Patents by Inventor Jeffrey L. Franklin

Jeffrey L. Franklin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10800103
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery assembly. The energy delivery assembly includes a light source to emit one or more light beams, a first reflective member having a plurality of reflective facets, and at least one second reflective member. The first reflective member is rotatable such that sequential facets sweep the light beam sequentially along a path on the uppermost layer. The at least one second reflective member is movable such that the at least one second reflective surface is repositionable to receive at least one of the at least one light beam and redirect the at least one of at least one light beam along a two-dimensional path on the uppermost layer.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: October 13, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Raanan Zehavi, Jeffrey L. Franklin, Kashif Maqsood
  • Patent number: 10730240
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery system. The energy deliver system includes a light source to emit a light beam, and a reflective member having a plurality of reflective facets. The reflective member is positioned in a path of the light beam to receive the light beam and redirect the light beam toward the top surface of the platform to deliver energy to an uppermost layer of the layers of feed material to fuse the feed material. The reflective member is rotatable such that sequential facets sweep the light beam sequentially along a path on the uppermost layer.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: August 4, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Raanan Zehavi, Jeffrey L. Franklin, Kashif Maqsood
  • Publication number: 20190151944
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to deliver a plurality of successive layers of feed material onto the platform, a light source to generate a light beam, a first polygon mirror scanner to reflect the light beam towards the platform, and a second polygon mirror scanner to reflect the light beam towards the platform. The light beam is alternately directed to the first polygon mirror scanner and the second polygon mirror scanner such that the light beam is directed to the first polygon mirror scanner during a dead time of the second polygon mirror scanner and the light beam is directed to the second polygon mirror scanner during a dead time of the first polygon mirror scanner.
    Type: Application
    Filed: October 24, 2018
    Publication date: May 23, 2019
    Inventors: Paul J. Steffas, Ajey M. Joshi, Jeffrey L. Franklin, Zhihong Lin
  • Publication number: 20180339450
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to deliver a plurality of layers of feed material, one or more light sources configured to emit a first light beam and a second light beam, and a polygon beam scanner including a rotatable mirror having a plurality of reflective facets to redirect the first light beam and the second light beam toward the platform to deliver energy to an uppermost layer of feed material. The mirror is positioned and rotatable such that motion of each facet of the plurality of reflective facets causes the first light beam to sweep along a first path on the uppermost layer and causes the second light beam to sweep along the first path following the first light beam.
    Type: Application
    Filed: April 23, 2018
    Publication date: November 29, 2018
    Inventors: Jeffrey L. Franklin, Hou T. Ng, Nag B. Patibandla
  • Publication number: 20180339454
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery system. The energy delivery system has one or more light sources configured to emit a first light beam and a second light beam, and one or more reflective members each having reflective facets to redirect the first light beam or the second light beam toward an uppermost layer of feed material to deliver energy to the uppermost layer. The one or more reflective members are each rotatable such that motion of each sequential facet of the reflective facets of each of the one or more reflective members sweeps the first light beam along a first path on the uppermost layer or sweeps the second light beam along a second path on the uppermost layer.
    Type: Application
    Filed: April 23, 2018
    Publication date: November 29, 2018
    Inventors: Jeffrey L. Franklin, Hou T. Ng, Nag B. Patibandla
  • Publication number: 20180257301
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery system. The energy deliver system includes a light source to emit a light beam, and a reflective member having a plurality of reflective facets. The reflective member is positioned in a path of the light beam to receive the light beam and redirect the light beam toward the top surface of the platform to deliver energy to an uppermost layer of the layers of feed material to fuse the feed material. The reflective member is rotatable such that sequential facets sweep the light beam sequentially along a path on the uppermost layer.
    Type: Application
    Filed: November 13, 2017
    Publication date: September 13, 2018
    Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Raanan Zehavi, Jeffrey L. Franklin, Kashif Maqsood
  • Publication number: 20180257299
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery assembly. The energy delivery assembly includes a light source to emit one or more light beams, a first reflective member having a plurality of reflective facets, and at least one second reflective member. The first reflective member is rotatable such that sequential facets sweep the light beam sequentially along a path on the uppermost layer. The at least one second reflective member is movable such that the at least one second reflective surface is repositionable to receive at least one of the at least one light beam and redirect the at least one of at least one light beam along a two-dimensional path on the uppermost layer.
