Patents by Inventor Indra V. Chary
Indra V. Chary has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250253241Abstract: A microelectronic device comprises pillar structures comprising semiconductive material, contact structures in physical contact with upper portions of the pillar structures, and conductive structures over and in physical contact with the contact structures. Each of the conductive structures comprises an upper portion having a first width, and a lower portion vertically interposed between the upper portion and the contact structures. The lower portion has a tapered profile defining additional widths varying from a second width less than the first width at an uppermost boundary of the lower portion to a third width less than the second width at a lowermost boundary of the lower portion. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.Type: ApplicationFiled: April 24, 2025Publication date: August 7, 2025Inventors: Shuangqiang Luo, Indra V. Chary
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Publication number: 20250174558Abstract: A microelectronic device, including a stack structure including alternating conductive structures and dielectric structures is disclosed. Memory pillars extend through the stack structure. Contacts are laterally adjacent to the memory pillars and extending through the stack structure. The contacts including active contacts and support contacts. The active contacts including a liner and a conductive material. The support contacts including the liner and a dielectric material. The conductive material of the active contacts is in electrical communication with the memory pillars. Methods and electronic systems are also disclosed.Type: ApplicationFiled: January 29, 2025Publication date: May 29, 2025Inventors: S M Istiaque Hossain, Indra V. Chary, Anilkumar Chandolu, Sidhartha Gupta, Shuangqiang Luo
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Patent number: 12315803Abstract: A microelectronic device comprises pillar structures comprising semiconductive material, contact structures in physical contact with upper portions of the pillar structures, and conductive structures over and in physical contact with the contact structures. Each of the conductive structures comprises an upper portion having a first width, and a lower portion vertically interposed between the upper portion and the contact structures. The lower portion has a tapered profile defining additional widths varying from a second width less than the first width at an uppermost boundary of the lower portion to a third width less than the second width at a lowermost boundary of the lower portion. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.Type: GrantFiled: December 29, 2023Date of Patent: May 27, 2025Assignee: Lodestar Licensing Group LLCInventors: Shuangqiang Luo, Indra V. Chary
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Patent number: 12315801Abstract: A microelectronic device comprises a stack structure, contact structures, and additional contact structures. The stack structure comprises a vertically alternating sequence of conductive material and insulative material arranged in tiers. The stack structure is divided into blocks each comprising a stadium structure including steps comprising horizontal ends of the tiers. The contact structures are within a horizontal area of the stadium structure and vertically extend through the stack structure. The additional contact structures are on at least some of the steps of the stadium structure and are coupled to the contact structures. Memory devices and electronic devices are also disclosed.Type: GrantFiled: June 16, 2021Date of Patent: May 27, 2025Assignee: Micron Technology, Inc.Inventors: Indra V. Chary, Shuangqiang Luo, Lifang Xu
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Publication number: 20250126791Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.Type: ApplicationFiled: December 18, 2024Publication date: April 17, 2025Inventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
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Publication number: 20250107204Abstract: Microelectronic devices include a tiered stack having vertically alternating insulative and conductive structures. A first series of stadiums is defined in the tiered stack within a first block of a dual-block structure. A second series of stadiums is defined in the tiered stack within a second block of the dual-block structure. The first and second series of stadiums are substantially symmetrically structured about a trench at a center of the dual-block structure. The trench extends a width of the first and second series of stadiums. The stadiums of the first and second series of stadiums have opposing staircase structures comprising steps at ends of the conductive structures of the tiered stack. Conductive source/drain contact structures are in the stack and extend substantially vertically from a source/drain region at a floor of the trench. Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.Type: ApplicationFiled: December 9, 2024Publication date: March 27, 2025Inventors: Lifang Xu, Richard J. Hill, Indra V. Chary, Lars P. Heineck
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Publication number: 20250096042Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. The memory-block regions comprise part of a memory-plane region. A pair of elevationally-extending walls are formed that are laterally-spaced relative one another and that are individually horizontally-longitudinally-elongated. The pair of walls are one of (a) or (b), where: (a): in the memory-plane region laterally-between immediately-laterally-adjacent of the memory-block regions; and (b): in a region that is edge-of-plane relative to the memory-plane region. Through the horizontally-elongated trenches and after forming the pair of walls, sacrificial material that is in the first tiers is isotropically etching away and replaced with conducting material of individual conducting lines.Type: ApplicationFiled: December 5, 2024Publication date: March 20, 2025Applicant: Micron Technology, Inc.Inventors: Anilkumar Chandolu, Indra V. Chary
