Patents by Inventor Joachim Hertkorn

Joachim Hertkorn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9293640
    Abstract: In at least one embodiment, the method is designed to produce an optoelectronic semiconductor chip. The method includes at least the following steps in the stated sequence: A) providing a growth substrate with a growth side, B) depositing at least one nucleation layer based on AlxGa1-xOyN1-y on the growth side, C) depositing and structuring a masking layer, D) optionally growing a GaN-based seed layer in regions on the nucleation layer not covered by the masking layer, E) partially removing the nucleation layer and/or the seed layer in regions not covered by the masking layer or applying a second masking layer on the nucleation layer or on the seed layer in the regions not covered by the masking layer, and F) growing an AlInGaN-based semiconductor layer sequence with at least one active layer.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: March 22, 2016
    Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Joachim Hertkorn, Lorenzo Zini, Jan-Philipp Ahl, Alexander Frey
  • Publication number: 20150287883
    Abstract: A composite substrate has a carrier and a utility layer. The utility layer is attached to the carrier by means of a dielectric bonding layer and the carrier contains a radiation conversion material. Other embodiments relate to a semiconductor chip having such a composite substrate, a method for producing a composite substrate and a method for producing a semiconductor chip with a composite substrate.
    Type: Application
    Filed: June 15, 2015
    Publication date: October 8, 2015
    Inventors: Johannes Baur, Berthold Hahn, Volker Haerle, Karl Engl, Joachim Hertkorn, Tetsuya Taki
  • Publication number: 20150270434
    Abstract: A method is provided for producing an optoelectronic device, comprising the steps of providing a substrate, applying a nucleation layer on a surface of the substrate, applying and patterning a mask layer on the nucleation layer, growing a nitride semiconductor in a first growth step, wherein webs are laid which form a lateral lattice, wherein the webs have trapezoidal cross-sectional areas in places in the direction of growth, and laterally overgrowing the webs with a nitride semiconductor in a second growth step, to close spaces between the webs.
    Type: Application
    Filed: September 18, 2013
    Publication date: September 24, 2015
    Inventors: Joachim Hertkorn, Jan-Philipp Ahl, Lorenzo Zini, Matthias Peter, Tobias Meyer, Alexander Frey
  • Publication number: 20150249181
    Abstract: The invention concerns an optoelectronic component comprising a layer structure with a light-active layer. In a first lateral region the light-active layer has a higher density of V-defects than in a second lateral region.
    Type: Application
    Filed: September 24, 2013
    Publication date: September 3, 2015
    Inventors: Christian Leirer, Tobias Meyer, Matthias Peter, Juergen Off, Joachim Hertkorn, Andreas Loeffler, Alexander Walter, Dario Schiavon
  • Patent number: 9123528
    Abstract: A composite substrate has a carrier and a utility layer. The utility layer is attached to the carrier by means of a dielectric bonding layer and the carrier contains a radiation conversion material. Other embodiments relate to a semiconductor chip having such a composite substrate, a method for producing a composite substrate and a method for producing a semiconductor chip with a composite substrate.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: September 1, 2015
    Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Johannes Baur, Berthold Hahn, Karl Engl, Ann-Kathrin Haerle, Jakob Johannes Haerle, Johanna Magdalena Haerle, Joachim Hertkorn, Tetsuya Taki
  • Publication number: 20150187985
    Abstract: In at least one embodiment, the method is designed to produce an optoelectronic semiconductor chip. The method includes at least the following steps in the stated sequence: A) providing a growth substrate with a growth side, B) depositing at least one nucleation layer based on AlxGa1-xOyN1-y on the growth side, C) depositing and structuring a masking layer, D) optionally growing a GaN-based seed layer in regions on the nucleation layer not covered by the masking layer, E) partially removing the nucleation layer and/or the seed layer in regions not covered by the masking layer or applying a second masking layer on the nucleation layer or on the seed layer in the regions not covered by the masking layer, and F) growing an AlInGaN-based semiconductor layer sequence with at least one active layer.
