Patents by Inventor Jia Ni

Jia Ni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230238429
    Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.
    Type: Application
    Filed: April 3, 2023
    Publication date: July 27, 2023
    Inventors: Lung-Kun CHU, Jia-Ni YU, Chung-Wei HSU, Chih-Hao WANG, Kuo-Cheng CHIANG, Kuan-Lun CHENG, Mao-Lin HUANG
  • Patent number: 11710667
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method comprises forming a first stack structure and a second stack structure in a first area over a substrate, wherein each of the stack structures includes semiconductor layers separated and stacked up; depositing a first interfacial layer around each of the semiconductor layers of the stack structures; depositing a gate dielectric layer around the first interfacial layer; forming a dipole oxide layer around the gate dielectric layer; removing the dipole oxide layer around the gate dielectric layer of the second stack structure; performing an annealing process to form a dipole gate dielectric layer for the first stack structure and a non-dipole gate dielectric layer for the second stack structure; and depositing a first gate electrode around the dipole gate dielectric layer of the first stack structure and the non-dipole gate dielectric layer of the second stack structure.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: July 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Hou-Yu Chen, Ching-Wei Tsai, Chih-Hao Wang, Lung-Kun Chu, Mao-Lin Huang, Jia-Ni Yu
  • Patent number: 11670723
    Abstract: A semiconductor device according to the present disclosure includes a fin structure over a substrate, a vertical stack of silicon nanostructures disposed over the fin structure, an isolation structure disposed around the fin structure, a germanium-containing interfacial layer wrapping around each of the vertical stack of silicon nanostructures, a gate dielectric layer wrapping around the germanium-containing interfacial layer, and a gate electrode layer wrapping around the gate dielectric layer.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Mao-Lin Huang, Lung-Kun Chu, Chung-Wei Hsu, Jia-Ni Yu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11670692
    Abstract: A semiconductor device includes power rails in a first interconnect structure on a backside of the semiconductor device. The semiconductor device further includes a gate-all-around (GAA) transistor having multiple channel layers stacked over the first interconnect structure, a gate stack wrapping around each of the multiple channel layers except a bottommost one of the multiple channel layers, and a source/drain feature adjoining the channel layers. The semiconductor device further includes a first conductive via connecting the first interconnect structure to a bottom of the source/drain feature and a dielectric feature isolating the bottommost one of the multiple channel layers from the first conductive via.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Wei Hsu, Lung-Kun Chu, Mao-Lin Huang, Jia-Ni Yu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230129769
    Abstract: A method includes providing a first channel layer and a second channel layer over a substrate; forming a first patterned hard mask covering the first channel layer and exposing the second channel layer; selectively depositing a cladding layer on the second channel layer and not on the first patterned hard mask; performing a first thermal drive-in process; removing the first patterned hard mask; after removing the first patterned hard mask, forming an interfacial dielectric layer on the cladding layer and the first channel layer; and forming a high-k dielectric layer on the interfacial dielectric layer.
    Type: Application
    Filed: December 20, 2022
    Publication date: April 27, 2023
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230127045
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a fin structure formed over a substrate, and a gate structure formed over the fin structure. The gate structure includes a gate dielectric layer, a first conductive layer over the first conductive layer. The gate structure includes a fill layer over the first conductive layer. The semiconductor device structure includes a protection layer formed over the fill layer, and a top surface of the gate dielectric layer is lower than a top surface of the protection layer and higher than a top surface of the first conductive layer.
    Type: Application
    Filed: December 19, 2022
    Publication date: April 27, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Mao-Lin HUANG, Lung-Kun CHU, Chung-Wei HSU, Jia-Ni YU, Chun-Fu LU, Kuo-Cheng CHIANG, Kuan-Lun CHENG, Chih-Hao WANG
  • Patent number: 11637195
    Abstract: A method of fabricating a device includes providing a fin extending from a substrate, the fin having a plurality of semiconductor layers and a first distance between each adjacent semiconductor layers. The method further includes providing a dielectric fin extending from the substrate where the dielectric fin is adjacent to the plurality of semiconductor layers and there is a second distance between an end of each of the semiconductor layers and a first sidewall of the dielectric fin. The second distance is greater than the first distance. Depositing a dielectric layer over the semiconductor layers and over the first sidewall of the dielectric fin. Forming a first metal layer over the dielectric layer on the semiconductor layers and on the first sidewall of the dielectric fin, wherein portions of the first metal layer disposed on and interposing adjacent semiconductor layers are merged together. Finally removing the first metal layer.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: April 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Lung-Kun Chu, Mao-Lin Huang, Chung-Wei Hsu, Jia-Ni Yu, Kuo-Cheng Chiang, Chih-Hao Wang
  • Publication number: 20230120117
    Abstract: A method of forming a semiconductor device includes forming a first dielectric layer over a first channel region in a first region and over a second channel region in a second region; introducing a first dipole element into the first dielectric layer in the first region to form a first dipole-containing gate dielectric layer in the first region; forming a second dielectric layer over the first dipole-containing gate dielectric layer; introducing fluorine into the second dielectric layer to form a first fluorine-containing gate dielectric layer over the first dipole-containing gate dielectric layer; and forming a gate electrode over the first fluorine-containing gate dielectric layer.
