Patents by Inventor J. Lowe

J. Lowe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for controllably implanting workpieces
    Patent number: 8461030
    Abstract: A plasma processing apparatus comprises a plasma source configured to produce a plasma in a plasma chamber, such that the plasma contains ions for implantation into a workpiece. The apparatus also includes a focusing plate arrangement having an aperture arrangement configured to modify a shape of a plasma sheath of the plasma proximate the focusing plate such that ions exiting an aperture of the aperture arrangement define focused ions. The apparatus further includes a processing chamber containing a workpiece spaced from the focusing plate such that a stationary implant region of the focused ions at the workpiece is substantially narrower that the aperture. The apparatus is configured to create a plurality of patterned areas in the workpiece by scanning the workpiece during ion implantation.
    Type: Grant
    Filed: November 16, 2010
    Date of Patent: June 11, 2013
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh, James Buonodono, Deepak A. Ramappa, Russell J. Low, Atul Gupta, Kevin M. Daniels
  • Using beam blockers to perform a patterned implant of a workpiece
    Patent number: 8461556
    Abstract: Blockers in an ion beam blocker unit selectively block or trim an ion beam. In one instance, the ion beam has first current regions and second current regions. These current regions may be unequal. The ion beam is then implanted into a workpiece to form regions with different doses. The workpiece may be scanned so that the entirety of its surface is implanted.
    Type: Grant
    Filed: September 8, 2010
    Date of Patent: June 11, 2013
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Daniel Distaso, Russell J. Low
  • Interfacing two insulation parts in high voltage environment
    Patent number: 8455760
    Abstract: Methods of interfacing parts in a high voltage environment and related structures are disclosed. A method comprises: providing a first part and a second part; and interfacing the first part and the second part to create a first substantially zero electrical field area at a first outer extent of an interface between the first and second parts and a reduced electrical field area in a different portion of the interface.
    Type: Grant
    Filed: January 3, 2011
    Date of Patent: June 4, 2013
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Russell J. Low, Kasegn Tekletsadik, Anthony Renau, Piotr R. Lubicki, D. Jeffrey Lischer, Steve Krause, Eric Hermanson, Doug E. May
  • Mask health monitor using a faraday probe
    Patent number: 8455847
    Abstract: In an ion implanter, an ion current measurement device is disposed behind a mask co-planarly with respect to a surface of a target substrate as if said target substrate was positioned on a platen. The ion current measurement device is translated across the ion beam. The current of the ion beam directed through a plurality of apertures of the mask is measured using the ion current measurement device. In this manner, the position of the mask with respect to the ion beam as well as the condition of the mask may be determined based on the ion current profile measured by the ion current measurement device.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: June 4, 2013
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Benjamin B. Riordon, Nicholas P. T. Bateman, William T. Weaver, Russell J. Low
  • Flexible ion source
    Patent number: 8330127
    Abstract: Liner elements to protect the ion source housing and also increase the power efficiency of the ion source are disclosed. Two liner elements, preferably constructed from tungsten, are inserted into the ion source chamber, one placed against each of the two sidewalls. These inserts are electrically biased so as to induce an electrical field that is perpendicular to the applied magnetic field. Such an arrangement has been unexpectedly found to increase the life of not only the ion chamber housing, but also the indirectly heated cathode (IHC) and the repeller. In addition, the use of these biased liner elements also improved the power efficiency of the ion source; allowing more ions to be generated at a given power level, or an equal number of ions to be generated at a lower power level.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: December 11, 2012
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Russell J. Low, Jay T. Scheuer, Alexander S. Perel, Craig R. Chaney, Neil J. Bassom
  • Peptide-based organic sunscreens
    Patent number: 8318659
    Abstract: Peptide-based organic sunscreens, formed by coupling a skin-binding peptide with an organic sunscreen agent, are described. The skin-binding peptide part of the peptide-based organic sunscreen binds strongly to the skin, thus keeping the organic sunscreen agent attached to the skin for long lasting protection. Sunscreen compositions comprising the peptide-based organic sunscreens are also provided.
    Type: Grant
    Filed: October 31, 2006
    Date of Patent: November 27, 2012
    Assignee: E I du Pont de Nemours and Company
    Inventors: David J. Lowe, John P. O'Brien, Antoinette E. Wilkins
  • Intravascular filter and method
    Patent number: 8303618
    Abstract: A filter disposed at the distal end of an elongate guidewire. Catheters are provided for delivering the filter to, and retrieving the filter from, a treatment site. The catheters can be over-the-wire or single operator exchange. The catheters include a housing for receiving the filter therein. The housing has an atraumatic distal end.
    Type: Grant
    Filed: December 28, 2004
    Date of Patent: November 6, 2012
    Assignee: Boston Scientific Scimed, Inc.
