Patents by Inventor Ishai Schwarzband
Ishai Schwarzband has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9858658Abstract: A method for classification includes receiving an image of an area of a semiconductor wafer on which a pattern has been formed, the area containing an image location of interest, and receiving computer-aided design (CAD) data relating to the pattern comprising a CAD location of interest corresponding to the image location of interest. At least one value for one or more attributes of the image location of interest is computed based on a context of the CAD location of interest with respect to the CAD data.Type: GrantFiled: April 19, 2012Date of Patent: January 2, 2018Assignee: Applied Materials Israel LtdInventors: Idan Kaizerman, Ishai Schwarzband, Efrat Rozenman
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Patent number: 9824852Abstract: A Critical Dimensions Scanning Electron Microscope (CD-SEM) is described that comprises a unit for performing CD-SEM measurements of a semiconductor wafer, a BSE imaging unit for obtaining a Grey Level image (GL) of the wafer, and a unit for GL analysis and for processing the GL analysis results with reference to results of the CD-measurements.Type: GrantFiled: December 31, 2015Date of Patent: November 21, 2017Assignee: Applied Materials Israel LtdInventors: Roman Kris, Yakov Weinberg, Yan Ivanchenko, Ishai Schwarzband, Dan Lange, Arbel Englander, Efrat Noifeld, Ran Goldman, Ori Shoval
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Publication number: 20170243343Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.Type: ApplicationFiled: December 26, 2016Publication date: August 24, 2017Inventors: Yakov WEINBERG, Ishai SCHWARZBAND, Roman KRIS, Itay ZAUER, Ran GOLDMAN, Olga NOVAK, Dhananjay Singh RATHORE, Ofer ADAN, Shimon LEVI
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Patent number: 9715724Abstract: A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.Type: GrantFiled: July 29, 2014Date of Patent: July 25, 2017Assignee: Applied Materials Israel Ltd.Inventors: Ishai Schwarzband, Yan Ivanchenko, Daniel Ravid, Orly Zvitia, Idan Kaizerman
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Publication number: 20170194125Abstract: A Critical Dimensions Scanning Electron Microscope (CD-SEM) is described that comprises a unit for performing CD-SEM measurements of a semiconductor wafer, a BSE imaging unit for obtaining a Grey Level image (GL) of the wafer, and a unit for GL analysis and for processing the GL analysis results with reference to results of the CD-measurements.Type: ApplicationFiled: December 31, 2015Publication date: July 6, 2017Inventors: Roman KRIS, Yakov WEINBERG, Yan IVANCHENKO, Ishai SCHWARZBAND, Dan LANGE, Arbel ENGLANDER, Efrat NOIFELD, Ran GOLDMAN, Ori SHOVAL
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Patent number: 9674536Abstract: A technique for visualizing elements in images by applying a color coding procedure to data which comprises an initial image and segmentation results based on N labels. The segmentation results comprise information on segmentation uncertainty. The color coding procedure constructs a resulting colored image based on the initial image and N pre-selected base colors, and in such a manner that colors in the resulting colored image are modified by using intensity of the initial image and the information on segmentation uncertainty.Type: GrantFiled: November 10, 2015Date of Patent: June 6, 2017Assignee: Applied Materials Israel, Ltd.Inventors: Yakov Weinberg, Hagai Kirshner, Ishai Schwarzband
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Publication number: 20170134735Abstract: A technique for visualizing elements in images by applying a color coding procedure to data which comprises an initial image and segmentation results based on N labels. The segmentation results comprise information on segmentation uncertainty. The color coding procedure constructs a resulting colored image based on the initial image and N pre-selected base colors, and in such a manner that colors in the resulting colored image are modified by using intensity of the initial image and the information on segmentation uncertainty.Type: ApplicationFiled: November 10, 2015Publication date: May 11, 2017Inventors: Yakov WEINBERG, Hagai KIRSHNER, Ishai SCHWARZBAND
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Patent number: 9595091Abstract: A method for classification includes receiving an image of an area of a semiconductor wafer on which a pattern has been formed, the area containing a location of interest. At least one value for one or more attributes of the location of interest are computed based upon topographical features of the location of interest in a three-dimensional (3D) map of the area.Type: GrantFiled: April 19, 2012Date of Patent: March 14, 2017Assignee: Applied Materials Israel, Ltd.Inventors: Idan Kaizerman, Ishai Schwarzband, Efrat Rozenman
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Publication number: 20170018066Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.Type: ApplicationFiled: July 13, 2015Publication date: January 19, 2017Inventors: Yakov WEINBERG, Ishai SCHWARZBAND, Roman KRIS, Itay ZAUER, Ran GOLDMAN, Olga NOVAK, Dhananjay Singh RATHORE, Ofer ADAN, Shimon LEVI
