Abstract: Provided is a control device and a substrate processing apparatus including the same. The substrate processing apparatus includes a support unit configured to support and rotate a first substrate, the support unit including a spin chuck, a spray unit configured to spray a processing fluid on the first substrate, a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate, and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.

Abstract: A positive electrode active material includes lithium nickel-based oxide particles having a single-particle form composed of a single nodule or a single-particle-like form, which is a complex of at most 30 nodules. The positive electrode active material further includes a coating layer formed on the surface of the lithium nickel-based oxide particles, wherein the coating layer is formed by using a nano-sized coating precursor which is a chelate complex comprising lithium, nickel, cobalt, and Ma, where Ma is Mn, Al, or a combination thereof.

Abstract: A control device and a substrate processing apparatus including the same are provided. The substrate processing apparatus includes: a support unit including a spin head and configured to support and to rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a correction unit in a swing arm, the correction unit configured to move to a target point on the substrate and to irradiate a beam when the processing liquid is sprayed onto the substrate; and a control unit configured to calculate the target point, wherein the control unit is configured to convert image coordinates associated with a first coordinate system and then to calculate the target point by converting the image coordinates associated with the first coordinate system into image coordinates associated with a second coordinate system, and the second coordinate system is based on rotation angles of the spin head and the swing arm.

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: A positive electrode active material including a lithium nickel-based oxide in the form of a single particle composed of one nodule or a pseudo-single particle that is a composite of 30 or less nodules; and a coating portion which is formed in the form of an island on a portion of a surface of the lithium nickel-based oxide particle and includes cobalt (Co), wherein, in a Ni L3-edge spectrum obtained by measuring the surface of the lithium nickel-based oxide, which is in contact with the coating portion, by electron energy loss spectroscopy, an intensity at 855.5 eV is higher than an intensity at 853 eV. A preparation method thereof, a positive electrode and a lithium secondary battery which include the positive electrode active material are also provided.

Abstract: A storage vehicle for a mobility includes a seat provided inside the storage vehicle and spaced from a floor of the storage vehicle upward to form a separation space below the seat; a storage slot formed in the separation space below the seat, opened to an external side of the storage vehicle through a portion of a sidewall of the storage vehicle, and configured to store the mobility therein; a door provided in the opening portion of the storage slot; and an opening/closing portion provided on a side of the door and configured to operate the door upward or downward to open or close an opening portion of the storage slot.

Abstract: A display device includes a display panel including a display area including sub-pixels, a data driver providing a data voltage to each of the sub-pixels through a data line, a gate driver providing a bias gate signal to each of the sub-pixels and a driving controller compensating for the data voltage written in a second area to which the bias gate signal having an activation level in a first period in which the data voltage is written in the first area is applied based on a first data voltage corresponding to a grayscale of a first area of the display area and a second data voltage corresponding to a grayscale of a different area from the first area of the display area.

Abstract: A rotor for an induction motor includes a rotor core having a hollow portion on a central portion wherein a shaft is coupled to the rotor core by being inserted through the hollow portion, a plurality of slots radially formed in the rotor core around a central axis of the shaft, a plurality of conductor bars coupled to the plurality of slots, and an end ring electrically connecting the plurality of conductor bars to each other, wherein the rotor core is thermally treated above Curie temperature to form a predetermined pattern on an outer circumference of the rotor core.

Abstract: A hybrid motor includes a rotor, a radial stator facing the circumference of the rotor, and first and second axial stators facing both sides of the rotor. The rotor includes conduction bars arranged in radial and axial directions, corresponding to the radial stator and the axial stators, and end-rings electrically connecting the conduction bars.

Abstract: A fixing device for a vehicle configured to connect the vehicle's cabin unit and loading unit of loading cargo at the rear of the cabin unit includes a coil transmitting an electromagnetic force to a drive pulley, an assembly module including a drive pulley and mechanically fixing the cabin unit and the loading unit together through a driving force of the drive pulley via the coil when the loading unit moves and aligns with the cabin unit, and a magnetic module enclosing the assembly module on an external side of the assembly module and magnetically fixing the cabin unit and the loading unit together by changing a magnetic circuit through a rotation force of a magnetic body while the cabin unit and the loading unit are mechanically connected to each other.

Abstract: An armrest apparatus for vehicles includes a body that is combined with a mounting area provided on a side surface of an interior of a vehicle to be slidably movable and on which a passenger rests an arm. A movement guide of the apparatus protrudes from the body and is inserted into a mounting groove provided in the mounting area to guide movement of the body along the mounting groove. A mounting unit is provided in the mounting area and supports the body and fixes a position of the body withdrawn from the mounting area through sliding movement.

