Abstract: A semiconductor device inspection method includes: selecting, for a semiconductor device including at least one layer, a target layer on which inspection and measurement are to be performed; selecting a material to fill a hole region formed inside the semiconductor device; conducting a simulation for an optical inspection and a measurement for the semiconductor device; selecting, based on the simulation, a wavelength band of light for the optical inspection and the measurement; and detecting, through the light at the selected wavelength, a lower portion of the semiconductor device and a defect of the semiconductor device. A refractive index of the material filling the inside of the hole region is greater than a refractive index of a molding layer surrounding the outside of the hole region.

Abstract: An optical inspection method may include obtaining polarization information of a reflected light reflected from a working object, illuminating an incident light on the working object and obtaining the reflected light converted to an arbitrary elliptical polarization by being reflected from the working object, nulling the reflected light by using a waveplate and a polarizer, where an initial value of a fast axis of the waveplate is set based on the polarization information, and detecting a defect signal by adjusting the waveplate and the polarizer while maintaining the nulling.

Abstract: The present invention relates to a long hole saw for a composite material insulation panel for easily cutting a steel sheet of a hard material and a heat insulator such as Styrofoam or urethane of a soft material in one direction, wherein it is possible to reduce shaking vibrations generated during the cutting and to easily, precisely, and stably drill holes when drilling holes for the installation of pipes, conduits, etc. into a composite material insulation panel used for wall or roof construction of a building.

Abstract: The present invention relates to a long hole saw for a composite material insulation panel for easily cutting a steel sheet of a hard material and a heat insulator such as Styrofoam or urethane of a soft material in one direction, wherein it is possible to reduce shaking vibrations generated during the cutting and to easily, precisely, and stably drill holes when drilling holes for the installation of pipes, conduits, etc. into a composite material insulation panel used for wall or roof construction of a building.