Patents by Inventor Ingmar Meijer
Ingmar Meijer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240069442Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.Type: ApplicationFiled: November 7, 2023Publication date: February 29, 2024Inventors: Gerhard Ingmar Meijer, Valery Weber, Peter Willem Jan Staar
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Patent number: 11846886Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.Type: GrantFiled: November 23, 2020Date of Patent: December 19, 2023Assignee: International Business Machines CorporationInventors: Gerhard Ingmar Meijer, Valery Weber, Peter Willem Jan Staar
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Publication number: 20230363118Abstract: A method includes: integrating, by the computing device, a combination of user identified parameters in a template-based framework with historical operations data of a plurality of data centers in a multiple data center set-up to produce a feature set of parameters; clustering, by the computing device, the exclusive feature set of parameters into an optimal number of groups, each of which comprise similar physical attributes of chillers associated with any of the plurality of data centers; generating, by the computing device, analytical models for data center infrastructure component energy efficiency optimization of the multiple data center set-up based on the optimal number of groups; and providing recommendations from the analytical models as to which parameters are to be adjusted to have a more efficient energy utilization of the data center infrastructure components.Type: ApplicationFiled: May 6, 2022Publication date: November 9, 2023Inventors: Antony PULICKEN, Paramita CHAKRABORTY, Gerhard Ingmar MEIJER
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Publication number: 20230229077Abstract: A photoacid generator (PAG) anion, a photoresist composition, and a method are disclosed. The PAG anion includes a moiety, selected from an alkyl group, a monocyclic aromatic group, and a bicyclic aromatic group, that includes a carbon atom with a negative elementary charge. The PAG anion also includes an electron acceptor atom, selected from boron(III), aluminum(III), and phosphorus(V), which is covalently bonded to the carbon atom. The PAG anion also has at least one electron-withdrawing R group. The photoresist composition has a PAG that includes the PAG anion and a cation selected from triphenylsulfonium, diphenyliodonium, phenylthiolanium, and derivatives thereof. The method includes forming a layer of the photoresist composition over a material surface on a substrate, irradiating the layer to form a pattern of radiation-exposed regions, selectively removing portions of the irradiated layer to form exposed portions of the material surface, and etching or ion implanting the exposed portions.Type: ApplicationFiled: January 20, 2022Publication date: July 20, 2023Inventors: Gerhard Ingmar Meijer, Valery Weber, Peter Willem Jan Staar
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Publication number: 20220317572Abstract: Organometallic photoresists suitable for use in deep ultraviolet (DUV) or extreme ultraviolet (EUV) lithography are provided. The organometallic photoresists contain an organometallic molecule having least a metal element M selected from the group consisting of Bi, Sb, and mixtures thereof, and having an oxidation state of 3+, and at least one polymerizable group R. A method of forming a patterned materials feature on a substrate utilizing the organometallic photoresist compositions is also provided.Type: ApplicationFiled: April 1, 2021Publication date: October 6, 2022Inventors: Gerhard Ingmar Meijer, Valery Weber, Peter Willem Jan Staar
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Publication number: 20220308448Abstract: In an approach to improve the field of photoacid generators (PAGs) through a new photoacid generator, in particular to a photoacid generator comprising a new polycyclic aromatic photoacid generator compound anion, and a photoresist composition, comprising said photoacid generator. Embodiments the present invention relate to a method of generating an acid using said photoresist composition and a method of forming a patterned materials feature on a substrate.Type: ApplicationFiled: March 29, 2021Publication date: September 29, 2022Inventors: Gerhard Ingmar Meijer, Valery Weber, Peter Willem Jan Staar
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Publication number: 20220163886Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.Type: ApplicationFiled: November 23, 2020Publication date: May 26, 2022Inventors: Gerhard Ingmar Meijer, Valery Weber, Peter Willem Jan Staar
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Patent number: 11315634Abstract: A device includes at least one tunable resistive element. Each tunable resistive element comprises a first terminal, a second terminal, and a dielectric layer arranged between the first and second terminals. The device is configured to apply at least one electrical set pulse to the resistive elements to form a conductive filament comprising a plurality of oxygen vacancies in the dielectric layer. The device is configured to apply at least one electrical reset pulse to displace a subset of the oxygen vacancies of the conductive filament. The at least one electrical reset pulse comprises a first part, which is adapted to increase the temperature of the conductive filament and increase the mobility of the oxygen vacancies of the conductive filament, and a second part, which is configured to displace the subset of the oxygen vacancies of the conductive filament.Type: GrantFiled: October 20, 2020Date of Patent: April 26, 2022Assignee: International Business Machines CorporationInventors: Siegfried Friedrich Karg, Gerhard Ingmar Meijer
