Abstract: A plasma processing apparatus includes a processing chamber in which a sample is subjected to plasma processing, a first radio frequency power supply that supplies radio frequency power for generating plasma, a sample stage on which the sample is mounted, and a second radio frequency power supply that supplies radio frequency power to the sample stage, the plasma processing apparatus further includes a DC power supply that applies a DC voltage, that is changed according to a periodically repeated waveform, to the sample stage, and the waveform of one cycle has a period in which amplitude changes by a predetermined amount or more during a predetermined time. Accordingly, charged particles on a wafer surface are removed, a trench shape with high verticality can be obtained, and damage to a film that is not to be etched inside a trench can be reduced.

Abstract: An electronic device that includes a base substrate having a mounting surface; an electronic component having a mechanical vibration portion mounted on the mounting surface of the base substrate; an intermediate layer mounted on the base substrate and forming an internal space with the base substrate so as to accommodate the electronic component therein, the intermediate layer having at least one through-hole that opens the internal space to an outside; and a sealing layer on the intermediate layer and sealing the internal space by closing the at least one through-hole.

Abstract: A piezoelectric resonator unit includes a piezoelectric substrate, first and second excitation electrodes, first and second connecting electrodes, and first and second exterior members. The first excitation electrode and first connecting electrode are disposed on a first main surface of the piezoelectric substrate and are electrically connected to each other. Similarly, the second excitation electrode and the second connecting electrode are disposed on a second main surface of the piezoelectric substrate and are electrically connected to each other. First and second exterior members bonded to the substrate with sealing members interposed. The first exterior member includes a first terminal portion formed in a shape that externally exposes at least part of the first connecting electrode. A first outer electrode covers the first terminal portion and the exposed portion of the first connecting electrode protruding from the first exterior member.

Abstract: A quartz crystal unit that includes a quartz crystal resonator with a quartz crystal blank on which a pair of excitation electrodes are formed, a frame body that surrounds an outer periphery of the blank, and a coupling member that couples the frame body to the blank. Moreover, a package member is joined to an entire periphery of the frame body on at least one side of the excitation electrodes; and an extension electrode is provided that is electrically connected to one of the excitation electrodes. A recess is formed in a junction region of at least one of the frame body and the package member. In the junction region, the extension electrode is disposed in the recess in such a way that the extension electrode has a thickness that does not exceed a depth of the recess.

Abstract: An electronic device that includes a base substrate having a mounting surface; an electronic component having a mechanical vibration portion mounted on the mounting surface of the base substrate; an intermediate layer mounted on the base substrate and forming an internal space with the base substrate so as to accommodate the electronic component therein, the intermediate layer having at least one through-hole that opens the internal space to an outside; and a sealing layer on the intermediate layer and sealing the internal space by closing the at least one through-hole.

Abstract: The friction stir welding tool member according to the present invention is made of a ceramic member in which a shoulder portion and a probe portion are integrally formed, wherein a root portion of the probe portion and an end portion of the shoulder portion have a curved surface shape; and the friction stir welding tool member has a ratio (R1/D) of 0.02 or more and 0.20 or less when a curvature radius of the end portion of the shoulder portion is defined as R1 (mm) and an outer diameter of the shoulder portion is defined as D (mm). In addition, the ceramic member is preferably made of a silicon nitride sintered body having a Vickers hardness of 1400 HV1 or more. According to the above-described configuration, a friction stir welding tool member having excellent durability can be provided.

Abstract: A method of forming a quartz crystal resonator is provided with the resonator including a body portion with first and second main surfaces facing each other and, in plan view having a pair of long sides extending in a first direction and a pair of short sides extending in a second intersecting direction. Moreover, first and second excitation electrodes are formed on the respective main surfaces; a frame surrounds the body portion at both ends and is separated from the both ends; and first and second coupling portions extend from the short sides and with widths of the short sides. At least one of the first and second coupling portions is formed with a thickness in a third direction is smaller than a thickness in the third direction of a region of the body portion where the first excitation electrode and the second excitation electrode face each other.

