Patents by Inventor Joachim Doehler

Joachim Doehler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5126635
    Abstract: A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.
    Type: Grant
    Filed: April 2, 1991
    Date of Patent: June 30, 1992
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Buddie Dotter, II, Jeffrey M. Krisko, Lester R. Peedin
  • Patent number: 5093149
    Abstract: A method of depositing high quality thin film at a high rate of deposition through the formation of a high flux of activated precursor species of a precursor deposition gas by employing a substantial pressure differential between the pressure adjacent the aperture in a conduit from which said precursor deposition gas is introduced into the interior of a vacuumized enclosure and the background pressure which exits in said enclosure. As the precursor deposition gas is introduced into said enclosure, a high density plume of said activated precursor species are formed therefrom due to an electromagnetic field established in an activation region adjacent said aperture. The pressure differential is sufficient to cause those activated precursor species to be deposited upon a remotely positioned substrate. In order to obtain a sufficient pressure differential, it is preferred that the flow of the precursor deposition gas reaches transonic velocity.
    Type: Grant
    Filed: May 7, 1990
    Date of Patent: March 3, 1992
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Stephen J. Hudgens, Stanford R. Ovshinsky, Lester R. Peedin, Jeffrey M. Krisko
  • Patent number: 4937094
    Abstract: A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exits in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux to activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit, for forming deposition/etchant species therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate.
    Type: Grant
    Filed: June 29, 1989
    Date of Patent: June 26, 1990
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Stephen J. Hudgens, Stanford R. Ovshinsky, Buddie Dotter, II, Lester R. Peedin, Jeffrey M. Krisko, Annette Krisko
  • Patent number: 4931756
    Abstract: A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.
    Type: Grant
    Filed: April 8, 1988
    Date of Patent: June 5, 1990
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Buddie Dotter, II, Jeffrey M. Krisko, Lester R. Peedin
  • Patent number: 4893584
    Abstract: Microwave energy apparatus adapted to sustain a substantially uniform plasma over a relatively large area. In the broadest form of the invention, an isolating window is disposed about the microwave applicator, said isolating window formed from a material through which the microwave energy can be transmitted from the applicator into a plasma reaction vessel and said isolating window configured in a shape which is substantially optimized to withstand compressive forces. In this manner, the thickness of the isolating window may be minimized to provide for rapid thermal cooling, wherby high power densities may be achieved without cracking the window.
    Type: Grant
    Filed: March 29, 1988
    Date of Patent: January 16, 1990
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Jeffrey M. Krisko
  • Patent number: 4883686
    Abstract: A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exits in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux of activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit, for forming deposition/etchant species therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate.
    Type: Grant
    Filed: May 26, 1988
    Date of Patent: November 28, 1989
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Stephen J. Hudgens, Stanford R. Ovshinsky, Buddie Dotter II, Lester R. Peedin, Jeffrey M. Krisko, Annette Krisko
  • Patent number: 4736304
    Abstract: There are disclosed a method and apparatus for improved operation of one or more deposition systems. A minimum expenditure malfunction recovery system provides for a variable recovery related to the current hardware and actual states of the system. A simplified input and output (I/O) device is provided to control the data flow in the system without addressing and decoding complexity. A flexible operation system is also provided for a plurality of deposition systems whose operation easily can be varied without reprogramming of the operating sequence.
    Type: Grant
    Filed: April 7, 1986
    Date of Patent: April 5, 1988
    Assignee: Energy Conversion Devices, Inc.
    Inventor: Joachim Doehler
  • Patent number: 4729341
    Abstract: There are disclosed a method and apparatus for depositing a layer of material onto the outer surfaces of a plurality of cylindrical members. The cylindrical members are arranged to form a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members being closely spaced apart to form an inner chamber which is substantially closed. Adjacent cylindrical members form narrow passages which communicate with the inner chamber. At least one reaction gas is introduced into the inner chamber through at least one of the narrow passages and a plasma is formed from the at least one reaction gas within the inner chamber to deposit the layer of material onto the outer surfaces of the cylindrical members. The plasma can be formed by using either microwave energy or radio frequency energy. More particularly disclosed is a method and apparatus for making electrophotographic drums.