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Patent number: 12250812Abstract: Some embodiments include an integrated assembly having a source structure, and having a stack of alternating conductive levels and insulative levels over the source structure. Cell-material-pillars pass through the stack. The cell-material-pillars are arranged within a configuration which includes a first memory-block-region and a second memory-block-region. The cell-material-pillars include channel material which is electrically coupled with the source structure. Memory cells are along the conductive levels and include regions of the cell-material-pillars. A panel is between the first and second memory-block-regions. The panel has a first material configured as a container shape. The container shape defines opposing sides and a bottom of a cavity. The panel has a second material within the cavity. The second material is compositionally different from the first material. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: January 9, 2023Date of Patent: March 11, 2025Assignee: Micron Technology, Inc.Inventors: Jordan D. Greenlee, Nancy M. Lomeli, John D. Hopkins, Jiewei Chen, Indra V. Chary, Jun Fang, Vladimir Samara, Kaiming Luo, Rita J. Klein, Xiao Li, Vinayak Shamanna
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Publication number: 20250071996Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.Type: ApplicationFiled: November 12, 2024Publication date: February 27, 2025Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
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Publication number: 20250056800Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Upper masses comprise first material laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks and second material laterally-between and longitudinally-spaced-along the immediately-laterally-adjacent memory blocks longitudinally-between and under the upper masses. The second material is of different composition from that of the first material. The second material comprises insulative material. Other embodiments, including method, are disclosed.Type: ApplicationFiled: September 9, 2024Publication date: February 13, 2025Inventors: Jordan D. Greenlee, Daniel Billingsley, Indra V. Chary, Rita J. Klein
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Patent number: 12224240Abstract: A microelectronic device, including a stack structure including alternating conductive structures and dielectric structures is disclosed. Memory pillars extend through the stack structure. Contacts are laterally adjacent to the memory pillars and extending through the stack structure. The contacts including active contacts and support contacts. The active contacts including a liner and a conductive material. The support contacts including the liner and a dielectric material. The conductive material of the active contacts is in electrical communication with the memory pillars. Methods and electronic systems are also disclosed.Type: GrantFiled: August 9, 2021Date of Patent: February 11, 2025Assignee: Micron Technology, Inc.Inventors: S M Istiaque Hossain, Indra V. Chary, Anilkumar Chandolu, Sidhartha Gupta, Shuangqiang Luo
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Patent number: 12213317Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The operative channel-material strings in the laterally-spaced memory blocks comprise part of a memory plane. An elevationally-extending wall is in the memory plane laterally-between immediately-laterally-adjacent of the memory blocks and that completely encircles an island that is laterally-between immediately-laterally-adjacent of the memory blocks in the memory plane. Other embodiments, including method are disclosed.Type: GrantFiled: November 14, 2023Date of Patent: January 28, 2025Assignee: Micron Technology, Inc.Inventors: Lifang Xu, Indra V. Chary, Justin B. Dorhout, Jian Li, Haitao Liu, Paolo Tessariol
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Patent number: 12211746Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. The memory-block regions comprise part of a memory-plane region. A pair of elevationally-extending walls are formed that are laterally-spaced relative one another and that are individually horizontally-longitudinally-elongated. The pair of walls are one of (a) or (b), where: (a): in the memory-plane region laterally-between immediately-laterally-adjacent of the memory-block regions; and (b): in a region that is edge-of-plane relative to the memory-plane region. Through the horizontally-elongated trenches and after forming the pair of walls, sacrificial material that is in the first tiers is isotropically etching away and replaced with conducting material of individual conducting lines.Type: GrantFiled: April 15, 2021Date of Patent: January 28, 2025Assignee: Micron Technology, Inc.Inventors: Anilkumar Chandolu, Indra V. Chary
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Publication number: 20250024673Abstract: A microelectronic device comprising a stack structure comprising a non-staircase region, a staircase region, and an array region. Each of the non-staircase region, the staircase region, and the array region comprises tiers of alternating conductive materials and dielectric materials. One or more pillars are in the non-staircase region and in the array region, and one or more supports are in the staircase region. A conductive material is in each of the non-staircase region, the staircase region, and the array region and extends vertically into a source adjacent to the tiers. The source comprises corrosion containment features in each of the non-staircase region, the staircase region, and the array region, adjacent to the conductive material in the source. Additional microelectronic devices, electronic systems, and methods are also disclosed.Type: ApplicationFiled: September 25, 2024Publication date: January 16, 2025Inventors: Shuangqiang Luo, Indra V. Chary
