Abstract: An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

Abstract: Disclosed is a hybrid pole bearingless switched reluctance motor (BLSRM). The BLSRM includes a stator provided with windings, a rotor rotating about an axis when current is conducted to the windings. The rotor includes a plurality of rotor poles extending radially outward, and the stator includes a plurality of stator poles extending radially inward. The windings include suspending windings to generate radial force for the rotor and torque windings to generate torque. The suspending windings are mutually separated from the torque windings. Through the use of the hybrid pole BLSRM, a stator pole generating the radial force can be controlled independently from the stator pole generating the torque by separately arranging the stator pole generating the radial force and the stator pole generating torque based on the analysis of radial force and torque characteristics according to the position of the stator poles.

Abstract: A wafer unloading system and wafer processing equipment (system) including the same are disclosed. The wafer unloading system includes a fluid supply tube for supplying a fluid, a nozzle for injecting the supplied fluid, and an injection hole defined in a plate to allow the injected fluid to reach a space between a polishing pad and a wafer.

Abstract: Disclosed is a single-crystal ingot manufacturing apparatus, which includes a crucible in which a melt is accommodated, a heater configured to heat the crucible, a heat shield member configured to shield radiant heat from the heater and the melt, and a neck cover configured to encompass a seed crystal unit above the crucible with being introduced into an opening of the heat shield member, the radiant heat being not shielded in the opening, the neck cover being vertically moved in linkage to vertical movement of the seed crystal unit within a predetermined range.

Abstract: Provided is an ingot growing apparatus, which includes a crucible containing a silicon melt, a pulling device pulling a silicon single crystal ingot grown from the silicon melt, and a dopant supply unit disposed adjacent to the pulling device and for supplying a dopant during growing of the ingot. The neck portion may be doped at a concentration higher than that of the ingot through the dopant supply unit. Therefore, dislocation propagation velocity may be decreased and a propagation length may be shortened.

Abstract: Disclosed here is a speed control apparatus for a switched reluctance motor (SRM) including: a current control unit generating command currents for each period; a driving unit generating a pulse width modulation (PWM) signal to allow a voltage to be applied to the SRM; a magnetic flux error calculating unit calculating a magnetic flux error; a rotor position estimating unit calculating an estimation position using the magnetic flux error to output the estimation position to the magnetic flux error calculating unit; and a mode change-over unit allowing a command position corresponding to a command speed to be input to the magnetic flux error calculating unit.

Abstract: Disclosed is a method for suppressing a speed ripple occurring during an operation of an AC motor by using a torque compensator based on an activation function. The method includes the steps of calculating a speed error ?err based on a reference speed ?ref and an actual speed ?act; calculating a controller output Trm by using the speed error ?err as an input of a PI control and an operation of a compensated torque Tcom; and determining a torque variation based on the controller output Trm and a reference torque Tref and operating the torque variation in relation to an anti-windup gain Ka to use torque variation as an input of an integral (I) control. The method suppresses the speed ripple by compensating for the torque ripple through a controller which calculates the compensated torque by taking the signs of the speed error and the differential speed error into consideration.

Abstract: Disclosed herein are an initial driving apparatus and method of a two-phase switched reluctance motor (SRM). The initial driving apparatus of a two-phase SRM includes: a driving unit; a current measuring unit; a memory; and a controlling unit comparing the currents measured in the current measuring unit and a difference between the currents with the data currents and the difference between the data currents stored in the memory to determine an initial position, thereby initially driving the SRM. Therefore, the two-phase SRM may be stably operated.

Abstract: Disclosed herein is a torque control method for a high-speed Switched Reluctance Motor (SRM), which controls a torque in the high-speed operation of a 2-phase SRM. In the torque control method for a high-speed SRM, a positive torque (T*mA) of an active phase (A phase) of the two phases of the SRM is compensated for based on a negative torque attributable to an inactive phase (B phase) of two phases during a compensation control enable interval (ENA) ranging from a time point at which the active phase (A phase) is turned on to a time point at which tail current of the inactive phase (B phase) remains. Accordingly, the present invention can remarkably reduce a torque ripple occurring in high-speed operation mode in consideration of the influence of a negative torque attributable to tail current.

Abstract: Disclosed is a method for suppressing a speed ripple occurring during an operation of an AC motor by using a torque compensator based on an activation function. The method includes the steps of calculating a speed error ?err based on a reference speed ?ref and an actual speed ?act; calculating a controller output Trm by using the speed error ?err as an input of a PI control and an operation of a compensated torque Tcom; and determining a torque variation based on the controller output Trm and a reference torque Tref and operating the torque variation in relation to an anti-windup gain Ka to use torque variation as an input of an integral (I) control. The method suppresses the speed ripple by compensating for the torque ripple through a controller which calculates the compensated torque by taking the signs of the speed error and the differential speed error into consideration.

Abstract: Disclosed is a passive converter for a drive device of a switched reluctance motor (SRM), in which high demagnetization voltage for the SRM is provided. The converter includes a rectifier which smoothes input voltage to supply DC voltage, a boost circuit connected with the rectifier, and an asymmetric converter connected with the boost circuit, and the boost circuit includes first to third diodes and first and second capacitors. The high demagnetization voltage is generated at current duration of a single phase or poly-phase SRM by using the passive converter for the drive device of the SRM, so that the driving efficiency and the output power of the SRM can be increased.