    Type: Grant
    Filed: November 24, 1986
    Date of Patent: March 8, 1988
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Eugene W. Fournier, Erik J. Bjornard, Annette G. Johncock, Joachim Doehler
  • Patent number: 4664951
    Abstract: A method of providing for corrective laterally movement of a web of substrate material which is adapted to continuously move in a longitudinal direction through a vapor deposition processor without substantially buckling or tensioning either of the longitudinal edges thereof. The lateral displacement is accomplished without buckling or tensioning the edges of the web despite the fact that the web is magnetically urged into a generally planar path of travel as it moves through the deposition regions of the processor.
    Type: Grant
    Filed: July 31, 1985
    Date of Patent: May 12, 1987
    Assignee: Energy Conversion Devices, Inc.
    Inventor: Joachim Doehler
  • Patent number: 4626447
    Abstract: Apparatus for and a method of confining the ionized plasma developed during the glow discharge deposition of thin film semiconductor alloy material to preselected portions of the plasma region so as to prevent etching and deposit only uniform, nonhomogeneous semiconductor alloy material.
    Type: Grant
    Filed: March 18, 1985
    Date of Patent: December 2, 1986
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Masatsugu Izu
  • Patent number: 4608943
    Abstract: An improved cathode assembly specifically designed to provide for the uniform, localized profiling of dopant or other alterant elements into the host matrix of a semiconductor alloy material which is continuously and uniformly deposited onto a moving substrate by a glow discharge deposition process.
    Type: Grant
    Filed: October 24, 1984
    Date of Patent: September 2, 1986
    Assignee: Sovonics Solar Systems
    Inventors: Joachim Doehler, Masatsugu Izu
  • Patent number: 4515107
    Abstract: An apparatus for manufacturing photovoltaic devices of the type including a plurality of layers of semiconductor materials deposited onto a substrate includes a plurality of deposition chambers, each chamber arranged to deposit a respective one of the layers of semiconductor materials onto the substrate as the substrate is advanced therethrough. At least one of the deposition chambers is coupled to a source of microwave energy to form a microwave energy excited glow discharge plasma within the at least one deposition chamber for depositing at least one of the layers of semiconductor material onto the substrate from the microwave energy excited glow discharge plasma within the at least one deposition chamber.Also disclosed is an assembly for depositing a material onto a substrate from a microwave energy excited plasma. The assembly includes a deposition chamber, a source of microwave energy, and an antenna extending into the chamber and coupled to the microwave energy source.
    Type: Grant
    Filed: November 12, 1982
    Date of Patent: May 7, 1985
    Assignee: Sovonics Solar Systems
    Inventors: Eugene Fournier, Joachim Doehler
  • Patent number: 4479455
    Abstract: A process gas introduction and channeling system for use with apparatus adapted to produce photovoltaic devices by depositing semiconductor layers onto continuously moving substrate material. The deposition apparatus preferably includes at least one deposition chamber having (1) a region in which process gases are decomposed and (2) a manifold from which process gases are introduced to flow through the downstream decomposition region. In the preferred embodiment, as the process gases flow through the decomposition region, they are disassociated and recombined under the influence of an electromagnetic field. The species and combinations of process gases thus formed are deposited onto the substrate material.
    Type: Grant
    Filed: March 14, 1983
    Date of Patent: October 30, 1984
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Kevin R. Hoffman, Timothy D. Laarman, Gary M. DiDio, Therese McDonough
  • Patent number: 4478173
    Abstract: A method of and apparatus for accurately sensing and reproducibly controlling the intensity of electromagnetic energy in the decomposition region of a deposition chamber. The apparatus includes a detector adapted to (1) monitor the level of radiation emitted from the decomposition region and (2) provide an output signal indicative of said level. The invention further includes circuitry for (1) comparing the signal from the detector with a reference signal indicative of a preselected level of energy, and (2) generating a correction signal indicative of the actual level of energy in the decomposition region relative to the preselected level of energy. According to the method of this invention, the correction signal may be utilized to regulate the source of electromagnetic energy so that the preselected level of electromagnetic energy within the decomposition region is kept constant despite fluctuations in other operating parameters.
