Patents by Inventor Itsuo Yuzurihara

Itsuo Yuzurihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190311885
    Abstract: In frequency control where impedance matching is performed by frequency sweep in an RF power supply device, a frequency sweep direction is specified, allowing a reflection coefficient and/or reflected power to move to a minimum, whereby it is possible to reduce a time length required until detecting the frequency that enables the reflection coefficient and/or the reflected power to be minimized. The frequency control for impedance matching in the RF power supply device is performed according to the following two-stage control; A) phase control that specifies the frequency sweep direction that allows the reflection coefficient and/or the reflected power to move to a minimum, based on the phase state of oscillating frequency, and that starts increasing or decreasing the frequency in thus specified sweep direction; and B) reflected power control where the reflection coefficient or the reflection amount is used as a control end condition for completing the frequency control.
    Type: Application
    Filed: September 7, 2016
    Publication date: October 10, 2019
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Ryosuke Ohma
  • Patent number: 10355607
    Abstract: An excessive voltage rise of load voltage, caused by an impedance mismatching on a transmission path, is prevented, and high-frequency power is regenerated. A parallel impedance is connected to the transmission path during the voltage rise, thereby regenerating voltage caused by a standing wave and preventing excessive load voltage, together with enhancing energy usage efficiency. Establishing the parallel impedance for the load impedance, on the transmission path between the high-frequency amplifier circuit of the high-frequency power supply device and the high-frequency load, reduces impedance at the connecting position to prevent generation of excessive voltage on the transmission path, and high-frequency power is regenerated from the transmission path by the parallel impedance.
    Type: Grant
    Filed: November 19, 2014
    Date of Patent: July 16, 2019
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Patent number: 10348267
    Abstract: An impedance matching device comprising a variable reactor having a main winding and control winding, wherein a generated magnet field in the core is an AC magnetic field with a magnitude exceeding a value to settle a deviation between a control target value for impedance matching and a feedback value, by changing the magnitude of the generated magnetic field by changing a control current passing through the control winding, thereby controlling inductance of the variable rector to be a predetermined value to perform impedance matching, the response delay in the impedance matching is reduced by reducing a response delay in the inductance variation of the variable reactor.
    Type: Grant
    Filed: February 15, 2016
    Date of Patent: July 9, 2019
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Sadao Mori, Tadaharu Ohno
  • Patent number: 10244615
    Abstract: There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.
    Type: Grant
    Filed: February 20, 2015
    Date of Patent: March 26, 2019
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
  • Publication number: 20180249570
    Abstract: There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.
    Type: Application
    Filed: February 20, 2015
    Publication date: August 30, 2018
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
  • Publication number: 20180248534
    Abstract: An impedance matching device comprising a variable reactor having a main winding and control winding, wherein a generated magnet field in the core is an AC magnetic field with a magnitude exceeding a value to settle a deviation between a control target value for impedance matching and a feedback value, by changing the magnitude of the generated magnetic field by changing a control current passing through the control winding, thereby controlling inductance of the variable rector to be a predetermined value to perform impedance matching, the response delay in the impedance matching is reduced by reducing a response delay in the inductance variation of the variable reactor.
    Type: Application
    Filed: February 15, 2016
    Publication date: August 30, 2018
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Sadao Mori, Tadaharu Ohno
  • Patent number: 10038435
    Abstract: In a configuration of an isolation circuit using a transformer of a high-frequency-isolation gate driver circuit in the frequency band from 1 to 100 MHz, a period for resetting the exciting current is eliminated, generation of self-resonance phenomenon after resetting is cancelled to reduce generation of noise current, and malfunctions of the switching element due to noise is prevented. In driving plural gate circuits by RF signals, exciting current is allowed to pass through a primary coil of a gate driver transformer alternately in both directions continuously all the time, in a configuration for isolating drive input signals by the gate driver transformer. Accordingly, the reset period that is required when the exciting current flows only in one way becomes unnecessary, and thus generation of self-resonance phenomenon after resetting is canceled. Then, generation of noise current caused by the self-resonance phenomenon is reduced.
    Type: Grant
    Filed: February 20, 2015
    Date of Patent: July 31, 2018
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Hiroshi Kunitama
  • Publication number: 20170331471
    Abstract: In a configuration of an isolation circuit using a transformer of a high-frequency-isolation gate driver circuit in the frequency band from 1 to 100 MHz, a period for resetting the exciting current is eliminated, generation of self-resonance phenomenon after resetting is cancelled to reduce generation of noise current, and malfunctions of the switching element due to noise is prevented. In driving plural gate circuits by RF signals, exciting current is allowed to pass through a primary coil of a gate driver transformer alternately in both directions continuously all the time, in a configuration for isolating drive input signals by the gate driver transformer. Accordingly, the reset period that is required when the exciting current flows only in one way becomes unnecessary, and thus generation of self-resonance phenomenon after resetting is canceled. Then, generation of noise current caused by the self-resonance phenomenon is reduced.
