Abstract: Provided is a substrate cleaning apparatus including: a cleaning bath configured to accommodate a substrate having a first surface and a second surface; a substrate support configured to support the substrate; first and second nozzle bars provided in the cleaning bath to be rotatable in a plane parallel with the substrate, each of the first and the second nozzle bars including a passage; a plurality of nozzles provided along a longitudinal direction of each of the first and the second nozzle bars and configured to spray the cleaning solution from the passage of each of the first and the second nozzle bars to the substrate; and first and second brushes, the first brush provided on a first side of the substrate and configured to clean the first surface and the second brush provided on a second side of the substrate and configured to clean the second surface of the substrate.

Abstract: A bulk acoustic wave resonator includes a resonating part comprising a first electrode, a piezoelectric layer, and a second electrode sequentially laminated, wherein the resonating part is disposed on a substrate; and a cap comprising a groove part configured to accommodate the resonating part, a frame bonded to the substrate by a bonding agent, and a permeation preventing part configured to block the bonding agent from permeating into the groove part from the frame.

Abstract: The present invention relates to a toughened glass cutting method and a toughened glass cutting apparatus and, more specifically, to a toughened glass cutting method and a toughened glass cutting apparatus for subdividing toughened disk glass into unit glass. To this end, the present invention provides a toughened glass cutting method, characterized by comprising: a crack formation step for forming at least one crack on a cutting line of toughened glass to be cut; and a cutting step for cutting the toughened glass along the cutting line by heating the cutting line of the toughened glass.

Abstract: The present invention relates to a method for manufacturing chemically strengthened glass and, more specifically, to a method for manufacturing chemically strengthened glass that can enhance the strength of glass. To this end, the present invention provides a method of manufacturing chemically strengthened glass comprising: a primary chemical strengthening step for chemically strengthening a mother glass; a cutting step for cutting the chemically strengthened mother glass into a predetermined size; a paste applying step for applying paste to a cutting plane formed by the cutting step; and a secondary chemical strengthening step for chemically strengthening only the cutting plane by heating the paste, wherein the paste includes alkaline ions having a larger ionic radius than those included in the mother glass.

Abstract: An acoustic transducer includes a substrate member provided with a plurality of holes formed therein through which sound waves are input, a vibration member including a first region and a second region provided at an edge of the first region and disposed to be parallel to the substrate member while having an interval therebetween, and a plurality of support members disposed along the edge of the first region.

Abstract: An acoustic transducer includes a substrate member including a first region having one or more first holes formed therein, and a second region, a vibration member including a third region facing the first region and a fourth region facing the second region and having one or more second holes formed therein, and a support member extended from a boundary region between the first region and the second region to a boundary region between the third region and the fourth region to allow the substrate member and the vibration member to be spaced apart from each other by a predetermined interval.

Abstract: A method of cutting chemically toughened glass which is chemically toughened in a chemical toughening process of creating compressive stress in the surface of glass by exchanging first alkali ions in the glass with second alkali ions. The method includes the steps of applying a paste on a portion of the chemically toughened glass that is to be cut, heating the paste, and cutting the chemically toughened glass along the portion on which the paste is applied. The paste contains alkali ions. The ion radius of the alkali ions in the paste is smaller than an ion radius of the second alkali ions which substitute the first ions in the chemical toughening process.

Abstract: Embodiments of the invention provide a cap module for MEMS including a substrate, a first negative photoresist, which is formed on one surface of the substrate, and a second negative photoresist, which is formed on one surface of the first negative photoresist.

Abstract: There is provided a piezoelectric actuator including: a piezoelectric member having a multilayer structure; an external electrode formed on an outer surface of the piezoelectric member; and an intermediate electrode formed between layers of the piezoelectric members and having an area smaller than that of the external electrode.

