Patents by Inventor James P. McGuire
James P. McGuire has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6995908Abstract: An optical system includes multiple cubic crystalline optical elements and one or more polarization rotators in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements. In one embodiment, all cubic crystalline optical elements are oriented with identical three dimensional cubic crystalline lattice directions, a 90° polarization rotator divides the system into front and rear groups such that the net retardance of the front group is balanced by the net retardance of the rear group.Type: GrantFiled: June 20, 2002Date of Patent: February 7, 2006Assignee: ASML Netherlands B.V.Inventor: James P. McGuire
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Patent number: 6970232Abstract: An optical system includes multiple cubic crystalline optical elements and one or more polarization rotators in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements. In one embodiment, all cubic crystalline optical elements are oriented with identical three dimensional cubic crystalline lattice directions, a 90° polarization rotator divides the system into front and rear groups such that the net retardance of the front group is balanced by the net retardance of the rear group.Type: GrantFiled: June 20, 2002Date of Patent: November 29, 2005Assignee: ASML Netherlands B.V.Inventor: James P. McGuire, Jr.
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Patent number: 6958864Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.Type: GrantFiled: December 26, 2002Date of Patent: October 25, 2005Assignee: ASML Netherlands B.V.Inventor: James P. McGuire, Jr.
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Patent number: 6947192Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance. Various birefringent elements, wave plates, and combinations thereof provide additional correction for residual retardance and wavefront aberrations.Type: GrantFiled: January 19, 2004Date of Patent: September 20, 2005Assignee: ASML Netherlands B.V.Inventors: Jeffrey M. Hoffman, James P. McGuire
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Patent number: 6941073Abstract: An East-West separable ROADM particularly usable as a programmable N×M optical add/drop multiplexer with an efficient pass through of optical channels in a multi-wavelength communication system. The East-West separable ROADM uses a grating that separates multi-channel optical signals into a plurality of optical channels, and combines a plurality of optical channels into multi-channel optical signals. Programmable mirrors and beam steerers can direct each optical channel to any of a plurality of fibers coupled to the device.Type: GrantFiled: July 23, 2003Date of Patent: September 6, 2005Assignee: Optical Research AssociatesInventor: James P. McGuire
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Patent number: 6917458Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance. Various birefringent elements, wave plates, and combinations thereof provide additional correction for residual retardance and wavefront aberrations.Type: GrantFiled: February 20, 2003Date of Patent: July 12, 2005Assignee: ASML Netherlands B.V.Inventors: Jeffrey M. Hoffman, James P. McGuire
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Patent number: 6885488Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance. Various birefringent elements, wave plates, and combinations thereof provide additional correction for residual retardance and wavefront aberrations.Type: GrantFiled: February 20, 2003Date of Patent: April 26, 2005Assignee: Optical Research AssociatesInventors: Jeffrey M. Hoffman, James P. McGuire
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Patent number: 6844972Abstract: An optical system includes multiple cubic crystalline optical elements and one or more polarization rotators in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements. In one embodiment, all cubic crystalline optical elements are oriented with identical three dimensional cubic crystalline lattice directions, a 90° polarization rotator divides the system into front and rear groups such that the net retardance of the front group is balanced by the net retardance of the rear group.Type: GrantFiled: June 20, 2002Date of Patent: January 18, 2005Inventor: James P. McGuire, Jr.
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Publication number: 20040145806Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance.Type: ApplicationFiled: January 19, 2004Publication date: July 29, 2004Inventors: Jeffrey M. Hoffman, James P. McGuire
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Publication number: 20040136718Abstract: An East-West separable ROADM particularly usable as a programmable N×M optical add/drop multiplexer with an efficient pass through of optical channels in a multi-wavelength communication system. The East-West separable ROADM uses a grating that separates multi-channel optical signals into a plurality of optical channels, and combines a plurality of optical channels into multi-channel optical signals. Programmable mirrors and beam steerers can direct each optical channel to any of a plurality of fibers coupled to the device.Type: ApplicationFiled: July 23, 2003Publication date: July 15, 2004Inventor: James P. McGuire
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Patent number: 6760095Abstract: An illumination system and condenser for use in photolithography in the extreme ultraviolet wavelength region has a first non-imaging optic element collecting electromagnetic radiation from a source and creates a desired radiance distribution. A second non-imaging optic element receives the electromagnetic radiation from the first non-imaging optic element and redirects and images the electromagnetic radiation. The electromagnetic radiation from the second non-imaging optic element is suitable for being received by other conventional optical surfaces to provide a desired radiance distribution with a desired angular distribution and desired shape. Facets are used to provide the desired illumination over the desired illumination field. Reflective facets may be placed on the second non-imaging optic, which can reduce the number of mirrors and increase efficiency.Type: GrantFiled: February 7, 2003Date of Patent: July 6, 2004Assignee: ASML Holding N.V.Inventor: James P. McGuire, Jr.