Abstract: A management system for a micro mobility vehicle, includes a service vehicle which is configured to travel along a movement path, wherein the service vehicle includes an accommodation slot for accommodating the micro mobility vehicle, and is configured for exchanging power with the micro mobility vehicle when the micro mobility vehicle is accommodated in the accommodation slot; and a management server configured to communicate with the micro mobility vehicle and the service vehicle to determine a location and a charging amount of the micro mobility vehicle and configured to manage charging and arrangement of the micro mobility vehicle by guiding the service vehicle to allow the micro mobility vehicle to be accommodated in the service vehicle or withdraw the micro mobility vehicle from the service vehicle.

Abstract: A floor module for a vehicle includes a plurality of tile portions configured to cover a vehicle floor of a vehicle and sequentially aligned by being coupled in a transverse direction, a plurality of fixing portions provided below the tile portions, connected to the tile portions in an upward and downward direction, and sequentially aligned by being coupled in the transverse direction, and a plurality of mounting portions provided above the vehicle floor and configured to support the tile portions and the fixing portions from below by being connected to the fixing portions in the upward and downward direction in a state in which the tile portions and the fixing portions are matched.

Abstract: Disclosed is a convenience equipment pull-out device for a vehicle. The convenience equipment pull-out device includes: a housing mounted on a headliner of the vehicle, a body which is mounted on the housing and coupled to a movable driving portion and to a plurality of movement guides. In particular, the body slides along the movement guides when the driving portion is driven. The device further includes a pull-out portion rotatably coupled to the body and selectively pulled out towards the interior of the vehicle while a hinge region connected to the body slides along a guide rail member of the housing.

Abstract: Disclosed are a composite fiber (MXene composite fiber) and a manufacturing method thereof. The composite fibers are manufactured by braiding a MXene-PAN fiber heat-treated with a polymer fiber. The method includes preparing a first dispersion including an MXene compound and a first solvent, preparing a second dispersion including polyacrylonitrile (PAN) and a second solvent, obtaining an admixture including the first dispersion and the second dispersion, obtaining a spun fiber by performing wet-spinning of the admixture, obtaining an MXene-PAN fiber by performing heat treatment of the spun fiber, and obtaining the MXene composite fiber by braiding the MXene-PAN fibers with a polymer fiber. An electrical conductivity of the MXene-PAN fiber is about 0.1 Scm?1 to 1,000 Scm?1.

Abstract: A system for docking a vehicle to a building, wherein the vehicle functions as a space of the building when the vehicle is connected thereto, and wherein the building includes at least one station inside or outside thereof such that the vehicle can dock at the at least one station, includes a server configured to check whether the at least one station is available to allow a user to select a station for a vehicle, to select the station randomly when the user does not select the station, and when the vehicle is docked at the selected station, to connect the vehicle to the selected station in wired or wireless manner to manage use of the selected station.

Abstract: Each panel forming a variable mechanism is maintained in a state accommodated on an internal wall surface to secure a cabin space of a mobility, and according to the need of a passenger, the rotational position of each panel is changed so that a shape of the variable mechanism is transformed, providing a convenient function. Accordingly, a space utilization apparatus of mobility that can secure a cabin space by removing an unused space of the cabin space when the convenience function is not used in the cabin space of the mobility, and can improve the space utilization by selectively providing the convenience function.

Abstract: A door locking control system includes an armature coupled to a door or a door frame around which the door is opened or closed, a magnetic module provided on the door or the door frame to face the armature and operated to be fixedly brought into contact with or separated from the armature by a magnetic force induced from a change in a magnetic circuit occurring due to the rotation of a first magnetic body provided inside of the magnetic module, a detector configured to detect an open state or a closed state of the door, and a controller electrically connected to the detector and configured to control the operation of the magnetic module according to the open state or the closed state of the door detected by the detector.

Abstract: A drone docking station for a vehicle includes: a transfer device configured to have a cargo loaded on a drone or to vertically move the cargo transferred by the drone; a guide device including a guide panel provided on a roof of the vehicle and connected to an upper end portion of the transfer device to have the drone accommodated on an upper portion of the guide panel, wherein the guide panel is disposed to surround the transfer device and provided to move inward or outward or to be rotated around a center portion of the transfer device; and a control unit electrically connected to the guide device and configured to rotate or move the guide panel so that the drone corresponds to the cargo positioned in the transfer device when the drone is accommodated on the guide panel.

Abstract: An article management system utilizes an electric cart which may autonomously move, automatically and easily managing articles and ensuring the convenience of delivery service by the automation of article delivery.