    Type: Grant
    Filed: April 18, 1983
    Date of Patent: October 23, 1984
    Assignee: Energy Conversion Devices, Inc.
    Inventor: Joachim Doehler
  • Patent number: 4450786
    Abstract: An improved magnetic gas gate is adapted to operatively interconnect two adjacent chambers, in the first chamber of which process gases are introduced for depositing a first layer upon a magnetic substrate and in the second chamber of which process gases are introduced for depositing a second layer atop the first layer. Since it is important to prevent the second chamber gases from contaminating the first chamber gases, a constant pressure differential established between the chambers is employed to provide a substantially unidirectional flow of gases from the first chamber into the second chamber. Magnetic gas gates have been used in the prior art to reduce the size of gas gate passageways by creating a magnetic field which urges the unlayered surface of the substrate toward a wall of the passageway.
    Type: Grant
    Filed: February 16, 1983
    Date of Patent: May 29, 1984
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, David A. Gattuso, Kevin R. Hoffman
  • Patent number: 4440107
    Abstract: An apparatus for producing improved large area photovoltaic devices by substantially reducing the warpage of relatively large area, relatively thin webs of magnetic substrate material which travel through a plurality of high temperature, low pressure glow discharge deposition chambers. As the web of the substrate material moves through the deposition chambers, it assumes a normal, elongated path of travel. Due to the elevated deposition temperature, the elongated path of travel, the force of gravity, etc., the web has a tendency to warp. Warpage of the web is undesirable as it promotes the deposition of non-uniform semiconductor alloy layers. The improvement of the present invention contemplates the establishment of at least one magnetic field within each deposition chamber which is adapted to urge the web of substrate material out of its normal path of travel into a flat, substantially planar path of travel.
    Type: Grant
    Filed: July 12, 1982
    Date of Patent: April 3, 1984
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, Vincent Cannella, Richard O. Gray, Jr.
  • Patent number: 4438724
    Abstract: A grooved passageway surface in a magnetic gas gate, the gas gate adapted to operatively connect two adjacent chambers, in the first chamber of which process gases are introduced for depositing a first layer upon a magnetic substrate and in the second chamber of which process gases are introduced for depositing a second layer atop the first layer. Since it is important to prevent the second chamber gases from contaminating the first chamber gases, a constant pressure differential established between the chambers is employed to provide a substantially unidirectional flow of gases from the first chamber into the second chamber. Magnetic gas gates have been used in the prior art to reduce the size of gas gate passageways by creating a magnetic field which urges the unlayered surface of the substrate toward a wall of the passageway.
    Type: Grant
    Filed: August 13, 1982
    Date of Patent: March 27, 1984
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Joachim Doehler, David A. Gattuso, Kevin R. Hoffman
  • Patent number: 4419533
    Abstract: There is disclosed new and improved photovoltaic devices which provide increased short circuit currents and efficiencies over that previously obtainable from prior devices. The disclosed devices include incident radiation directing means for directing at least a portion of the incident light through the active region or regions thereof at angles sufficient to substantially confine the directed radiation in the devices. This allows substantially total utilization of photogenerated electron-hole pairs. Further, because the light is directed through the active region or regions at such angles, the active regions can be made thinner to also increase collection efficiencies.The incident radiation directors can be random surface or bulk reflectors to provide random scattering of the light, or periodic surface or bulk reflector to provide selective scattering of the light.
    Type: Grant
    Filed: March 3, 1982
    Date of Patent: December 6, 1983
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Wolodymyr Czubatyj, Rajendra Singh, Joachim Doehler, David D. Allred, Jaime M. Reyes