Patents by Inventor Ilya Bezel

Ilya Bezel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160381776
    Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
    Type: Application
    Filed: June 20, 2016
    Publication date: December 29, 2016
    Inventors: Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin
  • Patent number: 9530636
    Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: December 27, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Sebaek Oh, Anant Chimmalgi, Rahul Yadav, Matthew Derstine, Ilya Bezel
  • Patent number: 9526158
    Abstract: A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: December 20, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao, Gildardo R. Delgado
  • Patent number: 9512985
    Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: December 6, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Gregory R. Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel, Muzammil A. Arain, Anatoly A. Vasiliev, James Andrew Allen, Oleg Shulepov, Andrew V. Hill, Ohad Bachar, Moshe Markowitz, Yaron Ish-Shalom, Ilan Sela, Amnon Manassen, Alexander Svizher, Maxim Khokhlov, Avi Abramov, Oleg Tsibulevsky, Daniel Kandel, Mark Ghinovker
  • Patent number: 9516733
    Abstract: A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: December 6, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Yanming Zhao, Gildardo R. Delgado
  • Publication number: 20160322211
    Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
    Type: Application
    Filed: July 11, 2016
    Publication date: November 3, 2016
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao, Anant Chimmalgi, Jincheng Wang
  • Publication number: 20160268120
    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
    Type: Application
    Filed: March 8, 2016
    Publication date: September 15, 2016
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer
  • Patent number: 9433070
    Abstract: A plasma cell for forming light-sustained plasma includes a transmission element configured to contain a volume of gas, a first terminal flange disposed at or near an opening of the transmission element, a second terminal flange disposed at or near another opening of the transmission element, a floating flange disposed between the first or second terminal flange and the transmission element. The floating flange is movable to compensate for thermal expansion of the transmission element. Further, the floating flange is configured to enclose the internal volume of the transmission element to contain a volume of gas within the transmission element. The transmission element is configured to receive illumination from an illumination source in order to generate plasma within the volume of gas. The transmission element is transparent to a portion of the illumination from the illumination source and a portion of broadband radiation emitted by the plasma.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: August 30, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Amir Torkaman
  • Publication number: 20160205758
    Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.
    Type: Application
    Filed: January 6, 2016
    Publication date: July 14, 2016
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Richard Solarz, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Anant Chimmalgi, Xiumei Liu, Brooke Bruguier
  • Patent number: 9390902
    Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: July 12, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao, Anant Chimmalgi, Jincheng Wang
  • Patent number: 9390892
    Abstract: A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.
    Type: Grant
    Filed: June 23, 2013
    Date of Patent: July 12, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Anatoly Shchemelinin, Ilya Bezel
  • Publication number: 20160163516
    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
    Type: Application
    Filed: February 15, 2016
    Publication date: June 9, 2016
    Inventors: Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado
  • Patent number: 9318311
    Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.
    Type: Grant
    Filed: October 9, 2012
    Date of Patent: April 19, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Anant Chimmalgi, Anatoly Shchemelinin, Ilya Bezel, Rajeev Patil
  • Publication number: 20160066402
    Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The transmission element of the plasma cell is at least partially transparent to at least a portion of the illumination generated by the illumination source and at least a portion of broadband radiation emitted by the plasma. The plasma cell also includes one or more gas return channels formed within the transmission element for transferring gas from a region above the plasma generation region to a region below the plasma generation region.
    Type: Application
    Filed: November 9, 2015
    Publication date: March 3, 2016
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Patent number: 9263238
    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
    Type: Grant
    Filed: March 26, 2015
    Date of Patent: February 16, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado
  • Patent number: 9232622
    Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.
    Type: Grant
    Filed: September 3, 2014
    Date of Patent: January 5, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi
  • Publication number: 20150357179
    Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
    Type: Application
    Filed: April 29, 2015
    Publication date: December 10, 2015
    Inventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
  • Publication number: 20150333471
    Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.
    Type: Application
    Filed: March 24, 2015
    Publication date: November 19, 2015
    Inventors: Anant Chimmalgi, Rahul Yadav, Anatoly Shchemelinin, Ilya Bezel, Matthew Derstine
  • Patent number: 9185788
    Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.
    Type: Grant
    Filed: May 27, 2014
    Date of Patent: November 10, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine
  • Publication number: 20150279628
    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.
    Type: Application
    Filed: March 26, 2015
    Publication date: October 1, 2015
    Inventors: Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado