Patents by Inventor Jan Hoentschel

Jan Hoentschel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9806170
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Grant
    Filed: May 11, 2016
    Date of Patent: October 31, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Ryan Sporer, Rick J. Carter, Peter Baars, Hans-Jürgen Thees, Jan Höntschel
  • Patent number: 9806067
    Abstract: A semiconductor die is provided with an optical transmitter configured to transmit an optical signal to another die and an optical receiver configured to receive an optical signal from another die. Furthermore, a method of forming a semiconductor device is provided including forming a first semiconductor die with the steps of providing a semiconductor substrate, forming a transistor device at least partially over the semiconductor substrate, forming an optical receiver one of at least partially over and at least partially in the semiconductor substrate, forming a metallization layer over the transistor device, and forming an optical transmitter one of at least partially over the metallization layer and at least partially in the metallization layer.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: October 31, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Sven Beyer, Jan Hoentschel, Alexander Ebermann
  • Patent number: 9793372
    Abstract: An integrated circuit includes a first transistor, a second transistor and a dummy gate structure. The first transistor includes a first gate structure. The first gate structure includes a first gate insulation layer including a high-k dielectric material and a first gate electrode. The second transistor includes a second gate structure. The second gate structure includes a second gate insulation layer including the high-k dielectric material and a second gate electrode. The dummy gate structure is arranged between the first transistor and the second transistor and substantially does not include the high-k dielectric material.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: October 17, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Jan Hoentschel, Nigel Chan, Sven Beyer
  • Patent number: 9735174
    Abstract: A method of manufacturing a semiconductor device including a capacitor structure is provided, including the steps of providing an SOI wafer comprising a substrate, a buried oxide (BOX) layer formed over the substrate and a semiconductor layer formed over the BOX layer, removing the semiconductor layer in a first region of the wafer to expose the BOX layer, forming a dielectric layer over the exposed BOX layer in the first region, and forming a conductive layer over the dielectric layer. Moreover, a semiconductor device including a capacitor formed on a wafer is provided, wherein the capacitor comprises a first capacitor electrode comprising a doped semiconductor substrate of the wafer, a capacitor insulator comprising an ultra-thin BOX layer of the wafer and a high-k dielectric layer formed on the ultra-thin BOX layer, and a second capacitor electrode comprising a conductive layer formed over the high-k dielectric layer.
    Type: Grant
    Filed: January 14, 2015
    Date of Patent: August 15, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Jan Hoentschel, Peter Baars, Hans-Peter Moll
  • Patent number: 9698179
    Abstract: The present disclosure provides, in accordance with some illustrative embodiments, a capacitor structure comprising an active region formed in a semiconductor substrate, a MOSFET device comprising source and drain regions formed in the active region and a gate electrode formed above the active region, and a first electrode and a second electrode formed in a metallization layer above the MOSFET device, wherein the first electrode is electrically connected with the source and drain regions via respective source and drain contacts and the second electrode is electrically connected with the gate electrode via a gate contact.
    Type: Grant
    Filed: February 12, 2016
    Date of Patent: July 4, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Sven Beyer, Jan Hoentschel, Alexander Ebermann
  • Patent number: 9620589
    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method includes providing a semiconductor substrate, defining a length on the semiconductor substrate corresponding to opposing vertices of a nanowire, removing a portion of the semiconductor substrate to provide a first fin structure and a second fin structure, etching a first cavity proximate to the first side, depositing a protective layer in the first cavity, removing a portion of the protective layer to expose a portion of the semiconductor substrate, and etching a second cavity at the exposed semiconductor substrate where the first and second cavities communicate. The first and second fin structures are adjacent where the length of the first fin structure corresponds to the opposing vertices and has a first side and a second side.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: April 11, 2017
    Assignee: GLOBALFOUNDRIES, INC.
    Inventors: Nicolas Sassiat, Ran Yan, Kun-Hsien Lin, Jan Hoentschel
  • Patent number: 9608112
    Abstract: The present disclosure provides, in accordance with some illustrative embodiments, a method of forming a semiconductor device, the method including providing an SOI substrate with an active semiconductor layer disposed on a buried insulating material layer, which is in turn formed on a base substrate material, forming a gate structure on the active semiconductor layer in an active region of the SOI substrate, partially exposing the base substrate for forming at least one bulk exposed region after the gate structure is formed, and forming a contact structure for contacting the at least one bulk exposed region.
