Abstract: A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode.

Abstract: A method of manufacturing a display apparatus, the method including forming a display device on a substrate; and forming a thin-film encapsulation layer on the display device, the thin-film encapsulation layer including at least one inorganic layer that includes low-temperature viscosity transition (LVT) inorganic materials, wherein forming the thin-film encapsulation layer includes irradiating energy beams toward the thin-film encapsulation layer during formation of the thin-film encapsulation layer.

Abstract: Provided is an organic light emitting display apparatus. The apparatus may include a substrate including a display region where an image is realized and a non-display region surrounding the display region. The apparatus includes an organic light emitting unit including a first electrode, an intermediate layer, and a second electrode, which are disposed in the display region and are sequentially stacked on the substrate. The apparatus also includes a first inorganic film including a first low temperature viscosity transition (LVT) inorganic material having a first viscosity transition temperature, and covering the organic light emitting unit; and a second inorganic film including a second LVT inorganic material having a second viscosity transition temperature lower than the first viscosity transition temperature, and formed in the non-display region.

Abstract: A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode.

Abstract: An organic light-emitting display apparatus includes: a substrate, and an organic light-emitting device disposed on the substrate. The organic light-emitting device includes a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer. In addition, the organic light-emitting display apparatus further includes a thin film encapsulating layer disposed on the organic light-emitting device. The thin film encapsulating layer includes at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material. The LVT inorganic material includes tin oxide and at least one of boron oxide (B2O3), bismuth oxide (Bi2O3), barium oxide (BaO), and ammonium dihydrogen phosphate (NH4H2PO4).

Abstract: An organic light-emitting display apparatus and a method of manufacturing the organic light-emitting display apparatus. The organic light-emitting display apparatus includes a substrate; a display unit on the substrate; and an encapsulating layer encapsulating the display unit. The encapsulating layer is formed of a low-temperature viscosity transition inorganic material. The encapsulating layer includes nitrogen.

Abstract: A method of manufacturing an organic light-emitting display apparatus includes disposing a low melting glass (LMG) thin film to cover a display unit disposed on a substrate, and radiating an energy beam onto the LMG thin film. Accordingly, an encapsulation layer having excellent sealing characteristics may be rapidly formed, and thus manufacturing process efficiency and product reliability may be improved.

Abstract: A method of manufacturing a display apparatus, the method including forming a display device on a substrate; and forming a thin-film encapsulation layer on the display device, the thin-film encapsulation layer including at least one inorganic layer that includes low-temperature viscosity transition (LVT) inorganic materials, wherein forming the thin-film encapsulation layer includes irradiating energy beams toward the thin-film encapsulation layer during formation of the thin-film encapsulation layer.

Abstract: A method for manufacturing an organic light emitting display device includes mounting in a chamber a substrate where a transparent electrode is to be formed and a SnO member that is a source of forming the transparent electrode, injecting argon gas and oxygen into the chamber, and evaporating the SnO member to be deposited on the substrate.

Abstract: An organic light-emitting display and methods of manufacturing the same are disclosed. In one aspect, an organic light-emitting apparatus includes a substrate, a display unit on the substrate, a step compensation layer formed on the display unit and supplementing a step on a surface of the display unit, a first intermediate layer formed on the step compensation layer, and an encapsulation layer formed on the first intermediate layer and sealing the display unit.

Abstract: A method of manufacturing an organic light-emitting display apparatus includes: providing an organic light emission part on a substrate; providing a first inorganic layer including a first low temperature viscosity transition (“LVT”) inorganic material on the substrate to cover the organic light emission part; and adding fluoride into the first inorganic layer using a fluorine group material such that the first inorganic layer is converted into a second inorganic layer comprising a second low temperature viscosity transition inorganic material.

Abstract: A method of manufacturing an organic light-emitting display apparatus includes providing an organic light-emitting device including a first electrode, a second electrode and an intermediate layer including an organic emission layer, on a substrate; forming a pre-thin film encapsulation layer including an inorganic layer including a low temperature viscosity (“LVT”) inorganic material, on the organic light-emitting device; and selectively irradiating a beam having certain energy to a local area of the pre-thin film encapsulation layer.

Abstract: An organic light-emitting display apparatus includes: a substrate, and an organic light-emitting device disposed on the substrate. The organic light-emitting device includes a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer. In addition, the organic light-emitting display apparatus further includes a thin film encapsulating layer disposed on the organic light-emitting device. The thin film encapsulating layer includes at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material. The LVT inorganic material includes tin oxide and at least one of boron oxide (B2O3), bismuth oxide (Bi2O3), barium oxide (BaO), and ammonium dihydrogen phosphate (NH4H2PO4).

Abstract: A method of manufacturing an organic light-emitting display apparatus includes disposing a low melting glass (LMG) thin film to cover a display unit disposed on a substrate, and radiating an energy beam onto the LMG thin film. Accordingly, an encapsulation layer having excellent sealing characteristics may be rapidly formed, and thus manufacturing process efficiency and product reliability may be improved.

Abstract: A method of manufacturing an organic light-emitting display apparatus includes: providing an organic light emission part on a substrate; providing a first inorganic layer including a first low temperature viscosity transition (“LVT”) inorganic material on the substrate to cover the organic light emission part; and adding fluoride into the first inorganic layer using a fluorine group material such that the first inorganic layer is converted into a second inorganic layer comprising a second low temperature viscosity transition inorganic material.

Abstract: Provided is an organic light emitting display apparatus. The apparatus may include a substrate including a display region where an image is realized and a non-display region surrounding the display region. The apparatus includes an organic light emitting unit including a first electrode, an intermediate layer, and a second electrode, which are disposed in the display region and are sequentially stacked on the substrate. The apparatus also includes a first inorganic film including a first low temperature viscosity transition (LVT) inorganic material having a first viscosity transition temperature, and covering the organic light emitting unit; and a second inorganic film including a second LVT inorganic material having a second viscosity transition temperature lower than the first viscosity transition temperature, and formed in the non-display region.

Abstract: An organic light emitting diode display includes a substrate, an organic light emitting unit disposed on the substrate and including a laminate of a first electrode, an organic emission film, and a second electrode, a first inorganic film formed on the substrate to cover the organic light emitting unit, the first inorganic film including SnO2, and a second inorganic film formed on the first inorganic film, the second inorganic film including SnO2 at a top surface and including SnO, a proportion of the SnO increasing in a direction from the top surface of the second inorganic film toward the first inorganic film.

Abstract: An organic light-emitting display and methods of manufacturing the same are disclosed. In one aspect, an organic light-emitting apparatus includes a substrate, a display unit on the substrate, a step compensation layer formed on the display unit and supplementing a step on a surface of the display unit, a first intermediate layer formed on the step compensation layer, and an encapsulation layer formed on the first intermediate layer and sealing the display unit.

Abstract: An organic light-emitting display apparatus and a method of manufacturing the organic light-emitting display apparatus. The organic light-emitting display apparatus includes a substrate; a display unit on the substrate; and an encapsulating layer encapsulating the display unit. The encapsulating layer is formed of a low-temperature viscosity transition inorganic material. The encapsulating layer includes nitrogen.

Abstract: A method for manufacturing an organic light emitting display device includes mounting in a chamber a substrate where a transparent electrode is to be formed and a SnO member that is a source of forming the transparent electrode, injecting argon gas and oxygen into the chamber, and evaporating the SnO member to be deposited on the substrate.