Abstract: Embodiments of the present disclosure generally relate to chemical mechanical polishing (CMP) systems, and more particular, to modular polishing systems used in the manufacturing of semiconductor devices. In one embodiment, a polishing system includes a first portion having a plurality of polishing stations disposed therein, and a second portion coupled to the first portion, the second portion comprising a substrate cleaning system. The substrate cleaning system comprises a wet-in/dry-out substrate cleaning module comprising a chamber housing which defines a chamber volume. The polishing system further includes a substrate handler located in the second portion, where the substrate handler is positioned to transfer substrates to or from the wet-in/dry-out substrate cleaning module through one or more openings formed in one or more sidewalls of the chamber housing.

Abstract: Embodiments of the present disclosure generally relate to chemical mechanical polishing (CMP) systems, and more particular, to modular polishing systems used in the manufacturing of semiconductor devices. In one embodiment, a polishing system includes a first portion having a plurality of polishing stations disposed therein, and a second portion coupled to the first portion, the second portion comprising a substrate cleaning system. The substrate cleaning system comprises a wet-in/dry-out substrate cleaning module comprising a chamber housing which defines a chamber volume. The polishing system further includes a substrate handler located in the second portion, where the substrate handler is positioned to transfer substrates to or from the wet-in/dry-out substrate cleaning module through one or more openings formed in one or more sidewalls of the chamber housing.

Abstract: A nanomask for generating an illumination pattern includes a layer having a first surface and a second surface and a plurality of resonant nano-features disposed on at least a selected one of the first surface and the second surface. The nanomask is configured to provide an illumination pattern adjacent to the second surface. The illumination pattern has dimensions smaller than a wavelength ? of electromagnetic radiation used to illuminate the first surface of the layer in a single illumination. A nanopatterning method is also described.

Abstract: The invention relates to an integrated solar cell which includes a plasmonic layer which includes a pattern configured to support plasmon waves, The plasmonic layer is configured to receive as input light energy of an incident light and at least one photon of light received from one or more layers in optical communication with the plasmonic layer and to re-emit as output a guided light to the one or more layers in optical communication with the plasmonic layer. A wavelength conversion layer is configured to receive as input at least one photon having a first wavelength and to provide as output at least one photon having a second wavelength different than the first wavelength. A photovoltaic layer is optically coupled to both the wavelength conversion layer and the plasmonic layer, the photovoltaic layer configured to convert at least one photon having the second wavelength to electrical energy.

Abstract: The invention relates to an integrated film which includes a plasmonic layer including a pattern configured to support plasmon waves. The plasmonic layer is configured to receive as input light energy of an incident light including at least one photon having a first wavelength and an at least one photon of light received from one or more layers in optical communication with the plasmonic layer and to re-emit as output a guided light to the one or more layers in optical communication with the plasmonic layer. The integrated film also includes a wavelength conversion layer optically coupled to the plasmonic layer. The wavelength conversion layer is configured to receive as input the at least one photon having a first wavelength and to provide as output at least one photon having a second wavelength different than the first wave length.

Abstract: An integrated energy conversion device includes a nanoarray layer having a plurality of nanofeatures disposed in a pattern. The nanoarray layer is configured to modify a selected one of a direction and a wavelength of photons of light incident on a surface of the nanoarray layer. The nanoarray layer has a surface. A first material is disposed adjacent to and optically coupled to one region of the surface of the nanoarray layer. A second material is disposed adjacent to and optically coupled to a second region of the surface of the nanoarray layer. At least a selected one of the first material and the second material includes a photovoltaic layer which is configured to provide an integrated solar cell electrical output voltage and an integrated solar cell electrical output current between an integrated solar cell positive output terminal and an integrated solar cell negative output terminal.

Abstract: A planar plasmonic device includes a first material layer having a surface configured to receive at least one photon of incident light. A patterned plasmonic nanostructured layer is disposed adjacent and optically coupled to the first material layer. The patterned plasmonic nanostructured layer includes a selected one of: a) at least a portion of a surface of the patterned plasmonic nanostructured layer includes a textured surface, and b) at least one compound nanofeature including a first material disposed adjacent to a second material within the compound nanofeature.

Abstract: An asymmetric waveguide layer which includes a metal film having an array of apertures defined in the metal film. The apertures extend from a first surface of the metal film to a second surface of the metal film. A plurality of photons have a wavelength of about X propagate through the asymmetric waveguide layer in one direction, and are substantially prevented from propagating in the other direction. An integrated solar cell is also described. First and second PV layers are disposed adjacent to and optically coupled to the asymmetric waveguide layer. A reflective layer is disposed adjacent to and optically coupled to the second PV layer second surface. Light passing through the asymmetric waveguide is substantially trapped within the second PV layer by a combination of reflection from the reflective layer and reflection by the asymmetric waveguide layer.

Abstract: A surface plasmon wavelength converter device includes a metallic film which has a plurality of nanofeatures. A wavelength conversion layer having a plurality of centers is disposed adjacent to the metallic film. The surface plasmon wavelength converter device is configured to respond to an incident electromagnetic radiation having a first wavelength by radiating away from the surface plasmon wavelength converter device an electromagnetic radiation having a second wavelength. A surface plasmon wavelength converter device having a metallic film and at least one center disposed in at least one of a plurality of nanofeatures of the metallic film is also described. A surface plasmon wavelength converter device having a transparent conductive oxide (TCO) film having a plurality of metallic nanofeatures, adjacent to a wavelength conversion layer, and a TCO film having a plurality of metallic nanofeatures with at least one center disposed therein is also described.

Abstract: A digital image upscaling system enhances the visual quality of enlarged images by detecting diagonal edges and applying an appropriate scaling algorithm, such as a rotated bilinear scaling process, to output pixels associated with those edges. The rotated bilinear scaling process involves detecting diagonal edges and specifying a new frame of reference rotated 45° from the original frame of reference, and then selecting a rotated pixel set based on the new frame of reference. Bilinear interpolation in the new frame of reference using the rotated pixel set provides improved pixel data for the output pixel. Output pixels found not to be associated with diagonal edges are processed using standard bilinear interpolation.

Abstract: A method for processing a received signal at a mobile receiver of a wireless communications system is disclosed. The method comprises demodulating the received signal to obtain an analog base band signal and converting the analog base band signal into a digital base band signal. The signal strength of the digital base band signal is estimated and, using the estimation, the digital base band signal is scaled by a scaling factor. The digital base band signal is equalized into an equalized digital signal which is then rescaled by a resealing factor.

Abstract: A method and apparatus for large scale noise decoupling in an integrated circuit is disclosed herein. A power decoupling mesh and a power distribution structure are included in the integrated circuit. The power decoupling mesh is configured in accordance with the power distribution structure. The power decoupling mesh comprises a plurality of decoupling capacitors, such as trench capacitors or MOSFETs.