    Type: Application
    Filed: June 11, 2013
    Publication date: July 2, 2015
    Applicant: OSRAM Opto Semiconductors GmbH
    Inventors: Joachim Hertkorn, Lorenzo Zini, Jan-Philipp Ahl, Alexander Frey
  • Publication number: 20150108426
    Abstract: In at least one embodiment, the method is designed to produce an active zone for an optoelectronic semiconductor chip and comprises the following steps: growing a fourth barrier layer (24) based on Alx4Iny4Ga1-x4-y4N where 0?x4?0.40 and on average 0<y4?0.4, wherein the In content increases along a growth direction (z), growing a quantum well layer (20) on the fourth barrier layer (24), wherein the quantum well layer (20) is based on InyGa1-yN where 0.08?y?0.35, growing a first barrier layer (21) based on Alx1Iny1Ga1-x1-y1N where 0?x1?0.40 and on average 0<y1?0.4 onto the quantum well layer (20), wherein the In content decreases along the growth direction (z), growing a second barrier layer (22) based on GaN onto the first barrier layer (21), and growing a third barrier layer (23) based on GaN onto the second barrier layer (22), wherein the third barrier layer (23) is grown with the addition of H2 gas.
    Type: Application
    Filed: May 3, 2013
    Publication date: April 23, 2015
    Applicant: OSRAM Opto Semiconductors GmbH
    Inventors: Joachim Hertkorn, Thomas Lehnhardt, Marcus Eichfelder, Jan-Philipp Ahl
  • Patent number: 9012885
    Abstract: A semiconductor chip includes a semiconductor body with a semiconductor layer sequence. An active region intended for generating radiation is arranged between an n-conductive multilayer structure and a p-conductive semiconductor layer. A doping profile is formed in the n-conductive multilayer structure which includes at least one doping peak.
    Type: Grant
    Filed: December 27, 2010
    Date of Patent: April 21, 2015
    Assignee: Osram Opto Semiconductors GmbH
    Inventors: Matthias Peter, Tobias Meyer, Alexander Walter, Tetsuya Taki, Juergen Off, Rainer Butendeich, Joachim Hertkorn
  • Publication number: 20150076507
    Abstract: An epitaxy substrate (11, 12, 13) for a nitride compound semiconductor material is specified, which has a nucleation layer (2) directly on a substrate (1) wherein the nucleation layer (2) has at least one first layer (21) composed of AlON with a column structure. A method for producing an epitaxy substrate and an optoelectronic semiconductor chip comprising an epitaxy substrate are furthermore specified.
    Type: Application
    Filed: April 24, 2013
    Publication date: March 19, 2015
    Applicant: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Joachim Hertkorn, Alexander Frey, Christian Schmid
  • Publication number: 20150031150
    Abstract: A method for producing a radiation-emitting semiconductor component is provided, comprising the following steps:—providing a growth substrate (1)—depositing a nucleation layer (2) on the growth substrate (1),—applying a structured dielectric layer (3) to the nucleation layer (2),—applying an epitaxial layer (4) by means of a FACELO process to the structured dielectric layer (3),—epitaxial growth of an epitaxial layer sequence (5) on the epitaxial layer (4), wherein the epitaxial layer sequence (5) comprises an active zone (6) that is suitable for producing electromagnetic radiation.
    Type: Application
    Filed: January 10, 2013
    Publication date: January 29, 2015
    Inventors: Joachim Hertkorn, Lorenzo Zini
  • Publication number: 20140346541
    Abstract: A method of producing an optoelectronic semiconductor chip includes providing a growth substrate, producing a III nitride nucleation layer on the growth substrate by sputtering, wherein a material of the growth substrate differs from a material of the nucleation layer, and growing a III nitride semiconductor layer sequence having an active layer onto the nucleation layer.
    Type: Application
    Filed: August 23, 2012
    Publication date: November 27, 2014
    Applicant: OSRAM Opto Semiconductors GmbH
    Inventors: Joachim Hertkorn, Karl Engl, Berthold Hahn, Andreas Weimar
  • Publication number: 20140342484
    Abstract: A method of producing a semiconductor chip includes providing a silicon growth substrate, producing a III nitride buffer layer on the growth substrate by sputtering, and growing a III nitride semiconductor layer sequence having an active layer above the buffer layer.
    Type: Application
    Filed: August 28, 2012
    Publication date: November 20, 2014
    Applicant: OSRAM Opto Semiconductors GmbH
    Inventors: Joachim Hertkorn, Karl Engl, Berthold Hahn, Andreas Weimar, Peter Stauss
  • Publication number: 20140203413
    Abstract: A composite substrate has a carrier and a utility layer. The utility layer is attached to the carrier by means of a dielectric bonding layer and the carrier contains a radiation conversion material. Other embodiments relate to a semiconductor chip having such a composite substrate, a method for producing a composite substrate and a method for producing a semiconductor chip with a composite substrate.