    Type: Application
    Filed: November 13, 2017
    Publication date: September 13, 2018
    Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Raanan Zehavi, Jeffrey L. Franklin, Kashif Maqsood
  • Publication number: 20180257300
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, an energy delivery system, and an actuator. The energy delivery system includes a light source to emit a light beam, and a reflective member having a plurality of reflective facets, the reflective member positionable in a path of the light beam to receive the light beam and redirect the light beam toward the top surface of the platform to deliver energy to an uppermost layer of the layers of feed material to fuse the feed material. The reflective member is rotatable such that sequential facets sweep the light beam sequentially along a linear path on the uppermost layer. The actuator is configured to adjust an angle of the linear path relative to the platform.
    Type: Application
    Filed: November 13, 2017
    Publication date: September 13, 2018
    Inventors: Hou T. Ng, Nag B. Patibandla, Ajey M. Joshi, Raanan Zehavi, Jeffrey L. Franklin, Kashif Maqsood
  • Publication number: 20180161937
    Abstract: According to embodiments, a method of selectively ablating an optically transparent material covering a metal layer of a device may comprise: providing a layer of optically transparent material on a metal layer; and irradiating a portion of the layer of optically transparent material with a defocused or shaped laser beam and ablating the portion of the layer of optically transparent material; wherein the ablating leaves the metal layer completely intact and wherein the laser light has a wavelength within a range of 355 nm to 1070 nm and wherein the layer of optically transparent material absorbs less than or equal to 50% of the laser light from the laser beam on a single pass of the laser light through the layer of optically transparent material. Apparatus for laser ablation of a layer of transparent material on a metal layer, while leaving the metal layer completely intact are described.
    Type: Application
    Filed: May 16, 2016
    Publication date: June 14, 2018
    Inventor: Jeffrey L. FRANKLIN
  • Publication number: 20180138522
    Abstract: A method of fabricating electrochemical devices may comprise: providing a layer of dielectric material on a metal electrode; enhancing light absorption in the layer of dielectric material within the visible and near UV range, forming a layer of enhanced dielectric material; and laser ablating substantially all of the enhanced dielectric material in select areas of the layer using a laser with a wavelength in the visible and near UV range, wherein the laser ablating leaves the metal electrode substantially intact. In some embodiments, the layer may be provided engineered for higher laser light absorption within the visible and near ultraviolet range, without the need for enhancing. An electrochemical device may comprise: a substrate; a stack of active device layers formed on the substrate; and an encapsulation layer covering the stack, engineered to strongly absorb laser light within the visible and near ultraviolet range.
    Type: Application
    Filed: May 11, 2016
    Publication date: May 17, 2018
    Inventors: Giback PARK, Michael Yu-Tak YOUNG, Byung-Sung Leo KWAK, Jeffrey L. FRANKLIN, Kyu CHO II
  • Publication number: 20180040860
    Abstract: A thin film device. The thin film device may include: an active device region; a thin film encapsulant disposed adjacent to the active device region and encapsulating at least a portion of the active device region. The thin film encapsulant may include an outer layer, wherein the outer layer is disposed adjacent ambient and comprises a hydrophobic layer.
    Type: Application
    Filed: October 31, 2016
    Publication date: February 8, 2018
    Inventors: Michael Yu-Tak Young, Jeffrey L. Franklin
  • Publication number: 20170301928
    Abstract: A device for maskless thin film etching, including an ablation tool adapted to emit an ablative output for etching a surface, a gas jet associated with a source of carrier gas and adapted to emit a stream of the carrier gas at an area of the surface where the output of the ablation tool impinges, and a suction member associated with a vacuum source and adapted to collect ablated particulate from the area of the surface where the output of the ablation tool impinges, wherein the ablation tool, the gas jet, and the suction member are mounted adjacent one another.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Michael Yu-Tak Young, Jeffrey L. Franklin
  • Publication number: 20170301955
    Abstract: A thin film battery may include: a contact layer, the contact layer disposed in a first plane and comprising a cathode current collector and an anode current collector pad; a device stack disposed on the cathode current collector, the device stack comprising a cathode and solid state electrolyte; an anode current collector disposed on the device stack; a thin film encapsulant, the thin film encapsulant disposed over the device stack, wherein the solid state electrolyte encapsulates the cathode.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Byung-Sung Kwak, Lizhong Sun, Giback Park, Dimitrios Argyris, Michael Yu-Tak Young, Jeffrey L. Franklin
  • Publication number: 20170301892
