Patents by Inventor Jack Kavalieros

Jack Kavalieros has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240112714
    Abstract: A memory device includes a group of ferroelectric capacitors with a shared plate that extends through the ferroelectric capacitors, has a greatest width between ferroelectric capacitors, and is coupled to an access transistor. The shared plate may be vertically between ferroelectric layers of the ferroelectric capacitors at the shared plate's greatest width. The memory device may include an integrated circuit die and be coupled to a power supply. Forming a group of ferroelectric capacitors includes forming an opening through an alternating stack of insulators and conductive plates, selectively forming ferroelectric material on the conductive plates rather than the insulators, and forming a shared plate in the opening over the ferroelectric material.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Christopher Neumann, Brian Doyle, Sou-Chi Chang, Bernal Granados Alpizar, Sarah Atanasov, Matthew Metz, Uygar Avci, Jack Kavalieros, Shriram Shivaraman
  • Publication number: 20240105854
    Abstract: Transistor structures may include a metal oxide contact buffer between a portion of a channel material and source or drain contact metallization. The contact buffer may improve control of transistor channel length by limiting reaction between contact metallization and the channel material. The channel material may be of a first composition and the contact buffer may be of a second composition.
    Type: Application
    Filed: December 4, 2023
    Publication date: March 28, 2024
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Abhishek Sharma, Van Le, Jack Kavalieros, Shriram Shivaraman, Seung Hoon Sung, Tahir Ghani, Arnab Sen Gupta, Nazila Haratipour, Justin Weber
  • Patent number: 11887988
    Abstract: Thin film transistor structures may include a regrown source or drain material between a channel material and source or drain contact metallization. The source or drain material may be selectively deposited at low temperatures to backfill recesses formed in the channel material. Electrically active dopant impurities may be introduced in-situ during deposition of the source or drain material. The source or drain material may overlap a portion of a gate electrode undercut by the recesses. With channel material of a first composition and source or drain material of a second composition, thin film transistor structures may display low external resistance and high channel mobility.
    Type: Grant
    Filed: August 1, 2019
    Date of Patent: January 30, 2024
    Assignee: Intel Corporation
    Inventors: Ashish Agrawal, Jack Kavalieros, Anand Murthy, Gilbert Dewey, Matthew Metz, Willy Rachmady, Cheng-Ying Huang, Cory Bomberger
  • Patent number: 11862715
    Abstract: Tunneling Field Effect Transistors (TFETs) are promising devices in that they promise significant performance increase and energy consumption decrease due to a steeper subthreshold slope (for example, smaller sub-threshold swing). In various embodiments, vertical fin-based TFETs can be fabricated in trenches, for example, silicon trenches. In another embodiment, vertical TFETs can be used on different material systems acting as a substrate and/or trenches (for example, Si, Ge, III-V semiconductors, GaN, and the like). In one embodiment, the tunneling direction in the channel of the vertical TFET can be perpendicular to the Si substrates. In one embodiment, this can be different than the tunneling direction in the channel of lateral TFETs.
