Abstract: The invention relates to a sensor system (102) for measuring a velocity of a fluid (110) flowing through a channel (108), comprising a heating element (104) for heating the fluid, wherein the heating element (104) is provided with a predetermined level of power during operation. The sensor system (102) furthermore comprises a primary electronic circuit (114) having a primary resonance frequency, which primary resonance frequency is temperature dependent. Herein the temperature of the primary electronic circuit (114) is determined by heat transferred from the heating element (104) to the fluid (110) flowing through the channel (108). In addition, the sensor system (102) comprises a transducer arrangement (126) configured for generating a measurement signal (128) indicative for the velocity of the fluid (110) flowing through the channel (108). Herein, the measurement signal (108) is based on the primary resonance frequency.

Abstract: A thermal flow sensor integrated circuit for sensing flow in a channel based on temperature measurements, the integrated circuit having a temperature sensing element (30) on a front side of the integrated circuit arranged to face the channel, and a bond pad (60, 200) coupled electrically to the temperature sensing element, for making electrical contact off the integrated circuit, the bond pad being arranged to face away from the channel. By having the bond pad facing away from the channel, the space needed for the bond pad and any connections to it need not extend beyond the temperature sensing element and get in the way of the channel. Hence the temperature sensing element can be located closer to the channel or in the channel to enable measurements with better response time and sensitivity.

Abstract: The invention relates to a sensor (102, 202, 402, 502) for detecting bubbles in gas phase present in a liquid (208, 408, 527) flowing through a flow path (204, 406, 508). The sensor comprises a heating element (106, 210) for heating the liquid, which heating element is provided with a predetermined level of power at least during detecting, and a transducer arrangement (108, 112, 212) arranged for generating a measurement signal (114) indicative for the temperature of the heating element. The sensor furthermore comprises a comparator arrangement (116) for comparing a measurement value of the measurement signal with a predetermined threshold level, which predetermined threshold level corresponds to a reference temperature attainable by the heating element in response to said predetermined level of power and a minimum velocity attainable by the liquid in the flow path.