Abstract: Integrated inspection and test systems for liquid crystal display (LCD) active plates. The integrated inspection and test systems may combine visual imaging inspection and an electronic sensing such as voltage imaging, electron beam sensing or charge sensing, in which the potential defect information obtained by the visual inspection system is combined with the potential defect information obtained by the electronic sensing system to produce a defect report. One or more high-resolution visual cameras are scanned over a stationary plate, and the image data from the camera(s) is processed to detect potential defects. A high-resolution electronic sensing system examines the stationary plate, and the image data from the sensor(s) is processed to detect potential defects. The potential defects from the visual image data and electronic sensing image data are processed to produce the final defect information.

Abstract: A method for inspecting a display panel includes capturing images of a portion of a plurality of display panels having display elements with an image acquisition device having sensor elements, each image comprising an image of approximately a first number of display elements captured with approximately a second number of sensor elements, the first number different from the second number, each image including a Moiré artifact pattern, combining the images of the portion of the plurality of display panels to form a reference image including a Moiré artifact pattern reference, capturing a sample image of a portion of a sample display panel having display elements with the image acquisition device, the sample image comprising an image of approximately the first number of display elements on the sample display captured with approximately the second number of sensor elements, the sample image including a sample Moiré artifact pattern, combining the sample image with the reference image to inhib

Abstract: A system is provided wherein a plurality of high accuracy air injectors are disposed along the edges of a sensor plate of a sensing head to form an air bearing and a plurality of high displacement air injectors are also disposed along the edges of the sensor plate to form an air bearing, each independently controlled, with the sensing head having high accuracy and low accuracy separation distance sensors coupled in a feedback loop through a mapper (a programmable CPU) which, without knowledge of the exact position of the sensors or air injectors, but being responsive to feedback information, iteratively adjusts relative separation of the sensor plate and a flat panel workpiece to the desired positional accuracy through digital to analog converters supplying control signals to analog amplifiers controlling orifices.

Abstract: A method and apparatus for identifying and classifying pixel defects, and in particular Mura defects using digital processing techniques. The present method includes steps of acquiring an image with a Mura defect, and performing a Laplacian convolution on the image to enhance the Mura defect against background illumination. A step of thresholding the Mura defect against the background illumination is also provided. The thresholded Mura defect is compared against the original Mura defect to define statistical parameters of the original Mura defect. An annular region is defined around the periphery of the Mura defect. Statistics of the annular region defines statistics for background illumination as compared to the original Mura defect. The statistics from the Mura defect are then compared to the background illumination statistics for Mura defect classification and analysis.

Abstract: An improved testing system and method for testing a flat-panel display is disclosed herein. A display is positioned under a high resolution camera for detection of, for example, brightness uniformity across the display. Errors in the detected image due to aliasing are avoided in the present invention by incrementally shifting the displayed image relative to the camera and detecting the displayed image at various shifted positions. A resulting accurate display can then be reconstructed by identifying those detector pixels generating a maximum signal. A single image may then be reconstructed using only those detected maximum pixel signals. The reconstructed image will be free of aliasing. The reconstructed image may then be analyzed electronically, and any anomalies in the pixels forming the display panel can then be accurately detected.

Abstract: A method for inspecting a substrate having a plurality of output pixels using an image sensing device having a plurality of input pixels includes the steps of capturing an input image of a plurality of groups of output pixels with a plurality of groups of input pixels, each group of input pixels capturing a group of output pixels, each input pixel in a group of input pixels having a position, inhibiting modulation contributions from input pixels in the input image, forming a plurality of images from the plurality of groups of input pixels in the input image, each image including input pixels from a similar position in each group of input pixels, detecting defects in each of the plurality of images, and determining defects in sub-pixels of the substrate in response to the defects detected in each of the plurality of images.

Abstract: In a computer system having both peripherals having their own DMA channel arbiter and peripherals having no arbiter, a separate arbitration unit, controlled directly by the CPU, is provided to arbitrate on behalf of peripherals having no arbiter. The CPU can thus freely assign different arbitration levels to such peripherals, and can instruct the arbitration unit to simultaneously arbitrate on different arbitration levels or for two or more DMA channels.