Patents by Inventor Jen-Sheng Yang

Jen-Sheng Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELF-ALIGNED INSULATED FILM FOR HIGH-K METAL GATE DEVICE
    Publication number: 20130056837
    Abstract: A method of making an integrated circuit includes providing a semiconductor substrate and forming a gate dielectric over the substrate, such as a high-k dielectric. A metal gate structure is formed over the semiconductor substrate and the gate dielectric and a thin dielectric film is formed over that. The thin dielectric film includes oxynitride combined with metal from the metal gate. The method further includes providing an interlayer dielectric (ILD) on either side of the metal gate structure.
    Type: Application
    Filed: September 24, 2011
    Publication date: March 7, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jin-Aun Ng, Maxi Chang, Jen-Sheng Yang, Ta-Wei Lin, Shih-Hao Lo, Chih-Yang Yeh, Hui-Wen Lin, Jung-Hui Kao, Yuan-Tien Tu, Huan-Just Lin, Chih-Tang Peng, Pei-Ren Jeng, Bao-Ru Young, Hak-Lay Chuang
  • Method for reducing topography of non-volatile memory and resulting memory cells
    Publication number: 20070241386
    Abstract: A method for forming a semiconductor structure includes providing a substrate; forming a gate stack of a flash memory cell, wherein a top portion of the gate stack comprises a capping layer; forming a gate having at least a portion over the capping layer; and reducing a thickness of the portion of the gate over the capping layer. The topography height difference between the flash memory cell and MOS devices on the same chip is reduced.
    Type: Application
    Filed: March 9, 2007
    Publication date: October 18, 2007
    Inventors: Shih Wei Wang, Derek Lin, Chen-Ming Huang, Chang-Jen Hsieh, Chi-Hsin Lo, Chung-Yi Yu, Feng-Jia Shiu, Yeur-Luen Tu, Yi-Shin Chu, Jen-Sheng Yang