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Publication number: 20220122662Abstract: A device includes at least one tunable resistive element. Each tunable resistive element comprises a first terminal, a second terminal, and a dielectric layer arranged between the first and second terminals. The device is configured to apply at least one electrical set pulse to the resistive elements to form a conductive filament comprising a plurality of oxygen vacancies in the dielectric layer. The device is configured to apply at least one electrical reset pulse to displace a subset of the oxygen vacancies of the conductive filament. The at least one electrical reset pulse comprises a first part, which is adapted to increase the temperature of the conductive filament and increase the mobility of the oxygen vacancies of the conductive filament, and a second part, which is configured to displace the subset of the oxygen vacancies of the conductive filament.Type: ApplicationFiled: October 20, 2020Publication date: April 21, 2022Inventors: Siegfried Friedrich Karg, Gerhard Ingmar Meijer
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Patent number: 10388540Abstract: This invention relates to cooling devices for multi-chip semiconductor devices, system-on-a-package devices, and other packaged devices. Because of the non-uniform height across the surface in such large-chip and multi-chip assemblies, providing heat exchange can be troublesome. Many air cooled heat sinks are too stiff to adapt to such non-uniform or warped shapes of chips or to shape-changing chip surfaces during operation. In the present disclosure, application of a mechanical load perpendicular to the chip plane causes certain features to flex and adapt to the non-uniform height of the chip plane, providing improved heat exchange.Type: GrantFiled: March 13, 2017Date of Patent: August 20, 2019Assignee: International Business Machines CorporationInventors: Thomas Brunschwiler, Ingmar Meijer, Stephan Paredes, Gerd Schlottig
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Publication number: 20180261522Abstract: This invention relates to cooling devices for multi-chip semiconductor devices, system-on-a-package devices, and other packaged devices. Because of the non-uniform height across the surface in such large-chip and multi-chip assemblies, providing heat exchange can be troublesome. Many air cooled heat sinks are too stiff to adapt to such non-uniform or warped shapes of chips or to shape-changing chip surfaces during operation. In the present disclosure, application of a mechanical load perpendicular to the chip plane causes certain features to flex and adapt to the non-uniform height of the chip plane, providing improved heat exchange.Type: ApplicationFiled: March 13, 2017Publication date: September 13, 2018Inventors: Thomas Brunschwiler, Ingmar Meijer, Stephan Paredes, Gerd Schlottig
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Patent number: 9880595Abstract: The present invention is notably directed to a cooling device, e.g., for computer hardware. The device comprises a deformable, outer chamber, having at least one thermally conducting section, the latter suited for thermally contacting a heat source of a computer hardware. The outer chamber is deformable upon a pressure increase therein. The cooling device further comprises at least one inner chamber nested in the outer chamber, the inner chamber expandable in volume upon a pressure increase therein. The invention is further directed to a computer hardware apparatus comprising such a cooling device, or stacks of such cooling devices paired with respective set of electronic components.Type: GrantFiled: June 8, 2016Date of Patent: January 30, 2018Assignee: International Business Machines CorporationInventors: Thomas Brunschwiler, Ingmar Meijer, Bruno Michel, Stephan Paredes, Gerd Schlottig
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Publication number: 20170357297Abstract: The present invention is notably directed to a cooling device, e.g., for computer hardware. The device comprises a deformable, outer chamber, having at least one thermally conducting section, the latter suited for thermally contacting a heat source of a computer hardware. The outer chamber is deformable upon a pressure increase therein. The cooling device further comprises at least one inner chamber nested in the outer chamber, the inner chamber expandable in volume upon a pressure increase therein. The invention is further directed to a computer hardware apparatus comprising such a cooling device, or stacks of such cooling devices paired with respective set of electronic components.Type: ApplicationFiled: June 8, 2016Publication date: December 14, 2017Inventors: Thomas BRUNSCHWILER, Ingmar MEIJER, Bruno MICHEL, Stephan PAREDES, Gerd SCHLOTTIG
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Patent number: 9066460Abstract: Cooled electronic assemblies and methods of fabrication are provided. In one embodiment, the assembly includes a coolant-cooled electronic module with one or more electronic component(s), and one or more coolant-carrying channel(s) integrated within the module, and configured to facilitate flow of coolant through the module for cooling the electronic component(s). In addition, the assembly includes a coolant manifold structure detachably coupled to the electronic module. The manifold structure facilitates flow of coolant to the coolant-carrying channel(s) of the electronic module, and the coolant manifold structure and electronic module include adjoining surfaces. One surface of the adjoining surfaces includes a plurality of coolant capillaries or passages. The coolant capillaries are sized to inhibit, for instance, via surface tension, leaking of coolant therefrom at the one surface with decoupling of the coolant manifold structure and electronic module along the adjoining surfaces.Type: GrantFiled: January 17, 2013Date of Patent: June 23, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Thomas J. Brunschwiler, Evan G. Colgan, Michael J. Ellsworth, Jr., Werner Escher, Ingmar Meijer, Stephen Paredes, Gerd Schlottig, Jeffrey A. Zitz