    Type: Grant
    Filed: August 3, 2015
    Date of Patent: March 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Sven Beyer, Tom Hasche, Jan Hoentschel
  • Patent number: 9608003
    Abstract: An integrated circuit product is disclosed including an SOI structure including a bulk semiconductor substrate, a buried insulation layer positioned on the bulk semiconductor substrate and a semiconductor layer positioned on the insulation layer, wherein, in a first region of the SOI structure, the semiconductor layer and the buried insulation layer are removed and, in a second region of the SOI structure, the semiconductor layer and the buried insulation layer are present above the bulk semiconductor substrate. The product further includes a semiconductor bulk device comprising a first gate structure positioned on the bulk semiconductor substrate in the first region and an SOI semiconductor device comprising a second gate structure positioned on the semiconductor layer in the second region, wherein the first and second gate structures have a final gate height substantially extending to a common height level above an upper surface of the bulk semiconductor substrate.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: March 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Peter Baars, Hans-Peter Moll, Jan Hoentschel
  • Publication number: 20170077314
    Abstract: The present disclosure provides, in a first aspect, a semiconductor device structure, including an SOI substrate comprising a semiconductor base substrate, a buried insulating structure formed on the semiconductor base substrate and a semiconductor film formed on the buried insulating structure, wherein the buried insulating structure comprises a multilayer stack having a nitride layer interposed between two oxide layers. The semiconductor device structure further includes a semiconductor device formed in and above an active region of the SOI substrate, and a back bias contact which is electrically connected to the semiconductor base substrate below the semiconductor device.
    Type: Application
    Filed: September 14, 2015
    Publication date: March 16, 2017
    Inventors: Elliot John Smith, Sven Beyer, Nigel Chan, Jan Hoentschel
  • Patent number: 9590118
    Abstract: The present disclosure provides, in a first aspect, a semiconductor device structure, including an SOI substrate comprising a semiconductor base substrate, a buried insulating structure formed on the semiconductor base substrate and a semiconductor film formed on the buried insulating structure, wherein the buried insulating structure comprises a multilayer stack having a nitride layer interposed between two oxide layers. The semiconductor device structure further includes a semiconductor device formed in and above an active region of the SOI substrate, and a back bias contact which is electrically connected to the semiconductor base substrate below the semiconductor device.
    Type: Grant
    Filed: September 14, 2015
    Date of Patent: March 7, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Elliot John Smith, Sven Beyer, Nigel Chan, Jan Hoentschel
  • Patent number: 9583240
    Abstract: The present disclosure relates to a semiconductor structure comprising a positive temperature coefficient thermistor and a negative temperature coefficient thermistor, connected to each other in parallel by means of connecting elements which are configured such that the resistance resulting from the parallel connection is substantially stable in a predetermined temperature range, and to a corresponding manufacturing method.
    Type: Grant
    Filed: August 26, 2014
    Date of Patent: February 28, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Stefan Flachowsky, Ralf Illgen, Jan Hoentschel
  • Publication number: 20170040354
    Abstract: The present disclosure provides, in accordance with some illustrative embodiments, a capacitor structure comprising an active region formed in a semiconductor substrate, a MOSFET device comprising source and drain regions formed in the active region and a gate electrode formed above the active region, and a first electrode and a second electrode formed in a metallization layer above the MOSFET device, wherein the first electrode is electrically connected with the source and drain regions via respective source and drain contacts and the second electrode is electrically connected with the gate electrode via a gate contact.
    Type: Application
    Filed: February 12, 2016
    Publication date: February 9, 2017
    Inventors: Elliot John Smith, Sven Beyer, Jan Hoentschel, Alexander Ebermann
  • Publication number: 20170040450
    Abstract: The present disclosure provides, in accordance with some illustrative embodiments, a method of forming a semiconductor device, the method including providing an SOI substrate with an active semiconductor layer disposed on a buried insulating material layer, which is in turn formed on a base substrate material, forming a gate structure on the active semiconductor layer in an active region of the SOI substrate, partially exposing the base substrate for forming at least one bulk exposed region after the gate structure is formed, and forming a contact structure for contacting the at least one bulk exposed region.
