Patents by Inventor Jochen Paul
Jochen Paul has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6967771Abstract: Antireflection multilayer coatings with only three or four layers are proposed for the production of laser resistant optical components with minimal residual reflection and high transparency for UV light in a wavelength range approx. 150 nm to approx. 250 nm at large angles of incidence in the range of approx. 70° to approx. 80°, particularly in the range between approx. 72° and approx. 76°. For incident p-polarized UV light three-layer systems can be used, in which a layer of low refractive material, in particular magnesium fluoride is arranged between two layers of high refractive material and, in the case of the specified wavelength, of minimally absorbent material, in particular of hafnium oxide or aluminum oxide. For example, this allows a residual reflection of perceptibly less than 1% to be achieved in the case of a wavelength of 248 nm at angles of incidence in the range between approx. 72° and approx. 76°.Type: GrantFiled: February 2, 2004Date of Patent: November 22, 2005Assignee: Carl Zeiss SMT AGInventors: Ralf Kuschnereit, Hans-Jochen Paul
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Publication number: 20050179996Abstract: An attenuating filter provides a prescribed attenuation of the intensity of transmitted, short-wavelength, ultraviolet light, in particular, at wavelengths below 200 nm, that is governed by a predefinable spatial distribution of its spectral transmittance. The filter has a transparent substrate (3), e.g. fabricated from crystalline calcium fluoride. A filter coating (5) fabricated from a dielectric material that absorbs over a predefined wavelength range is applied to at least one surface (4) of the substrate. In the case of operating wavelengths of about 193 nm, the filter coating consists largely of tantalum pentoxide. Filters of the type, which may be inexpensively fabricated with high yields, are noted for their high abilities to withstand laser radiation and may be effectively antireflection coated employing simply designed antireflection coatings.Type: ApplicationFiled: November 29, 2004Publication date: August 18, 2005Inventors: Bernhard Weigl, Hans-Jochen Paul, Eric Eva
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Publication number: 20050146683Abstract: An optical component and a coating system for coating substrates for optical components with essentially rotationally symmetric coatings, the system having a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (? max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.Type: ApplicationFiled: February 9, 2005Publication date: July 7, 2005Inventors: Harry Bauer, Matthias Heller, Hans-Jochen Paul, Jens Ullmann, Patrick Scheible, Christoph Zaczek
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Publication number: 20050116144Abstract: A semiconductor-based, especially a silicon-based, light detector, comprising a detector body (1.1) having a detector surface (1.2) and a covering layer (2) which comprises at least one first layer (2.1) and which is arranged on the detector surface (1.2), wherein, to enhance the quantum efficiency, the covering layer (2) has a transmittance in at least one working wavelength range which is higher than the transmittance of a covering layer consisting of SiO2 of the same thickness.Type: ApplicationFiled: September 10, 2004Publication date: June 2, 2005Inventors: Frank Hartung, Jochen Paul, Harry Bauer
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Patent number: 6863398Abstract: A method for coating substrates (10) for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (? max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.Type: GrantFiled: September 17, 2002Date of Patent: March 8, 2005Assignee: Carl Zeiss SMT AGInventors: Harry Bauer, Matthias Heller, Hans-Jochen Paul, Jens Ullmann, Patrick Scheible, Christoph Zaczek
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Patent number: 6836379Abstract: A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a &lgr;/4 plate arranged between the mirror and the beam splitter.Type: GrantFiled: April 8, 2002Date of Patent: December 28, 2004Assignee: Carl Zeiss SMT AGInventors: Michael Gerhard, Hans-Jochen Paul
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Patent number: 6825976Abstract: An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm, in particular approx. 248 nm, and for a high angle of incidence up to at least approx. 40° has a substrate and a multilayer antireflection system arranged on at least one surface of said substrate to provide reflection reduction. The multilayer system distinguishes itself in that the layer adjacent to the substrate does not consist of magnesium fluoride and that none of the layers has a thickness of more than half of the working wavelength. In particular, the layer thicknesses of the low refractive materials should not exceed ⅓ the working wavelength. By adhering to these boundary conditions, antireflective coatings can be produced that provide both permanent laser resistance as well as a high resistance against inner layer stress and thermal stress.Type: GrantFiled: January 7, 2002Date of Patent: November 30, 2004Assignee: Carl Zeiss SMT AGInventors: Hans-Jochen Paul, Matthias Heller
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Publication number: 20040174587Abstract: Antireflection multilayer coatings with only three or four layers are proposed for the production of laser resistant optical components with minimal residual reflection and high transparency for UV light in a wavelength range approx. 150 nm to approx. 250 nm at large angles of incidence in the range of approx. 70° to approx. 80°, particularly in the range between approx. 72° and approx. 76°. For incident p-polarized UV light three-layer systems can be used, in which a layer of low refractive material, in particular magnesium fluoride is arranged between two layers of high refractive material and, in the case of the specified wavelength, of minimally absorbent material, in particular of hafnium oxide or aluminum oxide. For example, this allows a residual reflection of perceptibly less than 1% to be achieved in the case of a wavelength of 248 nm at angles of incidence in the range between approx. 72° and approx. 76°.Type: ApplicationFiled: February 2, 2004Publication date: September 9, 2004Applicant: CARL ZEISS SMT AGInventors: Ralf Kuschnereit, Hans-Jochen Paul