    Type: Application
    Filed: February 20, 2015
    Publication date: November 16, 2017
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Hiroshi Kunitama
  • Patent number: 9806629
    Abstract: In an inverter circuit, more particularly in a single-phase inverter, soft switching is performed with a simple configuration to prevent switching loss of a switching element. A resonance circuit is configured by a resonant capacitor provided on the power supply side of a bridge circuit constituting a single phase inverter, a resonant inductor provided on the output side of the bridge circuit, and the bridge circuit. A resonance current passing through the resonance circuit allows zero voltage switching (ZVS) and zero current switching (ZCS) to be implemented at the rising time of main switching elements constituting the bridge circuit, and the zero voltage switching is implemented by means of zero voltage of the resonant capacitor at the falling time of the main switching elements constituting the bridge circuit.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: October 31, 2017
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
  • Publication number: 20170279364
    Abstract: An excessive voltage rise of load voltage, caused by an impedance mismatching on a transmission path, is prevented, and high-frequency power is regenerated. A parallel impedance is connected to the transmission path during the voltage rise, thereby regenerating voltage caused by a standing wave and preventing excessive load voltage, together with enhancing energy usage efficiency. Establishing the parallel impedance for the load impedance, on the transmission path between the high-frequency amplifier circuit of the high-frequency power supply device and the high-frequency load, reduces impedance at the connecting position to prevent generation of excessive voltage on the transmission path, and high-frequency power is regenerated from the transmission path by the parallel impedance.
    Type: Application
    Filed: November 19, 2014
    Publication date: September 28, 2017
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Patent number: 9699878
    Abstract: In detecting the unignited state of plasma based on a reflected wave, false detection during a normal plasma ignition time is prevented so as to detect the unignited state during plasma abnormality. When a pulse output is supplied to a plasma load by pulse driving from an RF power source, the unignited state of plasma abnormality is detected on the basis of the continuous state of the reflected wave, whereby a total reflected wave generated in the unignited state during plasma abnormality is detected in distinction from the reflected wave generated in the normal ignited state. With this configuration, in detecting the unignited state by comparing a peak value of the reflected wave with a threshold, it is possible to prevent that a reflected wave generated in the normal ignited state is erroneously detected as the total reflected wave that is generated in the abnormal unignited state.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: July 4, 2017
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Patent number: 9621064
    Abstract: In a voltage-type DC power supply provided with an inverter, current supply from the inverter to the load side is suppressed when arc is generated. DC output from the voltage-type DC power supply is suspended and resumed: upon suspending the DC output, the chopper is separated from the inverter, thereby suppressing excessive current to the load when arc is generated, allowing the arc to be extinguished at high speed, and holding the current passing through the chopper in the form of circulating current. Upon restarting the inverter, the circulating current being held is supplied to the load, thereby reducing a delay of supply of DC power to the load at the time of resuming the DC output from the voltage-type DC power supply.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: April 11, 2017
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
  • Patent number: 9590565
    Abstract: In a class-D amplifier, oscillation phenomenon is suppressed in a high RF range and surge voltage is reduced. An oscillation absorption circuit is connected on the power supply side of the class-D amplifier circuit, and the class-D amplifier circuit and thus connected oscillation absorption circuit equivalently configure an oscillation circuit. Resistance provided in the oscillation absorption circuit is assumed as damping resistance of the oscillation circuit, thereby suppressing the oscillation phenomenon and reducing the surge voltage. The oscillation absorption circuit is made up of the RL parallel circuit of resistance and inductance. The oscillation absorption circuit and the class-D amplifier circuit constitute the oscillation circuit, and the resistance of the oscillation absorption circuit constitutes the damping resistance of the oscillation circuit in the high RF range.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: March 7, 2017
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Publication number: 20160308457
    Abstract: In an inverter circuit, more particularly in a single-phase inverter, soft switching is performed with a simple configuration to prevent switching loss of a switching element. A resonance circuit is configured by a resonant capacitor provided on the power supply side of a bridge circuit constituting a single phase inverter, a resonant inductor provided on the output side of the bridge circuit, and the bridge circuit. A resonance current passing through the resonance circuit allows zero voltage switching (ZVS) and zero current switching (ZCS) to be implemented at the rising time of main switching elements constituting the bridge circuit, and the zero voltage switching is implemented by means of zero voltage of the resonant capacitor at the falling time of the main switching elements constituting the bridge circuit.