    Type: Grant
    Filed: May 16, 2022
    Date of Patent: January 2, 2024
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Jack Kavalieros, Ian Young, Matthew Metz, Willy Rachmady, Uygar Avci, Ashish Agrawal, Benjamin Chu-Kung
  • Patent number: 11843054
    Abstract: Embodiments herein describe techniques for a semiconductor device including a transistor. The transistor includes a first metal contact as a source electrode, a second metal contact as a drain electrode, a channel area between the source electrode and the drain electrode, and a third metal contact aligned with the channel area as a gate electrode. The first metal contact may be located in a first metal layer along a first direction. The second metal contact may be located in a second metal layer along the first direction, in parallel with the first metal contact. The third metal contact may be located in a third metal layer along a second direction substantially orthogonal to the first direction. The third metal layer is between the first metal layer and the second metal layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: December 12, 2023
    Assignee: Intel Corporation
    Inventors: Van H. Le, Seung Hoon Sung, Benjamin Chu-Kung, Miriam Reshotko, Matthew Metz, Yih Wang, Gilbert Dewey, Jack Kavalieros, Tahir Ghani, Nazila Haratipour, Abhishek Sharma, Shriram Shivaraman
  • Patent number: 11843058
    Abstract: Transistor structures may include a metal oxide contact buffer between a portion of a channel material and source or drain contact metallization. The contact buffer may improve control of transistor channel length by limiting reaction between contact metallization and the channel material. The channel material may be of a first composition and the contact buffer may be of a second composition.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: December 12, 2023
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Abhishek Sharma, Van Le, Jack Kavalieros, Shriram Shivaraman, Seung Hoon Sung, Tahir Ghani, Arnab Sen Gupta, Nazila Haratipour, Justin Weber
  • Patent number: 11812600
    Abstract: An integrated circuit includes one or more layers of insulating material defining a vertical bore with a first portion and a second portion. A capacitor structure is in the first portion of the vertical bore and includes a first electrode, a second electrode, and a dielectric between the first electrode and the second electrode. A transistor structure is in the second portion of the vertical bore and includes a third electrode extending into the second portion of the vertical bore, a layer of semiconductor material in contact with the first electrode and in contact with the second electrode, and a dielectric between the semiconductor material and the insulating material. A fourth electrode wraps around the transistor structure such that the dielectric is between the semiconductor material and the fourth electrode. The capacitor structure can be above or below the transistor structure in a self-aligned vertical arrangement.
    Type: Grant
    Filed: June 25, 2019
    Date of Patent: November 7, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Charles C. Kuo, Abhishek A. Sharma, Van H. Le, Jack Kavalieros
  • Publication number: 20230352598
    Abstract: An integrated circuit includes: a gate dielectric; a first layer adjacent to the gate dielectric; a second layer adjacent to the first layer, the second layer comprising an amorphous material; a third layer adjacent to the second layer, the third layer comprising a crystalline material; and a source or drain at least partially adjacent to the third layer. In some cases, the crystalline material of the third layer is a first crystalline material, and the first layer comprises a second crystalline material, which may be the same as or different from the first crystalline material. In some cases, the gate dielectric includes a high-K dielectric material. In some cases, the gate dielectric, the first layer, the second layer, the third layer, and the source or drain are part of a back-gate transistor structure (e.g., back-gate TFT), which may be part of a memory structure (e.g., located within an interconnect structure).
    Type: Application
    Filed: June 30, 2023
    Publication date: November 2, 2023
    Applicant: Intel Corporation
    Inventors: Van H. Le, Abhishek A. Sharma, Gilbert Dewey, Kent Millard, Jack Kavalieros, Shriram Shivaraman, Tristan A. Tronic, Sanaz Gardner, Justin R. Weber, Tahir Ghani, Li Huey Tan, Kevin Lin
  • Patent number: 11784251
    Abstract: A transistor includes a semiconductor body including a material such as an amorphous or polycrystalline material, for example and a gate stack on a first portion of the body. The gate stack includes a gate dielectric on the body, and a gate electrode on the gate dielectric. The transistor further includes a first metallization structure on a second portion of the body and a third metallization structure on a third portion of the body, opposite to the second portion. The transistor further includes a ferroelectric material on at least a fourth portion of the body, where the ferroelectric material is between the gate stack and the first or second metallization structure.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: October 10, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Gilbert Dewey, Abhishek Sharma, Van H. Le, Jack Kavalieros
  • Publication number: 20230317558
    Abstract: Integrated circuit dies, systems, and techniques are described related to multiple transistor epitaxial layer source and drain transistor circuits operable at low temperatures. A system includes an integrated circuit die having a number of transistors each having a crystalline channel structure, a first layer epitaxial to the channel structure, and a second layer epitaxial to the first layer. The system further includes a cooling structure integral to the integrated circuit die, coupled to the integrated circuit die, or both. The cooling structure is operable to remove heat from the integrated circuit die to achieve an operating temperature at the desired low temperature.