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Patent number: 6697194Abstract: Antireflection multilayer coatings with only three or four layers are proposed for the production of laser resistant optical components with minimal residual reflection and high transparency for UV light in a wavelength range approx. 150 nm to approx. 250 nm at large angles of incidence in the range of approx. 70° to approx. 80°, particularly in the range between approx. 72° and approx. 76°. For incident p-polarized UV light three-layer systems can be used, in which a layer of low refractive material, in particular magnesium fluoride is arranged between two layers of high refractive material and, in the case of the specified wavelength, of minimally absorbent material, in particular of hafnium oxide or aluminum oxide. For example, this allows a residual reflection of perceptibly less than 1% to be achieved in the case of a wavelength of 248 nm at angles of incidence in the range between approx. 72° and approx. 76°.Type: GrantFiled: December 12, 2001Date of Patent: February 24, 2004Assignee: Carl Zeiss SMT AGInventors: Ralf Kuschnereit, Hans-Jochen Paul
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Publication number: 20030082298Abstract: A method for coating substrates (10) for optical components with essentially rotationally symmetric coatings employs a coating system equipped with a planetary-drive system (1) that has a rotating planet carrier (2) and several planets (4), each of which carries a single substrate, that corotate both with the planet carrier and with respect to the primary carrier. In one embodiment a set of stationary first masks (20) that allow controlling the radial variation in physical film thickness is arranged between a source (8) of material situated beneath the planets and the substrates. A set of second masks that mask off evaporation angles exceeding a limiting evaporation or incidence angle (&bgr;max) for every substrate also corotate with the primary carrier (2), which allows depositing coatings having a prescribed radial film-thickness distribution and a virtually constant density of the coating material over their full radial extents for relatively low, and only slightly varying, evaporation angles.Type: ApplicationFiled: September 17, 2002Publication date: May 1, 2003Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AGInventors: Harry Bauer, Matthias Heller, Hans-Jochen Paul, Jens Ullmann, Patrick Scheible, Christoph Zaczek
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Publication number: 20020196550Abstract: A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a &lgr;/4 plate arranged between the mirror and the beam splitter.Type: ApplicationFiled: April 8, 2002Publication date: December 26, 2002Inventors: Michael Gerhard, Hans-Jochen Paul
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Publication number: 20020191310Abstract: An attenuating filter provides a prescribed attenuation of the intensity of transmitted, short-wavelength, ultraviolet light, in particular, at wavelengths below 200 nm, that is governed by a predefinable spatial distribution of its spectral transmittance. The filter has a transparent substrate (3), e.g. fabricated from crystalline calcium fluoride. A filter coating (5) fabricated from a dielectric material that absorbs over a predefined wavelength range is applied to at least one surface (4) of the substrate. In the case of operating wavelengths of about 193 nm, the filter coating consists largely of tantalum pentoxide. Filters of the type, which may be inexpensively fabricated with high yields, are noted for their high abilities to withstand laser radiation and may be effectively antireflection coated employing simply designed antireflection coatings.Type: ApplicationFiled: May 22, 2002Publication date: December 19, 2002Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AGInventors: Bernhard Weigl, Hans-Jochen Paul, Eric Eva
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Publication number: 20020114068Abstract: Antireflection multilayer coatings with only three or four layers are proposed for the production of laser resistant optical components with minimal residual reflection and high transparency for UV light in a wavelength range approx. 150 nm to approx. 250 nm at large angles of incidence in the range of approx. 70° to approx. 80°, particularly in the range between approx. 72° and approx. 76°. For incident p-polarized UV light three-layer systems can be used, in which a layer of low refractive material, in particular magnesium fluoride is arranged between two layers of high refractive material and, in the case of the specified wavelength, of minimally absorbent material, in particular of hafnium oxide or aluminum oxide. For example, this allows a residual reflection of perceptibly less than 1% to be achieved in the case of a wavelength of 248 nm at angles of incidence in the range between approx. 72° and approx. 76°.Type: ApplicationFiled: December 12, 2001Publication date: August 22, 2002Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AGInventors: Ralf Kuschnereit, Hans-Jochen Paul
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Publication number: 20020105721Abstract: An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm, in particular approx. 248 nm, and for a high angle of incidence up to at least approx. 40° has a substrate and a multilayer antireflection system arranged on at least one surface of said substrate to provide reflection reduction. The multilayer system distinguishes itself in that the layer adjacent to the substrate does not consist of magnesium fluoride and that none of the layers has a thickness of more than half of the working wavelength. In particular, the layer thicknesses of the low refractive materials should not exceed 1/3 the working wavelength. By adhering to these boundary conditions, antireflective coatings can be produced that provide both permanent laser resistance as well as a high resistance against inner layer stress and thermal stress.Type: ApplicationFiled: January 7, 2002Publication date: August 8, 2002Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AGInventors: Hans-Jochen Paul, Matthias Heller