Patents by Inventor Ishai Schwarzband
Ishai Schwarzband has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11756188Abstract: Input data may be received. The input data may include an image of a pattern and location data that identifies a modified portion of the pattern. A processing device may determine a first parameter of a first dimension within the pattern and a second parameter of a second dimension outside of the pattern. A combined set may be generated based on the first parameter and the second parameter. A defect associated with the modified portion may be classified based on the combined set.Type: GrantFiled: March 14, 2022Date of Patent: September 12, 2023Assignee: Applied Materials Israel Ltd.Inventors: Vadim Vereschagin, Roman Kris, Ishai Schwarzband, Boaz Cohen, Evgeny Bal, Ariel Shkalim
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Patent number: 11651509Abstract: A method for process control of a semiconductor structure fabricated by a series of fabrication steps, the method comprising obtaining an image of the semiconductor structure indicative of at least two individual fabrication steps; wherein the image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from the semiconductor structure; and processing, by a hardware processor, the image to determining a parameter of the semiconductor structure, wherein processing includes measuring step/s from among the fabrication steps as an individual feature.Type: GrantFiled: October 31, 2019Date of Patent: May 16, 2023Assignee: Applied Materials Israel Ltd.Inventors: Roman Kris, Roi Meir, Sahar Levin, Ishai Schwarzband, Grigory Klebanov, Shimon Levi, Efrat Noifeld, Hiroshi Miroku, Taku Yoshizawa, Kasturi Saha, Sharon Duvdevani-Bar, Vadim Vereschagin
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Publication number: 20220198639Abstract: Input data may be received. The input data may include an image of a pattern and location data that identifies a modified portion of the pattern. A processing device may determine a first parameter of a first dimension within the pattern and a second parameter of a second dimension outside of the pattern. A combined set may be generated based on the first parameter and the second parameter. A defect associated with the modified portion may be classified based on the combined set.Type: ApplicationFiled: March 14, 2022Publication date: June 23, 2022Inventors: Vadim Vereschagin, Roman Kris, Ishai Schwarzband, Boaz Cohen, Evgeny Bal, Ariel Shkalim
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Patent number: 11301983Abstract: An improved technique for determining height difference in patterns provided on semiconductor wafers uses real measurements (e.g., measurements from SEM images) and a height difference determination model. In one version of the model, a measurable variable of the model is expressed in terms of a function of a change in depth of shadow (i.e. relative brightness), wherein the depth of shadow depends on the height difference as well as width difference between two features on a semiconductor wafer. In another version of the model, the measurable variable is expressed in terms of a function of a change of a measured distance between two characteristic points on the real image of a periodic structure with respect to a change in a tilt angle of a scanning electron beam.Type: GrantFiled: August 17, 2020Date of Patent: April 12, 2022Assignee: Applied Materials Israel Ltd.Inventors: Ishai Schwarzband, Yan Avniel, Sergey Khristo, Mor Baram, Shimon Levi, Doron Girmonsky, Roman Kris
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Patent number: 11276160Abstract: A captured image of a pattern and a reference image of the pattern may be received. A contour of interest of the pattern may be identified. One or more measurements of a dimension of the pattern may be determined for each of the reference image and the captured image with respect to the contour of interest of the pattern. A defect associated with the contour of interest may be classified based on the determined one or more measurements of the dimension of the pattern for each of the reference image and the captured image.Type: GrantFiled: October 1, 2018Date of Patent: March 15, 2022Assignee: Applied Materials Israel LTD.Inventors: Vadim Vereschagin, Roman Kris, Ishai Schwarzband, Boaz Cohen, Ariel Shkalim, Evgeny Bal
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Publication number: 20210383529Abstract: A method for process control of a semiconductor structure fabricated by a series of fabrication steps, the method comprising obtaining an image of the semiconductor structure indicative of at least two individual fabrication steps; wherein the image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from the semiconductor structure; and processing, by a hardware processor, the image to determining a parameter of the semiconductor structure, wherein processing includes measuring step/s from among the fabrication steps as an individual feature.Type: ApplicationFiled: October 31, 2019Publication date: December 9, 2021Inventors: Roman KRIS, Roi MEIR, Sahar LEVIN, Ishai SCHWARZBAND, Grigory KLEBANOV, Shimon LEVI, Efrat NOIFELD, Hiroshi MIROKU, Taku YOSHIZAWA, Kasturi SAHA, Sharon DUVDEVANI-BAR, Vadim VERESCHAGIN
