Abstract: A solution tank device comprises: an insulating thin film, which is configured to allow an object to be measured to pass therethrough, and has a thickness of 1 micrometer or less; a first solution tank, which is configured to support one surface of both surfaces of the insulating thin film; and a first conductive structure, which has a sheet resistance of 1013 ohms or less in a portion in which contact friction occurs between the first solution tank and an object outside of the first solution tank.

Abstract: A first modulation voltage is applied to a thin film. An amount of a change in the phase of a current carried through the thin film with respect to the phase of the first modulation voltage is compared with a threshold. Upon detecting that the amount of the change in the phase exceeds the threshold is detected, the application of the first modulation voltage is stopped. Thus, a nanopore is formed on the thin film at high speed.

Abstract: A method includes a step of introducing a solution between a substrate with a membrane in which the membrane is provided so as to close an opening and a substrate provided with an independent electrode in which the independent electrode is provided, a step of pressure bonding the substrate with the membrane and the substrate with the independent electrode through a partition wall, and a step of forming a sealed liquid tank surrounded by at least the membrane and the partition wall by the pressure bonding, and arraying of a solid-state type nanopore sequencer is simply performed.

Abstract: A method of manufacturing a membrane device comprises: a first step of forming a pillar structure on a part of a Si substrate by etching; a second step of forming a first insulation layer on the Si substrate so as to expose a Si surface of an upper part of the pillar structure; a third step of forming a second insulation layer on the pillar structure and the first insulation layer; and a fourth step of etching the Si substrate from an opposite side of the second insulation layer and etching the pillar structure with the first insulation layer being a mask, to thereby form a membrane, which is a region free of the pillar structure in the second insulation layer.

Abstract: To introduce a biomolecule into a nanopore without the need to check the position of the nanopore in a thin film. In addition, displacement stability is ensured and stable acquisition of blocking signals is realized. An immobilization member 107 having a larger size than a thin film 113 with a nanopore 112 is used, and biomolecules are immobilized on the biomolecule immobilization member 107 at a density that allows at least one biomolecule 108 to enter an electric field region around the nanopore when the biomolecule immobilization member 107 has moved close to a nanopore device 101.

Abstract: The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.

Abstract: To introduce a biomolecule into a nanopore without the need to check the position of the nanopore in a thin film. In addition, displacement stability is ensured and stable acquisition of blocking signals is realized. An immobilization member 107 having a larger size than a thin film 113 with a nanopore 112 is used, and biomolecules are immobilized on the biomolecule immobilization member 107 at a density that allows at least one biomolecule 108 to enter an electric field region around the nanopore when the biomolecule immobilization member 107 has moved close to a nanopore device 101.

Abstract: The present invention provides a membrane device having a configuration capable of reducing the frequency of clogging of a sample in a nanopore when the sample passes through the nanopore. In the membrane device according to the present invention, a membrane and a semiconductor layer are stacked on a Si substrate, and an insulating film is formed on a side wall of a through hole included in the semiconductor layer.

Abstract: A method of manufacturing a membrane device comprises: a first step of forming a pillar structure on a part of a Si substrate by etching; a second step of forming a first insulation layer on the Si substrate so as to expose a Si surface of an upper part of the pillar structure; a third step of forming a second insulation layer on the pillar structure and the first insulation layer; and a fourth step of etching the Si substrate from an opposite side of the second insulation layer and etching the pillar structure with the first insulation layer being a mask, to thereby form a membrane, which is a region free of the pillar structure in the second insulation layer.

Abstract: A biomolecule measuring device includes a first liquid tank and a second liquid tank which are filled with an electrolytic solution, a nanopore device that supports a thin film having a nanopore and is provided between the first liquid tank and the second liquid tank so as to communicate between the first liquid, tank and the second liquid tank through the nanopores, and an immobilizing member that is disposed in the first liquid tank, has a size larger than that of the thin film, and to which the biomolecules are immobilized, in which at least, one of the nanopore device and the immobilizing member has a groove structure.

Abstract: A solution tank device comprises: an insulating thin film, which is configured to allow an object to be measured to pass therethrough, and has a thickness of 1 micrometer or less; a first solution tank, which is configured to support one surface of both surfaces of the insulating thin film; and a first conductive structure, which has a sheet resistance of 1013 ohms or less in a portion in which contact friction occurs between the first solution tank and an object outside of the first solution tank.