Abstract: Disclosed here is a speed control apparatus for a switched reluctance motor (SRM) including: a current control unit generating command currents for each period; a driving unit generating a pulse width modulation (PWM) signal to allow a voltage to be applied to the SRM; a magnetic flux error calculating unit calculating a magnetic flux error; a rotor position estimating unit calculating an estimation position using the magnetic flux error to output the estimation position to the magnetic flux error calculating unit; and a mode change-over unit allowing a command position corresponding to a command speed to be input to the magnetic flux error calculating unit.

Abstract: Disclosed herein is a method of controlling the current of a high-speed Switched Reluctance Motor (SRM) using an inverter circuit including a first switching element, a second switching element, a first diode, a second diode and a reactor, wherein the first switching element and the first diode, the second diode and the second switching element are connected to a bridge circuit, and one end of the reactor is connected to the junction of the first switching element and the first diode, and the remaining end of the reactor is connected to the junction of the second diode and the second switching element; and excitation mode, free-wheeling mode-1, the excitation mode, and free-wheeling mode-2 are sequentially performed in a unit period T, and, when the control is terminated, demagnetization is performed.

Abstract: Disclosed herein is a torque control method for a high-speed Switched Reluctance Motor (SRM), which controls a torque in the high-speed operation of a 2-phase SRM. In the torque control method for a high-speed SRM, a positive torque (T*mA) of an active phase (A phase) of the two phases of the SRM is compensated for based on a negative torque attributable to an inactive phase (B phase) of two phases during a compensation control enable interval (ENA) ranging from a time point at which the active phase (A phase) is turned on to a time point at which tail current of the inactive phase (B phase) remains. Accordingly, the present invention can remarkably reduce a torque ripple occurring in high-speed operation mode in consideration of the influence of a negative torque attributable to tail current.

Abstract: Disclosed herein is a method of controlling the current of a high-speed Switched Reluctance Motor (SRM) using an inverter circuit including a first switching element, a second switching element, a first diode, a second diode and a reactor, wherein the first switching element and the first diode, the second diode and the second switching element are connected to a bridge circuit, and one end of the reactor is connected to the junction of the first switching element and the first diode, and the remaining end of the reactor is connected to the junction of the second diode and the second switching element; and excitation mode, free-wheeling mode-1, the excitation mode, and free-wheeling mode-2 are sequentially performed in a unit period T, and, when the control is terminated, demagnetization is performed.

Abstract: Disclosed is a hybrid pole bearingless switched reluctance motor (BLSRM). The BLSRM includes a stator provided with windings, a rotor rotating about an axis when current is conducted to the windings. The rotor includes a plurality of rotor poles extending radially outward, and the stator includes a plurality of stator poles extending radially inward. The windings include suspending windings to generate radial force for the rotor and torque windings to generate torque. The suspending windings are mutually separated from the torque windings. Through the use of the hybrid pole BLSRM, a stator pole generating the radial force can be controlled independently from the stator pole generating the torque by separately arranging the stator pole generating the radial force and the stator pole generating torque based on the analysis of radial force and torque characteristics according to the position of the stator poles.

Abstract: An apparatus for wet treatment of an object includes a treatment bath in which an object to be treated is received and treated; a plurality of object supporting rods rotatably installed in the treatment bath and having a plurality of slots formed in surfaces thereof to support an object so that the object stands in a direction perpendicular to a bottom surface of the treatment bath; and a rotating means connected to the object supporting rods to rotate the object in a circumferential direction by rotating the object supporting rods. Treatment fluid injecting holes for injecting a treatment fluid to the object and treatment fluid channels for supplying the treatment fluid to the treatment fluid injecting holes are formed in the object supporting rods. Thus, a dead zone in the treatment bath is removed and the treatment fluid may flow uniformly and smoothly, which improves treatment efficiency and treatment uniformity.

Abstract: A wafer unloading system and wafer processing equipment (system) including the same are disclosed. The wafer unloading system includes a fluid supply tube for supplying a fluid, a nozzle for injecting the supplied fluid, and an injection hole defined in a plate to allow the injected fluid to reach a space between a polishing pad and a wafer.

Abstract: Disclosed is an active boost power converter for driving a single-phase SRM, capable of rapidly establishing excitation current in the excitation mode and reducing tail current and negative torque in the demagnetization mode under the high-speed operation of the SRM. The active boost power converter includes a boost module and a converter module connected to the boost module. The boost module includes first and second capacitors, first and second diodes and a switch device turned on/off to connect the first and second capacitors to each other in series or parallel. The switch device includes an insulated gate bipolar transistor (IGBT). The power converter is operated with first and second input modes and first and second output modes. Voltage of the first capacitor is equal to dc-link voltage and first and second capacitors are controlled to be operated in series or parallel by simply controlling the IGBT.

Abstract: Disclosed is a passive converter for a drive device of a switched reluctance motor (SRM), in which high demagnetization voltage for the SRM is provided. The converter includes a rectifier which smoothes input voltage to supply DC voltage, a boost circuit connected with the rectifier, and an asymmetric converter connected with the boost circuit, and the boost circuit includes first to third diodes and first and second capacitors.