Patents by Inventor James Wiley
James Wiley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11348222Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the water in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: GrantFiled: November 7, 2019Date of Patent: May 31, 2022Assignee: KLA-Tencor Technologies Corp.Inventors: Paul Frank Marella, Sharon McCauley, Ellis Chang, William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess
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Publication number: 20200391659Abstract: An occupancy alerting device for warning a driver of a child occupant in a vehicle includes a housing that is configured to be positioned in a passenger compartment of a vehicle by a driver who is transporting a child. A power module, a microprocessor, and a detector are coupled to the housing and are positioned in an interior space defined by the housing. A speaker is coupled to the housing. The microprocessor is operationally coupled to the power module, the detector, and the speaker. The detector is motion type and thus is configured to detect motion of the vehicle. The microprocessor is positioned to selectively actuate the speaker, based on a motion status of the vehicle, to broadcast an occupancy alert to an area proximate to the housing to alert the driver to the child in the vehicle.Type: ApplicationFiled: June 14, 2019Publication date: December 17, 2020Inventor: James Wiley
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Patent number: 10713771Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the wafer in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: GrantFiled: April 25, 2018Date of Patent: July 14, 2020Assignee: KLA-Tencor Technologies Corp.Inventors: Paul Frank Marella, Sharon McCauley, Ellis Chang, William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess
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Publication number: 20200074619Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the water in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: ApplicationFiled: November 7, 2019Publication date: March 5, 2020Inventors: Paul Frank Marella, Sharon McCauley, Ellis Chang, William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess
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Patent number: 10307980Abstract: An applicator assembly for applying a cord to a tire-building surface that rotates during tire construction. The applicator assembly includes an applicator member to apply the cord. A first rotary device rotates the applicator member about a first axis that is transverse to the surface. A first translation device moves the applicator member in a first linear path relative to the surface. The applicator member may include a roller and/or a resilient member. A second rotary device may rotate the applicator member and the first rotary device around a second axis substantially perpendicular to the first axis. A second translation device may move the applicator member, the first rotary device, the second rotary device, and the first translation device. A system for applying the cord to a core member may further include a spindle to rotate the core member about the axis of rotation.Type: GrantFiled: February 20, 2013Date of Patent: June 4, 2019Assignee: The Goodyear Tire & Rubber CompanyInventors: Boaz E. Eidelberg, Mark A. Sieverding, Robert T. Irwin, Max Joel Miller, Jr., Robert D. Irwin, Peter Bruder, James Wiley, James M. Dunn, Brad Kraus
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Publication number: 20180247403Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the wafer in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: ApplicationFiled: April 25, 2018Publication date: August 30, 2018Inventors: Paul Frank Marella, Sharon McCauley, Ellis Chang, William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess
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Publication number: 20150178914Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the wafer in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: ApplicationFiled: March 4, 2015Publication date: June 25, 2015Inventors: Paul Frank Marella, Sharon McCauley, Ellis Chang, William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess
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Patent number: 9002497Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the wafer in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: GrantFiled: July 1, 2004Date of Patent: April 7, 2015Assignee: KLA-Tencor Technologies Corp.Inventors: William Volk, James Wiley, Sterling Watson, Sagar A. Kekare, Carl Hess, Paul Frank Marella, Sharon McCauley, Ellis Chang
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Patent number: 8318391Abstract: A method for identifying process window signature patterns in a device area of a mask is disclosed. The signature patterns collectively provide a unique response to changes in a set of process condition parameters to the lithography process. The signature patterns enable monitoring of associated process condition parameters for signs of process drift, analyzing of the process condition parameters to determine which are limiting and affecting the chip yields, analyzing the changes in the process condition parameters to determine the corrections that should be fed back into the lithography process or forwarded to an etch process, identifying specific masks that do not transfer the intended pattern to wafers as intended, and identifying groups of masks that share common characteristics and behave in a similar manner with respect to changes in process condition parameters when transferring the pattern to the wafer.Type: GrantFiled: September 23, 2011Date of Patent: November 27, 2012Assignee: ASML Netherlands B.V.Inventors: Jun Ye, Moshe E. Preil, Xun Chen, Shauh-Teh Juang, James Wiley
