Patents by Inventor James W. Adkisson

James W. Adkisson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8927379
    Abstract: A method of forming a heterojunction bipolar transistor. The method includes providing a structure comprising at least an intrinsic base region and an emitter pedestal region. A stack is formed on the intrinsic base region. The stack comprises a polysilicon layer and a top sacrificial oxide layer. A trench is formed in the structure. The trench circumscribes the intrinsic base region and the stack. An extrinsic base is formed at two regions around the stack. The extrinsic base is formed by a selective epitaxial growth process to create a bridge over the trench. The bridge connects the two regions. An opening is provided in the stack. The opening exposes a portion of the intrinsic base region. An emitter is formed in the opening.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: January 6, 2015
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Kevin K. Chan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Patent number: 8910355
    Abstract: Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.
    Type: Grant
    Filed: December 12, 2011
    Date of Patent: December 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Panglijen Candra, Thomas J. Dunbar, Jeffrey P. Gambino, Mark D. Jaffe, Anthony K. Stamper, Randy L. Wolf
  • Publication number: 20140353725
    Abstract: Disclosed are devices and methods of forming the devices wherein pair(s) of first openings are formed through a dielectric layer and a first semiconductor layer into a substrate and, within the substrate, the first openings of each pair are expanded laterally and merged to form a corresponding trench. Dielectric material is deposited, filling the upper portions of the first openings and creating trench isolation region(s). A second semiconductor layer is deposited and second opening(s) are formed through the second semiconductor and dielectric layers, exposing monocrystalline portion(s) of the first semiconductor layer between the each pair of first openings. A third semiconductor layer is epitaxially deposited with a polycrystalline section on the second semiconductor layer and monocrystalline section(s) on the exposed monocrystalline portion(s) of the first semiconductor layer. A crystallization anneal is performed and a device (e.g.
    Type: Application
    Filed: May 29, 2013
    Publication date: December 4, 2014
    Applicant: International Business Machines Corporation
    Inventors: James W. Adkisson, Peng Cheng, Vibhor Jain, Vikas Kumar Kaushal, Qizhi Liu, John J. Pekarik
  • Patent number: 8900954
    Abstract: A method that forms a structure implants a well implant into a substrate, patterns a mask on the substrate (to have at least one opening that exposes a channel region of the substrate) and forms a conformal dielectric layer on the mask and to line the opening. The conformal dielectric layer covers the channel region of the substrate. The method also forms a conformal gate metal layer on the conformal dielectric layer, implants a compensating implant through the conformal gate metal layer and the conformal dielectric layer into the channel region of the substrate, and forms a gate conductor on the conformal gate metal layer. Additionally, the method removes the mask to leave a gate stack on the substrate, forms sidewall spacers on the gate stack, and then forms source/drain regions in the substrate partially below the sidewall spacers.
    Type: Grant
    Filed: November 4, 2011
    Date of Patent: December 2, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Brent A. Anderson, Andres Bryant, Edward J. Nowak
  • Publication number: 20140340548
    Abstract: A reference pixel sensor cell (e.g., global shutter) with hold node for leakage cancellation, methods of manufacture and design structure is provided. A pixel array includes one or more reference pixel sensor cells dispersed locally throughout active light sensing regions. The one or more reference pixel sensor cells provides a reference signal used to correct for photon generated leakage signals which vary by locality within the active light sensing regions.
    Type: Application
    Filed: August 1, 2014
    Publication date: November 20, 2014
    Inventors: James W. ADKISSON, John J. ELLIS-MONAGHAN, Richard J. RASSEL
  • Patent number: 8836835
    Abstract: A reference pixel sensor cell (e.g., global shutter) with hold node for leakage cancellation, methods of manufacture and design structure is provided. A pixel array includes one or more reference pixel sensor cells dispersed locally throughout active light sensing regions. The one or more reference pixel sensor cells provides a reference signal used to correct for photon generated leakage signals which vary by locality within the active light sensing regions.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: September 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, Richard J. Rassel
  • Publication number: 20140231878
    Abstract: Fabrication methods, device structures, and design structures for a bipolar junction transistor. An emitter is formed in a device region defined in a substrate. An intrinsic base is formed on the emitter. A collector is formed that is separated from the emitter by the intrinsic base. The collector includes a semiconductor material having an electronic bandgap greater than an electronic bandgap of a semiconductor material of the device region.
