Patents by Inventor Joachim Rudhard

Joachim Rudhard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing a micromechanical structure and a micromechanical structure
    Publication number: 20020171150
    Abstract: A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.
    Type: Application
    Filed: July 3, 2002
    Publication date: November 21, 2002
    Inventor: Joachim Rudhard
  • Method for producing a micromechanical structure and a micromechanical structure
    Patent number: 6436821
    Abstract: A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.
    Type: Grant
    Filed: November 5, 2001
    Date of Patent: August 20, 2002
    Assignee: Robert Bosch GmbH
    Inventor: Joachim Rudhard
  • Method for producing a micromechanical structure and a micromechanical structure
    Publication number: 20020055253
    Abstract: A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.
    Type: Application
    Filed: November 5, 2001
    Publication date: May 9, 2002
    Inventor: Joachim Rudhard