Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

Abstract: An electronic device causing flexure vibration of touch panel, to allow for preventing vibration from attenuated and providing sufficient water and dust proofness, the device includes touch panel 20, vibration unit 80 that vibrates touch panel 20, and upper housing 10a that covers peripheral portion of upper surface of touch panel 20, such that inwardly-extending roof portion 10a-2 is provided around periphery of top portion of upper housing 10a, a surface of touch panel 20 is surrounded by elastic member 60 except for upper surface area of touch panel 20 corresponding to opening 10a-1 and area of vibration unit 80 on touch panel 20, and contact is established between elastic member on peripheral portion of upper surface of touch panel 20 and roof portion 10a-2 and/or between elastic member on peripheral portion of bottom surface of touch panel 20 and support member 10b of touch panel 20.

Abstract: A single- and dual-chamber module-attachable wafer-handling chamber includes: a wafer-handling main chamber equipped with a wafer-handling robot therein, and adaptors for connecting process modules to the wafer-handling main chamber. The adaptors are detachably attached to the sides of the wafer-handling main chamber, respectively, and the process modules are detachably attached to the adaptors, respectively, so that the process modules can be attached to the wafer-handling main chamber, regardless of whether the process modules are of a single-chamber type or dual-chamber type.

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract: An anti-slip end effector for transporting a workpiece, configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; and at least one anti-slip protrusion disposed in the workpiece-supporting area for supporting a backside of the workpiece, said anti-slip protrusion having a top face capable of contacting and adhering to the backside of the workpiece by van der Waals force and capable of pivoting on a pivot axis, said pivot axis being disposed away from a center of the top face as viewed from above.

Abstract: A polyol (PL) for polyurethane preparation is disclosed that includes the polyol (a) and the strength-enhancing agent (b), as follows. Polyol (a): a polyoxyalkylene polyol that is the alkylene oxide adduct of an active hydrogen-containing compound (H), in which at least 40% of a hydroxyl group positioned on the terminal is a primary hydroxyl group-containing group represented by general formula (I). In general formula (I), R1 represents a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, cycloalkyl group, or phenyl group. Strength-enhancing agent (b): a compound that is at least one compound selected from the group comprising an ester compound, a thioester compound, a phosphoric acid ester compound, and an amide compound, and that is derived from an aromatic polyvalent carboxylic acid with a valence of 2 or higher.

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract: An anti-slip end effector for transporting a workpiece, configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; and at least one anti-slip protrusion disposed in the workpiece-supporting area for supporting a backside of the workpiece, said anti-slip protrusion having a top face capable of contacting and adhering to the backside of the workpiece by van der Waals force and capable of pivoting on a pivot axis, said pivot axis being disposed away from a center of the top face as viewed from above.

Abstract: A single- and dual-chamber module-attachable wafer-handling chamber includes: a wafer-handling main chamber equipped with a wafer-handling robot therein, and adaptors for connecting process modules to the wafer-handling main chamber. The adaptors are detachably attached to the sides of the wafer-handling main chamber, respectively, and the process modules are detachably attached to the adaptors, respectively, so that the process modules can be attached to the wafer-handling main chamber, regardless of whether the process modules are of a single-chamber type or dual-chamber type.

Abstract: An electronic device causing flexure vibration of touch panel, to allow for preventing vibration from attenuated and providing sufficient water and dust proofness, includes touch panel 20, vibration unit 50 that vibrates touch panel 20, and upper housing 10a that covers peripheral portion of upper surface of touch panel 20, such that inwardly-extending roof portion 10a-2 is provided around periphery of top portion of upper housing 10a, a surface of touch panel 20 is surrounded by elastic member 60 except for upper surface area of touch panel 20 corresponding to opening 10a-1 and area of vibration unit 80 on touch panel 20, and contact is established between elastic member on peripheral portion of upper surface of touch panel 20 and roof portion 10a-2 and/or between elastic member on peripheral portion of bottom surface of touch panel 20 and support member 10b of touch panel 20.