    Type: Application
    Filed: August 3, 2015
    Publication date: February 9, 2017
    Inventors: Elliot John Smith, Sven Beyer, Tom Hasche, Jan Hoentschel
  • Publication number: 20170025398
    Abstract: A semiconductor die is provided with an optical transmitter configured to transmit an optical signal to another die and an optical receiver configured to receive an optical signal from another die. Furthermore, a method of forming a semiconductor device is provided including forming a first semiconductor die with the steps of providing a semiconductor substrate, forming a transistor device at least partially over the semiconductor substrate, forming an optical receiver one of at least partially over and at least partially in the semiconductor substrate, forming a metallization layer over the transistor device, and forming an optical transmitter one of at least partially over the metallization layer and at least partially in the metallization layer.
    Type: Application
    Filed: July 20, 2015
    Publication date: January 26, 2017
    Inventors: Sven Beyer, Jan Hoentschel, Alexander Ebermann
  • Patent number: 9553046
    Abstract: A method of forming a semiconductor device comprising a fuse is provided including providing a semiconductor-on-insulator (SOI) structure comprising an insulating layer and a semiconductor layer formed on the insulating layer, forming raised semiconductor regions on the semiconductor layer adjacent to a central portion of the semiconductor layer and performing a silicidation process of the central portion of the semiconductor layer and the raised semiconductor regions to form a silicided semiconductor layer and silicided raised semiconductor regions.
    Type: Grant
    Filed: May 21, 2015
    Date of Patent: January 24, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Jan Hoentschel, Peter Baars, Hans-Peter Moll
  • Publication number: 20160358915
    Abstract: A semiconductor device includes a semiconductor substrate and a fin positioned above the semiconductor substrate, wherein the fin includes a semiconductor material. Additionally, a ferroelectric high-k spacer covers sidewall surfaces of the fin and a non-ferroelectric high-k material layer covers the ferroelectric high-k spacer and the fin, wherein a portion of the non-ferroelectric high-k material layer is positioned on and in direct contact with the semiconductor material at the upper surface of the fin.
    Type: Application
    Filed: August 16, 2016
    Publication date: December 8, 2016
    Inventors: Stefan Flachowsky, Ralf Illgen, Jan Hoentschel
  • Publication number: 20160343659
    Abstract: A method of forming a semiconductor device comprising a fuse is provided including providing a semiconductor-on-insulator (SOI) structure comprising an insulating layer and a semiconductor layer formed on the insulating layer, forming raised semiconductor regions on the semiconductor layer adjacent to a central portion of the semiconductor layer and performing a silicidation process of the central portion of the semiconductor layer and the raised semiconductor regions to form a silicided semiconductor layer and silicided raised semiconductor regions.
    Type: Application
    Filed: May 21, 2015
    Publication date: November 24, 2016
    Inventors: Jan Hoentschel, Peter Baars, Hans-Peter Moll
  • Patent number: 9502564
    Abstract: A semiconductor device includes an active region formed in a semiconductor substrate, a gate structure disposed over the active region, source/drain regions formed in the active region in alignment with the gate structure, and a buried insulating material region disposed in the active region under the gate structure. The buried insulating material region is surrounded by the active region and borders a channel region in the active region below the gate structure along a depth of the active region. The source/drain regions have a depth greater than a top surface of the buried insulating material region.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: November 22, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Hans-Peter Moll, Peter Baars, Jan Hoentschel
  • Patent number: 9490189
    Abstract: A method of controlling temperature in a semiconductor device that includes a stacked device configuration is disclosed. The method includes providing a Peltier element having a metal-based heat sink formed above a first substrate of the stacked device configuration and a metal-based heat source formed above a second substrate of the stacked device configuration, and establishing a current flow through the Peltier element when the semiconductor device is in a specified operating phase.
    Type: Grant
    Filed: May 6, 2014
    Date of Patent: November 8, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Uwe Griebenow, Jan Hoentschel, Thilo Scheiper, Sven Beyer
  • Patent number: 9490344
    Abstract: Disclosed herein are various semiconductor devices with dual metal silicide regions and to various methods of making such devices. One illustrative method disclosed herein includes the steps of forming an upper portion of a source/drain region that is positioned above a surface of a semiconducting substrate, wherein the upper portion of the source/drain region has an upper surface that is positioned above the surface of the substrate by a distance that is at least equal to a target thickness of a metal silicide region to be formed in the upper portion of the source/drain region and forming the metal silicide region in the upper portion of the source/drain region.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: November 8, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Stefan Flachowsky, Jan Hoentschel, Thilo Scheiper