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Publication number: 20200380668Abstract: An improved technique for determining height difference in patterns provided on semiconductor wafers uses real measurements (e.g., measurements from SEM images) and a height difference determination model. In one version of the model, a measurable variable of the model is expressed in terms of a function of a change in depth of shadow (i.e. relative brightness), wherein the depth of shadow depends on the height difference as well as width difference between two features on a semiconductor wafer. In another version of the model, the measurable variable is expressed in terms of a function of a change of a measured distance between two characteristic points on the real image of a periodic structure with respect to a change in a tilt angle of a scanning electron beam.Type: ApplicationFiled: August 17, 2020Publication date: December 3, 2020Inventors: Ishai Schwarzband, Yan Avniel, Sergey Khristo, Mor Baram, Shimon Levi, Doron Girmonsky, Roman Kris
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Publication number: 20200327652Abstract: A captured image of a pattern and a reference image of the pattern may be received. A contour of interest of the pattern may be identified. One or more measurements of a dimension of the pattern may be determined for each of the reference image and the captured image with respect to the contour of interest of the pattern. A defect associated with the contour of interest may be classified based on the determined one or more measurements of the dimension of the pattern for each of the reference image and the captured image.Type: ApplicationFiled: October 1, 2018Publication date: October 15, 2020Inventors: Vadim VERESCHAGIN, Roman KRIS, Ishai SCHWARZBAND, Boaz COHEN, Ariel SHKALIM, Evgeny BAL
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Patent number: 10748272Abstract: An improved technique for determining height difference in patterns provided on semiconductor wafers uses real measurements (e.g., measurements from SEM images) and a height difference determination model. In one version of the model, a measurable variable of the model is expressed in terms of a function of a change in depth of shadow (i.e. relative brightness), wherein the depth of shadow depends on the height difference as well as width difference between two features on a semiconductor wafer. In another version of the model, the measurable variable is expressed in terms of a function of a change of a measured distance between two characteristic points on the real image of a periodic structure with respect to a change in a tilt angle of a scanning electron beam.Type: GrantFiled: May 17, 2018Date of Patent: August 18, 2020Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Ishai Schwarzband, Yan Avniel, Sergey Khristo, Mor Baram, Shimon Levi, Doron Girmonsky, Roman Kris
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Patent number: 10731979Abstract: A method for monitoring a first nanometric structure formed by a multiple patterning process, the method may include performing a first plurality of measurements to provide a first plurality of measurement results; wherein the performing of the first plurality of measurements comprises illuminating first plurality of locations of a first sidewall of the first nanometric structure by oblique charged particle beams of different tilt angles; and processing, by a hardware processor, the first plurality of measurement results to determine a first attribute of the first nanometric structure.Type: GrantFiled: January 12, 2018Date of Patent: August 4, 2020Assignee: Applied Materials Israel Ltd.Inventors: Shimon Levi, Ishai Schwarzband, Roman Kris
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Patent number: 10636140Abstract: A height of a pattern on a semiconductor wafer is determined by comparing a measured image of the pattern with a predicted image of the pattern, as produced by a shadow model. An estimated height of the pattern is provided as an input to the shadow model. The shadow model produces occluding contours that are used to generate predicted images. A set of predicted images are generated, each predicted image being associated with an estimated height. The estimated height corresponding to the predicted image most closely matching with the measured image is used as the height calculated by the shadow model.Type: GrantFiled: May 17, 2018Date of Patent: April 28, 2020Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Ishai Schwarzband, Sergey Khristo, Yan Avniel
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Patent number: 10504693Abstract: A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the area includes multiple instances of a structure of interest, and the structure of interest is of a nanometric scale; determining multiple types of attributes from the image; reducing a number of the attributes to provide reduced attribute information; generating guidelines, based on the reduced attribute information and on reference data, for evaluating the reduced attribute information; and evaluating an actual object by implementing the guidelines.Type: GrantFiled: September 14, 2018Date of Patent: December 10, 2019Assignee: Applied Materials Israel Ltd.Inventors: Shay Attal, Shaul Cohen, Guy Maoz, Noam Zac, Mor Baram, Lee Moldovan, Ishai Schwarzband, Ron Katzir, Kfir Ben-Zikri, Doron Girmonsky