    Type: Application
    Filed: April 1, 2022
    Publication date: October 5, 2023
    Applicant: Intel Corporation
    Inventors: Abhishek Sharma, Wilfred Gomes, Anand Murthy, Tahir Ghani, Jack Kavalieros, Rajabali Koduri
  • Patent number: 11777029
    Abstract: A vertical transistor structure includes a material stack having a source material, a drain material, and a channel material therebetween. The vertical transistor structure further includes a gate electrode adjacent to a sidewall of the stack, where the sidewall includes the channel material, and at least a partial thickness of both the source material and the drain material. A gate dielectric is present between the sidewall of the stack and the gate electrode. The vertical transistor structure further includes a first metallization over a first area of the stack above the gate dielectric layer, and in contact with the gate electrode on sidewall of the stack. A second metallization is adjacent to the first metallization, where the second metallization is over a second area of the stack, and in contact with the source material or the drain material.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: October 3, 2023
    Assignee: Intel Corporation
    Inventors: Nazila Haratipour, I-Cheng Tung, Abhishek A. Sharma, Arnab Sen Gupta, Van Le, Matthew V. Metz, Jack Kavalieros, Tahir Ghani
  • Patent number: 11764306
    Abstract: Described is an apparatus which comprises: a gate comprising a metal; a first layer adjacent to the gate, the first layer comprising a dielectric material; a second layer adjacent to the first layer, the second layer comprising a second material; a third layer adjacent to the second layer, the third layer comprising a third material including an amorphous metal oxide; a fourth layer adjacent to the third layer, the fourth layer comprising a fourth material, wherein the fourth and second materials are different than the third material; a source partially adjacent to the fourth layer; and a drain partially adjacent to the fourth layer.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: September 19, 2023
    Assignee: Intel Corporation
    Inventors: Van H. Le, Abhishek A. Sharma, Gilbert Dewey, Kent Millard, Jack Kavalieros, Shriram Shivaraman, Tristan A. Tronic, Sanaz Gardner, Justin R. Weber, Tahir Ghani, Li Huey Tan, Kevin Lin
  • Patent number: 11756998
    Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device having a channel area including a channel III-V material, and a source area including a first portion and a second portion of the source area. The first portion of the source area includes a first III-V material, and the second portion of the source area includes a second III-V material. The channel III-V material, the first III-V material and the second III-V material may have a same lattice constant. Moreover, the first III-V material has a first bandgap, and the second III-V material has a second bandgap, the channel III-V material has a channel III-V material bandgap, where the channel material bandgap, the second bandgap, and the first bandgap form a monotonic sequence of bandgaps. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: January 14, 2022
    Date of Patent: September 12, 2023
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Tahir Ghani, Jack Kavalieros, Anand Murthy, Harold Kennel, Gilbert Dewey, Matthew Metz, Willy Rachmady, Sean Ma, Nicholas Minutillo
  • Patent number: 11695081
    Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. A semiconductor device may include isolation areas above a substrate to form a trench between the isolation areas. A first buffer layer is over the substrate, in contact with the substrate, and within the trench. A second buffer layer is within the trench over the first buffer layer, and in contact with the first buffer layer. A channel area is above the first buffer layer, above a portion of the second buffer layer that are below a source area or a drain area, and without being vertically above a portion of the second buffer layer. In addition, the source area or the drain area is above the second buffer layer, in contact with the second buffer layer, and adjacent to the channel area. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: July 4, 2023
    Assignee: Intel Corporation
    Inventors: Sean Ma, Nicholas Minutillo, Cheng-Ying Huang, Tahir Ghani, Jack Kavalieros, Anand Murthy, Harold Kennel, Gilbert Dewey, Matthew Metz, Willy Rachmady
  • Patent number: 11640984
    Abstract: Techniques and mechanisms for providing electrical insulation or other protection of an integrated circuit (IC) device with a spacer structure which comprises an (anti)ferromagnetic material. In an embodiment, a transistor comprises doped source or drain regions and a channel region which are each disposed in a fin structure, wherein a gate electrode and an underlying dielectric layer of the transistor each extend over the channel region. Insulation spacers are disposed on opposite sides of the gate electrode, where at least a portion of one such insulation spacer comprises an (anti)ferroelectric material. Another portion of the insulation spacer comprises a non-(anti)ferroelectric material. In another embodiment, the two portions of the spacer are offset vertically from one another, wherein the (anti)ferroelectric portion forms a bottom of the spacer.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: May 2, 2023
