Abstract: In order to increase the capacity of an “all-solid” type micro-battery, the layer of electrolyte is structured: transversing cavities are created in the flat layer, advantageously at the level of patches of collector material, then filled by anode or cathode material.

Abstract: This device, which is used to measure pressures or accelerations for example, comprises an isolation layer (32) that holds at least one piezoresistive gauge (29). The side tangents (T) of this gauge essentially make up over 90° angles with the surface (37) of the isolation layer. The device may be created using processes of wet isotropic etching, chemical anisotropic etching or isolation material growth processes.

Abstract: The present invention relates to a process for making a contact point (8) on the rear surface of a component including at least one first substrate (10) with at least one active region (12) and at least one second substrate (20) for protecting the active region. In accordance with the invention, a second substrate of a non-insulating material is used and at least one through insulation trench (21) is made in it surrounding a part (22) of this substrate, said part being in contact with the active region when the first and second substrates are assembled. Application to sensor conditioning.

Abstract: A structure having a first part and at least one second part. The second part is electrically insulated from the first part and the parts are formed in the same wafer of a material. The first and second parts have the same thickness, extend in the same plane and have at least one mutually adjacent edge. The adjacent edges are separated by a spacing. In addition there is at least one joint of insulating material arranged in the spacing to make the first and second parts integral. The structure may be used for sensors and isolated circuits.

Abstract: This device, which is used to measure pressures or accelerations for example, comprises an isolation layer (32) that holds at least one piezoresistive gauge (29). The side tangents (T) of this gauge essentially make up over 90° angles with the surface (37) of the isolation layer. The device may be created using processes of wet isotropic etching, chemical anisotropic etching or isolation material growth processes.

Abstract: A sensor or actuator structure having a first part and at least one second part. The second part is mobile and electrically insulated in relation to the first part. The first and second parts are formed in a noninsulating substrate wafer and have mutually adjacent edges separated by at least one cut which goes right through the substrate. The second part has at least one extension in the form of a beam which has one end fixed onto the first part by way of an electrically insulating joint. This device may be used in an accelerometer.

Abstract: An electrostatic motor and its method of production.This electric motor, comprising a fixed part (200, 204, 206, 208) called a stator with a deformable resilient membrane (208) and a moving part (230) called a rotor arranged on the membrane (208) and driven by deformation waves from the resilient membrane, is characterised in that it includes electrostatic means (204, 205) for deforming the membrane (208).

Abstract: A directional accelerometer and a process for the microlithographic fabrication of such an accelerometer. The accelerometer includes a substrate having at least one recess to define at least one beam in the substrate. One of the ends of the beam is integrally formed with the remainder of the substrate. The beam, which is oriented in the first direction, is deformable into the recess in a second direction only, parallel to the substrate surface and perpendicular to the first direction. The second direction corresponds to the acceleration component to be measured. Electrical connections and contacts are formed in the substrate for the device measuring the deformations of the beam. These measurements make it possible to determine the acceleration components.