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Publication number: 20190219390Abstract: A method for monitoring a first nanometric structure formed by a multiple patterning process, the method may include performing a first plurality of measurements to provide a first plurality of measurement results; wherein the performing of the first plurality of measurements comprises illuminating first plurality of locations of a first sidewall of the first nanometric structure by oblique charged particle beams of different tilt angles; and processing, by a hardware processor, the first plurality of measurement results to determine a first attribute of the first nanometric structure.Type: ApplicationFiled: January 12, 2018Publication date: July 18, 2019Inventors: Shimon LEVI, Ishai SCHWARZBAND, Roman KRIS
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Patent number: 10354376Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.Type: GrantFiled: March 12, 2018Date of Patent: July 16, 2019Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Yakov Weinberg, Ishai Schwarzband, Roman Kris, Itay Zauer, Ran Goldman, Olga Novak, Dhananjay Singh Rathore, Ofer Adan, Shimon Levi
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Publication number: 20190088444Abstract: A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the area includes multiple instances of a structure of interest, and the structure of interest is of a nanometric scale; determining multiple types of attributes from the image; reducing a number of the attributes to provide reduced attribute information; generating guidelines, based on the reduced attribute information and on reference data, for evaluating the reduced attribute information; and evaluating an actual object by implementing the guidelines.Type: ApplicationFiled: September 14, 2018Publication date: March 21, 2019Inventors: Shay Attal, Shaul Cohen, Guy Maoz, Noam Zac, Mor Baram, Lee Moldovan, Ishai Schwarzband, Ron Katzir, Kfir Ben-Zikri, Doron Girmonsky
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Publication number: 20180336671Abstract: A height of a pattern on a semiconductor wafer is determined by comparing a measured image of the pattern with a predicted image of the pattern, as produced by a shadow model. An estimated height of the pattern is provided as an input to the shadow model. The shadow model produces occluding contours that are used to generate predicted images. A set of predicted images are generated, each predicted image being associated with an estimated height. The estimated height corresponding to the predicted image most closely matching with the measured image is used as the height calculated by the shadow model.Type: ApplicationFiled: May 17, 2018Publication date: November 22, 2018Inventors: Ishai SCHWARZBAND, Sergey KHRISTO, Yan AVNIEL
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Publication number: 20180336675Abstract: An improved technique for determining height difference in patterns provided on semiconductor wafers uses real measurements (e.g., measurements from SEM images) and a height difference determination model. In one version of the model, a measurable variable of the model is expressed in terms of a function of a change in depth of shadow (i.e. relative brightness), wherein the depth of shadow depends on the height difference as well as width difference between two features on a semiconductor wafer. In another version of the model, the measurable variable is expressed in terms of a function of a change of a measured distance between two characteristic points on the real image of a periodic structure with respect to a change in a tilt angle of a scanning electron beam.Type: ApplicationFiled: May 17, 2018Publication date: November 22, 2018Inventors: Ishai SCHWARZBAND, Yan AVNIEL, Sergey KHRISTO, Mor BARAM, Shimon LEVI, Doron GIRMONSKY, Roman KRIS
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Patent number: 10103005Abstract: Disclosed herein are a system and method for imaging low electron yield regions with a charged beam imager. In certain embodiments, a system may include a processor, wherein the processor comprise an image waveform finder, a synthetic image generator and an output image generator; wherein the processor is configured to (i) receive or generate multiple images of a region of the object; wherein the region has an electron yield that is below an electron yield threshold; (ii) process the multiple images to generate multiple synthetic images, and (iii) generate an output image of the region in response to the multiple synthetic images.Type: GrantFiled: July 9, 2015Date of Patent: October 16, 2018Assignee: Applied Materials Israel Ltd.Inventors: Yuval Gronau, Ishai Schwarzband, Barak Dee-Noor
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Publication number: 20180268539Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.Type: ApplicationFiled: March 12, 2018Publication date: September 20, 2018Inventors: Yakov WEINBERG, Ishai SCHWARZBAND, Roman KRIS, Itay ZAUER, Ran GOLDMAN, Olga NOVAK, Dhananjay Singh RATHORE, Ofer ADAN, Shimon LEVI
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Patent number: 9916652Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.Type: GrantFiled: December 26, 2016Date of Patent: March 13, 2018Assignee: Applied Materials Israel Ltd.Inventors: Yakov Weinberg, Ishai Schwarzband, Roman Kris, Itay Zauer, Ran Goldman, Olga Novak, Dhananjay Singh Rathore, Ofer Adan, Shimon Levi