Abstract: The invention is directed to a method and an arrangement for generating extreme ultraviolet (EUV) radiation, i.e., radiation of high-energy photons in the wavelength range from 11 to 14 nm, based on a gas discharge. The object of the invention, to find a novel possibility for generating EUV radiation in which an extended life of the system is achieved with stable generation of a dense, hot plasma column, is met according to the invention in that a preionization discharge is ignited between two parallel disk-shaped flat electrodes prior to the main discharge by a surface discharge along the superficies surface of a cylindrical insulator with a plasma column generated through the gas discharge with pulsed direct voltage, which preionization discharge carries out an ionization of the working gas in the discharge chamber by means of fast charged particles.

Abstract: A load balancing mechanism maps a binary tree representation of a routing table into a set of fixed size memories. The mechanism efficiently utilizes the memory in the routing table without violating the tree precedence constraints and the memory access requirements of a pipelined system. The mechanism stores a subtree associated with a densely populated level of the binary tree in memory associated with lower levels.