Patents by Inventor Jeffrey S. Hale

Jeffrey S. Hale has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220244169
    Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
    Type: Application
    Filed: September 16, 2021
    Publication date: August 4, 2022
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Ping He, Martin M. Liphardt, Jeremy A. Van Derslice, Craig M. Herzinger, Jeffrey S. Hale, Brian D. Guenther, Duane E. Meyer, Stefan Schoeche, James D. Welch
  • Patent number: 10989601
    Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: May 1, 2020
    Date of Patent: April 27, 2021
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Craig M. Herzinger
  • Patent number: 10775298
    Abstract: Ellipsometers and polarimeters and the like having at least one rotating element which is driven by a motor that comprises air bearings.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: September 15, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Christopher D. Hassler, Galen L. Pfeiffer, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt
  • Patent number: 10338362
    Abstract: In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: July 2, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Duane E. Meyer
  • Patent number: 10175160
    Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
    Type: Grant
    Filed: April 20, 2018
    Date of Patent: January 8, 2019
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Stefan Schoeche, Jeremy A. Van Derslice, Jeffrey S. Hale, Craig M. Herzinger
  • Patent number: 10061068
    Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: August 28, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Craig M. Herzinger, Ping He, Jeffrey S. Hale
  • Patent number: 10018815
    Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: July 10, 2018
    Assignee: J.A. WOOLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L Pfeiffer
  • Patent number: 9976902
    Abstract: Methodology of characterizing pore size and distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on a Bruggerman effective medium.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: May 22, 2018
    Assignee: J.A. WOOLAM CO., INC.
    Inventors: Stefan Schoeche, Jeremy A. Van Derslice, Jeffrey S. Hale, Craig M. Herzinger
  • Patent number: 9952141
    Abstract: An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: April 24, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeffrey S. Hale, Craig M. Herzinger, Martin M. Liphardt
  • Patent number: 9921395
    Abstract: A reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved. This invention is also a combination of a focusing element and a filtering element that provides an optimum electromagnetic beam cross-sectional area based on optimizing the beam cross-sectional area in view of conflicting effects of aberration and diffraction inherent in said focusing element, which, for each wavelength, vary oppositely to one another with electromagnetic beam cross-sectional area.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: March 20, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Publication number: 20160356998
    Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Application
    Filed: August 8, 2016
    Publication date: December 8, 2016
    Applicant: J.A. WOOLLAM CO., INC
    Inventors: MARTIN M. LIPHARDT, JEFFREY S. HALE, PING HE, GALEN L. PFEIFFER
  • Patent number: 9500843
    Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: August 8, 2016
    Date of Patent: November 22, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 9442016
    Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: November 4, 2014
    Date of Patent: September 13, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 9347768
    Abstract: A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: May 24, 2016
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Galen L. Pfeiffer, Blaine D. Johs, Brian D. Guenther, Martin M. Liphardt, Jeffrey S. Hale
  • Publication number: 20150355029
    Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
    Type: Application
    Filed: November 4, 2014
    Publication date: December 10, 2015
    Applicant: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 8436994
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Grant
    Filed: January 15, 2011
    Date of Patent: May 7, 2013
    Assignee: J.A. Woollam Co., Inc
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 8159672
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: April 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • Publication number: 20110109906
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Application
    Filed: January 15, 2011
    Publication date: May 12, 2011
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 7872751
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: January 18, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Patent number: 7705995
    Abstract: A method of monitoring, in real time, the depth to which a process sample is etched by an etching procedure involving investigating a sample substrate that has a patterned surface which, when electromagnetic radiation in an appropriate wavelength range is caused to reflect from, demonstrates lateral interference effects, such that when a frequency transform is applied to spectroscopic reflection data, three distinguishable peaks occur, at least for some range of pattern depth in the sample surface.
    Type: Grant
    Filed: June 15, 2005
    Date of Patent: April 27, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Jeffrey S. Hale