Abstract: In the field of the next generation DNA sequencer, a method for integrating very high sensitive FET sensors having side gates and nanopores as devices used for identifying four kinds of base and for mapping the base sequence of DNA without using reagents, and a semiconductor device having selection transistors and amplifier transistors respectively corresponding to the FET sensors having side gates and nanopores respectively so as to be able to read the variation of a detection current based on the differences among the charges of the four kinds of base without deteriorating the detection sensitivity of the FET sensor, are presented.

Abstract: A method for producing a membrane device includes: forming an insulating film as a first film on a Si substrate; forming a Si film as a second film on the entire surface or a part of the first film; forming an insulating film as a third film on the second film; forming an aperture so as to pass through a part of the third film positioned on the second film and not to pass through the second film; etching a part of the substrate on one side of the first film with a solution that does not etch the first film; and etching a part or all of the second film on the other side of the first film with a gas or a solution that does not etch the first film and has an etching rate for the third film lower than an etching rate for the second film.

Abstract: The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.

Abstract: The thin film of a thin film device used for analyzing a biopolymer breaks due to the potential difference between the solutions at both sides of the thin film. The apparatus has a thin film, a first solution in contact with a first surface of the thin film, a second solution in contact with a second surface of the thin film, potential difference adjustment means for adjusting the potential difference between the first solution and the second solution to a small value, a control unit for controlling the potential difference adjustment means, a biopolymer inlet from which a biopolymer is introduced to at least one of the first solution and the second solution, a first electrode provided in the first solution, a second electrode provided in the second solution and an ammeter for measuring the current which flows between the first electrode and the second electrode when the biopolymer passes through a hole in the thin film between the first solution and the second solution.

Abstract: To introduce a biomolecule into a nanopore without the need to check the position of the nanopore in a thin film. In addition, displacement stability is ensured and stable acquisition of blocking signals is realized. An immobilization member 107 having a larger size than a thin film 113 with a nanopore 112 is used, and biomolecules are immobilized on the biomolecule immobilization member 107 at a density that allows at least one biomolecule 108 to enter an electric field region around the nanopore when the biomolecule immobilization member 107 has moved close to a nanopore device 101.

Abstract: The present invention is intended to provide a method and a device for detecting a biomolecule with high sensitivity and high throughput over a wide dynamic range without requiring concentration adjustments of a sample in advance. The present invention specifically binds charge carriers to a detection target biomolecule, and detects the detection target biomolecule one by one by measuring a current change that occurs as the conjugate of the biomolecule and the charge carriers passes through a micropore. High-throughput detection of a biomolecule sample is possible with an array of detectors.

Abstract: In a non-volatile memory in which writing/erasing is performed by changing a total charge amount by injecting electrons and holes into a silicon nitride film serving as a charge accumulation layer, in order to realize a high efficiency of a hole injection from a gate electrode, the gate electrode of a memory cell comprises a laminated structure made of a plurality of polysilicon films with different impurity concentrations, for example, a two-layered structure comprising a p-type polysilicon film with a low impurity concentration and a p?-type polysilicon film with a high impurity concentration deposited thereon.

Abstract: While an insulating film having a near-field light generating element placed thereon is being irradiated with light in an electrolytic solution, or after the film that has been irradiated with light is disposed in the electrolytic solution, a first voltage is applied between the two electrodes installed in the electrolytic solution across the film, a second voltage is then applied between the two electrodes, and a value of a current that flows between the two electrodes due to the application of the second voltage is detected. This procedure is stopped when the current value reaches or exceeds a pre-set threshold value, whereby a hole is formed at a desired location in the thin-film.

Abstract: A pore forming method in which a pore is formed in such a way that a first voltage is applied between electrodes that are disposed with a film in an electrolytic solution therebetween; a second voltage, which is lower than the first voltage, is applied between the electrodes; a current that flows between the electrodes owing to the application of the second voltage is measured; it is judged whether a value of a current is equal to or larger than a predefined threshold; and if the value of the current is smaller than the threshold, the above sequence is repeated until a pore is formed. In this case, the second voltage is a voltage that makes the value (IPF) of the current flowing through the film practically 0. With the use of the above method, a nanopore is formed in the film simply, easily, and accurately.