Patents by Inventor Jean-Marc BETHOUX

Jean-Marc BETHOUX has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11913134
    Abstract: A process for manufacturing a two-dimensional film of a group IV material having a hexagonal crystalline structure, in particular, graphene, comprises formation of a growth substrate, comprising the transfer of a single-crystal metal film suitable for the growth of the two-dimensional film on a support substrate, and epitaxial growth of the two-dimensional film on the metal film of the substrate.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: February 27, 2024
    Assignee: SOITEC
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Publication number: 20230416940
    Abstract: A process for manufacturing a two-dimensional film of a group IV material having a hexagonal crystalline structure, in particular, graphene, comprises formation of a growth substrate, comprising the transfer of a single-crystal metal film suitable for the growth of the two-dimensional film on a support substrate, and epitaxial growth of the two-dimensional film on the metal film of the substrate.
    Type: Application
    Filed: September 5, 2023
    Publication date: December 28, 2023
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Publication number: 20230217832
    Abstract: A composite substrate includes a final substrate, and a piezoelectric material directly molecularly bonded to the final substrate at a first interface. The piezoelectric material comprises an epitaxial layer, but does not comprise a seed layer. Additional composite substrates include a final substrate, and a piezoelectric material directly molecularly bonded to the final substrate at a first interface. The piezoelectric material comprises an epitaxial layer. The composite substrate further includes a seed layer on which the piezoelectric material has been epitaxially grown. The seed layer is disposed on a side of the epitaxial layer opposite the final substrate. An acoustic wave device comprises such a composite substrate with at least one electrode on a surface of the piezoelectric layer opposite the substrate.
    Type: Application
    Filed: March 6, 2023
    Publication date: July 6, 2023
    Inventors: Bruno Ghyselen, Ionut Radu, Jean-Marc Bethoux
  • Publication number: 20230075685
    Abstract: A method for manufacturing a film, notably monocrystalline, on a flexible sheet, comprises the following steps: providing a donor substrate, forming an embrittlement zone in the donor substrate so as to delimit the film, forming the flexible sheet by deposition over the surface of the film, and detaching the donor substrate along the embrittlement zone so as to transfer the film onto the flexible sheet.
    Type: Application
    Filed: October 25, 2022
    Publication date: March 9, 2023
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Patent number: 11600766
    Abstract: A method for manufacturing a monocrystalline piezoelectric material layer includes providing a donor substrate made of the piezoelectric material, providing a receiving substrate, transferring a so-called “seed layer” of the donor substrate onto the receiving substrate, and using epitaxy of the piezoelectric material on the seed layer until the desired thickness for the monocrystalline piezoelectric layer is obtained.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: March 7, 2023
    Assignee: Soitec
    Inventors: Bruno Ghyselen, Ionut Radu, Jean-Marc Bethoux
  • Patent number: 11557715
    Abstract: A method for manufacturing a film, notably monocrystalline, on a flexible sheet, comprises the following steps: providing a donor substrate, forming an embrittlement zone in the donor substrate so as to delimit the film, forming the flexible sheet by deposition over the surface of the film, and detaching the donor substrate along the embrittlement zone so as to transfer the film onto the flexible sheet.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: January 17, 2023
    Assignee: Soitec
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Patent number: 11469367
    Abstract: A method for separating a removable composite structure using a light flux includes supplying the removable composite structure, which successively comprises: a substrate that is transparent to the light flux; an optically absorbent layer for at least partially absorbing a light flux; a sacrificial layer adapted to dissociate subject to the application of a temperature higher than a dissociation temperature and made of a material different from that of the optically absorbent layer; and at least one layer to be separated. The method further includes applying a light flux through the substrate, the light flux being at least partly absorbed by the optically absorbent layer, so as to heat the optically absorbent layer; heating the sacrificial layer by thermal conduction from the optically absorbent layer, up to a temperature that is greater than or equal to the dissociation temperature; and dissociating the sacrificial layer under the effect of the heating.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: October 11, 2022
    Assignee: Soitec
    Inventors: Jean-Marc Bethoux, Guillaume Besnard, Yann Sinquin
  • Patent number: 11462676
    Abstract: A method for adjusting the stress state of a piezoelectric film having a first stress state at room temperature includes a step of forming an assembly including a carrier having a thermal expansion coefficient, a compliant layer placed on the carrier, and the piezoelectric film placed on the compliant layer, the piezoelectric film having a thermal expansion coefficient different from that of the carrier. The method also includes a step of heat treating the assembly, in which the assembly is heated to a treatment temperature above the glass transition temperature of the compliant layer. The present disclosure also relates to a process for fabricating an acoustic wave device comprising the piezoelectric layer the stress state of which was adjusted as described herein.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: October 4, 2022
    Assignee: Soitec
    Inventors: Jean-Marc Bethoux, Yann Sinquin, Damien Radisson
  • Publication number: 20220301923
    Abstract: A method for manufacturing a film on a support having a non-flat surface comprises: providing a donor substrate having a non-flat surface, forming an embrittlement zone in the donor substrate so as to delimit the film to be transferred, forming the support by deposition on the non-flat surface of the film to be transferred, and detaching the donor substrate along the embrittlement zone so as to transfer the film onto the support.