    Type: Application
    Filed: December 26, 2013
    Publication date: October 20, 2016
    Applicants: KYOSAN ELECTRIC MFG. CO., LTD., KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo YUZURIHARA, Shinichi KODAMA, Toshiyuki ADACHI
  • Publication number: 20160295675
    Abstract: In detecting the unignited state of plasma based on a reflected wave, false detection during a normal plasma ignition time is prevented so as to detect the unignited state during plasma abnormality. When a pulse output is supplied to a plasma load by pulse driving from an RF power source, the unignited state of plasma abnormality is detected on the basis of the continuous state of the reflected wave, whereby a total reflected wave generated in the unignited state during plasma abnormality is detected in distinction from the reflected wave generated in the normal ignited state. With this configuration, in detecting the unignited state by comparing a peak value of the reflected wave with a threshold, it is possible to prevent that a reflected wave generated in the normal ignited state is erroneously detected as the total reflected wave that is generated in the abnormal unignited state.
    Type: Application
    Filed: December 26, 2013
    Publication date: October 6, 2016
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Patent number: 9450519
    Abstract: A DC power source to supply DC power to a plasma generator is configured as a simple and small-sized device that forms high voltage for generating a plasma discharge. A step of passing a short-circuit current for extremely short time through the voltage source step-down chopper provided in the DC power source and accumulating energy in a reactor is performed repeatedly more than once, so as to discharge the energy accumulated in the reactor to the output capacitance and raise the output voltage sequentially, thereby boosting the voltage up to the ignition set voltage. The short-circuit current is formed by a switching element of a boosting circuit provided in the DC power source. Boosting the voltage at the output terminal by accumulating and discharging the short-circuit current is repeated to raise the voltage at the output terminal of the DC power source up to the ignition set voltage.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: September 20, 2016
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
  • Patent number: 9451687
    Abstract: A high-frequency power supply device is provided with a plasma ignition step that supplies pulse power to ignite plasma, and drive power supply step to supply drive power for maintaining the plasma being generated. In the plasma ignition step, an ignition pulse being applied in an ignition pulse output operation is configured as including a main pulse that induces ignition, and a prepulse with lower power than the power of the main pulse and being applied at a stage prior to the main pulse. Since the ignition pulse is configured as including the main pulse and the prepulse, this enables protection of a high-frequency power source against reflected wave power, as well as reliably igniting the plasma.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: September 20, 2016
    Assignee: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Publication number: 20160204698
    Abstract: A DC power source to supply DC power to a plasma generator is configured as a simple and small-sized device that forms high voltage for generating a plasma discharge. A step of passing a short-circuit current for extremely short time through the voltage source step-down chopper provided in the DC power source and accumulating energy in a reactor is performed repeatedly more than once, so as to discharge the energy accumulated in the reactor to the output capacitance and raise the output voltage sequentially, thereby boosting the voltage up to the ignition set voltage. The short-circuit current is formed by a switching element of a boosting circuit provided in the DC power source. Boosting the voltage at the output terminal by accumulating and discharging the short-circuit current is repeated to raise the voltage at the output terminal of the DC power source up to the ignition set voltage.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 14, 2016
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
  • Publication number: 20160165713
    Abstract: A high-frequency power supply device is provided with a plasma ignition step that supplies pulse power to ignite plasma, and drive power supply step to supply drive power for maintaining the plasma being generated. In the plasma ignition step, an ignition pulse being applied in an ignition pulse output operation is configured as including a main pulse that induces ignition, and a prepulse with lower power than the power of the main pulse and being applied at a stage prior to the main pulse. Since the ignition pulse is configured as including the main pulse and the prepulse, this enables protection of a high-frequency power source against reflected wave power, as well as reliably igniting the plasma.
    Type: Application
    Filed: March 12, 2014
    Publication date: June 9, 2016
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
  • Publication number: 20160141971
    Abstract: In a voltage-type DC power supply provided with an inverter, current supply from the inverter to the load side is suppressed when arc is generated. DC output from the voltage-type DC power supply is suspended and resumed: upon suspending the DC output, the chopper is separated from the inverter, thereby suppressing excessive current to the load when arc is generated, allowing the arc to be extinguished at high speed, and holding the current passing through the chopper in the form of circulating current. Upon restarting the inverter, the circulating current being held is supplied to the load, thereby reducing a delay of supply of DC power to the load at the time of resuming the DC output from the voltage-type DC power supply.
    Type: Application
    Filed: December 26, 2013
    Publication date: May 19, 2016
    Applicant: KYOSAN ELECTRIC MFG. CO., LTD.
    Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi