Abstract: A method of treating a surface includes providing an object and applying a masking layer to a target surface area of the object. A sacrificial material is applied to a non-target surface area of the object. The method also includes removing the masking layer from the target surface area. The target surface area is exposed to a substance that etches or coats the target surface area. The sacrificial material from the non-target surface area of the object is removed, leaving the target surface area of the object etched or coated by the substance while the non-target surface area is not etched or coated by the substance.

Abstract: A first embodiment is a method for semiconductor process control comprising clustering processing tools of a processing stage into a tool cluster based on processing data and forming a prediction model for processing a semiconductor wafer based on the tool cluster. A second embodiment is a method for semiconductor process control comprising providing cluster routes between first stage tool clusters and second stage tool clusters, assigning a comparative optimization ranking to each cluster route, and scheduling processing of wafers. The comparative optimization ranking identifies comparatively which cluster routes provide for high wafer processing uniformity.

Abstract: Embodiments of an apparatus comprising a light guide including a proximal end, a distal end, a display positioned near the proximal end, an eye-tracking camera positioned at or near the proximal end to image eye-tracking radiation, a proximal optical element positioned in the light guide near the proximal end and a distal optical element positioned in the light guide near the distal end. The proximal optical element is optically coupled to the display, the eye-tracking camera and the distal optical element and the distal optical element is optically coupled to the proximal optical element, the ambient input region and the input/output region. Other embodiments are disclosed and claimed.

Abstract: An optical apparatus includes a light source, a deformable mirror, an actuator system, and a partially transparent mirror. The deformable mirror is positioned in an optical path of the image output from the light source. The actuator system is coupled to the deformable mirror to selectively adjust at least a curvature of the deformable mirror. The partially transparent mirror is positioned to be in front of the eye of the user when the optical apparatus is worn and optically aligned with the deformable mirror such that the image output from the light source positioned peripherally to the eye is reflected by the deformable mirror to the partially transparent mirror and reflected by the partially transparent mirror to the eye of the user.

Abstract: A wearable computing system may include a head-mounted display (HMD) and an optical system with a display panel configured to generate images. The optical system may include an optical element that is adjustable between at least a first configuration and a second configuration. When the optical element is in the first configuration, the images generated by the display panel are viewable at an internal viewing location. When the optical element is in the second configuration, the images generated by the display panel are projected externally from the HMD. For example, the location, refractive index, reflectance, opacity, and/or polarization of the optical element could be adjusted.

Abstract: An optical combiner includes a first, second, and third color combiner layer (“CCL”). The first CCL includes a first diffractive grating coated with a first filter configured to reflect a first color light and pass a second and a third color light. The second CCL includes a second diffractive grating coated with a second filter configured to reflect the second color light and pass the third color light. The third CCL includes a third diffractive grating coated with a third filter configured to partially reflect visible light. The diffractive gratings are each embedded in an index matched material and are angle-tuned diffractive gratings configured to receive image light at an angle and respectively reflect the first, second, and third color light in the image light at an order of diffraction that directs the light to an eye of a user.

Abstract: An eyepiece for a HMD includes a waveguide, an ambient light polarizer, and a wire grid polarizer with a diffraction lens having a lens function patterned into the wire grid polarizer. Polarized image light is guided between eye-ward and ambient sides of the waveguide from a display source to a viewing region of the waveguide where the polarized image light is directed out of the waveguide through the eye-ward side. The viewing region passes ambient light incident on the ambient side through to the eye-ward side. The ambient light polarizer is disposed adjacent to the ambient side to polarize the ambient light into polarized ambient light having a second polarization orthogonal to the first polarization. The wire grid polarizer is disposed adjacent to the eye-ward side along the viewing region. The wire grid polarizer is oriented to applying the lens function to the polarized image light via diffraction.

Abstract: A semiconductor manufacturing system, an interface system, a carrier, and a method for providing an ambient controlled environment is disclosed. The semiconductor manufacturing system comprises a plurality of process chambers; at least one interface system, wherein the interface system includes a first ambient control element; at least one carrier, wherein the carrier comprises a second ambient control element; and a control module coupled to the plurality of process chambers, the at least one interface system, and the at least one carrier.

Abstract: A calcium carbonate granulation and a method for preparing a calcium carbonate granulation are provided. The method includes applying an atomized binder to powdered calcium carbonate in a fluid bed granulator at a relatively high atomization pressure to achieve a reduced binder droplet size, and drying the resulting composition at elevated temperatures in a fluidized bed dryer. The resulting granulation include porous granules having a lower density and reduced mean particle size with improved compressibility. In addition, the resulting granulation can be compacted into tablets having a hardness 50% greater than the hardness of tablets formed from commercially available granulations.

Abstract: A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure.