    Type: Application
    Filed: December 16, 2011
    Publication date: July 24, 2014
    Applicant: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Johannes Baur, Berthold Hahn, Volker Härle, Karl Engl, Joachim Hertkorn, Tetsuya Taki
  • Publication number: 20140057417
    Abstract: A method for producing an optoelectronic semiconductor chip is disclosed. A growth substrate is provided in an epitaxy installation. At least one intermediate layer is deposited by epitaxy on the growth substrate. A structured surface that faces away from the growth substrate is produced on the side of the intermediate layer facing away from the growth substrate. An active layer is deposited by epitaxy on the structured surface. The structured surface is produced in the epitaxy installation and the active layer follows the structuring of the structured surface at least in some regions in a conformal manner or at least in some sections essentially in a conformal manner.
    Type: Application
    Filed: February 15, 2012
    Publication date: February 27, 2014
    Applicant: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Christian Leirer, Anton Vogl, Andreas Biebersdorf, Joachim Hertkorn, Tetsuya Taki, Rainer Butendeich
  • Patent number: 8581236
    Abstract: An electrically pumped optoelectronic semiconductor chip includes at least two radiation-active quantum wells comprising InGaN or consisting thereof. The optoelectronic semiconductor chip includes at least two cover layers which include AlGaN or consist thereof. Each of the cover layers is assigned to precisely one of the radiation-active quantum wells. The cover layers are each located on a p-side of the associated radiation-active quantum well. The distance between the radiation-active quantum well and the associated cover layer is at most 1.5 nm.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: November 12, 2013
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Matthias Peter, Tobias Meyer, Jürgen Off, Tetsuya Taki, Joachim Hertkorn, Matthias Sabathil, Ansgar Laubsch, Andreas Biebersdorf
  • Publication number: 20130264598
    Abstract: A method can be used for producing a semiconductor layer sequence, which is based on a nitride compound semiconductor material and which comprises a microstructured outer surface. The method has the following steps: A) growing at least one first semiconductor layer of the semiconductor layer sequence on a substrate; B) applying an etch-resistant layer on the first semiconductor layer; C) growing at least one further semiconductor layer on the layer sequence obtained in step B); D) separating the semiconductor layer sequence from the substrate, a separating zone of the semiconductor layer sequence being at least partly removed; E) etching the obtained separating surface of the semiconductor layer sequence by an etching means such that a microstructuring of the first semiconductor layer is carried out and the microstructured outer surface is formed.
    Type: Application
    Filed: September 30, 2011
    Publication date: October 10, 2013
    Applicant: OSRAM OPTP SEMICONDUCTORS GMBH
    Inventors: Joachim Hertkorn, Tetsuya Taki, Jürgen Off
  • Publication number: 20130214285
    Abstract: A semiconductor component has a semiconductor layer sequence made of a nitridic composite semiconductor material on a substrate. The substrate includes a silicon surface facing the semiconductor layer sequence. The semiconductor layer sequence includes an active region and at least one intermediate layer made of an oxygen-doped AN composite semiconductor material between the substrate and the active region.
    Type: Application
    Filed: August 11, 2011
    Publication date: August 22, 2013
    Applicant: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Peter Stauss, Joachim Hertkorn, Philipp Drechsel
  • Publication number: 20120298964
    Abstract: A semiconductor chip includes a semiconductor body with a semiconductor layer sequence. An active region intended for generating radiation is arranged between an n-conductive multilayer structure and a p-conductive semiconductor layer. A doping profile is formed in the n-conductive multilayer structure which includes at least one doping peak.
    Type: Application
    Filed: December 27, 2010
    Publication date: November 29, 2012
    Applicant: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Matthias Peter, Tobias Meyer, Alexander Walter, Tetsuya Taki, Juergen Off, Rainer Butendeich, Joachim Hertkorn
  • Publication number: 20120161103
    Abstract: An electrically pumped optoelectronic semiconductor chip includes at least two radiation-active quantum wells comprising InGaN or consisting thereof. The optoelectronic semiconductor chip includes at least two cover layers which include AlGaN or consist thereof. Each of the cover layers is assigned to precisely one of the radiation-active quantum wells. The cover layers are each located on a p-side of the associated radiation-active quantum well. The distance between the radiation-active quantum well and the associated cover layer is at most 1.5 nm.
    Type: Application
    Filed: June 30, 2010
    Publication date: June 28, 2012
    Applicant: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Matthias Peter, Tobias Meyer, Jürgen Off, Tetsuya Taki, Joachim Hertkorn, Matthias Sabathil, Ansgar Laubsch, Andreas Biebersdorf