Patents by Inventor Ilya Bezel

Ilya Bezel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10976025
    Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: April 13, 2021
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Rudolf Brunner
  • Publication number: 20210092826
    Abstract: A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizonal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.
    Type: Application
    Filed: September 17, 2020
    Publication date: March 25, 2021
    Applicant: KLA Corporation
    Inventors: Ilya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Maksim Alexandrovich Deminskii, Boris Vasilyevich Potapkin
  • Publication number: 20210022233
    Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
    Type: Application
    Filed: September 22, 2020
    Publication date: January 21, 2021
    Inventors: Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
  • Patent number: 10887974
    Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
    Type: Grant
    Filed: June 20, 2016
    Date of Patent: January 5, 2021
    Assignee: KLA Corporation
    Inventors: Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
  • Patent number: 10823943
    Abstract: A plasma light source with lamp house correction is disclosed. The system may include a pump source configured to generate pump illumination. The pump illumination may be directed, by an elliptical reflector element, to a volume of gas contained within a plasma lamp in order to generate a plasma. The plasma may be configured to generate broadband illumination. The system may also include a correction plate and/or an aspherical elliptical reflector element configured to alter the pump illumination to correct for aberrations introduced by the plasma lamp. The system may also include an additional aspherical correction plate configured to alter the broadband illumination to correct for aberrations introduced by optical elements of the system.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: November 3, 2020
    Assignee: KLA Corporation
    Inventors: Shiyu Zhang, Ilya Bezel
  • Patent number: 10806016
    Abstract: A system for generating broadband radiation is disclosed. The system includes a target material source configured to deliver one or more of a liquid or solid state target material to a plasma-forming region of a chamber. The system further includes a pump source configured to generate pump radiation to excite the target material in the plasma forming region of the chamber to generate broadband radiation. The system is further configured to transmit at least a portion of the broadband radiation generated in the plasma-forming region of the chamber out of the chamber through a windowless aperture.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: October 13, 2020
    Assignee: KLA Corporation
    Inventors: Oleg Khodykin, Ilya Bezel
  • Publication number: 20200274314
    Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
    Type: Application
    Filed: February 14, 2020
    Publication date: August 27, 2020
    Inventors: Ilya Bezel, Matthew Derstine, William Schumaker, Michael Friedmann
  • Patent number: 10714307
    Abstract: An imaging system utilizing atomic atoms is provided. The system may include a neutral atom source configured to generate a beam of neutral atoms. The system may also include an ionizer configured to collect neutral atoms scattered from the surface of a sample. The ionizer may also be configured to ionize the collected neutral atoms. The system may also include a selector configured to receive ions from the ionizer and selectively filter received ions. The system may also include one or more optical elements configured to direct selected ions to a detector. The detector may be configured to generate one or more images of the surface of the sample based on the received ions.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: July 14, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Eugene Shifrin, Gildardo Delgado, Rudy F. Garcia
  • Patent number: 10714327
    Abstract: A system for pumping laser sustained plasma and enhancing one or more selected wavelengths of output illumination generated by the laser sustained plasma is disclosed. In embodiments, the system includes one or more pump modules configured to generate pump illumination for the laser sustained plasma and one or more enhancing illumination sources configured to generate enhancing illumination at one or more selected wavelengths. The pump illumination may be directed along one or more pump illumination paths that are non-collinear to an output illumination path of the output illumination. The enhancing illumination may be directed along an illumination path that is collinear to the output illumination path of the output illumination so that the enhancing illumination is combined with the output illumination, thereby enhancing the output illumination at the one or more selected wavelengths.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: July 14, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine
  • Publication number: 20200202504
    Abstract: Methods and systems for enhanced defect detection based on images collected by at least two imaging detectors at different times are described. In some embodiments, the time between image measurements is at least 100 microseconds and no more than 10 milliseconds. In one aspect, one or more defects of interest are identified based on a composite image of a measured area generated based on a difference between collected images. In a further aspect, measurement conditions associated with the each imaged location are adjusted to be different for measurements performed by at least two imaging detectors at different times. In some embodiments, the measurement conditions are adjusted during the time between measurements by different imaging detectors. Exemplary changes of measurement conditions include environmental changes at the wafer under measurement and changes made to the optical configuration of the inspection system.
    Type: Application
    Filed: December 21, 2018
    Publication date: June 25, 2020
    Inventors: Anatoly Shchemelinin, Ilya Bezel, Eugene Shifrin
  • Patent number: 10690589
    Abstract: A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: June 23, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Kenneth P. Gross, John Szilagyi
  • Patent number: 10691024
    Abstract: An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: June 23, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Wei Zhao, Ilya Bezel
  • Publication number: 20200150445
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
    Type: Application
    Filed: November 9, 2018
    Publication date: May 14, 2020
    Inventors: Ilya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak
  • Patent number: 10616987
    Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: April 7, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Wei Zhao, Kenneth P. Gross, Ilya Bezel, Matthew Panzer
  • Patent number: 10568195
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: February 18, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Publication number: 20200041774
    Abstract: A plasma light source with lamp house correction is disclosed. The system may include a pump source configured to generate pump illumination. The pump illumination may be directed, by an elliptical reflector element, to a volume of gas contained within a plasma lamp in order to generate a plasma. The plasma may be configured to generate broadband illumination. The system may also include a correction plate and/or an aspherical elliptical reflector element configured to alter the pump illumination to correct for aberrations introduced by the plasma lamp. The system may also include an additional aspherical correction plate configured to alter the broadband illumination to correct for aberrations introduced by optical elements of the system.
    Type: Application
    Filed: October 19, 2018
    Publication date: February 6, 2020
    Inventors: Shiyu Zhang, Ilya Bezel
  • Patent number: 10522340
    Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: December 31, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
  • Patent number: 10520741
    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: December 31, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer, Eugene Shifrin
  • Publication number: 20190378684
    Abstract: An imaging system utilizing atomic atoms is provided. The system may include a neutral atom source configured to generate a beam of neutral atoms. The system may also include an ionizer configured to collect neutral atoms scattered from the surface of a sample. The ionizer may also be configured to ionize the collected neutral atoms. The system may also include a selector configured to receive ions from the ionizer and selectively filter received ions. The system may also include one or more optical elements configured to direct selected ions to a detector. The detector may be configured to generate one or more images of the surface of the sample based on the received ions.
    Type: Application
    Filed: September 25, 2018
    Publication date: December 12, 2019
    Inventors: Ilya Bezel, Eugene Shifrin, Gildardo Delgado, Rudy F. Garcia
  • Publication number: 20190373709
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.
    Type: Application
    Filed: August 1, 2018
    Publication date: December 5, 2019
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine