structure and at least one end portion of the gate.
    Type: Application
    Filed: August 7, 2017
    Publication date: November 23, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jung-Chi JENG, I-Chih CHEN, Wen-Chang KUO, Ying-Hao CHEN, Ru-Shang HSIAO, Chih-Mu HUANG
  • Patent number: 9812569
    Abstract: A semiconductor device and a method of fabricating the semiconductor device are provided. The semiconductor device includes a substrate; a source/drain region having a first dopant in the substrate; a barrier layer having a second dopant formed around the source/drain region in the substrate. When a semiconductor device is scaled down, the doped profile in source/drain regions might affect the threshold voltage uniformity, the provided semiconductor device may improve the threshold voltage uniformity by the barrier layer to control the doped profile.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: November 7, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Chih Chen, Ying-Lang Wang, Chih-Mu Huang, Ying-Hao Chen, Wen-Chang Kuo, Jung-Chi Jeng
  • Publication number: 20170317164
    Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.
    Type: Application
    Filed: July 17, 2017
    Publication date: November 2, 2017
    Inventors: I-Chih CHEN, Chih-Mu HUANG, Fu-Tsun TSAI, Meng-Yi WU, Yung-Fa LEE, Ying-Lang WANG
  • Patent number: 9768221
    Abstract: A semiconductor device including a light sensing region disposed on a substrate is provided that includes a bond structure having one or more patterned layers underlying the pad element. The pad element may be coupled to the light sensing region and may be formed in a first metal layer disposed on the substrate. A second metal layer of the device has a first bond region, a region of the second metal layer that underlies the pad element. This first bond region of the second metal layer includes a pattern of a plurality of conductive lines interposed by dielectric. A via connects the pad element and the second metal layer.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: September 19, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shang-Yen Wu, I-Chih Chen, Yi-Sheng Liu, Volume Chien, Fu-Tsun Tsai, Chi-Cherng Jeng, Ying-Hao Chen
  • Patent number: 9728637
    Abstract: Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and an isolation structure in the semiconductor substrate and surrounding an active region of the semiconductor substrate. The semiconductor device also includes a gate over the semiconductor substrate, and the gate has an intermediate portion over the active region and two end portions connected to the intermediate portion, and the end portions are over the isolation structure. The semiconductor device further includes a support film over the isolation structure and covering the isolation structure and at least one of the end portions of the gate. The support film exposes the active region and the intermediate portion of the gate.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: August 8, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jung-Chi Jeng, I-Chih Chen, Wen-Chang Kuo, Ying-Hao Chen, Ru-Shang Hsiao, Chih-Mu Huang
  • Patent number: 9728598
    Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.
    Type: Grant
    Filed: April 7, 2015
    Date of Patent: August 8, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Chih Chen, Chih-Mu Huang, Fu-Tsun Tsai, Meng-Yi Wu, Yung-Fa Lee, Ying-Lang Wang
  • Patent number: 9659859
    Abstract: A semiconductor device includes a first layer including a number of first layer metal pads, a second layer formed on top of the first layer, the second layer including a number of second layer metal pads, and vias connecting the first layer metal pads to the second layer metal pads. A surface area overlap between the first layer metal pads and the second layer metal pads is below a defined threshold.
    Type: Grant
    Filed: July 27, 2015
    Date of Patent: May 23, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: I-Chih Chen, Ying-Hao Chen, Chi-Cherng Jeng, Volume Chien, Fu-Tsun Tsai, Kun-Huei Lin
  • Publication number: 20160380085
    Abstract: A method of manufacturing a semiconductor device includes receiving a FinFET precursor including a fin structure formed between some isolation regions, and a gate structure formed over a portion of the fin structure; removing a top portion of the fin structure on either side of the gate structure; growing a semiconductive layer on top of a remaining portion of the fin structure such that a plurality of corners is formed over the fin structure; forming a capping layer over the semiconductive layer; performing an annealing process on the FinFET precursor to form a plurality of dislocations proximate to the corners; and removing the capping layer.
