Patents by Inventor Jay R. Wallace
Jay R. Wallace has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11948781Abstract: A processing system may include a plasma chamber operable to generate a plasma, and an extraction assembly, arranged along a side of the plasma chamber. The extraction assembly may include an extraction plate including an extraction aperture, the extraction plate having a non-planar shape, and generating an extracted ion beam at a high angle of incidence with respect to a perpendicular to a plane of a substrate, when the plane of the substrate is arranged parallel to the side of the plasma chamber.Type: GrantFiled: January 27, 2021Date of Patent: April 2, 2024Assignee: Applied Materials, Inc.Inventors: Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Jay R. Wallace, Kevin M. Daniels, Kevin T. Ryan, Minab B. Teferi, Frank Sinclair, Joseph C. Olson
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Publication number: 20230197422Abstract: A fastening assembly for fastening a beam blocker to an extraction plate, the fastening assembly including a mounting pin having a shaft portion, a base portion at a first end of the shaft portion, and a head portion at a second end of the shaft portion, a centering sleeve radially surrounding the shaft portion and axially abutting the base portion, the centering sleeve being radially compressible between the shaft portion and the extraction plate and between the shaft portion and the beam blocker, an annular spacer surrounding the centering sleeve and axially abutting the beam blocker, with the centering sleeve extending partially into the spacer, and a latching cap surrounding the shaft portion and axially abutting the spacer, with the shaft portion extending through a through hole of the latching cap, the through hole being smaller than the head portion in a direction perpendicular to an axis of mounting pin.Type: ApplicationFiled: December 20, 2021Publication date: June 22, 2023Applicant: Applied Materials, Inc.Inventors: Kevin T. Ryan, Appu Naveen Thomas, Adam Calkins, Jay R. Wallace, Tyler Rockwell, Solomon Belangedi Basame, Kevin M. Daniels, Kevin Richard Verrier
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Publication number: 20230124509Abstract: An extraction assembly may include an extraction plate for placement along a side of a plasma chamber, and having an extraction aperture, elongated along a first direction, and having an aperture height, extending along a second direction, perpendicular to the first direction. The extraction plate defines an inner surface along the extraction aperture, lying in a first plane. A beam blocker is disposed over the extraction aperture, and has an outer surface, disposed in a second plane, different than the first plane. As such, the beam blocker overlaps with the extraction plate along a first edge of the extraction aperture by a first overlap distance, and overlaps with the extraction plate along a second edge of the extraction aperture by a second overlap distance, so as to define a first extraction slit, along the first edge, and a second extraction slit along the second edge.Type: ApplicationFiled: October 17, 2021Publication date: April 20, 2023Applicant: Applied Materials, Inc.Inventors: Costel Biloiu, Jay R. Wallace, Solomon Belangedi Basame, Kevin R. Anglin, Tyler Rockwell
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Publication number: 20220384156Abstract: A substrate holder assembly including a substrate platen, the substrate platen disposed to support a substrate at a substrate position, a halo ring, the halo ring being disposed around the substrate position, and an outer halo being disposed around the halo ring and defining a first aperture, wherein the outer halo is disposed to engage the halo ring, the halo ring being disposed at least partially within the first aperture, the halo ring defining a second aperture, concentrically positioned within the first aperture, wherein the outer halo and the halo ring are formed at least partially of silicon, silicon carbide, doped silicon, quartz, and ceramic.Type: ApplicationFiled: May 25, 2021Publication date: December 1, 2022Applicant: Applied Materials, Inc.Inventors: Jay R. Wallace, Simon Ruffell, Kevin R. Anglin, Tyler Rockwell, Christopher Campbell, Kevin M. Daniels, Richard J. Hertel, Kevin T. Ryan
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Patent number: 11495430Abstract: An ion beam processing system including a plasma chamber, a plasma plate, disposed alongside the plasma chamber, the plasma plate defining a first extraction aperture, a beam blocker, disposed within the plasma chamber and facing the extraction aperture, a blocker electrode, disposed on a surface of the beam blocker outside of the plasma chamber, and an extraction electrode disposed on a surface of the plasma plate outside of the plasma chamber.Type: GrantFiled: July 15, 2020Date of Patent: November 8, 2022Assignee: Applied Materials, Inc.Inventors: Jay R. Wallace, Costel Biloiu, Kevin M. Daniels