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Publication number: 20140198452Abstract: Cooled electronic assemblies and methods of fabrication are provided. In one embodiment, the assembly includes a coolant-cooled electronic module with one or more electronic component(s), and one or more coolant-carrying channel(s) integrated within the module, and configured to facilitate flow of coolant through the module for cooling the electronic component(s). In addition, the assembly includes a coolant manifold structure detachably coupled to the electronic module. The manifold structure facilitates flow of coolant to the coolant-carrying channel(s) of the electronic module, and the coolant manifold structure and electronic module include adjoining surfaces. One surface of the adjoining surfaces includes a plurality of coolant capillaries or passages. The coolant capillaries are sized to inhibit, for instance, via surface tension, leaking of coolant therefrom at the one surface with decoupling of the coolant manifold structure and electronic module along the adjoining surfaces.Type: ApplicationFiled: January 17, 2013Publication date: July 17, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Thomas J. BRUNSCHWILER, Evan G. COLGAN, Michael J. ELLSWORTH, JR., Werner ESCHER, Ingmar MEIJER, Stephen PAREDES, Gerd SCHLOTTIG, Jeffrey A. ZITZ
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Patent number: 8470676Abstract: A multi-terminal programmable element. The programmable element includes a source electrode and a drain electrode on a base. The programmable element includes reference voltage contact that is not in contact with the source or drain electrode. The base includes a transition-metal oxide with oxygen vacancies for drifting under an applied electric field. Further, materials of the source electrode and the base are selected such that an interface of a source and/or drain electrode material and the transition metal oxide base material forms an energy barrier for electron injection from the electrode into the base material. The energy barrier has a height that depends on an oxygen vacancy concentration of the base material. Four non-volatile states are programmable into the programmable element.Type: GrantFiled: January 8, 2009Date of Patent: June 25, 2013Assignee: International Business Machines CorporationInventors: Siegfried F. Karg, Gerhard Ingmar Meijer
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Patent number: 8405124Abstract: A complementary logic element including first and second transistor elements. The first and second gate electrodes of the two transistor elements are electrically parallel to form a common gate. Both the coupling layers of the first and the second transistor element include a resistance switching material, a conductivity of which may be altered by causing an ion concentration to alter if an electrical voltage signal of an appropriate polarity is applied. The first and second transistor elements also include an ion conductor layer that is capable of accepting ions from the coupling layer and of releasing ions into the coupling layer. The coupling layers and ion conductor layers are such that the application of an electrical signal of a given polarity to the gate enhances the electrical conductivity of the first coupling layer and diminishes the electrical conductivity of the second, or vice versa.Type: GrantFiled: January 8, 2009Date of Patent: March 26, 2013Assignee: International Business Machines CorporationInventors: Siegfried Friedrich Karg, Gerhard Ingmar Meijer
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Patent number: 8377789Abstract: A method for fabricating a field-enhanced programmable resistance memory cell. In an example embodiment, a resistor includes a resistance structure between a first electrode and a second electrode. The resistance structure includes an insulating dielectric material. The second electrode includes a protrusion extending into the resistance structure. The insulating dielectric material includes a material in which a confined conductive region with a programmable resistance is formable via a conditioning signal.Type: GrantFiled: August 9, 2009Date of Patent: February 19, 2013Assignee: International Business Machines CorporationInventors: Gerhard Ingmar Meijer, Chung Hon Lam, Hon-Sum Phillip Wong
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Publication number: 20120321915Abstract: An electrochemical power delivery voltage regulator. The regulator includes one or more fluid circuits having a first electrolyte solution with a primary redox couple and a secondary redox couple; and a second electrolyte solution with a further primary redox couple; a polyelectrode in contact with the first electrolyte solution; a further electrode in contact with the second electrolyte solution; and control means coupled to control a relative concentration of electroactive species of the secondary redox couple and thereby impact a mixed potential at the polyelectrode, such as to regulate a supply voltage of the electrochemical power delivery voltage regulator, in operation. The invention further concerns a corresponding method of voltage regulation and a system comprising such an electrochemical power and electrical consumers with consumer fluid circuits in fluid communication with respective one or more fluid circuits of the electrochemical power delivery voltage regulator.Type: ApplicationFiled: August 24, 2012Publication date: December 20, 2012Applicant: International Business Machines CorporationInventors: Gerhard Ingmar Meijer, Patrick Ruch
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Patent number: 8279665Abstract: In accordance with an aspect of the present disclosure, a memory cell (1) or select element is provided. The element includes an ion conductor element (3) formed of a ion conductor material with mobile metal ions, a first electrically conducing electrode (4) in electrical contact with the ion conductor element, and a second electrically conducting electrode (6) in electrical contact with the ion conductor element, so that the memory cell or select element is programmable by applying an electrical voltage between the first electrode and the second electrode that causes the metal ions to be influenced so that an electrical resistance across the ion conductor element is caused to vary, for example because a metallic protrusion (7) is caused to grow or decompose. In contrast to prior art approaches, the ion conductor element has a shape that is asymmetrical with respect to an exchange of the first electrode (4) and the second electrode (6) for each other.Type: GrantFiled: November 18, 2010Date of Patent: October 2, 2012Assignee: International Business Machines CorporationInventors: Siegfried Friedrich Karg, Gerhard Ingmar Meijer