Abstract: Embodiments of the invention provide a piezoelectric actuator module, which includes a multilayer part comprising a multilayer piezoelectric material part and an electrode part connected to the multilayer piezoelectric material part, and a support layer coupled with the multilayer part. The piezoelectric actuator module further includes a support part displaceably supporting the support layer. The multilayer piezoelectric material part is poled in the same direction, and the multilayer part is configured to expand or contract when voltages in anti-phase are applied to the electrode part.

Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.

Abstract: A piezoelectric actuator includes upper and lower electrodes providing driving voltages and a piezoelectric film formed between the upper and lower electrodes and providing a driving force to ink in a plurality of pressure chambers formed on an inkjet print head, respectively. The piezoelectric film may include a plurality of basin parts individually formed on respective tops of the plurality of pressure chambers and a large-area part connected to the plurality of basin parts, respectively, at one end of the plurality of basin parts and formed as a single body. The large-area part may include a groove formed on an extended line of a basin line partitioning the basin parts.

Abstract: Disclosed herein is an angular velocity sensor, including: a mass body part; an internal frame supporting the mass body part; a first flexible part each connecting the mass body part to the internal frame; a second flexible part each connecting the mass body part to the internal frame; an external frame supporting the internal frame; a third flexible part connecting the internal frame and the external frame to each other; and a fourth flexible part connecting the internal frame and the external frame to each other, wherein the internal frame, the second flexible part, and the fourth flexible part have an oxide layer formed thereon.

Abstract: Disclosed are an inkjet print head and a method of manufacturing the same. An inkjet print head according to an aspect of the invention may include: an inkjet board having an ink passage therein; a cutting portion provided outside the ink passage of the inkjet board and having a cutting surface created by separation into head chip units of the inkjet board; and an auxiliary cutting portion provided from one surface of the cutting portion inwardly in a thickness direction of the inkjet board, and assisting the separation into head chip units of the inkjet board.

Abstract: A method of manufacturing a piezoelectric inkjet printhead includes processing a lower silicon-on-insulator substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer, processing the lower silicon-on-insulator substrate by etching the second silicon layer to form a manifold, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, and a plurality of dampers connected with the pressure chambers, and by etching the first silicon layer and the intervening oxide layer to form a plurality of vertical nozzles through the first silicon layer and the intervening oxide layer to corresponding ones of the plurality of dampers, stacking and bonding an upper substrate on the lower substrate, reducing the upper substrate to a predetermined thickness, and forming a piezoelectric actuator on the upper substrate.

Abstract: A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

Abstract: There is provided a poling method for a piezoelectric element, including performing preliminary poling of the piezoelectric element twice or more with different voltages and measuring conductance of the piezoelectric element with regard to respective voltage, establishing a relational expression between the voltage and the conductance of the piezoelectric element, calculating targeted conductance required to exhibit a targeted piezoelectric characteristic of the piezoelectric element, and selecting a targeted voltage level corresponding to the targeted conductance and performing final poling of the piezoelectric element at the targeted voltage level.

Abstract: A method of cutting chemically toughened glass which is chemically toughened in a chemical toughening process of creating compressive stress in the surface of glass by exchanging first alkali ions in the glass with second alkali ions. The method includes the steps of applying a paste on a portion of the chemically toughened glass that is to be cut, heating the paste, and cutting the chemically toughened glass along the portion on which the paste is applied. The paste contains alkali ions. The ion radius of the alkali ions in the paste is smaller than an ion radius of the second alkali ions which substitute the first ions in the chemical toughening process.

Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.

Abstract: A piezoelectric actuator includes upper and lower electrodes providing driving voltages and a piezoelectric film formed between the upper and lower electrodes and providing a driving force to ink in a plurality of pressure chambers formed on an inkjet print head, respectively. The piezoelectric film may include a plurality of basin parts individually formed on respective tops of the plurality of pressure chambers and a large-area part connected to the plurality of basin parts, respectively, at one ends of the plurality of basin parts and formed as a single body. The large-area part may include an etching groove formed on an extended line of a basin line partitioning the basin parts.