    Inventors: John Daniel, Brian J. Lowe, Robert Cassell, Bradley F. Slaker, John E. Arnold, Jr., Thomas E. Broome
  • Embolic protection filtering device that can be adapted to be advanced over a guidewire
    Patent number: 8287564
    Abstract: An improved embolic protection filtering device. In at least some embodiments, an embolic protection filtering device includes a filter wire assembly. The filter wire assembly may include an elongate shaft, a tubular member, and an embolic protection filter.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: October 16, 2012
    Assignee: Boston Scientific Scimed, Inc.
    Inventors: Mel R. Beulke, Anthony C. Vrba, Brian J. Lowe, Thomas E. Broome, Dennis A. Boismier
  • CLEANING APPARATUS WITH ROTATING AND DETACHABLE BRUSH HEAD
    Publication number: 20120192366
    Abstract: A cleaning apparatus includes an elongated housing bounding a chamber with a motor disposed therein. A drive shaft is at least partially disposed within the chamber of the housing, the drive shaft being coupled with the motor such that during selective operation of the motor the drive shaft is rotated continuously. A brush head having a scrubbing element is removably coupled with the drive shaft such that rotation of the drive shaft facilitates rotation of the brush head.
    Type: Application
    Filed: October 6, 2010
    Publication date: August 2, 2012
    Applicant: Rubbermaid Incorporated
    Inventors: Aaron D. Cobabe, Kenneth W. Thiess, David J. Lowe, David O. Meyers
  • Gas adsorption on metal-organic frameworks
    Patent number: 8227375
    Abstract: The present invention involves the use of certain metal organic frameworks that have been treated with water or another metal titrant in the storage of carbon dioxide. The capacity of these frameworks is significantly increased through this treatment.
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: July 24, 2012
    Assignees: UOP LLC, Northwestern University
    Inventors: Richard R. Willis, John J. Low, Syed A. Faheem, Annabelle I. Benin, Randall Q. Snurr, Ahmet Ozgur Yazaydin
  • MASK HEALTH MONITOR USING A FARADAY PROBE
    Publication number: 20120181443
    Abstract: In an ion implanter, an ion current measurement device is disposed behind a mask co-planarly with respect to a surface of a target substrate as if said target substrate was positioned on a platen. The ion current measurement device is translated across the ion beam. The current of the ion beam directed through a plurality of apertures of the mask is measured using the ion current measurement device. In this manner, the position of the mask with respect to the ion beam as well as the condition of the mask may be determined based on the ion current profile measured by the ion current measurement device.
    Type: Application
    Filed: March 23, 2012
    Publication date: July 19, 2012
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.,
    Inventors: Benjamin B. RIORDON, Nicholas P.T. Bateman, William T. Weaver, Russell J. Low
  • METHODS AND SYSTEMS FOR REMOVING UNDISSOLVED SOLIDS PRIOR TO EXTRACTIVE FERMENTATION IN THE PRODUCTION OF BUTANOL
    Publication number: 20120164302
    Abstract: A method and system for efficiently producing a fermentative product alcohol such as butanol utilizing in situ product extraction are provided. The efficiency is obtained through separating undissolved solids after liquefying a given feedstock to create a feedstock and prior to fermentation, for example, through centrifugation. Removal of the undissolved solids avoids problems associated with having the undissolved solids present during in situ production extraction, and thereby increases the efficiency of the alcohol production.
    Type: Application
    Filed: June 17, 2011
    Publication date: June 28, 2012
    Applicant: BUTAMAX(TM) ADVANCED BIOFUELS LLC
    Inventors: BRIAN MICHAEL ROESCH, Keith H. Burlew, John W. Hallam, David J. Lowe, Joseph J. Zaher
  • PEPTIDE-MEDIATED NON-COVALENT DELIVERY OF ACTIVE AGENTS ACROSS THE BLOOD-BRAIN BARRIER
    Publication number: 20120107243
    Abstract: The peptides described herein can function as carrier peptides. These peptides can associate with (e.g., non-covalently bind) biologically active molecules or imaging agents to transport the biologically active molecules or imaging across the blood-brain barrier. In some cases, such transport may increase the effectiveness of the biological molecules or imaging agents.
    Type: Application
    Filed: July 14, 2010
    Publication date: May 3, 2012
    Applicant: MAYO FOUNDATION FOR MEDICAL EDUCATION AND RESEARCH
    Inventors: Geoffry L. Curran, Gobinda Sarkar, Joseph F. Poduslo, Robert B. Jenkins, Val J. Lowe, Eric W. Mahlum
  • METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PREDICTING CATHODE LIFETIME
    Publication number: 20120101742
    Abstract: A method of controlling operation of an indirectly-heated cathode (IHC) ion source comprises a step of measuring a rate of loss of cathode weight of the IHC ion source that occurs during operation using a first cathode configuration and under a first set of operation conditions. A maximum weight loss for the first cathode configuration is determined, and a cathode lifetime is calculated based upon the rate of cathode weight loss and the maximum weight loss. A further method comprises receiving a minimum source bias power value for operation of a cathode in a first configuration, measuring a rate of decrease in source bias power for a cathode in the first configuration, and calculating a lifetime of the cathode based upon the minimum source bias power and rate of decrease in source bias power.