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Publication number: 20040036961Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.Type: ApplicationFiled: December 26, 2002Publication date: February 26, 2004Inventor: James P. McGuire
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Publication number: 20040036985Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.Type: ApplicationFiled: December 26, 2002Publication date: February 26, 2004Inventor: James P. McGuire
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Publication number: 20040036971Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.Type: ApplicationFiled: December 26, 2002Publication date: February 26, 2004Inventor: James P. McGuire
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Publication number: 20040033010Abstract: A wavelength selective optical switch particularly usable as a programmable N×M optical switch in a multi-wavelength communication system. The switch uses a grating that separates multi-channel optical signals into a plurality of optical channels, and combines a plurality of optical channels into multi-channel optical signals. Programmable mirrors switch each optical channel to any of a plurality of fibers coupled to the switch.Type: ApplicationFiled: June 12, 2003Publication date: February 19, 2004Inventor: James P. McGuire
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Patent number: 6683710Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance.Type: GrantFiled: February 7, 2002Date of Patent: January 27, 2004Assignee: Optical Research AssociatesInventors: Jeffrey M. Hoffman, James P. McGuire
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Publication number: 20040001244Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance.Type: ApplicationFiled: February 20, 2003Publication date: January 1, 2004Applicant: Optical Research AssociatesInventors: Jeffrey M. Hoffman, James P. McGuire
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Publication number: 20030234981Abstract: An optical system includes multiple cubic crystalline optical elements aligned along a common optical axis and having their crystal lattices oriented with respect to each other to minimize the effects of intrinsic birefringence and produce a system with reduced retardance. The optical system may be a refractive or catadioptric system having a high numerical aperture and using light with a wavelength at or below 248 nanometers. The net retardance of the system is less than the sum of the retardance contributions of the respective optical elements as the elements are oriented such that the intrinsic birefringences of the individual elements cancel each other out. In one embodiment, two [110] cubic crystalline optical elements are clocked with respect to one another and used in conjunction with a [100] cubic crystalline optical element to reduce retardance.Type: ApplicationFiled: February 20, 2003Publication date: December 25, 2003Applicant: Optical Research AssociatesInventors: Jeffrey M. Hoffman, James P. McGuire
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Publication number: 20030215179Abstract: A multi-channel optical switching system particularly usable as a programmable optical add/drop multiplexer (POADM) in a multi-wavelength communication system. The switching system uses a thin film optical demux/mux that separates a multi-channel optical signal into a plurality of optical channels, and combines a plurality of optical channels into a multi-channel optical signal. The system also uses a plurality of optical ports optically connected to the thin film optical demux/mux and a selecting device to select which optical channel is directed to which of the optical ports.Type: ApplicationFiled: June 2, 2003Publication date: November 20, 2003Inventor: James P. Mcguire
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Patent number: 6636654Abstract: A multi-channel optical switching system particularly usable as a programmable optical add/drop multiplexer (POADM) in a multi-wavelength communication system. The switching system uses a thin film optical demux/mux that separates a multi-channel optical signal into a plurality of optical channels, and combines a plurality of optical channels into a multi-channel optical signal. The system also uses a plurality of optical ports optically connected to the thin film optical demux/mux and a selecting device to select which optical channel is directed to which of the optical ports.Type: GrantFiled: September 18, 2001Date of Patent: October 21, 2003Assignee: Optical Research AssociatesInventor: James P. McGuire, Jr.