    Type: Application
    Filed: March 28, 2014
    Publication date: August 21, 2014
    Applicant: International Business Machines Corporation
    Inventors: James W. Adkisson, David L. Harame, Qizhi Liu
  • Publication number: 20140231877
    Abstract: Fabrication methods, device structures, and design structures for a bipolar junction transistor. An emitter is formed in a device region defined in a substrate. An intrinsic base is formed on the emitter. A collector is formed that is separated from the emitter by the intrinsic base. The collector includes a semiconductor material having an electronic bandgap greater than an electronic bandgap of a semiconductor material of the device region.
    Type: Application
    Filed: February 18, 2013
    Publication date: August 21, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James W. Adkisson, David L. Harame, Qizhi Liu
  • Patent number: 8796149
    Abstract: Fabrication methods, device structures, and design structures for a bipolar junction transistor. An emitter is formed in a device region defined in a substrate. An intrinsic base is formed on the emitter. A collector is formed that is separated from the emitter by the intrinsic base. The collector includes a semiconductor material having an electronic bandgap greater than an electronic bandgap of a semiconductor material of the device region.
    Type: Grant
    Filed: February 18, 2013
    Date of Patent: August 5, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, David L. Harame, Qizhi Liu
  • Patent number: 8786051
    Abstract: Disclosed are a transistor (e.g., bipolar junction transistor (BJT) or a heterojunction bipolar transistor (HBT)) and a method of forming the transistor with a narrow in-substrate collector region for reduced base-collector junction capacitance. The transistor has, within a substrate, a collector region positioned laterally adjacent to a trench isolation region. A relatively thin seed layer covers the trench isolation region and collector region. This seed layer has a monocrystalline center, which is aligned above and wider than the collector region (e.g., due to a solid phase epitaxy regrowth process), and a polycrystalline outer section. An intrinsic base layer is epitaxially deposited on the seed layer such that it similarly has a monocrystalline center section that is aligned above and wider than the collector region. An extrinsic base layer is the intrinsic base layer and has a monocrystalline extrinsic base-to-intrinsic base link-up region that is offset vertically from the collector region.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: July 22, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, David L. Harame, Qizhi Liu
  • Publication number: 20140151852
    Abstract: Fabrication methods, device structures, and design structures for a bipolar junction transistor. The device structure includes a collector region, an intrinsic base formed on the collector region, an emitter coupled with the intrinsic base and separated from the collector by the intrinsic base, and an isolation region extending through the intrinsic base to the collector region. The isolation region is formed with a first section having first sidewalls that extend through the intrinsic base and a second section with second sidewalls that extend into the collector region. The second sidewalls are inclined relative to the first sidewalls. The isolation region is positioned in a trench that is formed with first and second etching process in which the latter etches different crystallographic directions of a single-crystal semiconductor material at different etch rates.
    Type: Application
    Filed: December 5, 2012
    Publication date: June 5, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James W. Adkisson, James R. Elliott, David L. Harame, Marwan H. Khater, Robert K. Leidy, Qizhi Liu, John J. Pekarik
  • Patent number: 8743247
    Abstract: A method of forming a CMOS active pixel sensor (APS) cell structure having at least one transfer gate device and method of operation. A first transfer gate device comprises a diodic or split transfer gate conductor structure having a first doped region of first conductivity type material and a second doped region of a second conductivity type material. A photosensing device is formed adjacent the first doped region for collecting charge carriers in response to light incident thereto, and, a diffusion region of a second conductivity type material is formed at or below the substrate surface adjacent the second doped region of the transfer gate device for receiving charges transferred from the photosensing device while preventing spillback of charges to the photosensing device upon timed voltage bias to the diodic or split transfer gate conductor structure.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: June 3, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Andres Bryant, John J. Ellis-Monaghan
  • Patent number: 8742560
    Abstract: Optical structures having an array of protuberances between two layers having different refractive indices are provided. The array of protuberances has vertical and lateral dimensions less than the wavelength range of lights detectable by a photodiode of a CMOS image sensor. The array of protuberances provides high transmission of light with little reflection. The array of protuberances may be provided over a photodiode, in a back-end-of-line interconnect structure, over a lens for a photodiode, on a backside of a photodiode, or on a window of a chip package.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: June 3, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, Jeffrey P. Gambino, Charles F. Musante
  • Publication number: 20140131661
    Abstract: Manufacturing a semiconductor structure including: forming a seed material on a sidewall of a mandrel; forming a graphene field effect transistor (FET) on the seed material; and removing the seed material.
