Abstract: This invention relates to an electromechanical actuator comprising a support and a deformable element comprising a portion anchored to at least one anchoring zone of the support and mobile portion, the deformable element comprising an electro-active layer, a reference electrode arranged on a first face of the electro-active layer an actuating electrode arranged on a second face, opposite the first face, of the electro-active layer comprises a capacitive device for measuring the deformation of the deformable element, said device being at least partially formed by a capacitive stack comprising a measuring electrode on the second face of the electro-active layer, a measuring portion of the reference electrode located facing the measuring electrode, and a portion of the electro-active layer inserted between the measuring electrode.

Abstract: A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.

Abstract: A pressure sensor to measure low pressures, including: a body extending in a plane, the body including a measurement zone situated at an end of the body, a connection zone situated at another end of the body, the measurement zone including a cavity delimited by a wall, that is deformable under effect of a difference in pressure between inside of the cavity and an external environment, the deformable wall situated at rest in a plane parallel to the plane of the sensor; a mechanism measuring deformation of the deformable wall, the measurement mechanism situated in the cavity; an electrical connection connecting the measurement mechanism to the connection zone, the electrical connection arranged in the body.

Abstract: A pressure sensor to measure low pressures, including: a body extending in a plane, the body including a measurement zone situated at an end of the body, a connection zone situated at another end of the body, the measurement zone including a cavity delimited by a wall, that is deformable under effect of a difference in pressure between inside of the cavity and an external environment, the deformable wall situated at rest in a plane parallel to the plane of the sensor; a mechanism measuring deformation of the deformable wall, the measurement mechanism situated in the cavity; an electrical connection connecting the measurement mechanism to the connection zone, the electrical connection arranged in the body.

Abstract: This invention relates to an electromechanical actuator comprising a support and a deformable element comprising a portion anchored to at least one anchoring zone of the support and mobile portion, the deformable element comprising an electro-active layer, a reference electrode arranged on a first face of the electro-active layer an actuating electrode arranged on a second face, opposite the first face, of the electro-active layer comprises a capacitive device for measuring the deformation of the deformable element, said device being at least partially formed by a capacitive stack comprising a measuring electrode on the second face of the electro-active layer, a measuring portion of the reference electrode located facing the measuring electrode, and a portion of the electro-active layer inserted between the measuring electrode.

Abstract: A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.

Abstract: A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimetres while its other dimensions are less than 10 times this thickness.

Abstract: A method for production of a capacitive sensor including a carrier whereupon electrodes separated from each other by a porous material rest, the porous material being made by porosifying trenches formed in a carrier.

Abstract: A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.

Abstract: A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimetres while its other dimensions are less than 10 times this thickness.

Abstract: A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimeters while its other dimensions are less than 10 times this thickness.

Abstract: A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimetres while its other dimensions are less than 10 times this thickness.

Abstract: A sensor structure is disclosed, notably for a harsh environment in a motor vehicle. The sensor includes a sensor body having, at one end, an element sensitive to the quantity to be measured in the harsh environment and, at another end, a circuit for connecting it, placed outside the harsh environment, physically separated from each other, connected by means for transmitting data without a connection, and between which means are provided that are permeable to data, for protecting the connecting circuit from the environment.

Abstract: A sensor structure notably for a harsh environment in a motor vehicle is disclosed. The sensor structure has a sensor body (1) having at one end an element (2) sensitive to the quantity to be measured in the harsh environment and at another end a connection circuit (3) for the latter, placed away from the harsh environment, and physically separated from one another. The sensor structure is connected by means for transmitting information by carrier current on an electrical conductor (5) of the sensor with which the sensitive element and the connection circuit are associated by wireless coupling means and between which are provided means (4) for protecting the connection circuit from the environment.

Abstract: A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.

Abstract: In order to increase the capacity of an “all-solid” type micro-battery, the layer of electrolyte is structured: transversing cavities are created in the flat layer, advantageously at the level of patches of collector material, then filled by anode or cathode material.

Abstract: A sensor structure is disclosed, notably for a harsh environment in a motor vehicle. The sensor includes a sensor body having, at one end, an element sensitive to the quantity to be measured in the harsh environment and, at another end, a circuit for connecting it, placed outside the harsh environment, physically separated from each other, connected by means for transmitting data without a connection, and between which means are provided that are permeable to data, for protecting the connecting circuit from the environment.

Abstract: A sensor structure notably for a harsh environment in a motor vehicle is disclosed. The sensor structure has a sensor body (1) having at one end an element (2) sensitive to the quantity to be measured in the harsh environment and at another end a connection circuit (3) for the latter, placed away from the harsh environment, and physically separated from one another. The sensor structure is connected by means for transmitting information by carrier current on an electrical conductor (5) of the sensor with which the sensitive element and the connection circuit are associated by wireless coupling means and between which are provided means (4) for protecting the connection circuit from the environment.

Abstract: A variable capacitor including at least two interdigitized combs provided with teeth, the cross section of the end of a tooth adjacent to the other comb being greater than the cross section of the end of a tooth remote from the other comb. The variable capacitor can be used in gyrometers and accelerometers.

Abstract: The present invention relates to a process for making a contact point (8) on the rear surface of a component including at least one first substrate (10) with at least one active region (12) and at least one second substrate (20) for protecting the active region. In accordance with the invention, a second substrate of a non-insulating material is used and at least one through insulation trench (21) is made in it surrounding a part (22) of this substrate, said part being in contact with the active region when the first and second substrates are assembled. Application to sensor conditioning.