Abstract: Methods and structures are disclosed to dispense a liquefied gas solution from a liquefied gas solution (LGE) container. The LGE container comprises a temperature sensor to detect the temperature of the liquefied gas solution within the LGE container. The LGE container temperature is controlled using a temperature control element and a processor connected to the temperature sensor and to the temperature control element. The LGE is transferred from the container into a secondary container through a valve. The method includes the following steps: (a) opening the valve to allow the LGE to flow from the LGE container into the secondary container; (b) taking readings from the temperature sensor; and (c) based on the temperature readings, heating the LGE container to maintain the temperature of the LGE container at a predetermined temperature or within a predetermined temperature range.

Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.

Abstract: Methods and structures are disclosed to dispense a liquefied gas solution from a liquefied gas solution (LGE) container. The LGE container comprises a temperature sensor to detect the temperature of the liquefied gas solution within the LGE container. The LGE container temperature is controlled using a temperature control element and a processor connected to the temperature sensor and to the temperature control element. The LGE is transferred from the container into a secondary container through a valve. The method includes the following steps: (a) opening the valve to allow the LGE to flow from the LGE container into the secondary container; (b) taking readings from the temperature sensor; and (c) based on the temperature readings, heating the LGE container to maintain the temperature of the LGE container at a predetermined temperature or within a predetermined temperature range.

Abstract: A safe electrolyte comprising a liquefied gas solvent that will transition from a liquid state to a gas state (“gas off”) at a pressure of 100 kPa and a temperature of 293.15 K is disclosed. The electrolyte is a mixture of a compressed gas solvent and a salt, and includes a hydrocarbon solvent of a sufficient concentration to promote solubility of the salt into the compressed gas solvent without phase separation. The molar ratio of the hydrocarbon solvent to the compressed gas solvent is in a range of 10:90 to 90:10. The hydrocarbon solvent may be selected to lower the global warming potential (GWP) of the electrolyte by at least 10%. This safe electrolyte can be used to manufacture an electrochemical energy storage device.

Abstract: Methods and structures are disclosed to dispense a liquefied gas solution from a liquefied gas solution (LGE) container. The LGE container comprises a temperature sensor to detect the temperature of the liquefied gas solution within the LGE container. The LGE container temperature is controlled using a temperature control element, and a processor connected to the temperature sensor and the temperature control element. The LGE is transferred from the container to a secondary container through a valve. The method includes the following steps: (a) opening the valve to allow the LGE to flow from the LGE container into the secondary container; (b) taking readings from the temperature sensor; (c) based on the temperature readings, heating the LGE container to maintain the temperature of the LGE container at a predetermined temperature or temperature range.

Abstract: Mechanisms and methods for pressurized fluid injection and sealing into containment vessels using a divided valve mechanism are disclosed. The invention describes designs and methods in which a valve may be plugged by an actuator, and then the valve and actuator are disjoined, allowing the containment vessel to then be sealed but without the additional mass or volume of the actuation mechanism and without fluid loss from the containment vessel.

Abstract: A setup for preparing a liquified gas electrolyte (LGE) is disclosed. The setup includes a solvent container that contains a liquified gas solvent, a condensing container with an inlet, an outlet and an electrolyte container. The condensing container may contain a salt. The condensing container also has a heat sink and a heating element to raise and lower its internal temperature. A first valve fluidly connects the solvent container to the inlet, and a second valve fluidly connects the electrolyte container to the outlet. The setup has at least two configurations: a solvent transfer configuration, and a salt transfer configuration.

Abstract: A safe electrolyte comprising a liquefied gas solvent that will transition from a liquid state to a gas state (“gas off”) at a pressure of 100 kPa and a temperature of 293.15 K is disclosed. A first mixture is formed from a first electrolyte component (one or more solvents) mixed with a second electrolyte component (one or more hydrocarbon co-solvents). The addition of the second electrolyte component (1) lowers the vapor pressure of the first mixture by at least 10% as compared to the vapor pressure of the first electrolyte component alone, when measured at 293.15 K, and (2) results in a vapor pressure of the first mixture above 100 kPa at a temperature of 293.15 K. The second electrolyte component may also be selected to lower the global warming potential (GWP) of the first mixture by at least 10% as compared to the GWP of the first electrolyte component alone. The safe liquefied gas electrolyte is formed by mixing a third electrolyte component (one or more salts) to the first mixture.