    Type: Application
    Filed: November 11, 2013
    Publication date: May 15, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James W. ADKISSON, Thomas J. DUNBAR, Jeffrey P. GAMBINO, Molly J. LEITCH
  • Patent number: 8723392
    Abstract: Disclosed herein is a surface acoustic wave (SAW) filter and method of making the same. The SAW filter includes a piezoelectric substrate; a planar barrier layer disposed above the piezoelectric substrate, and at least one conductor buried in the piezoelectric substrate and the planar barrier layer.
    Type: Grant
    Filed: July 15, 2011
    Date of Patent: May 13, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Panglijen Candra, Thomas J. Dunbar, Jeffrey P. Gambino, Mark D. Jaffe, Anthony K. Stamper, Randy L. Wolf
  • Patent number: 8716771
    Abstract: Optical structures having an array of protuberances between two layers having different refractive indices are provided. The array of protuberances has vertical and lateral dimensions less than the wavelength range of lights detectable by a photodiode of a CMOS image sensor. The array of protuberances provides high transmission of light with little reflection. The array of protuberances may be provided over a photodiode, in a back-end-of-line interconnect structure, over a lens for a photodiode, on a backside of a photodiode, or on a window of a chip package.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: May 6, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, Jeffrey P. Gambino, Charles F. Musante
  • Publication number: 20140084420
    Abstract: A method of forming a heterojunction bipolar transistor. The method includes providing a structure comprising at least an intrinsic base region and an emitter pedestal region. A stack is formed on the intrinsic base region. The stack comprises a polysilicon layer and a top sacrificial oxide layer. A trench is formed in the structure. The trench circumscribes the intrinsic base region and the stack. An extrinsic base is formed at two regions around the stack. The extrinsic base is formed by a selective epitaxial growth process to create a bridge over the trench. The bridge connects the two regions. An opening is provided in the stack. The opening exposes a portion of the intrinsic base region. An emitter is formed in the opening.
    Type: Application
    Filed: September 26, 2012
    Publication date: March 27, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James W. Adkisson, Kevin K. Chan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Patent number: 8673683
    Abstract: Manufacturing a semiconductor structure including: forming a seed material on an insulator layer; forming a graphene field effect transistor (FET) on the seed material; and forming an air gap under the graphene FET by removing the seed material.
    Type: Grant
    Filed: June 8, 2012
    Date of Patent: March 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Thomas J. Dunbar, Jeffrey P. Gambino, Molly J. Leitch, Edward J. Nowak
  • Patent number: 8633055
    Abstract: Manufacturing a semiconductor structure including: forming a seed material on a sidewall of a mandrel; forming a graphene field effect transistor (FET) on the seed material; and removing the seed material.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: January 21, 2014
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Thomas J. Dunbar, Jeffrey P. Gambino, Molly J. Leitch
  • Patent number: 8610174
    Abstract: Disclosed is a transistor with a raised collector pedestal in reduced dimension for reduced base-collector junction capacitance. The raised collector pedestal is on the top surface of a substrate, extends vertically through dielectric layer(s), is un-doped or low-doped, is aligned above a sub-collector region contained within the substrate and is narrower than that sub-collector region. An intrinsic base layer is above the raised collector pedestal and the dielectric layer(s). An extrinsic base layer is above the intrinsic base layer. Thus, the space between the extrinsic base layer and the sub-collector region is increased. This increased space is filled by dielectric material and the electrical connection between the intrinsic base layer and the sub-collector region is provided by the relatively narrow, un-doped or low-doped, raised collector pedestal. Consequently, base-collector junction capacitance is reduced and, consequently, the maximum oscillation frequency is increased.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: December 17, 2013
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, David L. Harame, Qizhi Liu, John J. Pekarik