    Type: Application
    Filed: March 25, 2022
    Publication date: April 20, 2023
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Chun-Fu Lu, Chih-Hao Wang
  • Publication number: 20230123562
    Abstract: A structure includes first nanostructures vertically spaced one from another over a substrate in a core region of the semiconductor structure, a first interfacial layer wrapping around each of the first nanostructures, a first high-k dielectric layer over the first interfacial layer and wrapping around each of the first nanostructures, second nanostructures vertically spaced one from another over the substrate in an I/O region of the semiconductor structure, a second interfacial layer wrapping around each of the second nanostructures, a second high-k dielectric layer over the second interfacial layer and wrapping around each of the second nanostructures. The first nanostructures have a first vertical pitch, the second nanostructures have a second vertical pitch substantially equal to the first vertical pitch, the first nanostructures have a first vertical spacing, the second nanostructures have a second vertical spacing greater than the first vertical spacing by about 4 ? to about 20 ?.
    Type: Application
    Filed: December 21, 2022
    Publication date: April 20, 2023
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230121807
    Abstract: Disclosed is a nitrile derivative compound represented by formula (I), a stereoisomer, a deuterated product, a co-crystal, a solvate or a pharmaceutically acceptable salt thereof, wherein each group is as defined in the description. The compound has dipeptidyl peptidase 1 inhibitory activity and can be used to prepare a drug for treating diseases including obstructive airway diseases, bronchiectasis, cystic fibrosis, asthma, emphysema, and chronic obstructive pulmonary diseases.
    Type: Application
    Filed: October 28, 2022
    Publication date: April 20, 2023
    Applicant: HAISCO PHARMACEUTICALS PTE. LTD
    Inventors: Yao Li, Zongjun Shi, Guobiao ZHANG, Lei Chen, Wenjing Wang, Xiaobo Zhang, Dengyu Zheng, Bo Xu, Xin Liu, Yajun Wang, Fei Ye, Pingming Tang, Jia Ni, Chen Zhang, Pangke Yan
  • Patent number: 11631754
    Abstract: A method includes forming an active fin using a hard mask as an etching mask, wherein the active fin comprises a source region, a drain region, and a channel region, the hard mask remains over the active fin after etching the semiconductive substrate, and the hard mask has a first portion vertically overlapping the source region of the active fin, a second portion vertically overlapping the channel region of the active fin, and a third portion vertically overlapping the drain region of the active fin. A sacrificial gate is formed over the second portion of the hard mask and the channel region of the active fin. The first and third portions of the hard mask are etched. After etching the first and third portions of the hard mask, a gate spacer is formed extending along sidewalls of the sacrificial gate, and the sacrificial gate is replaced with a replacement gate.
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: April 18, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Zhi-Chang Lin, Wei-Hao Wu, Jia-Ni Yu
  • Patent number: 11626327
    Abstract: A semiconductor device is provided. The semiconductor device includes a plurality of first semiconductor nanosheets spaced apart from each other and in a p-type device region, and a plurality of second semiconductor nanosheets spaced apart from each other and in an n-type device region. The semiconductor device includes an isolation structure formed at a boundary between the p-type and n-type device regions, and a first hard mask layer formed over the first semiconductor nanosheets. The semiconductor device also includes a second hard mask layer formed over the second semiconductor nanosheets, and a p-type work function layer surrounding each of the first semiconductor nanosheets and the first hard mask layer.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Chiang, Chung-Wei Hsu, Lung-Kun Chu, Jia-Ni Yu, Chih-Hao Wang, Mao-Lin Huang
  • Patent number: 11626485
    Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: April 11, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lung-Kun Chu, Mao-Lin Huang, Chung-Wei Hsu, Jia-Ni Yu, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230099320
    Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor includes: a first source and a first drain separated by a first distance, a first semiconductor structure disposed between the first source and first drain, a first gate electrode disposed over the first semiconductor structure, and a first dielectric structure disposed over the first gate electrode. The first dielectric structure has a lower portion and an upper portion disposed over the lower portion and wider than the lower portion. The second transistor includes: a second source and a second drain separated by a second distance greater than the first distance, a second semiconductor structure disposed between the second source and second drain, a second gate electrode disposed over the second semiconductor structure, and a second dielectric structure disposed over the second gate electrode. The second dielectric structure and the first dielectric structure have different material compositions.
