Patents by Inventor Jiun-Ming Kuo

Jiun-Ming Kuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210257497
    Abstract: A semiconductor device includes a semiconductor substrate, at least one semiconductor fin and a gate stack. The semiconductor fin is disposed on the semiconductor substrate. The semiconductor fin includes a first portion, a second portion and a first neck portion between the first portion and the second portion. A width of the first portion decreases as the first portion becomes closer to the first neck portion, and a width of the second portion increases as the second portion becomes closer to a bottom surface of the semiconductor substrate. The gate stack partially covers the semiconductor fin.
    Type: Application
    Filed: September 14, 2020
    Publication date: August 19, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jiun-Ming Kuo, Hsin-Chih Chen, Che-Yuan Hsu, Kuo-Chin Liu, Han-Yu Tsai, You-Ting Lin, Jen-Hong Chang
  • Publication number: 20210257462
    Abstract: A semiconductor structure includes a SiGe fin protruding from a substrate, where the SiGe fin includes a top portion having a first sidewall and a second sidewall and a bottom portion having a third sidewall and a fourth sidewall, and where a first transition region connecting the first sidewall to the third sidewall and a second transition region connecting the second sidewall to the fourth sidewall each have a tapered profile extending away from the first sidewall and the second sidewall, respectively, and a Si-containing layer disposed on the top portion of the SiGe fin, where a portion of the Si-containing layer on the first transition region extends away from the first sidewall by a first lateral distance and a portion of the Si-containing layer on the second transition region extends away from the second sidewall by a second lateral distance that is different from the first lateral distance.
    Type: Application
    Filed: December 18, 2020
    Publication date: August 19, 2021
    Inventors: Yu-Shan Lu, Hung-Ju Chou, Pei-Ling Gao, Chen-Hsuan Liao, Chih-Chung Chang, Jiun-Ming Kuo, Che-Yuan Hsu
  • Publication number: 20210249312
    Abstract: The embodiments described herein are directed to a method for reducing fin oxidation during the formation of fin isolation regions. The method includes providing a semiconductor substrate with an n-doped region and a p-doped region formed on a top portion of the semiconductor substrate; epitaxially growing a first layer on the p-doped region; epitaxially growing a second layer different from the first layer on the n-doped region; epitaxially growing a third layer on top surfaces of the first and second layers, where the third layer is thinner than the first and second layers. The method further includes etching the first, second, and third layers to form fin structures on the semiconductor substrate and forming an isolation region between the fin structures.
    Type: Application
    Filed: February 11, 2020
    Publication date: August 12, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Ju CHOU, Chih-Chung CHANG, Jiun-Ming KUO, Che-Yuan HSU, Pei-Ling GAO, Chen-Hsuan LIAO
  • Publication number: 20210210354
    Abstract: A method includes forming a semiconductor capping layer over a first fin in a first region of a substrate, forming a dielectric layer over the semiconductor capping layer, and forming an insulation material over the dielectric layer, an upper surface of the insulation material extending further away from the substrate than an upper surface of the first fin. The method further incudes recessing the insulation material to expose a top portion of the first fin, and forming a gate structure over the top portion of the first fin.
    Type: Application
    Filed: March 19, 2021
    Publication date: July 8, 2021
    Inventors: Yin Wang, Hung-Ju Chou, Jiun-Ming Kuo, Wei-Ken Lin, Chun Te Li
  • Patent number: 10964548
    Abstract: A method includes forming a semiconductor capping layer over a first fin in a first region of a substrate, forming a dielectric layer over the semiconductor capping layer, and forming an insulation material over the dielectric layer, an upper surface of the insulation material extending further away from the substrate than an upper surface of the first fin. The method further includes recessing the insulation material to expose a top portion of the first fin, and forming a gate structure over the top portion of the first fin.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: March 30, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yin Wang, Hung-Ju Chou, Jiun-Ming Kuo, Wei-Ken Lin, Chun Te Li
  • Publication number: 20200006077
    Abstract: A method includes forming a semiconductor capping layer over a first fin in a first region of a substrate, forming a dielectric layer over the semiconductor capping layer, and forming an insulation material over the dielectric layer, an upper surface of the insulation material extending further away from the substrate than an upper surface of the first fin. The method further includes recessing the insulation material to expose a top portion of the first fin, and forming a gate structure over the top portion of the first fin.
    Type: Application
    Filed: September 13, 2019
    Publication date: January 2, 2020
    Inventors: Yin Wang, Hung-Ju Chou, Jiun-Ming Kuo, Wei-Ken Lin, Chun Te Li
  • Patent number: 10497577
    Abstract: A method includes forming a semiconductor capping layer over a first fin in a first region of a substrate, forming a dielectric layer over the semiconductor capping layer, and forming an insulation material over the dielectric layer, an upper surface of the insulation material extending further away from the substrate than an upper surface of the first fin. The method further includes recessing the insulation material to expose a top portion of the first fin, and forming a gate structure over the top portion of the first fin.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: December 3, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yin Wang, Hung-Ju Chou, Jiun-Ming Kuo, Wei-Ken Lin, Chun Te Li
  • Publication number: 20190067027
    Abstract: A method includes forming a semiconductor capping layer over a first fin in a first region of a substrate, forming a dielectric layer over the semiconductor capping layer, and forming an insulation material over the dielectric layer, an upper surface of the insulation material extending further away from the substrate than an upper surface of the first fin. The method further includes recessing the insulation material to expose a top portion of the first fin, and forming a gate structure over the top portion of the first fin.
    Type: Application
    Filed: November 1, 2017
    Publication date: February 28, 2019
    Inventors: Yin Wang, Hung-Ju Chou, Jiun-Ming Kuo, Wei-Ken Lin, Chun Te Li
  • Patent number: 9691721
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Grant
    Filed: May 27, 2016
    Date of Patent: June 27, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Hsu
  • Publication number: 20160276297
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Application
    Filed: May 27, 2016
    Publication date: September 22, 2016
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Hsu
  • Patent number: 9355912
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Grant
    Filed: December 1, 2014
    Date of Patent: May 31, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Hsu
  • Publication number: 20150087143
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Application
    Filed: December 1, 2014
    Publication date: March 26, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Che
  • Patent number: 8901627
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: December 2, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Che
  • Publication number: 20140138750
    Abstract: A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog.
    Type: Application
    Filed: November 16, 2012
    Publication date: May 22, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Lin Wu, Tung-Heng Hsieh, Jiun-Ming Kuo, Min-Hsiung Chiang, Che-Yuan Che