    Type: Application
    Filed: June 6, 2022
    Publication date: September 22, 2022
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Publication number: 20220270875
    Abstract: A method for producing a composite silicon carbide structure comprises: providing an initial substrate of monocrystalline silicon carbide; depositing an intermediate layer of polycrystalline silicon carbide at a temperature higher than 1000° C. on the initial substrate, the intermediate layer having a thickness greater than or equal to 1.5 microns; implanting light ionic species through the intermediate layer to form a buried brittle plane in the initial substrate, delimiting the thin layer between the buried brittle plane and the intermediate layer, and depositing an additional layer of polycrystalline silicon carbide at a temperature higher than 1000° C. on the intermediate layer, the intermediate layer and the additional layer forming a carrier substrate, and separating the buried brittle plane during the deposition of the additional layer.
    Type: Application
    Filed: July 2, 2020
    Publication date: August 25, 2022
    Inventors: Yann Sinquin, Jean-Marc Bethoux, Damien Radisson
  • Patent number: 11373897
    Abstract: A method for manufacturing a film on a support having a non-flat surface comprises: providing a donor substrate having a non-flat surface, forming an embrittlement zone in the donor substrate so as to delimit the film to be transferred, forming the support by deposition on the non-flat surface of the film to be transferred, and detaching the donor substrate along the embrittlement zone, so as to transfer the film onto the support.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: June 28, 2022
    Assignee: Soitec
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Patent number: 11295950
    Abstract: A structure that can be used to manufacture at least one active layer made of a III-V material thereon includes a substrate comprising a carrier having a main face, a dielectric layer located on the main face of the carrier, and a plurality of single-crystal semiconductor islands located directly on the dielectric layer. The islands have an upper surface in order to serve as a seed surface for the growth of the active layer. The structure further comprises a seed layer located between the single-crystal semiconductor islands, directly on the portion of the dielectric layer that is not covered by the islands, without masking the upper surface of the islands, so that the dielectric layer is not exposed to the external environment.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: April 5, 2022
    Assignee: Soitec
    Inventors: David Sotta, Jean-Marc Bethoux, Oleg Kononchuk
  • Publication number: 20220059720
    Abstract: A process for fabricating a growth substrate comprises preparing a donor substrate by forming a crystalline semiconductor surface layer on a seed layer of a carrier. This preparation comprises forming the surface layer as a plurality of alternations of an InGaN primary layer and of an AlGaN secondary layer, the indium concentration and the thickness of the primary layers and the aluminum concentration and the thickness of the secondary layers being selected so that a homogeneous AlInGaN layer that is equivalent, in terms of concentration of aluminum and indium-, to the surface layer has a natural lattice parameter different from the lattice parameter of the seed layer.
    Type: Application
    Filed: November 29, 2019
    Publication date: February 24, 2022
    Inventors: Jean-Marc Bethoux, Mariia Rozhavskaia
  • Publication number: 20210367139
    Abstract: A method of manufacturing a monocrystalline layer comprises the following successive steps: providing a donor substrate comprising a piezoelectric material of composition ABO3, where A consists of at least one element from among Li, Na, K, H, Ca; and B consists of at least one element from among Nb, Ta, Sb, V; providing a receiver substrate, transferring a layer called the “seed layer” from the donor substrate on to the receiver substrate, such that the seed layer is at the bonding interface, followed by thinning of the donor substrate layer; and growing a monocrystalline layer of composition A?B?O3 on piezoelectric material ABO3 of the seed layer, where A? consists of a least one of the following elements Li, Na, K, H; B? consists of a least one of the following elements Nb, Ta, Sb, V; and A? is different from A or B? is different from B.