    Type: Application
    Filed: December 5, 2022
    Publication date: March 30, 2023
    Inventors: Huan-Chieh Su, Zhi-Chang Lin, Ting-Hung Hsu, Jia-Ni Yu, Wei-Hao Wu, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11615962
    Abstract: A method includes providing a structure having a substrate and a stack of semiconductor layers over a surface of the substrate and spaced vertically one from another; forming an interfacial layer wrapping around each of the semiconductor layers; forming a high-k dielectric layer over the interfacial layer and wrapping around each of the semiconductor layers; and forming a capping layer over the high-k dielectric layer and wrapping around each of the semiconductor layers. With the capping layer wrapping around each of the semiconductor layers, the method further includes performing a thermal treatment to the structure, thereby increasing a thickness of the interfacial layer. After the performing of the thermal treatment, the method further includes removing the capping layer.
    Type: Grant
    Filed: February 4, 2021
    Date of Patent: March 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230079045
    Abstract: Provided are a compound of formula (I-a), an isomer thereof or a pharmaceutically acceptable salt thereof as a Hemagglutinin inhibitor, and a preparation method thereof. The compound is useful for preparing a medicament for treating a disease related to Hemagglutinin.
    Type: Application
    Filed: August 24, 2020
    Publication date: March 16, 2023
    Applicant: Sichuan Haisco Pharmaceutical Co., Ltd.
    Inventors: Yao Li, Lei Chen, Guobiao Zhang, Wenjing Wang, Zongjun Shi, Gang Hu, Haitao Huang, Haodong Wang, Bo Xu, Xiaobo Zhang, Guoliang LIU, Dengyu Zheng, Shilin Huang, Jianfei Zhao, Changwei Song, Chen Zhang, Fei Ye, Jia Ni, Pangke Yan
  • Patent number: 11600533
    Abstract: A method includes providing semiconductor channel layers over a substrate; forming a first dipole layer wrapping around the semiconductor channel layers; forming an interfacial dielectric layer wrapping around the first dipole layer; forming a high-k dielectric layer wrapping around the interfacial dielectric layer; forming a second dipole layer wrapping around the high-k dielectric layer; performing a thermal process to drive at least some dipole elements from the second dipole layer into the high-k dielectric layer; removing the second dipole layer; and forming a work function metal layer wrapping around the high-k dielectric layer.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: March 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230069174
    Abstract: Disclosed are a nitrogen-containing heterocyclic compound as shown in formula (I), or a stereoisomer, a solvate, a deuterated form, a pharmaceutically acceptable salt, or a cocrystal thereof or a pharmaceutical composition containing same, and the use thereof in the preparation of a drug for treating/preventing diseases mediated by autotaxin. Each group in formula (I) is as defined in the description.
    Type: Application
    Filed: December 10, 2020
    Publication date: March 2, 2023
    Inventors: Yao LI, Zongjun SHI, Wenjing WANG, Yongli WANG, Yunpeng PEI, Changwei SONG, Yonghong LI, Pingming TANG, Yan YU, Chen ZHANG, Jia NI, Pangke YAN
  • Publication number: 20230062026
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first gate electrode layer, a second gate electrode layer disposed over and aligned with the first gate electrode layer, and a gate isolation structure disposed between the first gate electrode layer and the second gate electrode layer. The gate isolation structure includes a first surface and a second surface opposite the first surface. At least a portion of the first surface is in contact with the first gate electrode layer. The second surface includes a first material and a second material different from the first material, and at least a portion of the second surface is in contact with the second gate electrode layer.
    Type: Application
    Filed: August 27, 2021
    Publication date: March 2, 2023
    Inventors: Jia-Ni YU, Kuo-Cheng CHIANG, Mao-Lin HUANG, Lung-Kun CHU, Chung-Wei HSU, Chih-Hao WANG, Kuan-Lun CHENG
  • Publication number: 20230061676
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes first and second dielectric features and a first semiconductor layer disposed between the first and second dielectric features. The structure further includes an isolation layer disposed between the first and second dielectric features, and the isolation layer is in contact with the first and second dielectric features. The first semiconductor layer is disposed over the isolation layer. The structure further includes a gate dielectric layer disposed over the isolation layer and a gate electrode layer disposed over the gate dielectric layer. The gate electrode layer has an end extending to a level between a first plane defined by a first surface of the first semiconductor layer and a second plane defined by a second surface opposite the first surface.
    Type: Application
    Filed: August 27, 2021
    Publication date: March 2, 2023
    Inventors: Lung-Kun CHU, Mao-Lin HUANG, Chung-Wei HSU, Jia-Ni YU, Kuan-Lun CHENG, Kuo-Cheng CHIANG, Chih-Hao WANG