    Assignee: Intel Corporation
    Inventors: Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Chia-Ching Lin, Owen Loh, Seung Hoon Sung, Aditya Kasukurti, Sou-Chi Chang, Tanay Gosavi, Ashish Verma Penumatcha
  • Patent number: 11616130
    Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Devin Merrill, Ashish Verma Penumatcha, Chia-Ching Lin, Owen Loh
  • Patent number: 11532619
    Abstract: Transistor structures including a non-planar body that has an active portion comprising a semiconductor material of a first height that is variable, and an inactive portion comprising an oxide of the semiconductor material of a second variable height, complementary to the first height. Gate electrodes and source/drain terminals may be coupled through a transistor channel having any width that varies according to the first height. Oxidation of a semiconductor material may be selectively catalyzed to convert a desired portion of a non-planar body into the oxide of the semiconductor material. Oxidation may be enhanced through the application of a catalyst, such as one comprising metal and oxygen, for example.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: December 20, 2022
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey, Jack Kavalieros, Caleb Barrett, Jay P. Gupta, Nishant Gupta, Kaiwen Hsu, Byungki Jung, Aravind S. Killampalli, Justin Railsback, Supanee Sukrittanon, Prashant Wadhwa
  • Patent number: 11532439
    Abstract: Described is an ultra-dense ferroelectric memory. The memory is fabricated using a patterning method by that applies atomic layer deposition with selective dry and/or wet etch to increase memory density at a given via opening. A ferroelectric capacitor in one example comprises: a first structure (e.g., first electrode) comprising metal; a second structure (e.g., a second electrode) comprising metal; and a third structure comprising ferroelectric material, wherein the third structure is between and adjacent to the first and second structures, wherein a portion of the third structure is interdigitated with the first and second structures to increase surface area of the third structure. The increased surface area allows for higher memory density.
    Type: Grant
    Filed: March 7, 2019
    Date of Patent: December 20, 2022
    Assignee: Intel Corporation
    Inventors: Chia-Ching Lin, Sou-Chi Chang, Nazila Haratipour, Seung Hoon Sung, Ashish Verma Penumatcha, Jack Kavalieros, Uygar E. Avci, Ian A. Young
  • Patent number: 11532601
    Abstract: System on Chip (SoC) solutions integrating an RFIC with a PMIC using a transistor technology based on group III-nitrides (III-N) that is capable of achieving high Ft and also sufficiently high breakdown voltage (BV) to implement high voltage and/or high power circuits. In embodiments, the III-N transistor architecture is amenable to scaling to sustain a trajectory of performance improvements over many successive device generations. In embodiments, the III-N transistor architecture is amenable to monolithic integration with group IV transistor architectures, such as planar and non-planar silicon CMOS transistor technologies. Planar and non-planar HEMT embodiments having one or more of recessed gates, symmetrical source and drain, regrown source/drains are formed with a replacement gate technique permitting enhancement mode operation and good gate passivation.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: December 20, 2022
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Valluri Rao, Niloy Mukherjee, Marko Radosavljevic, Ravi Pillarisetty, Gilbert Dewey, Jack Kavalieros
  • Patent number: 11508577
    Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device including a substrate and an insulator layer above the substrate. A channel area may include an III-V material relaxed grown on the insulator layer. A source area may be above the insulator layer, in contact with the insulator layer, and adjacent to a first end of the channel area. A drain area may be above the insulator layer, in contact with the insulator layer, and adjacent to a second end of the channel area that is opposite to the first end of the channel area. The source area or the drain area may include one or more seed components including a seed material with free surface. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: November 22, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Matthew Metz, Willy Rachmady, Sean Ma, Nicholas Minutillo, Cheng-Ying Huang, Tahir Ghani, Jack Kavalieros, Anand Murthy, Harold Kennel