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Publication number: 20250017007Abstract: A method of forming a microelectronic device includes forming a microelectronic device structure. The microelectronic device structure includes a stack structure comprising insulative structures and electrically conductive structures vertically alternating with the insulative structures, pillar structures extending vertically through the stack structure, an etch stop material vertically overlaying the stack structure, and a first dielectric material vertically overlying the etch stop material. The method further includes removing portions of the first dielectric material, the etch stop material, and an upper region of the stack structure to form a trench interposed between horizontally neighboring groups of the pillar structures, forming a liner material within the trench, and substantially filling a remaining portion of the trench with a second dielectric material to form a dielectric barrier structure.Type: ApplicationFiled: July 6, 2023Publication date: January 9, 2025Inventors: Shuangqiang Luo, Indra V. Chary, Nancy M. Lomeli, Xiao Li
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Patent number: 12185546Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a stack structure comprising insulative structures and additional insulative structures vertically alternating with the insulative structures, a dielectric structure vertically extending partially through the stack structure, and a dielectric material vertically overlying and horizontally extending across the stack structure and the dielectric structure. Portions of at least the dielectric material and the dielectric structure are removed to form a trench vertically overlying and at least partially horizontally overlapping a remaining portion of the dielectric structure. The trench is substantially filled with additional dielectric material. Microelectronic devices, memory devices, and electronic systems are also described.Type: GrantFiled: June 28, 2023Date of Patent: December 31, 2024Assignee: Loestar Licensing Group LLCInventors: Shuangqiang Luo, Indra V. Chary, Justin B. Dorhout
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Patent number: 12167599Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.Type: GrantFiled: December 19, 2022Date of Patent: December 10, 2024Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
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Patent number: 12166094Abstract: Microelectronic devices include a tiered stack having vertically alternating insulative and conductive structures. A first series of stadiums is defined in the tiered stack within a first block of a dual-block structure. A second series of stadiums is defined in the tiered stack within a second block of the dual-block structure. The first and second series of stadiums are substantially symmetrically structured about a trench at a center of the dual-block structure. The trench extends a width of the first and second series of stadiums. The stadiums of the first and second series of stadiums have opposing staircase structures comprising steps at ends of the conductive structures of the tiered stack. Conductive source/drain contact structures are in the stack and extend substantially vertically from a source/drain region at a floor of the trench. Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.Type: GrantFiled: July 12, 2021Date of Patent: December 10, 2024Assignee: Micron Technology, Inc.Inventors: Lifang Xu, Richard J. Hill, Indra V. Chary, Lars P. Heineck
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Publication number: 20240355363Abstract: Methods, systems, and devices for a bit line contact scheme in a memory system stack are described. A memory architecture may include bit lines coupled with bit line contacts, and pillars coupled with circuitry associated with supporting operation of the bit lines. Hybrid plugs may be integrated into the pillars to couple the bit line contacts with the pillars, forming a conductive path between the bit lines and the circuitry. The hybrid plugs may be recessed within the pillars such that the hybrid plugs do not extend through the memory architecture beyond the pillars. The hybrid plugs may include one or more relatively low capacitance, conductive materials, such as a titanium alloy material (e.g., titanium, titanium nitride), a tungsten alloy material (e.g., tungsten, tungsten nitride), or any combination thereof, among other materials.Type: ApplicationFiled: April 9, 2024Publication date: October 24, 2024Inventors: Mithun Kumar Ramasahayam, Indra V. Chary, Meng-Wei Kuo
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Patent number: 12127400Abstract: A microelectronic device comprising a stack structure comprising a non-staircase region, a staircase region, and an array region. Each of the non-staircase region, the staircase region, and the array region comprises tiers of alternating conductive materials and dielectric materials. One or more pillars are in the non-staircase region and in the array region, and one or more supports are in the staircase region. A conductive material is in each of the non-staircase region, the staircase region, and the array region and extends vertically into a source adjacent to the tiers. The source comprises corrosion containment features in each of the non-staircase region, the staircase region, and the array region, adjacent to the conductive material in the source. Additional microelectronic devices, electronic systems, and methods are also disclosed.Type: GrantFiled: January 24, 2022Date of Patent: October 22, 2024Inventors: Shuangqiang Luo, Indra V. Chary