Patents by Inventor Jeremy Cheng

Jeremy Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140178578
    Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium ?25-30%, titanium and aluminum ?30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
    Type: Application
    Filed: December 26, 2012
    Publication date: June 26, 2014
    Applicant: INTERMOLECULAR, INC.
    Inventors: Guizhen Zhang, Jeremy Cheng, Guowen Ding, Minh Huu Le, Daniel Schweigert, Yu Wang
  • Patent number: 8758581
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: June 24, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Patent number: 8449678
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Grant
    Filed: February 8, 2008
    Date of Patent: May 28, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Patent number: 8387563
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: March 5, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Rick Endo, Jeremy Cheng, Indranil De, James Tsung, Kurt Weiner, Maosheng Zhao
  • Publication number: 20120149180
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Application
    Filed: December 21, 2011
    Publication date: June 14, 2012
    Applicant: Intermolecular, Inc.
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Publication number: 20120142197
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Application
    Filed: February 14, 2012
    Publication date: June 7, 2012
    Applicant: Intermolecular, Inc.
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Publication number: 20090069924
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Application
    Filed: September 5, 2008
    Publication date: March 12, 2009
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Publication number: 20090061087
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Application
    Filed: February 8, 2008
    Publication date: March 5, 2009
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Publication number: 20090061108
    Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.
    Type: Application
    Filed: February 7, 2008
    Publication date: March 5, 2009
    Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
  • Patent number: 7455722
    Abstract: Solid oxide fuel cells selectively transport oxygen ions through an electrolyte membrane. The maximum oxygen ion transport rate limits the power density of the fuel cell. By ion irradiating the electrolyte membrane and/or the cathode, the oxygen adsorption, dissociation, and incorporation rates can be improved, leading to higher ion transport rates and better fuel cell performance.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: November 25, 2008
    Assignees: Honda Motor Co., Ltd, The Board of Trustees of the Leland Stanford Junior University
    Inventors: Rojana Pornprasertsuk, Jeremy Cheng, Yuji Saito, Friedrich B. Prinz
  • Publication number: 20070022878
    Abstract: Solid oxide fuel cells selectively transport oxygen ions through an electrolyte membrane. The maximum oxygen ion transport rate limits the power density of the fuel cell. By ion irradiating the electrolyte membrane and/or the cathode, the oxygen absorption, dissociation, and incorporation rates can be improved, leading to higher ion transport rates and better fuel cell performance.
    Type: Application
    Filed: July 14, 2006
    Publication date: February 1, 2007
    Inventors: Rojana Pornprasertsuk, Jeremy Cheng, Yuji Saito, Friedrich Prinz
  • Patent number: 5941383
    Abstract: A collapsible bag includes a base and an upper frame. A series of support rods are interconnected between the upper frame and the base. To secure the support rods within the golf bag, there is provided a retainer about the base that receives a slideable retaining cap. The slideable retaining cap is inserted within the retainer and engages a respective support rod that projects through an opening in the base. Thus the support rods are retained within the golf bag by the retaining caps that are inserted within the retainers.
    Type: Grant
    Filed: August 24, 1998
    Date of Patent: August 24, 1999
    Inventor: Jeremy Cheng