Abstract: A mobile electronic apparatus has a display side housing with a bearing unit at one end, a dummy hinge with a rotary unit mounted in the bearing unit at one end and a joint unit at the other end, and a key side housing joined to the joint unit at one end. The housings are turnably connected to one another via the dummy hinge. A key side housing has a vertically extending boss unit. A joint unit has an insertion hole into which the boss unit is inserted. The insertion hole has a fitting hole, in which the boss unit is fitted when the joint unit and the key side housing are joined to one another, and a diameter-expanding hole in communication with the fitting hole and expanded in a rotational direction of the rotary unit toward the key side housing.

Abstract: A polyol (PL) for polyurethane preparation is disclosed that includes the polyol (a) and the strength-enhancing agent (b), as follows. Polyol (a): a polyoxyalkylene polyol that is the alkylene oxide adduct of an active hydrogen-containing compound (H), in which at least 40% of a hydroxyl group positioned on the terminal is a primary hydroxyl group-containing group represented by general formula (I). In general formula (I), R1 represents a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, cycloalkyl group, or phenyl group. Strength-enhancing agent (b): a compound that is at least one compound selected from the group comprising an ester compound, a thioester compound, a phosphoric acid ester compound, and an amide compound, and that is derived from an aromatic polyvalent carboxylic acid with a valence of 2 or higher.

Abstract: There is provided a technique for reducing the occurrence of higher harmonics which occur from a field effect transistor, particularly a field effect transistor configuring a switching element of an antenna switch. In a transistor having a meander structure, the gate width of a partial transistor closest to a gate input side is increased. More specifically, a comb-like electrode is made longer than the other comb-like electrodes. In other words, a finger length is made greater than any other finger length. In particular, the comb-like electrode has the greatest length in all the comb-like electrodes.

Abstract: An ultrasonic cleaning apparatus having at least a cleaning tank; an ultrasonic wave transmitting tank; a vibrating plate placed at a bottom portion of the ultrasonic wave transmitting tank, the vibrating plate superposing the ultrasonic waves on the transmitting water with a transducer; and a holding jig for holding the object to be cleaned in the cleaning tank, the apparatus in which the object to be cleaned is ultrasonically cleaned by immersing the object to be cleaned held with the holding jig in the cleaning liquid accommodated in the cleaning tank, putting the cleaning tank into the transmitting water accommodated in the ultrasonic wave transmitting tank, and transmitting the ultrasonic waves superposed with the vibrating plate to the cleaning tank through the transmitting water, the apparatus comprising a transmitting tank oscillating mechanism for oscillating the ultrasonic wave transmitting tank in a horizontal plane.

Abstract: An ultrasonic cleaning apparatus having at least a cleaning an ultrasonic wave transmitting tank a vibrating plate placed at a bottom portion of the ultrasonic wave transmitting tank, the vibrating plate superposing the ultrasonic waves on the transmitting water with a transducer; and a holding jig for holding the object to be cleaned in the cleaning tank, the apparatus in which the object to be cleaned is ultrasonically cleaned by immersing the object to be cleaned held with the holding jig in the cleaning liquid accommodated in the cleaning tank, putting the cleaning tank into the transmitting water accommodated in the ultrasonic wave transmitting tank, and transmitting the ultrasonic waves superposed with the vibrating plate to the cleaning tank through the transmitting water, the apparatus comprising a transmitting tank oscillating mechanism for oscillating the ultrasonic wave transmitting tank in a horizontal plane.

Abstract: There is provided a technique for reducing the occurrence of higher harmonics which occur from a field effect transistor, particularly a field effect transistor configuring a switching element of an antenna switch. In a transistor having a meander structure, the gate width of a partial transistor closest to a gate input side is increased. More specifically, a comb-like electrode is made longer than the other comb-like electrodes. In other words, a finger length is made greater than any other finger length. In particular, the comb-like electrode has the greatest length in all the comb-like electrodes.

Abstract: A mobile electronic apparatus has a display side housing with a bearing unit at one end, a dummy hinge with a rotary unit mounted in the bearing unit at one end and a joint unit at the other end, and a key side housing joined to the joint unit at one end. The housings are turnably connected to one another via the dummy hinge. A key side housing has a vertically extending boss unit. A joint unit has an insertion hole into which the boss unit is inserted. The insertion hole has a fitting hole, in which the boss unit is fitted when the joint unit and the key side housing are joined to one another, and a diameter-expanding hole in communication with the fitting hole and expanded in a rotational direction of the rotary unit toward the key side housing.