Abstract: An optical combiner includes a first, second, and third color combiner layer (“CCL”). The first CCL includes a first diffractive grating coated with a first filter configured to reflect a first color light and pass a second and a third color light. The second CCL includes a second diffractive grating coated with a second filter configured to reflect the second color light and pass the third color light. The third CCL includes a third diffractive grating coated with a third filter configured to partially reflect visible light. The diffractive gratings are each embedded in an index matched material and are angle-tuned diffractive gratings configured to receive image light at an angle and respectively reflect the first, second, and third color light in the image light at an order of diffraction that directs the light to an eye of a user.

Abstract: An image waveguide includes first and second reflective surfaces being substantially parallel and opposing each other. The waveguide receives light from an in-coupling region through the first reflective surface, the light received at a first angle of incidence with respect to the second reflective surface. A reflective end surface positioned at an end of the waveguide and offset from perpendicular to the first and second reflective surfaces reflects the light to a second angle of incidence with respect to the second reflective surface that is less than the first angle of incidence. The light exits through an out-coupling region disposed on the first reflective surface to output the light at the second angle of incidence from the waveguide out the first reflective surface.

Abstract: A method to enable wafer result prediction includes collecting manufacturing data from various semiconductor manufacturing tools and metrology tools; choosing key parameters using an autokey method based on the manufacturing data; building a virtual metrology based on the key parameters; and predicting wafer results using the virtual metrology.

Abstract: An apparatus that includes a waveguide comprising a front surface, a back surface and an embedded structure between the front surface and the back surface. A reflective array is formed by at least part of the embedded structure. The reflective array includes a plurality of wedges, each wedge having a primary facet, a secondary facet, and a plateau facet wherein at least one of the plurality of primary facets is at least partially reflective. Other implementations are disclosed and claimed.

Abstract: An apparatus for simultaneously imaging a subject and displaying computer generated image (“CGI”) light to the subject includes a display array and a photodetector array. The display array and the photodetector array are disposed on a same semiconductor die. The display array includes display pixels configured to selectively generate the CGI light to be sent along a forward optical path. The photodetector array is positioned to receive non-visible image light that is reflected by the subject and directed along a reverse optical path. The CGI light to be sent along the forward optical path travels in a substantially opposite direction as the non-visible image light directed along the reverse optical path.

Abstract: An eyepiece for a HMD includes a waveguide, an ambient light polarizer, and a wire grid polarizer with a diffraction lens having a lens function patterned into the wire grid polarizer. Polarized image light is guided between eye-ward and ambient sides of the waveguide from a display source to a viewing region of the waveguide where the polarized image light is directed out of the waveguide through the eye-ward side. The viewing region passes ambient light incident on the ambient side through to the eye-ward side. The ambient light polarizer is disposed adjacent to the ambient side to polarize the ambient light into polarized ambient light having a second polarization orthogonal to the first polarization. The wire grid polarizer is disposed adjacent to the eye-ward side along the viewing region. The wire grid polarizer is oriented to applying the lens function to the polarized image light via diffraction.

Abstract: Embodiments of an apparatus comprising a light guide including a proximal end, a distal end, a display positioned near the proximal end, an eye-tracking camera positioned at or near the proximal end to image eye-tracking radiation, a proximal optical element positioned in the light guide near the proximal end and a distal optical element positioned in the light guide near the distal end. The proximal optical element is optically coupled to the display, the eye-tracking camera and the distal optical element and the distal optical element is optically coupled to the proximal optical element, the ambient input region and the input/output region. Other embodiments are disclosed and claimed.

Abstract: A multi-layer optical structure includes a pixel array layer, an addressing matrix layer, and a micro lens array. The pixel array layer includes an array of quantum dot pixels for emitting an image from a first side of the multi-layer optical structure. The addressing matrix layer adjoins the pixel array layer and includes electrically conductive signal lines to individual address and activate the quantum dot pixels to generate the image. The micro lens array includes micro lenses optically aligned with the quantum dot pixels in an emission path of the image to focus the image.

Abstract: An image waveguide includes an in-coupling region for receiving input light into the image waveguide and an out-coupling region for emitting output light from the image waveguide. The in-coupling region includes at least one in-coupling structure orientated to direct the input light into the waveguide for propagation towards the out-coupling region as guided light. The out-coupling region includes a two dimensional array of out-coupling mirror structures orientated to reflect the guided light out of the waveguide as the output light.

Abstract: Implementations are described of a waveguide apparatus including a proximal end, a distal end, a front surface and a back surface, the back surface being spaced apart from the front surface. A display input region is positioned at or near the proximal end, an ambient input region is positioned on the front surface near the distal end and an output region is positioned on the back surface near the distal end. One or more optical elements is positioned in or adjacent to the waveguide to direct display light from the display input region to the output region and to direct ambient light from the ambient input region to the output region, and an switchable mirror layer is positioned in or on the waveguide to selectively control the amount of ambient light that is directed to the output region. Other embodiments are disclosed and claimed.