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Publication number: 20170011881Abstract: A system that may include a processor, wherein the processor comprise an image waveform finder, a synthetic image generator and an output image generator; wherein the processor is configured to (i) receive or generate multiple images of a region of the object; wherein the region has an electron yield that is below an electron yield threshold; wherein each image is generated by scanning the region with an electron beam; (ii) process the multiple images to generate multiple synthetic images, and (iii) generate an output image of the region in response to the multiple synthetic images; wherein the image waveform finder is configured to process each image of the multiple images to find at least one image waveform that has a peak intensity that exceeds an intensity threshold; wherein the synthetic image generator is configured to replace one or more of the at least one image waveforms by one or more corresponding synthetic waveforms to provide a synthetic image; and wherein the output image generator is configuredType: ApplicationFiled: July 9, 2015Publication date: January 12, 2017Inventors: Yuval GRONAU, Ishai SCHWARZBAND, Barak DEE-NOOR
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Patent number: 9530199Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.Type: GrantFiled: July 13, 2015Date of Patent: December 27, 2016Assignee: Applied Materials Israel LtdInventors: Yakov Weinberg, Ishai Schwarzband, Roman Kris, Itay Zauer, Ran Goldman, Olga Novak, Dhananjay Singh Rathore, Ofer Adan, Shimon Levi
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Patent number: 9490101Abstract: A system for scanning an object, the system may include (a) charged particles optics that is configured to: scan, with a charged particle beam and at a first scan rate, a first region of interest (ROI) of an area of the object; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam and at a second scan rate, a second ROI of the area of the object; wherein the second scan rate is lower than the first scan rate; wherein first ROI differs from the second ROI by at least one parameter; detect second particles that were generated as a result of the scanning of the second ROA; and (b) a processor that is configured to generate at least one image of the area in response to the first and second particles.Type: GrantFiled: March 16, 2015Date of Patent: November 8, 2016Assignee: Applied Materials Israel Ltd.Inventors: Yuval Gronau, Ishai Schwarzband, Benzion Sender, Dror Shemesh, Ran Schleyen, Ofir Greenberg
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Publication number: 20160276127Abstract: A system for scanning an object, the system may include (a) charged particles optics that is configured to: scan, with a charged particle beam and at a first scan rate, a first region of interest (ROI) of an area of the object; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam and at a second scan rate, a second ROI of the area of the object; wherein the second scan rate is lower than the first scan rate; wherein first ROI differs from the second ROI by at least one parameter; detect second particles that were generated as a result of the scanning of the second ROA; and (b) a processor that is configured to generate at least one image of the area in response to the first and second particles.Type: ApplicationFiled: March 16, 2015Publication date: September 22, 2016Inventors: Yuval Gronau, Ishai Schwarzband, Benzion Sender, Dror Shemesh, Ran Schleyen, Ofir Greenberg
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Patent number: 9378923Abstract: A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.Type: GrantFiled: January 30, 2015Date of Patent: June 28, 2016Assignee: Applied Materials Israel, Ltd.Inventors: Ishai Schwarzband, Yakov Weinberg
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Publication number: 20160035076Abstract: A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.Type: ApplicationFiled: July 29, 2014Publication date: February 4, 2016Inventors: Ishai SCHWARZBAND, Yan IVANCHENKO, Daniel RAVID, Orly ZVITIA, Idan KAIZERMAN
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Publication number: 20150136960Abstract: A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.Type: ApplicationFiled: January 30, 2015Publication date: May 21, 2015Inventors: Ishai Schwarzband, Yakov Weinberg
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Patent number: 8946627Abstract: A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.Type: GrantFiled: November 15, 2013Date of Patent: February 3, 2015Assignee: Applied Materials Israel, Ltd.Inventors: Ishai Schwarzband, Yakov Weinberg
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Publication number: 20140074419Abstract: A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.Type: ApplicationFiled: November 15, 2013Publication date: March 13, 2014Applicant: Applied Materials Israel, Ltd.Inventors: Ishai Schwarzband, Yakov Weinberg
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Patent number: 8604427Abstract: A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied.Type: GrantFiled: February 2, 2012Date of Patent: December 10, 2013Assignee: Applied Materials Israel, Ltd.Inventors: Ishai Schwarzband, Yakov Weinberg
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Publication number: 20130279791Abstract: A method for classification includes receiving an image of an area of a semiconductor wafer on which a pattern has been formed, the area containing a location of interest. At least one value for one or more attributes of the location of interest are computed based upon topographical features of the location of interest in a three-dimensional (3D) map of the area.Type: ApplicationFiled: April 19, 2012Publication date: October 24, 2013Applicant: Applied Materials Israel Ltd.Inventors: Idan Kaizerman, Ishai Schwarzband, Efrat Rozenman