Abstract: A quartz crystal resonator is provided that includes a body portion with first and second main surfaces facing each other and, in plan view has a pair of long sides extending in a first direction and a pair of short sides extending in a second intersecting direction. Moreover, first and second excitation electrodes are disposed on the first and second main surfaces respectively; a frame surrounds the body portion at both ends and is separated from the both ends; and first and second coupling portions extend from the short sides in the first direction with widths of the short sides. At least one of the first and second coupling portions has a portion whose thickness in a third direction is smaller than a thickness in the third direction of a region of the body portion where the first excitation electrode and the second excitation electrode face each other.

Abstract: The friction stir welding tool member according to the present invention is made of a silicon nitride sintered body, wherein the silicon nitride sintered body contains 15% by mass or less of additive components except silicon nitride in such a manner that the additive components include at least one element selected from lanthanoid elements and at least one element selected from Mg, Ti, Hf, and Mo. In addition, it is preferable that the additive components further include at least one element selected from Al, Si, and C. According to the above-described configuration, a friction stir welding tool member having an excellent durability can be provided.

Abstract: The present invention provides a silicon nitride sintered body including silicon nitride crystal grains and a grain boundary phase, wherein the silicon nitride crystal grains are covered with the grain boundary phase and width of the grain boundary phase is 0.2 nm or more. It is preferable that the width of the grain boundary phase is 0.2 nm to 5 nm. Additionally, it is preferable that the silicon nitride sintered body includes 15% by mass or less of the grain boundary phase. According to the above-described configuration, it is possible to provide a high-temperature-resistant silicon nitride sintered body in which degradation of the grain boundary phase under high temperature environment is suppressed. This silicon nitride sintered body is suitable for constituent material of a high-temperature-resistant member, use environment of which is 300° C. or higher.

Abstract: The present invention provides a welding tool member for friction stir welding comprising a silicon nitride sintered body, wherein the silicon nitride sintered body includes an additive component other than silicon nitride in a content of 15% by mass or less, and the additive component includes three or more elements selected from Y, Al, Mg, Si, Ti, Hf, Mo and C. It is preferable that the content of the additive component is 3% by mass or more and 12.5% by mass or less. It is also preferable that the additive component includes four or more elements selected from Y, Al, Mg, Si, Ti, Hf, Mo and C. Due to above structure, there can be provided a welding tool member for friction stir welding having a high durability.

Abstract: A piezoelectric resonator unit includes a piezoelectric substrate, first and second excitation electrodes, first and second connecting electrodes, and first and second exterior members. The first excitation electrode and first connecting electrode are disposed on a first main surface of the piezoelectric substrate and are electrically connected to each other. Similarly, the second excitation electrode and the second connecting electrode are disposed on a second main surface of the piezoelectric substrate and are electrically connected to each other. First and second exterior members bonded to the substrate with sealing members interposed. The first exterior member includes a first terminal portion formed in a shape that externally exposes at least part of the first connecting electrode. A first outer electrode covers the first terminal portion and the exposed portion of the first connecting electrode protruding from the first exterior member.

Abstract: A method of forming a quartz crystal resonator is provided with the resonator including a body portion with first and second main surfaces facing each other and, in plan view having a pair of long sides extending in a first direction and a pair of short sides extending in a second intersecting direction. Moreover, first and second excitation electrodes are formed on the respective main surfaces; a frame surrounds the body portion at both ends and is separated from the both ends; and first and second coupling portions extend from the short sides and with widths of the short sides. At least one of the first and second coupling portions is formed with a thickness in a third direction is smaller than a thickness in the third direction of a region of the body portion where the first excitation electrode and the second excitation electrode face each other.

