Patents by Inventor Jeong-Ho Yi

Jeong-Ho Yi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE DEPOSITING SYSTEM AND DEPOSITING METHOD USING THE SAME
    Publication number: 20120064728
    Abstract: A substrate depositing system and a method of using a substrate depositing system. A substrate depositing system includes a load-lock chamber for loading and unloading a substrate, at least one transfer chamber connected to the load-lock chamber and including a substrate transfer device configured to vertically transfer the substrate, and a pair of depositing chambers connected to opposite sides of the at least one transfer chamber and including a depositing source and a pair of substrate fixing devices, the substrate transfer device including a pair of substrate installing members.
    Type: Application
    Filed: July 8, 2011
    Publication date: March 15, 2012
    Inventors: Jeong-Ho Yi, Suk-Won Jung, Seung-Ho Choi