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Patent number: 11361935Abstract: An extraction plate for an ion beam system. The extraction plate may include an insulator body that includes a peripheral portion, to connect to a first side of a plasma chamber, and further includes a central portion, defining a concave shape. As such, an extraction aperture may be arranged along a first surface of the central portion, where the first surface is oriented at a high angle with respect to the first side. The extraction plate may further include a patterned electrode, comprising a first portion and a second portion, affixed to an outer side of the insulator body, facing away from the plasma chamber, wherein the first portion is separated from the second portion by an insulating gap.Type: GrantFiled: November 7, 2020Date of Patent: June 14, 2022Assignee: Applied Materials, Inc.Inventors: Costel Biloiu, Jay R. Wallace, Kevin M. Daniels, Frank Sinclair, Christopher Campbell
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Publication number: 20220148843Abstract: An extraction plate for an ion beam system. The extraction plate may include an insulator body that includes a peripheral portion, to connect to a first side of a plasma chamber, and further includes a central portion, defining a concave shape. As such, an extraction aperture may be arranged along a first surface of the central portion, where the first surface is oriented at a high angle with respect to the first side. The extraction plate may further include a patterned electrode, comprising a first portion and a second portion, affixed to an outer side of the insulator body, facing away from the plasma chamber, wherein the first portion is separated from the second portion by an insulating gap.Type: ApplicationFiled: November 7, 2020Publication date: May 12, 2022Applicant: Applied Materials, Inc.Inventors: Costel Biloiu, Jay R. Wallace, Kevin M. Daniels, Frank Sinclair, Christopher Campbell
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Publication number: 20220020557Abstract: An ion beam processing system including a plasma chamber, a plasma plate, disposed alongside the plasma chamber, the plasma plate defining a first extraction aperture, a beam blocker, disposed within the plasma chamber and facing the extraction aperture, a blocker electrode, disposed on a surface of the beam blocker outside of the plasma chamber, and an extraction electrode disposed on a surface of the plasma plate outside of the plasma chamber.Type: ApplicationFiled: July 15, 2020Publication date: January 20, 2022Applicant: Applied Materials, Inc.Inventors: Jay R. Wallace, Costel Biloiu, Kevin M. Daniels
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Publication number: 20210391155Abstract: A processing system may include a plasma chamber operable to generate a plasma, and an extraction assembly, arranged along a side of the plasma chamber. The extraction assembly may include an extraction plate including an extraction aperture, the extraction plate having a non-planar shape, and generating an extracted ion beam at a high angle of incidence with respect to a perpendicular to a plane of a substrate, when the plane of the substrate is arranged parallel to the side of the plasma chamber.Type: ApplicationFiled: January 27, 2021Publication date: December 16, 2021Applicant: Applied Materials, Inc.Inventors: Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Jay R. Wallace, Kevin M. Daniels, Kevin T. Ryan, Minab B. Teferi, Frank Sinclair, Joseph C. Olson
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Publication number: 20180122670Abstract: An apparatus may include a platen to hold a substrate. A substrate plane structure may be disposed in front of the platen. The substrate plane structure has an opening therein. The apparatus may further include a removable structure disposed in the opening of the substrate plane structure. The removable structure may have an opening exposing a surface of the platen.Type: ApplicationFiled: November 1, 2016Publication date: May 3, 2018Inventors: Ernest E. Allen, Richard John Hertel, Jay R. Wallace, Keith A. Miller
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Patent number: 8791430Abstract: Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.Type: GrantFiled: March 2, 2012Date of Patent: July 29, 2014Assignee: TEL Epion Inc.Inventors: Matthew C. Gwinn, Avrum Freytsis, Jay R. Wallace
