Patents by Inventor Jean-Marc BETHOUX

Jean-Marc BETHOUX has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110127581
    Abstract: The present invention relates to a support for the epitaxy of a layer of a material of composition AlxInyGa(1-x-y)N, where 0?x?1, 0?y?1 and x+y?1, having successively from its base to its surface; a support substrate, a bonding layer, a monocrystalline seed layer for the epitaxial growth of the layer of material AlxInyGa(1-x-y)N. The support substrate is made of a material that presents an electrical resistivity of less than 10?3 ohm·cm and a thermal conductivity of greater than 100 W·m?1·K?1. The seed layer is in a material of the composition AlxInyGa(1-x-y)N, where 0?x?1, 0?y?1 and x+y?1. The seed and bonding layers provide a specific contact resistance that is less than or equal to 0.1 ohm·cm?2, and the materials of the support substrate, the bonding layer and the seed layer are refractory at a temperature of greater than 750° C. or even greater than 1000° C. The invention also relates to methods for manufacturing the support.
    Type: Application
    Filed: November 30, 2010
    Publication date: June 2, 2011
    Inventors: Jean-Marc Bethoux, Fabrice Letertre, Chris Werkhoven, Ionut Radu, Oleg Kononchuk
  • Publication number: 20100127353
    Abstract: Composite substrates are produced that include a strained III-nitride material seed layer on a support substrate. Methods of producing the composite substrate include developing a desired lattice strain in the III-nitride material to produce a lattice parameter substantially matching a lattice parameter of a device structure to be formed on the composite substrate. The III-nitride material may be formed with a Ga polarity or a N polarity. The desired lattice strain may be developed by forming a buffer layer between the III-nitride material and a growth substrate, implanting a dopant in the III-nitride material to modify its lattice parameter, or forming the III-nitride material with a coefficient of thermal expansion (CTE) on a growth substrate with a different CTE.
    Type: Application
    Filed: October 30, 2009
    Publication date: May 27, 2010
    Applicant: S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES, S.A.
    Inventors: Fabrice LETERTRE, Jean-Marc BETHOUX, Alice BOUSSAGOL