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Publication number: 20120021343Abstract: A method for identifying process window signature patterns in a device area of a mask is disclosed. The signature patterns collectively provide a unique response to changes in a set of process condition parameters to the lithography process. The signature patterns enable monitoring of associated process condition parameters for signs of process drift, analyzing of the process condition parameters to determine which are limiting and affecting the chip yields, analyzing the changes in the process condition parameters to determine the corrections that should be fed back into the lithography process or forwarded to an etch process, identifying specific masks that do not transfer the intended pattern to wafers as intended, and identifying groups of masks that share common characteristics and behave in a similar manner with respect to changes in process condition parameters when transferring the pattern to the wafer.Type: ApplicationFiled: September 23, 2011Publication date: January 26, 2012Applicant: ASML Netherlands B.V.Inventors: Jun Ye, Moshe E. Preil, Xun Chen, Shauh-Teh Juang, James Wiley
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Patent number: 8057967Abstract: A method for identifying process window signature patterns in a device area of a mask is disclosed. The signature patterns collectively provide a unique response to changes in a set of process condition parameters to the lithography process. The signature patterns enable monitoring of associated process condition parameters for signs of process drift, analyzing of the process condition parameters to determine which are limiting and affecting the chip yields, analyzing the changes in the process condition parameters to determine the corrections that should be fed back into the lithography process or forwarded to an etch process, identifying specific masks that do not transfer the intended pattern to wafers as intended, and identifying groups of masks that share common characteristics and behave in a similar manner with respect to changes in process condition parameters when transferring the pattern to the wafer.Type: GrantFiled: February 23, 2010Date of Patent: November 15, 2011Assignee: ASML Netherlands B.V.Inventors: Jun Ye, Moshe E. Preil, Xun Chen, Shauh-Teh Juang, James Wiley
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Publication number: 20100151364Abstract: A method for identifying process window signature patterns in a device area of a mask is disclosed. The signature patterns collectively provide a unique response to changes in a set of process condition parameters to the lithography process. The signature patterns enable monitoring of associated process condition parameters for signs of process drift, analyzing of the process condition parameters to determine which are limiting and affecting the chip yields, analyzing the changes in the process condition parameters to determine the corrections that should be fed back into the lithography process or forwarded to an etch process, identifying specific masks that do not transfer the intended pattern to wafers as intended, and identifying groups of masks that share common characteristics and behave in a similar manner with respect to changes in process condition parameters when transferring the pattern to the wafer.Type: ApplicationFiled: February 23, 2010Publication date: June 17, 2010Applicant: Brion Technology, Inc.Inventors: Jun Ye, Moshe E. Preil, Xun Chen, Shauh-Teh Juang, James Wiley
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Patent number: 7695876Abstract: A method for identifying process window signature patterns in a device area of a mask is disclosed. The signature patterns collectively provide a unique response to changes in a set of process condition parameters to the lithography process. The signature patterns enable monitoring of associated process condition parameters for signs of process drift, analyzing of the process condition parameters to determine which are limiting and affecting the chip yields, analyzing the changes in the process condition parameters to determine the corrections that should be fed back into the lithography process or forwarded to an etch process, identifying specific masks that do not transfer the intended pattern to wafers as intended, and identifying groups of masks that share common characteristics and behave in a similar manner with respect to changes in process condition parameters when transferring the pattern to the wafer.Type: GrantFiled: August 24, 2006Date of Patent: April 13, 2010Assignee: Brion Technologies, Inc.Inventors: Jun Ye, Moshe E. Preil, Xun Chen, Shauh-Teh Juang, James Wiley
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Publication number: 20080081385Abstract: Methods and systems for inspection of wafers and reticles using designer intent data are provided. One computer-implemented method includes identifying nuisance defects on a wafer based on inspection data produced by inspection of a reticle, which is used to form a pattern on the wafer prior to inspection of the wafer. Another computer-implemented method includes detecting defects on a wafer by analyzing data generated by inspection of the wafer in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle. An additional computer-implemented method includes determining a property of a manufacturing process used to process a wafer based on defects that alter a characteristic of a device formed on the wafer. Further computer-implemented methods include altering or simulating one or more characteristics of a design of an integrated circuit based on data generated by inspection of a wafer.Type: ApplicationFiled: November 14, 2007Publication date: April 3, 2008Inventors: Paul Marella, Sharon McCauley, Ellis Chang, William Volk, James Wiley, Sterling Watson, Sagar Kekare, Carl Hess