    Type: Application
    Filed: October 26, 2010
    Publication date: April 26, 2012
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Russell J. Low, Kevin M. Daniels, Bon-Woong Koo, Richard M. White, James W. Blanchette
  • Mask health monitor using a faraday probe
    Patent number: 8164068
    Abstract: In an ion implanter, an ion current measurement device is disposed behind a mask co-planarly with respect to a surface of a target substrate as if said target substrate was positioned on a platen. The ion current measurement device is translated across the ion beam. The current of the ion beam directed through a plurality of apertures of the mask is measured using the ion current measurement device. In this manner, the position of the mask with respect to the ion beam as well as the condition of the mask may be determined based on the ion current profile measured by the ion current measurement device.
    Type: Grant
    Filed: July 28, 2010
    Date of Patent: April 24, 2012
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Benjamin B. Riordon, Nicholas P. T. Bateman, William T. Weaver, Russell J. Low
  • Mask applied to a workpiece
    Patent number: 8153466
    Abstract: A method of fabricating a workpiece is disclosed. A material defining apertures is applied to a workpiece. A species is introduced to the workpiece through the apertures and the material is removed. For example, the material may be evaporated, may form a volatile product with a gas, or may dissolve when exposed to a solvent. The species may be introduced using, for example, ion implantation or gaseous diffusion.
    Type: Grant
    Filed: January 19, 2010
    Date of Patent: April 10, 2012
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Russell J. Low, Julian G. Blake, Frank Sinclair
  • USING BEAM BLOCKERS TO PERFORM A PATTERNED IMPLANT OF A WORKPIECE
    Publication number: 20120056110
    Abstract: Blockers in an ion beam blocker unit selectively block or trim an ion beam. In one instance, the ion beam has first current regions and second current regions. These current regions may be unequal. The ion beam is then implanted into a workpiece to form regions with different doses. The workpiece may be scanned so that the entirety of its surface is implanted.
    Type: Application
    Filed: September 8, 2010
    Publication date: March 8, 2012
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATED, INC.
    Inventors: Daniel DISTASO, Russell J. Low
  • MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK
    Publication number: 20120043712
    Abstract: A workpiece support is disclosed in which the platen, and thus the workpiece, can be tilted about at least two axis, which allows gravity to align the workpiece with a shadow mask in two orthogonal directions. In some embodiments, the workpiece support utilizes an axis of rotation that is orthogonal to the surface of the workpiece, in conjunction with a second axis that is parallel to the surface of the workpiece. Additionally, a method of aligning the workpiece using this workpiece support is also disclosed. Further, the workpiece support can be utilized to remove the workpiece from the support after implantation is completed.
    Type: Application
    Filed: August 17, 2010
    Publication date: February 23, 2012
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: William Weaver, Russell J. Low, Steven M. Anella, Robert J. Mitchell
  • PLATEN CLEANING
    Publication number: 20120017938
    Abstract: To achieve cost efficiency, solar cells must be processed at a high throughput. Breakages, which may leave debris on the clamping surface of the platen, adversely affect this throughput. A plurality of embodiments are disclosed which may be used to remove debris from the clamping surface without breaking the vacuum condition within the processing station. In some embodiments, a brush is used to sweep the debris from the surface of the platen. In other embodiments, an adhesive material is used to collect the debris. In some embodiments, the automation equipment used to handle masks may also be used to handle the platen cleaning mechanisms. In still other embodiments, stream of gas or ion beams are used to clean debris from the clamping surface of the platen.
    Type: Application
    Filed: July 20, 2011
    Publication date: January 26, 2012
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: William T. Weaver, Kevin M. Daniels, Dale K. Stone, Russell J. Low, Benjamin B. Riordon, Jeffrey Blahnik
  • Adsorptive Process for Separation of C8 Aromatic Hydrocarbons
    Publication number: 20120004491
    Abstract: A method for separating a xylene from a feed mixture by contacting the feed mixture with a bed of adsorbent comprising metal organic framework crystals selective to the xylene.
    Type: Application
    Filed: June 30, 2010
    Publication date: January 5, 2012
    Applicant: UOP LLC
    Inventors: Santi KULPRATHIPANJA, Richard R. Willis, Annabelle Benin, John J. Low