Abstract: A quartz crystal resonator is provided that includes a body portion with first and second main surfaces facing each other and, in plan view has a pair of long sides extending in a first direction and a pair of short sides extending in a second intersecting direction. Moreover, first and second excitation electrodes are disposed on the first and second main surfaces respectively; a frame surrounds the body portion at both ends and is separated from the both ends; and first and second coupling portions extend from the short sides in the first direction with widths of the short sides. At least one of the first and second coupling portions has a portion whose thickness in a third direction is smaller than a thickness in the third direction of a region of the body portion where the first excitation electrode and the second excitation electrode face each other.

Abstract: A crystal-oscillating device is disclosed with a reduction in size and a favorable Q value. The crystal-oscillating device includes a first packaging material; a crystal resonator mounted on the first packaging material; joining members that join the first packaging material to the crystal resonator; a first sealing frame for joining the second and third packaging materials, the first packaging material, and the second packaging material; and a second sealing frame for joining the second packaging material and the third packaging material to each other. Preferable, the second packaging material is formed in a frame shape to surround an outer peripheral edge of the crystal resonator, and the second packaging material and a crystal substrate of the crystal resonator are formed from the same crystal substrate.

Abstract: The friction stir welding tool member according to the present invention is made of a ceramic member in which a shoulder portion and a probe portion are integrally formed, wherein a root portion of the probe portion and an end portion of the shoulder portion have a curved surface shape; and the friction stir welding tool member has a ratio (R1/D) of 0.02 or more and 0.20 or less when a curvature radius of the end portion of the shoulder portion is defined as R1 (mm) and an outer diameter of the shoulder portion is defined as D (mm). In addition, the ceramic member is preferably made of a silicon nitride sintered body having a Vickers hardness of 1400 HV1 or more. According to the above-described configuration, a friction stir welding tool member having excellent durability can be provided.

Abstract: The friction stir welding tool member according to the present invention is made of a silicon nitride sintered body, wherein the silicon nitride sintered body contains 15% by mass or less of additive components except silicon nitride in such a manner that the additive components include at least one element selected from lanthanoid elements and at least one element selected from Mg, Ti, Hf, and Mo. In addition, it is preferable that the additive components further include at least one element selected from Al, Si, and C. According to the above-described configuration, a friction stir welding tool member having an excellent durability can be provided.

Abstract: A quartz crystal unit that includes a quartz crystal resonator with a quartz crystal blank on which a pair of excitation electrodes are formed, a frame body that surrounds an outer periphery of the blank, and a coupling member that couples the frame body to the blank. Moreover, a package member is joined to an entire periphery of the frame body on at least one side of the excitation electrodes; and an extension electrode is provided that is electrically connected to one of the excitation electrodes. A recess is formed in a junction region of at least one of the frame body and the package member. In the junction region, the extension electrode is disposed in the recess in such a way that the extension electrode has a thickness that does not exceed a depth of the recess.

Abstract: The present invention provides a silicon nitride sintered body including silicon nitride crystal grains and a grain boundary phase, wherein the silicon nitride crystal grains are covered with the grain boundary phase and width of the grain boundary phase is 0.2 nm or more. It is preferable that the width of the grain boundary phase is 0.2 nm to 5 nm. Additionally, it is preferable that the silicon nitride sintered body includes 15% by mass or less of the grain boundary phase. According to the above-described configuration, it is possible to provide a high-temperature-resistant silicon nitride sintered body in which degradation of the grain boundary phase under high temperature environment is suppressed. This silicon nitride sintered body is suitable for constituent material of a high-temperature-resistant member, use environment of which is 300° C. or higher.

Abstract: The present invention provides a welding tool member for friction stir welding comprising a silicon nitride sintered body, wherein the silicon nitride sintered body includes an additive component other than silicon nitride in a content of 15% by mass or less, and the additive component includes three or more elements selected from Y, Al, Mg, Si, Ti, Hf, Mo and C. It is preferable that the content of the additive component is 3% by mass or more and 12.5% by mass or less. It is also preferable that the additive component includes four or more elements selected from Y, Al, Mg, Si, Ti, Hf, Mo and C. Due to above structure, there can be provided a welding tool member for friction stir welding having a high durability.