Abstract: Mechanisms and methods for pressurized fluid injection and sealing into containment vessels using a divided valve mechanism are disclosed. The invention describes designs and methods in which a valve may be plugged by an actuator then the valve and actuator are then disjoined, allowing the containment vessel to then be sealed but without the additional mass or volume of the actuation mechanism and without fluid loss from the containment vessel.

Abstract: Mechanisms and methods for pressurized fluid injection and sealing into containment vessels using a divided valve mechanism are disclosed. The invention describes designs and methods in which a valve may be plugged by an actuator then the valve and actuator are then disjoined, allowing the containment vessel to then be sealed but without the additional mass or volume of the actuation mechanism and without fluid loss from the containment vessel.

Abstract: Mechanisms and methods for pressurized fluid injection and sealing into containment vessels using a divided valve mechanism are disclosed. The invention describes designs and methods in which a valve may be plugged by an actuator then the valve and actuator are then disjoined, allowing the containment vessel to then be sealed but without the additional mass or volume of the actuation mechanism and without fluid loss from the containment vessel.

Abstract: Mechanisms and methods for injecting and sealing pressurized fluid into containment vessels using a divided valve mechanism are disclosed. The invention describes designs and methods in which a valve may be plugged by an actuator, and then the valve and actuator may then be disjoined, allowing the containment vessel to thereby be sealed without the additional mass or volume of the actuation mechanism and without fluid loss from the containment vessel.

Abstract: A safe electrolyte which comprises a liquefied gas solvent that will transition from a liquid state to a gas state (“gas off”) at a pressure of 100 kPa and temperature of 293.15 K is further disclosed. A first mixture is formed from a first electrolyte component (one or more solvents) mixed with a second electrolyte component (one or more hydrocarbon co-solvents). The addition of the second electrolyte component (1) lowers the vapor pressure of the first mixture by at least 10% as compared to the vapor pressure of the first electrolyte component alone when measured at 293.15 K and (2) results in a vapor pressure of the first mixture above 100 kPa at a temperature of 293.15 K. The second electrolyte component may also be selected to lower the global warming potential (GWP) of the first mixture by at least 10% as compared to GWP of the first electrolyte component alone. The safe liquefied gas electrolyte is formed by mixing a third electrolyte component (one or more salts) to the first mixture.

Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.

Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.

Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.

Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.

Abstract: A method for etching silicon-containing films is disclosed. The method includes the steps of introducing a vapor of an iodine-containing etching compound into a reaction chamber containing a silicon-containing film on a substrate, wherein the iodine-containing etching compound has the formula CaHxFyIz, wherein a=1-3, x=0-6, y=1-7, z=1-2, x+y+z=4 when a=1, x+y+z=4 or 6 when a=2, and x+y+z=6 or 8 when a=3; introducing an inert gas into the reaction chamber; and activating a plasma to produce an activated iodine-containing etching compound capable of etching the silicon-containing film from the substrate.

Abstract: Disclosed is a novel method for constructing an electrochemical energy storage cell with a first and a second electrode. The method includes (a) coating the first electrode with a first electrolyte component to form a first coated electrode embedded within the first electrolyte component; (b) inserting the first coated electrode and the second electrode into a cell housing; (c) sealing the cell housing, wherein the cell housing comprises a solvent injection port; (d) injecting a liquefied gas solvent into the cell through the solvent injection port, wherein the solvent has a vapor pressure above an atmospheric pressure of 100 kPa at a temperature of 293 0.15 K; and (e) sealing the solvent injection port. This method can be modified in step (d) to include the injection of a liquid solvent.

Abstract: A battery device is disclosed that includes an ionically conducting electrolyte comprising a mixture of a compressed gas solvent and one or more solid or liquid salts, wherein the compressed gas solvent comprises at least a first component that has a vapor pressure above 100 kPa at a room temperature of 293.15 K. The device also includes a housing enclosing the ionically conducting electrolyte under a pressurized condition to maintain the compressed gas solvent at a pressure higher than 100 kPa at a room temperature of 293.15 K. The device also includes at least two conducting electrodes in contact with the ionically conducting electrolyte.