    Type: Application
    Filed: August 6, 2021
    Publication date: November 25, 2021
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Patent number: 11171256
    Abstract: A method for manufacturing a plurality of crystalline semiconductor islands having a variety of lattice parameters includes the following steps: providing a relaxation substrate that comprises a medium, a flow layer disposed on the medium and, a plurality of strained crystalline semiconductor islands having an initial lattice parameter located on the flow layer, a first group of islands having a first lattice parameter and a second group of islands having a second lattice parameter that is different from the first; and heat treating the relaxation substrate at a relaxation temperature greater than or equal to the glass transition temperature of the flow layer to cause differentiated lateral expansion of the islands of the first and second group. The lattice parameter of the relaxed islands of the first group and the relaxed islands of the second group then have different values.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: November 9, 2021
    Assignee: Soitec
    Inventors: Jean-Marc Bethoux, Morgane Logiou, Raphaél Caulmilone
  • Patent number: 11101428
    Abstract: A method of manufacturing a monocrystalline layer, comprises the following successive steps: providing a donor substrate comprising a piezoelectric material of composition ABO3, where A consists of at least one element from among Li, Na, K, H, Ca; and B consists of at least one element from among Nb, Ta, Sb, V; providing a receiver substrate, transferring a layer called the “seed layer” from the donor substrate on to the receiver substrate, such that the seed layer is at the bonding interface, followed by thinning of the donor substrate layer; and growing a monocrystalline layer of composition A?B?O3 on piezoelectric material ABO3 of the seed layer where A? consists of a least one of the following elements Li, Na, K, H; B? consists of a least one of the following elements Nb, Ta, Sb, V; and A? is different from A or B? is different from B.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: August 24, 2021
    Assignee: SOITEC
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux
  • Patent number: 11081521
    Abstract: A method for manufacturing a plurality of crystalline semiconductor islands having different lattice parameters includes providing a relaxation substrate comprising a support and a flow layer on the support that includes first and second groups of blocks having different viscosities at a relaxation temperature. The relaxation substrate also comprises a plurality of strained crystalline semiconductor islands on the flow layer, the islands of a first group being located on the first group of blocks and islands of a second group being located on the second group of blocks. The relaxation substrate is then heat treated at a relaxation temperature higher than or equal to the glass transition temperature of at least one block of the flow layer to cause differentiated lateral expansion of the first and second groups of islands such that the first and second groups of relaxed islands then have different lattice parameters.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: August 3, 2021
    Assignee: Soitec
    Inventor: Jean-Marc Bethoux
  • Publication number: 20210210653
    Abstract: A growth substrate for forming optoelectronic devices comprises a growth medium and, arranged on the growth medium, a first group of crystalline semiconductor islands having a first lattice parameter and a second group of crystalline semiconductor islands having a second lattice parameter that is different from the first. Methods may be used to manufacture such growth substrates. The methods may be used to provide a monolithic micro-panel or light-emitting diodes or a micro-display screen.
    Type: Application
    Filed: March 14, 2018
    Publication date: July 8, 2021
    Inventors: David Sotta, Olivier Ledoux, Olivier Bonnin, Jean-Marc Bethoux, Morgane Logiou, Raphaél Caulmilone
  • Publication number: 20210028348
    Abstract: A method for separating a removable composite structure using a light flux includes supplying the removable composite structure, which successively comprises: a substrate that is transparent to the light flux; an optically absorbent layer for at least partially absorbing a light flux; a sacrificial layer adapted to dissociate subject to the application of a temperature higher than a dissociation temperature and made of a material different from that of the optically absorbent layer; and at least one layer to be separated. The method further includes applying a light flux through the substrate, the light flux being at least partly absorbed by the optically absorbent layer, so as to heat the optically absorbent layer; heating the sacrificial layer by thermal conduction from the optically absorbent layer, up to a temperature that is greater than or equal to the dissociation temperature; and dissociating the sacrificial layer under the effect of the heating.
    Type: Application
    Filed: March 22, 2019
    Publication date: January 28, 2021
    Applicants: Soitec, Soitec
    Inventors: Jean-Marc Bethoux, Guillaume Besnard, Yann Sinquin
  • Publication number: 20200343441
    Abstract: A method for manufacturing film, notably monocrystalline, on a flexible sheet, comprises the following steps: providing a donor substrate, forming an embrittlement zone in the donor substrate so as to delimit film, forming the flexible sheet by deposition over the surface of the film, and detaching the donor substrate along the embrittlement zone so as to transfer the film onto the flexible sheet.
    Type: Application
    Filed: October 31, 2018
    Publication date: October 29, 2020
    Inventors: Bruno Ghyselen, Jean-Marc Bethoux