    Type: Application
    Filed: September 9, 2016
    Publication date: December 29, 2016
    Inventors: I-CHIH CHEN, CHIH-MING HSIEH, FU-TSUN TSAI, YUNG-FA LEE, CHIH-MU HUANG
  • Patent number: 9490345
    Abstract: A semiconductor device includes a gate structure on a substrate; a raised source/drain region adjacent to the gate structure; and an interconnect plug on the doped region. The raised source/drain region includes a top surface being elevated from a surface of the substrate; and a doped region exposed on the top surface. The doped region includes a dopant concentration greater than any other portions of the raised source/drain region. A bottommost portion of the interconnect plug includes a width approximate to a width of the doped region.
    Type: Grant
    Filed: October 31, 2014
    Date of Patent: November 8, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: I-Chih Chen, Fu-Tsun Tsai, Yung-Fa Lee, Ko-Min Lin, Chih-Mu Huang, Ying-Lang Wang
  • Publication number: 20160300906
    Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.
    Type: Application
    Filed: April 7, 2015
    Publication date: October 13, 2016
    Inventors: I-Chih CHEN, Chih-Mu HUANG, Fu-Tsun TSAI, Meng-Yi WU, Yung-Fa LEE, Ying-Lang WANG
  • Patent number: 9450093
    Abstract: Some embodiments of the present disclosure provide a method of manufacturing a semiconductor device including receiving a FinFET precursor including a fin structure formed between isolation regions, and a gate structure formed over a portion of the fin structure such that a sidewall of the fin structure is in contact with a gate spacer of the gate structure; patterning the fin structure to comprise a pattern of at least one upward step rising from the isolation region; forming a capping layer over the fin structure, the isolation region, and the gate structure; performing an annealing process on the FinFET precursor to form at least two dislocations along the upward step; and removing the capping layer.
    Type: Grant
    Filed: October 15, 2014
    Date of Patent: September 20, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: I-Chih Chen, Chih-Ming Hsieh, Fu-Tsun Tsai, Yung-Fa Lee, Chih-Mu Huang
  • Publication number: 20160148967
    Abstract: A bonding pad structure comprises an interconnect layer, an isolation layer over the interconnect layer, a conductive pad, and one or more non-conducting stress-releasing structures. The conductive pad comprises a planar portion over the isolation layer, and one or more bridging portions extending through at least the isolation layer and to the interconnect layer for establishing electric contact therewith, wherein there is a trench in the one or more bridging portions. The one or more non-conducting stress-releasing structures are disposed between the isolation layer and the conductive pad. The trench is surrounded by one of the one or more non-conducting stress-releasing structures from a top view.
    Type: Application
    Filed: February 1, 2016
    Publication date: May 26, 2016
    Inventors: Volume Chien, I-Chih Chen, Hsin-Chi Chen, Hung-Ta Huang, Ying-Hao Chen, Ying-Lang Wang
  • Publication number: 20160111536
    Abstract: Some embodiments of the present disclosure provide a method of manufacturing a semiconductor device including receiving a FinFET precursor including a fin structure formed between isolation regions, and a gate structure formed over a portion of the fin structure such that a sidewall of the fin structure is in contact with a gate spacer of the gate structure; patterning the fin structure to comprise a pattern of at least one upward step rising from the isolation region; forming a capping layer over the fin structure, the isolation region, and the gate structure; performing an annealing process on the FinFET precursor to form at least two dislocations along the upward step; and removing the capping layer.
    Type: Application
    Filed: October 15, 2014
    Publication date: April 21, 2016
    Inventors: I-CHIH CHEN, CHIH-MING HSIEH, FU-TSUN TSAI, YUNG-FA LEE, CHIH-MU HUANG
  • Patent number: 9281215
    Abstract: Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate. The semiconductor device also includes an isolation structure in the semiconductor substrate and surrounding an active region of the semiconductor substrate. The semiconductor device includes a gate over the semiconductor substrate. The gate has an intermediate portion over the active region and two end portions connected to the intermediate portion. Each of the end portions has a first gate length longer than a second gate length of the intermediate portion and is located over the isolation structure.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: March 8, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., LTD.
    Inventors: Jung-Chi Jeng, I-Chih Chen, Wen-Chang Kuo, Ying-Hao Chen, Ru-Shang Hsiao, Chih-Mu Huang