Abstract: The present invention provides a pump for supplying a liquid. The pump comprises: a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and a driver configured to provide a rotational force such that the hose is wound around the drum.

Abstract: Proposed are a home port and a substrate processing apparatus using the same. The home port is installed in the substrate processing apparatus to temporarily mount a nozzle for discharging a process liquid to a substrate, and includes a main body having a space therein, a nozzle holder provided at an upper portion of the main body and configured to mount the nozzle, an inclined surface formed below the nozzle holder in the space, a first supply pipe configured to discharge a rinse liquid to a tip of the nozzle, a second supply pipe configured to inject the rinse liquid into the main body, a conductive wire configured to electrically connect the inclined surface and the first supply pipe, and a first switch installed on the conductive wire.

Abstract: Proposed are a chilling unit, a heat treatment apparatus including same, and a heat treatment method. More particularly, proposed is a technology capable of rapidly and effectively lowering the temperature of a heating plate by bringing a heat exchange medium of a chilling unit into contact with the heating plate and then circulating a refrigerant after performing a heat treatment process of a substrate through a heat treatment apparatus.

Abstract: Proposed are a home port, and a substrate processing apparatus and a home port cleaning method using the same. The home port includes a housing supported by a holder and having a space therein, a nozzle holder provided at an upper portion of the housing and mounting a nozzle for discharging a process liquid to a substrate, an inclined surface formed below the nozzle holder in the space, an exhaust hole exhausting fumes generated in the space of the housing, a rinse supply hole supplying a rinse liquid for removing a residual process liquid remaining on the inclined surface, a hinge provided at a lower portion of the housing and hingedly coupling the housing and the holder to enable rotation of the housing, and an actuating means rotating the housing in a direction in which the inclined surface is parallel to a ground surface on which the housing is installed.

Abstract: An apparatus for inspecting a chemical solution of the present invention comprises a base unit having an inlet, through which a chemical solution is introduced, a flow path unit, in which the chemical solution introduced through the inlet is moved while a velocity of its fluid is changed, and including a first region unit provided adjacent to the inlet of the base unit and a second region unit being in series communication with the first region unit, in which the chemical solution discharged from the first region unit is moved, a detecting unit including a first detecting member for detecting a first signal that is an electrical signal of the first region unit, and a second detecting member for detecting a second signal that is an electrical signal of the second region unit, and a determining unit for receiving a signal from the detecting unit and determining that a particle and a bubble are detected if a current of the first signal and the second signal is changed compared to a reference value, and discrimin

Abstract: The present invention relates to a novel compound having excellent functions, such as electron injection and transport and light emission functions, and an organic electroluminescence device. By using the novel compound in an organic material layer of the organic electroluminescence device, properties of the device such a light emitting efficiency, driving voltage, and life can be improved.

Abstract: An exemplary embodiment of the present invention provided a pump for supplying a liquid. The pump includes: a flexible tube body including a pump chamber; a first flange provided at one end of the tube body; and a second flange provided at the other end of the tube body; and a driving unit for transmitting rotational force to the tube body to twist the tube body, in which the tube body has a bent portion bent at a predetermined angle.

Abstract: Provided is a pump for supplying a liquid. The pump includes: a tube including a pump chamber communicating with a chemical liquid inlet and a chemical liquid outlet, and configured to discharge a chemical liquid through a change in volume due to contraction and expansion; and a driving unit contracting or expanding the tube in a longitudinal direction, in which the tube includes: a flexible tube body including a pump chamber which has an increased internal volume when is contracted in a longitudinal direction and has a decreased internal volume when is expanded in the longitudinal direction, and which has a jar shape of which a radius is increased from the chemical liquid inlet to a center of the pump chamber, and the radius is decreased from the pump chamber to the chemical liquid outlet; a first flange provided at one end of the tube body and including the chemical liquid inlet; and a second flange provided at the other end of the tube body and including the chemical liquid outlet.

Abstract: Provided is a pump for supplying a liquid, the pump including: a flexible tube body including a pump chamber; first flange provided at one end of the tube body and including an inlet communicating with the pump chamber; a second flange provided at the other end of the tube body and including an outlet communicating with the pump chamber; and driving unit for transmitting rotational force to the tube body to twist the tube body.