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Patent number: 8409399Abstract: A chemical oxide removal (COR) processing system is presented, wherein the COR processing system includes a first treatment chamber and a second treatment chamber. The first treatment chamber comprises a chemical treatment chamber that provides a temperature controlled chamber having a protective barrier. The second treatment chamber comprises a heat treatment chamber that provides a temperature-controlled chamber having a protective barrier.Type: GrantFiled: May 21, 2009Date of Patent: April 2, 2013Assignee: Tokyo Electron LimitedInventors: Arthur H. LaFlamme, Jr., Thomas Hamelin, Jay R Wallace
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Patent number: 8323410Abstract: A high throughput chemical treatment system for processing a plurality of substrates is described. The chemical treatment system is configured to chemically treat a plurality of substrates in a dry, non-plasma environment.Type: GrantFiled: July 31, 2008Date of Patent: December 4, 2012Assignee: Tokyo Electron LimitedInventors: Jay R. Wallace, Hiroyuki Takahashi
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Patent number: 8303716Abstract: A high throughput processing system having a chemical treatment system and a thermal treatment system for processing a plurality of substrates is described. The chemical treatment system is configured to chemically treat a plurality of substrates in a dry, non-plasma environment. The thermal treatment system is configured to thermally treat a plurality of substrates chemically treated in the chemical treatment system.Type: GrantFiled: July 31, 2008Date of Patent: November 6, 2012Assignee: Tokyo Electron LimitedInventors: Jay R. Wallace, Thomas Hamelin
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Patent number: 8287688Abstract: A high throughput chemical treatment system for processing a plurality of substrates is described. The chemical treatment system is configured to chemically treat a plurality of substrates in a dry, non-plasma environment. A substrate support in the chemical treatment system is configured to support a plurality of substrates.Type: GrantFiled: July 31, 2008Date of Patent: October 16, 2012Assignee: Tokyo Electron LimitedInventors: Jay R. Wallace, Hiroyuki Takahashi
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Publication number: 20120223249Abstract: Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.Type: ApplicationFiled: March 2, 2012Publication date: September 6, 2012Applicant: TEL EPION Inc.Inventors: Matthew C. GWINN, Avrum FREYTSIS, Jay R. WALLACE
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Patent number: 8115140Abstract: A heater assembly configured to elevate a temperature of a processing element in a chemical treatment system is described. The heater assembly may be configured to uniformly heat a large area processing element, such as a processing element that spans a plurality of substrates. Additionally, for example, the heater assembly may be configured to elevate a temperature of an upper assembly, a gas injection assembly, a substrate holder, a chamber wall, or any combination of two or more thereof.Type: GrantFiled: July 31, 2008Date of Patent: February 14, 2012Assignee: Tokyo Electron LimitedInventors: Charles R. Launsby, Jay R. Wallace
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Publication number: 20100025389Abstract: A heater assembly configured to elevate a temperature of a processing element in a chemical treatment system is described. The heater assembly may be configured to uniformly heat a large area processing element, such as a processing element that spans a plurality of substrates. Additionally, for example, the heater assembly may be configured to elevate a temperature of an upper assembly, a gas injection assembly, a substrate holder, a chamber wall, or any combination of two or more thereof.Type: ApplicationFiled: July 31, 2008Publication date: February 4, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Charles R. Launsby, Jay R. Wallace
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Publication number: 20100024982Abstract: A high throughput processing system having a chemical treatment system and a thermal treatment system for processing a plurality of substrates is described. The chemical treatment system is configured to chemically treat a plurality of substrates in a dry, non-plasma environment. The thermal treatment system is configured to thermally treat a plurality of substrates chemically treated in the chemical treatment system.Type: ApplicationFiled: July 31, 2008Publication date: February 4, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Jay R. Wallace, Thomas Hamelin
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Publication number: 20100025367Abstract: A high throughput chemical treatment system for processing a plurality of substrates is described. The chemical treatment system is configured to chemically treat a plurality of substrates in a dry, non-plasma environment.Type: ApplicationFiled: July 31, 2008Publication date: February 4, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Jay R. Wallace, Hiroyuki Takahashi