    Abstract: A thin film device. The thin film device may include: an active device region, the active device region comprising a diffusant; and a thin film encapsulant disposed adjacent to the active device region and encapsulating at least a portion of the active device region, the thin film encapsulant comprising: a first layer, the first layer disposed immediately adjacent the active device region and comprising a soft and pliable material; and a second layer disposed on the first layer, the second layer comprising a rigid dielectric material or rigid metal material.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Byung-Sung Kwak, Lizhong Sun, Giback Park, Michael Yu-Tak Young, Jeffrey L. Franklin, Miaojun Wang
  • Publication number: 20170301893
    Abstract: Approaches herein provide encapsulation of a micro battery cell of a cell matrix. The micro battery cell includes an active device, such as a thin film device, formed atop a first side of a substrate. An encapsulant may be formed over the active device, wherein the encapsulant adheres to the active device and to a second side of the substrate. In some approaches, the encapsulant penetrates a plurality of openings provided through the substrate, thus allowing the encapsulant to form along the second side of the substrate to fully envelope the micro battery cell.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Michael Yu-Tak Young, Jeffrey L. Franklin
  • Publication number: 20170301954
    Abstract: A thin film battery may include: a cathode current collector, the cathode current collector being disposed in a first plane; a device stack disposed on the cathode current collector, the device stack comprising an anode current collector, the anode current collector being disposed in a second plane, above the first plane; and a thin film encapsulant, the thin film encapsulant disposed above the device stack, wherein the thin film encapsulant comprises a first portion extending along a surface of the anode current collector and a second portion extending along a plurality of sides of the device stack, wherein the cathode current collector extends under the second portion of the thin film encapsulant and outside of the thin film encapsulant; and wherein the anode current collector extends under the first portion of the thin film encapsulant and outside of the thin film encapsulant.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Byung-Sung Kwak, Lizhong Sun, Giback Park, Dimitrios Argyris, Michael Yu-Tak Young, Jeffrey L. Franklin
  • Publication number: 20170301897
    Abstract: A thin film device, comprising: an active device region, the active device region having reversible motion at least along a first direction between a first device state and a second device state; and a thin film encapsulant disposed adjacent the selective expansion region, wherein the thin film encapsulant comprises a first thickness in the first device state and a second thickness in the second device state, the first thickness being greater than the second thickness by 10% or greater, wherein the thin film encapsulant comprises a laser-etchable material.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Michael Yu-Tak Young, Byung-Sung Kwak, Giback Park, Lizhong Sun, Jeffrey L. Franklin, Robert Jan Visser
  • Publication number: 20170301891
    Abstract: A thin film device may include an active device region, where the active device region comprises a selective expansion region. The thin film device may further include a polymer layer disposed adjacent to the active device region and encapsulating the active device region, the polymer layer comprising a plurality of polymer sub-layers. A first polymer sub-layer of the plurality of polymer sub-layers may have a first hardness, while a second polymer sub-layer of the plurality of polymer sub-layers has a second hardness, the second hardness being different from the first hardness.
    Type: Application
    Filed: March 17, 2017
    Publication date: October 19, 2017
    Inventors: Byung-Sung Kwak, Lizhong Sun, Giback Park, Michael Yu-Tak Young, Jeffrey L. Franklin, Miaojun Wang, Dimitrios Argyris
  • Publication number: 20170301894
    Abstract: A thin film device. The thin film device may include: an active device region, the active device region comprising a diffusant; and a thin film encapsulant disposed adjacent to the active device region and encapsulating at least a portion of the active device region, the thin film encapsulant comprising: a first layer, the first layer disposed immediately adjacent the active device region and comprising a soft and pliable material; and a second layer disposed on the first layer, the second layer comprising a rigid dielectric material or rigid metal material.
    Type: Application
    Filed: March 17, 2017
    Publication date: October 19, 2017
    Inventors: Byung-Sung Kwak, Lizhong Sun, Giback Park, Michael Yu-Tak Young, Jeffrey L. Franklin, Miaojun Wang, Dimitrios Argyris
  • Publication number: 20170301895
    Abstract: Approaches herein provide improved encapsulation of an energy storage device. In one approach, a thin film storage device stack is formed atop a first side of a substrate, and an encapsulant is formed over the thin film storage device stack. A recess formed in the substrate adjacent the thin film storage device stack provides an anchoring point for the encapsulant. In some approaches, the recess is provided partially through a depth of the substrate, and has a geometry to promote physical coupling between the encapsulant and the substrate.
    Type: Application
    Filed: October 31, 2016
    Publication date: October 19, 2017
    Inventors: Michael Yu-Tak Young, Jeffrey L. Franklin, Byung-Sung Kwak