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Publication number: 20070140548Abstract: A method and software program for determining printability of a defect on a reticle or photomask onto a substrate during processing. That is performed by creating a pixel grid image having a plurality of individual pixel images showing the defect. A gray scale value is assigned to each pixel image of the pixel grid image and a probable center pixel of the defect is selected. Then the polarity of the defect is determined, with a coarse center pixel of the defect optionally selected using the probable center defect and polarity of the defect. If a coarse center pixel is selected, then a fine center of the defect can optionally be selected from the coarse center pixel and polarity of the defect. From the center pixel the physical extent of the defect can be determined followed by the determination the transmissivity energy level of the physical extent of the defect.Type: ApplicationFiled: November 22, 2006Publication date: June 21, 2007Inventors: Anthony Vacca, Thomas Vavul, Donald Parker, Zain Saidin, Sterling Watson, James Wiley
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Publication number: 20070122533Abstract: A device which separates banana pulp from its peel, suitable for large-scale processing, is disclosed. The device consists of upper and lower conveyor belts, a roller installed above the upper belt, and a pressure generating element (e.g., a roller or a plate) installed below the lower belt. The belts are installed so as to converge in the direction of their movement. The axes of the roller(s) is oriented between the longitudinal direction of the lower belt and its transverse direction.Type: ApplicationFiled: August 14, 2006Publication date: May 31, 2007Inventors: Rafael Alvarez, Raul Fernandez, Ilya Ilyin, Jose Mejia, Luis Murillo, Elena Nunez, Audrey Parfenov, Julio Schouwe, Julio Vasquez, James Wiley
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Publication number: 20070122534Abstract: A large scale processing method for separating banana pulp from its peel is disclosed. In this method bananas are separated into two parts (generally in a transverse direction), each part having a tip end and a cut end. A compression force is applied to those banana parts such that the force increases from the tip end to the cut end. A device which implements that process, comprising a cutting device, a means for feeding bananas into the cutting device, and two processing conveyor devices (to apply the compression force to the banana parts), is also disclosed.Type: ApplicationFiled: August 14, 2006Publication date: May 31, 2007Inventors: Rafael Alvarez, Raul Fernandez, Ilya Ilyin, Jose Mejia, Luis Guillermo Bonilla Murillo, Elena Nunez, Andrey Parfenov, Julio Schouwe, Julio Vasquez, James Wiley
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Publication number: 20070050749Abstract: A method for identifying process window signature patterns in a device area of a mask is disclosed. The signature patterns collectively provide a unique response to changes in a set of process condition parameters to the lithography process. The signature patterns enable monitoring of associated process condition parameters for signs of process drift, analyzing of the process condition parameters to determine which are limiting and affecting the chip yields, analyzing the changes in the process condition parameters to determine the corrections that should be fed back into the lithography process or forwarded to an etch process, identifying specific masks that do not transfer the intended pattern to wafers as intended, and identifying groups of masks that share common characteristics and behave in a similar manner with respect to changes in process condition parameters when transferring the pattern to the wafer.Type: ApplicationFiled: August 24, 2006Publication date: March 1, 2007Applicant: BRION TECHNOLOGIES, INC.Inventors: Jun Ye, Moshe Preil, Xun Chen, Shauh-Teh Juang, James Wiley
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Publication number: 20060273266Abstract: One embodiment of a method for detecting, sampling, analyzing, and correcting hot spots in an integrated circuit design allows the identification of the weakest patterns within each design layer, the accurate determination of the impact of process drifts upon the patterning performance of the real mask in a real scanner, and the optimum process correction, process monitoring, and RET improvements to optimize integrated circuit device performance and yield. The combination of high speed simulation coupled with massive data collection capability on actual aerial images and/or resist images at the specific patterns of interest provides a complete methodology for optimum RET implementation and process monitoring.Type: ApplicationFiled: May 19, 2006Publication date: December 7, 2006Applicant: BRION TECHNOLOGIES, INC.Inventors: Moshe Preil, Jun Ye, James Wiley, Shauh-Teh Juang, Michael Gassner
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Patent number: 7138640Abstract: The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.Type: GrantFiled: October 16, 2003Date of Patent: November 21, 2006Assignee: KLA-Tencor Technologies, CorporationInventors: Gil Delgado, John McMurtry, James Wiley