Abstract: An anti-B-cell maturation antigen (BCMA)/anti-4-1BB bispecific antibody or an antigen-binding fragment thereof, and use thereof, are provided. The bispecific antibody or an antigen-binding fragment thereof may have high binding affinity to both of a BCMA protein and a 4-1BB protein and may be effectively used to prevent or treat a disease related to BCMA, 4-1BB, or both thereof (e.g., cancer).

Abstract: Disclosed is a thin film stress control-based coating method for large-area coating. The method uses a two-step coating process in which a first coating layer that is a relatively low-hardness layer is primarily formed on a base member and a second coating layer that is a relatively high-hardness layer is secondarily formed on the first coating layer. The method can form a high-density coating structure that is hardly peeled off over a relatively large area compared to conventional coating methods by suppressing internal stress of the coating layers of the coating structure. Further disclosed is a coating structure manufactured by the same method.

Abstract: A simulation-based framework for optimizing resource allocation and layout design is disclosed.

Abstract: Disclosed are an organic ion conductive polymer gel elastomer including a polymer matrix; a plasticizing solvent impregnated into the polymer matrix to plasticize the polymer matrix so that the polymer matrix is in a gel state; and an ion conductive dopant ionized by the plasticizing solvent and dispersed in the polymer matrix, wherein the plasticizing solvent and the ion conductive dopant are non-hydrophilic, and a method of preparing the organic ion conductive polymer gel elastomer.

Abstract: The present disclosure relates to a novel organic compound which has excellent thermal stability, electron transporting ability, and light emitting ability, and to an organic EL device containing the same. As the organic compound is used in an organic material layer of the organic EL device, the thermal stability, luminous efficiency, driving voltage, and life of the device can be improved.

Abstract: A simulation-based framework for optimizing resource allocation and layout design is disclosed.

Abstract: A semiconductor device and a method of fabricating a semiconductor device, the device including a fin-type pattern extending in a first direction; a gate electrode extending in a second direction over the fin-type pattern, the second direction being different from the first direction; spacers on sidewalls of the gate electrode; a capping structure on the gate electrode and the spacers, the capping structure including a first capping pattern and a second capping pattern, the second capping pattern being on the first capping pattern; and an interlayer insulating film surrounding sidewalls of each of the spacers and sidewalls of the capping structure, the interlayer insulating film being in contact with the first capping pattern.

Abstract: A semiconductor device and a method of fabricating a semiconductor device, the device including a fin-type pattern extending in a first direction; a gate electrode extending in a second direction over the fin-type pattern, the second direction being different from the first direction; spacers on sidewalls of the gate electrode; a capping structure on the gate electrode and the spacers, the capping structure including a first capping pattern and a second capping pattern, the second capping pattern being on the first capping pattern; and an interlayer insulating film surrounding sidewalls of each of the spacers and sidewalls of the capping structure, the interlayer insulating film being in contact with the first capping pattern.

Abstract: Systems and methods are described for agent-based simulation of each individual's movements in order to monitor the propagation of a disease. An agent-based simulation model has been exemplarily constructed, which is mainly comprised of two parts: student mobility model and disease propagation model. In the student mobility model, movements of students are modeled based on the GIS map (viz. routes, distances) and their daily schedules (e.g. dorms and classrooms/buildings). The disease propagation model represents students' health status (viz. susceptible, pre-symptomatic, asymptomatic, quarantine, isolation, and recovered) based on different factors such as the number of infected students attending the class or living in a dorm, classroom/dorm features (e.g. size, humidity, ventilation), probabilities of disease transmissions (e.g.

Abstract: Systems and methods are disclosed for spatially and temporally mapping safer and riskier and wellbeing areas based on perceived safety/risk and wellbeing, related to perceived viral mitigating health behaviors, known built environment wellbeing features, and predictively modelling movement through locations, and building environment features and operations contributing to viral spread.

Abstract: Disclosed is a radio-wave-transmissive cover of a vehicle radar, which exhibits a metallic color and is imparted with improved radio-wave transmission performance. The radio-wave-transmissive cover may include an optical film formed by simultaneously depositing an aluminum (Al) material and a low-melting-point material, such that a radio wave radiated from an antenna of a radar, for example, provided in a vehicle is transmitted. The radio-wave-transmissive cover includes a substrate, and an optical film including aluminum (Al) and a low-melting-point metal having a melting point less than the melting point of aluminum (Al) on the surface of the substrate.